MX9708506A - Soporte vertical sin deslizamiento. - Google Patents

Soporte vertical sin deslizamiento.

Info

Publication number
MX9708506A
MX9708506A MX9708506A MX9708506A MX9708506A MX 9708506 A MX9708506 A MX 9708506A MX 9708506 A MX9708506 A MX 9708506A MX 9708506 A MX9708506 A MX 9708506A MX 9708506 A MX9708506 A MX 9708506A
Authority
MX
Mexico
Prior art keywords
wafer
support means
vertical rack
vertical
free vertical
Prior art date
Application number
MX9708506A
Other languages
English (en)
Inventor
John A Tomanovich
Original Assignee
Saint Gobain Norton Ind Cerami
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Norton Ind Cerami filed Critical Saint Gobain Norton Ind Cerami
Publication of MX9708506A publication Critical patent/MX9708506A/es

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

La presente invencion se refiere a un soporte vertical para soportar una pluralidad de obleas semiconductoras en una relacion paralela separada, sustancialmente horizontal, el soporte vertical conteniendo: a) medios de soporte vertical y b) una pluralidad de medios de soporte horizontales verticalmente separados que se extienden substancialmente en forma horizontal desde los medios de soporte vertical para definir una pluralidad de niveles de soporte para soportar las obleas, en donde los medios de soporte horizontal son proyecciones, cada proyeccion comprendiendo un brazo que termina en una plataforma de oblea de tal manera que el contacto más interno entre por lo menos una plataforma de oblea de cada nivel de soporte y su oblea soportada está en la region de entre 20% y 80% del radio de la oblea, medido desde el borde de la oblea, y en donde el brazo se proyecta a una inclinacion ascendente continua y termina en la plataforma de oblea.
MX9708506A 1995-05-05 1997-11-04 Soporte vertical sin deslizamiento. MX9708506A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43593195A 1995-05-05 1995-05-05

Publications (1)

Publication Number Publication Date
MX9708506A true MX9708506A (es) 1998-06-30

Family

ID=23730415

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9708506A MX9708506A (es) 1995-05-05 1997-11-04 Soporte vertical sin deslizamiento.

Country Status (8)

Country Link
US (1) US5865321A (es)
EP (1) EP0826233A1 (es)
JP (2) JPH10510680A (es)
KR (1) KR100278731B1 (es)
CN (1) CN1079577C (es)
CA (1) CA2218518C (es)
MX (1) MX9708506A (es)
WO (1) WO1996035228A1 (es)

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US6001499A (en) * 1997-10-24 1999-12-14 General Motors Corporation Fuel cell CO sensor
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US6171400B1 (en) 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US6835039B2 (en) * 2002-03-15 2004-12-28 Asm International N.V. Method and apparatus for batch processing of wafers in a furnace
US7256375B2 (en) * 2002-08-30 2007-08-14 Asm International N.V. Susceptor plate for high temperature heat treatment
US7022192B2 (en) * 2002-09-04 2006-04-04 Tokyo Electron Limited Semiconductor wafer susceptor
US6799940B2 (en) 2002-12-05 2004-10-05 Tokyo Electron Limited Removable semiconductor wafer susceptor
US20040173597A1 (en) * 2003-03-03 2004-09-09 Manoj Agrawal Apparatus for contacting gases at high temperature
US7033126B2 (en) * 2003-04-02 2006-04-25 Asm International N.V. Method and apparatus for loading a batch of wafers into a wafer boat
DE602004025366D1 (de) * 2003-07-02 2010-03-18 Cook Inc Koaxialen Katheter
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
US20060027171A1 (en) * 2004-08-06 2006-02-09 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer boat for reducing wafer warpage
US20060060145A1 (en) * 2004-09-17 2006-03-23 Van Den Berg Jannes R Susceptor with surface roughness for high temperature substrate processing
US20060065634A1 (en) * 2004-09-17 2006-03-30 Van Den Berg Jannes R Low temperature susceptor cleaning
JP2006128316A (ja) * 2004-10-27 2006-05-18 Shin Etsu Handotai Co Ltd 熱処理用縦型ボートおよび熱処理方法
EP1772901B1 (en) * 2005-10-07 2012-07-25 Rohm and Haas Electronic Materials, L.L.C. Wafer holding article and method for semiconductor processing
US7661544B2 (en) * 2007-02-01 2010-02-16 Tokyo Electron Limited Semiconductor wafer boat for batch processing
JP2009076621A (ja) * 2007-09-20 2009-04-09 Covalent Materials Corp 熱処理用縦型ボート
US8602239B2 (en) * 2010-08-16 2013-12-10 Robert L. Thomas, JR. Decorative paper plate storage units
CN103060774A (zh) * 2011-10-24 2013-04-24 北京北方微电子基地设备工艺研究中心有限责任公司 腔室装置及具有其的基片处理设备
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
WO2017023621A1 (en) 2015-07-31 2017-02-09 Viasat, Inc. Flexible capacity satellite constellation
JP6770461B2 (ja) * 2017-02-21 2020-10-14 クアーズテック株式会社 縦型ウエハボート
CN114136422A (zh) * 2020-09-03 2022-03-04 长鑫存储技术有限公司 称重装置

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DE2349512C3 (de) * 1973-10-02 1978-06-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von Halterungen aus Silicium oder Siliciumcarbid für Diffusions- und Temperprozesse
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Also Published As

Publication number Publication date
CN1079577C (zh) 2002-02-20
CA2218518C (en) 2002-10-01
JP2004006841A (ja) 2004-01-08
US5865321A (en) 1999-02-02
WO1996035228A1 (en) 1996-11-07
KR100278731B1 (ko) 2001-03-02
JPH10510680A (ja) 1998-10-13
EP0826233A1 (en) 1998-03-04
CN1183854A (zh) 1998-06-03
KR19990008205A (ko) 1999-01-25
CA2218518A1 (en) 1996-11-07

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Legal Events

Date Code Title Description
FG Grant or registration
MM Annulment or lapse due to non-payment of fees