JPH0319308B2 - - Google Patents
Info
- Publication number
- JPH0319308B2 JPH0319308B2 JP305786A JP305786A JPH0319308B2 JP H0319308 B2 JPH0319308 B2 JP H0319308B2 JP 305786 A JP305786 A JP 305786A JP 305786 A JP305786 A JP 305786A JP H0319308 B2 JPH0319308 B2 JP H0319308B2
- Authority
- JP
- Japan
- Prior art keywords
- plating
- salts
- acid
- nickel
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 41
- 150000003839 salts Chemical class 0.000 claims description 41
- 238000009713 electroplating Methods 0.000 claims description 28
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 27
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 229910052759 nickel Inorganic materials 0.000 claims description 23
- 229910052742 iron Inorganic materials 0.000 claims description 18
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 11
- -1 amine borane compound Chemical class 0.000 claims description 9
- 229910017052 cobalt Inorganic materials 0.000 claims description 8
- 239000010941 cobalt Substances 0.000 claims description 8
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 8
- 150000004820 halides Chemical class 0.000 claims description 8
- 150000003863 ammonium salts Chemical class 0.000 claims description 7
- 229910052783 alkali metal Inorganic materials 0.000 claims description 6
- 150000001340 alkali metals Chemical class 0.000 claims description 6
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 6
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 150000001412 amines Chemical class 0.000 claims description 6
- 239000000908 ammonium hydroxide Substances 0.000 claims description 6
- 150000001735 carboxylic acids Chemical class 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 5
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical class NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 claims description 4
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 claims description 4
- 239000006172 buffering agent Substances 0.000 claims description 3
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 claims description 3
- 229910000085 borane Inorganic materials 0.000 claims 1
- 238000007598 dipping method Methods 0.000 claims 1
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine Substances NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims 1
- UORVGPXVDQYIDP-UHFFFAOYSA-N trihydridoboron Substances B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 claims 1
- 238000007747 plating Methods 0.000 description 78
- 238000004070 electrodeposition Methods 0.000 description 21
- 238000003756 stirring Methods 0.000 description 13
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 12
- 229910045601 alloy Inorganic materials 0.000 description 11
- 239000000956 alloy Substances 0.000 description 11
- 235000011114 ammonium hydroxide Nutrition 0.000 description 10
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 9
- 241000080590 Niso Species 0.000 description 8
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 7
- 239000000872 buffer Substances 0.000 description 7
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 6
- 238000013019 agitation Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000001103 potassium chloride Substances 0.000 description 6
- 235000011164 potassium chloride Nutrition 0.000 description 6
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 5
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 4
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- JHJLBTNAGRQEKS-UHFFFAOYSA-M sodium bromide Chemical compound [Na+].[Br-] JHJLBTNAGRQEKS-UHFFFAOYSA-M 0.000 description 4
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 4
- 239000001393 triammonium citrate Substances 0.000 description 4
- 235000011046 triammonium citrate Nutrition 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000011780 sodium chloride Substances 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000001384 succinic acid Substances 0.000 description 3
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 2
- LCTONWCANYUPML-UHFFFAOYSA-N Pyruvic acid Chemical compound CC(=O)C(O)=O LCTONWCANYUPML-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 235000019270 ammonium chloride Nutrition 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 150000002429 hydrazines Chemical class 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000001630 malic acid Substances 0.000 description 2
- 235000011090 malic acid Nutrition 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
- KHPXUQMNIQBQEV-UHFFFAOYSA-N oxaloacetic acid Chemical compound OC(=O)CC(=O)C(O)=O KHPXUQMNIQBQEV-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- SCVFZCLFOSHCOH-UHFFFAOYSA-M potassium acetate Chemical compound [K+].CC([O-])=O SCVFZCLFOSHCOH-UHFFFAOYSA-M 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- IIACRCGMVDHOTQ-UHFFFAOYSA-M sulfamate Chemical compound NS([O-])(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-M 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- 125000001494 2-propynyl group Chemical group [H]C#CC([H])([H])* 0.000 description 1
- GOLORTLGFDVFDW-UHFFFAOYSA-N 3-(1h-benzimidazol-2-yl)-7-(diethylamino)chromen-2-one Chemical compound C1=CC=C2NC(C3=CC4=CC=C(C=C4OC3=O)N(CC)CC)=NC2=C1 GOLORTLGFDVFDW-UHFFFAOYSA-N 0.000 description 1
- JHUFGBSGINLPOW-UHFFFAOYSA-N 3-chloro-4-(trifluoromethoxy)benzoyl cyanide Chemical compound FC(F)(F)OC1=CC=C(C(=O)C#N)C=C1Cl JHUFGBSGINLPOW-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 1
- 239000005695 Ammonium acetate Substances 0.000 description 1
- 239000001715 Ammonium malate Substances 0.000 description 1
- 229910000521 B alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910003296 Ni-Mo Inorganic materials 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 NiâP Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- WINXNKPZLFISPD-UHFFFAOYSA-M Saccharin sodium Chemical compound [Na+].C1=CC=C2C(=O)[N-]S(=O)(=O)C2=C1 WINXNKPZLFISPD-UHFFFAOYSA-M 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 1
- 239000004280 Sodium formate Substances 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 235000019257 ammonium acetate Nutrition 0.000 description 1
- 229940043376 ammonium acetate Drugs 0.000 description 1
- SWLVFNYSXGMGBS-UHFFFAOYSA-N ammonium bromide Chemical compound [NH4+].[Br-] SWLVFNYSXGMGBS-UHFFFAOYSA-N 0.000 description 1
- KGECWXXIGSTYSQ-UHFFFAOYSA-N ammonium malate Chemical compound [NH4+].[NH4+].[O-]C(=O)C(O)CC([O-])=O KGECWXXIGSTYSQ-UHFFFAOYSA-N 0.000 description 1
- 235000019292 ammonium malate Nutrition 0.000 description 1
- 235000010323 ascorbic acid Nutrition 0.000 description 1
- 239000011668 ascorbic acid Substances 0.000 description 1
- 229960005070 ascorbic acid Drugs 0.000 description 1
- NHJPVZLSLOHJDM-UHFFFAOYSA-N azane;butanedioic acid Chemical compound [NH4+].[NH4+].[O-]C(=O)CCC([O-])=O NHJPVZLSLOHJDM-UHFFFAOYSA-N 0.000 description 1
- NGPGDYLVALNKEG-UHFFFAOYSA-N azanium;azane;2,3,4-trihydroxy-4-oxobutanoate Chemical compound [NH4+].[NH4+].[O-]C(=O)C(O)C(O)C([O-])=O NGPGDYLVALNKEG-UHFFFAOYSA-N 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- DLDJFQGPPSQZKI-UHFFFAOYSA-N but-2-yne-1,4-diol Chemical compound OCC#CCO DLDJFQGPPSQZKI-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229960004106 citric acid Drugs 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 1
- 229910000361 cobalt sulfate Inorganic materials 0.000 description 1
- 229940044175 cobalt sulfate Drugs 0.000 description 1
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 description 1
- WLQXLCXXAPYDIU-UHFFFAOYSA-L cobalt(2+);disulfamate Chemical compound [Co+2].NS([O-])(=O)=O.NS([O-])(=O)=O WLQXLCXXAPYDIU-UHFFFAOYSA-L 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- BQFFOAXUGJJYNZ-UHFFFAOYSA-N dichloromethane;sulfuric acid Chemical compound ClCCl.OS(O)(=O)=O BQFFOAXUGJJYNZ-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229960002089 ferrous chloride Drugs 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- SQZYOZWYVFYNFV-UHFFFAOYSA-L iron(2+);disulfamate Chemical compound [Fe+2].NS([O-])(=O)=O.NS([O-])(=O)=O SQZYOZWYVFYNFV-UHFFFAOYSA-L 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- INHCSSUBVCNVSK-UHFFFAOYSA-L lithium sulfate Inorganic materials [Li+].[Li+].[O-]S([O-])(=O)=O INHCSSUBVCNVSK-UHFFFAOYSA-L 0.000 description 1
- 229910001629 magnesium chloride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- DDTIGTPWGISMKL-UHFFFAOYSA-N molybdenum nickel Chemical compound [Ni].[Mo] DDTIGTPWGISMKL-UHFFFAOYSA-N 0.000 description 1
- VLAPMBHFAWRUQP-UHFFFAOYSA-L molybdic acid Chemical compound O[Mo](O)(=O)=O VLAPMBHFAWRUQP-UHFFFAOYSA-L 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N naphthalene-acid Natural products C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- UQPSGBZICXWIAG-UHFFFAOYSA-L nickel(2+);dibromide;trihydrate Chemical compound O.O.O.Br[Ni]Br UQPSGBZICXWIAG-UHFFFAOYSA-L 0.000 description 1
- DITXJPASYXFQAS-UHFFFAOYSA-N nickel;sulfamic acid Chemical compound [Ni].NS(O)(=O)=O DITXJPASYXFQAS-UHFFFAOYSA-N 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 235000011056 potassium acetate Nutrition 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- BTAAXEFROUUDIL-UHFFFAOYSA-M potassium;sulfamate Chemical compound [K+].NS([O-])(=O)=O BTAAXEFROUUDIL-UHFFFAOYSA-M 0.000 description 1
- TVDSBUOJIPERQY-UHFFFAOYSA-N prop-2-yn-1-ol Chemical compound OCC#C TVDSBUOJIPERQY-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 229940107700 pyruvic acid Drugs 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- HLBBKKJFGFRGMU-UHFFFAOYSA-M sodium formate Chemical compound [Na+].[O-]C=O HLBBKKJFGFRGMU-UHFFFAOYSA-M 0.000 description 1
- 235000019254 sodium formate Nutrition 0.000 description 1
- 239000011684 sodium molybdate Substances 0.000 description 1
- 235000015393 sodium molybdate Nutrition 0.000 description 1
- TVXXNOYZHKPKGW-UHFFFAOYSA-N sodium molybdate (anhydrous) Chemical compound [Na+].[Na+].[O-][Mo]([O-])(=O)=O TVXXNOYZHKPKGW-UHFFFAOYSA-N 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- QDWYPRSFEZRKDK-UHFFFAOYSA-M sodium;sulfamate Chemical compound [Na+].NS([O-])(=O)=O QDWYPRSFEZRKDK-UHFFFAOYSA-M 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- RHZZVWTVJHZKAH-UHFFFAOYSA-K trisodium;naphthalene-1,2,3-trisulfonate Chemical compound [Na+].[Na+].[Na+].C1=CC=C2C(S([O-])(=O)=O)=C(S([O-])(=O)=O)C(S(=O)(=O)[O-])=CC2=C1 RHZZVWTVJHZKAH-UHFFFAOYSA-K 0.000 description 1
- CMPGARWFYBADJI-UHFFFAOYSA-L tungstic acid Chemical compound O[W](O)(=O)=O CMPGARWFYBADJI-UHFFFAOYSA-L 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- 229960001763 zinc sulfate Drugs 0.000 description 1
Landscapes
- Electroplating And Plating Baths Therefor (AREA)
Description
ç£æ¥äžã®å©çšåé
æ¬çºæã¯ããã±ã«ãã³ãã«ããéãããã¯ãã
ãåéã®åäžé»çæ§ã«åªãããã€ã被èãäžãã
ããšãã§ããé»æ°ãã€ã液ã«é¢ããã åŸæ¥ã®æè¡åã³çºæã解決ããããšããåé¡ç¹ åŸæ¥ãããã±ã«åã³ããã±ã«åéé»æ°ãã€ã液
ãšããŠãã¯ãã济ãã¯ã€ãºãã«ã°æµŽãé«ç¡«é žãã
ã±ã«æµŽãé«å¡©åç©æµŽãã¹ã«ãã¢ãã³é žããã±ã«æµŽ
ãªã©ãç¥ãããŠãããããããã®æµŽã¯ããããå
äžé»çæ§ã®ç¹ã§åé¡ããããäœé»æµå¯åºŠéšåã®è
åäžè¶³ã«ããèé£æ§ãå æ²¢ã»ã¬ããªã³ã°ã®äœäžã
éã«äœé»æµå¯åºŠéšåã®èåã確ä¿ããããã«çã
ããã€ãæéã®å¢å€§ãé«é»æµå¯åºŠéšåãžã®éå°é»
æã«ãããã€ã補åã®å¯žæ³ç²ŸåºŠã®äœäžããã€ãé
å±ã®ç¡é§ãªæ¶è²»ãªã©ã®åé¡ãèµ·ãããç¹ã«æè¿ã«
ãããŠã¯ãããªã³ãåºæ¿ã®ãšããã³ã°ã¬ãžã¹ãçš
ãã€ãã端åãã€ããICãLSIã®é ç·ããªãŒãã
ã¬ãŒã çãžã®éãã€ãäžå°ãªã©ã«ããã±ã«ã¡ãã
ãããã±ã«âã³ãã«ãåéãã€ããåºã䜿çšãã
ãŠãããããããã®ãã€ãã«çšããå Žåã¯ãäžè¿°
ããããã«åäžé»çæ§ã«å£ããäœé»æµå¯åºŠéšåã®
被èŠåãä¹ããã®ã§ããã³ãã€ã³ã°ãåç°ä»ãäž
è¯ãèé£æ§äžè¯ãçãããããããé²æ¢ãããã
äœé»æµå¯åºŠéšåã®ãã€ãåããåããããšãé«é»
æµå¯åºŠéšåã®ãã€ãåããå¢å€§ããå¿åãäžæã
ãŠå¯çäžè¯ãçãããªã©ã®æ¬ ç¹ããããICãLSI
çã®è£œé äžå€§ããªåé¡ãšãªã€ãŠãããæŽã«ããã©
ã¹ããã¯ãäºéãã€ãã€ã¹ã補åã«ãã€ããã
ããEMIïŒé»ç£æ³¢é害ïŒé²æ¢çšããã±ãŒãžã«ãã€
ããããããå Žåã¯ãããã補åã¯è€éãªåœ¢ç¶ã®
ãã®ãå€ãã®ã§ãäœé»æµå¯åºŠéšåã®å æ²¢äžè¯ã
EMIé²æ¢èœã®äœäžãªã©ã®åé¡ããã€ãã ãã®å Žåããã€ãåããåäžã«ããã«ã¯ååŠã
ã€ãæ³ãæ¡çšããããšãèããããããååŠãã€
ãæ³ã¯ãã€ãé床ãé ãäžãéå±ã€ãªã³ã®éå å€
ãå¿ èŠãšããããšãããã€ãã³ã¹ããå¢å€§ãããŸ
ãçŸåšååŠãã€ãå¯èœãªéå±ãåéã®çš®é¡ãéã
ãããããéåžžã¯éå±ã€ãªã³ãé¯åãããŠããã®
ã§ææ°ŽåŠçã«æéãèŠãããªã©ã®åé¡ãããã åŸã€ãŠãåŸæ¥ããããã±ã«ãã³ãã«ããéãã
ããã®åéé»æ°ãã€ã液ãšããŠåäžé»çæ§ã«åªã
ããã®ãæãŸããŠããã æ¬çºæã¯äžèšäºæ ã«éã¿ãªããããã®ã§ãåäž
é»çæ§ãåªããããã±ã«ãã³ãã«ããéåã¯ãã
ãã®åéãã€ã被èãåŸãããé»æ°ãã€ã液ãæ
äŸããããšãç®çãšããã åé¡ç¹ã解決ããããã®æ段 å³ã¡ãæ¬çºæè ã¯ãããã±ã«ãããã±ã«åéç
ã®ãã€ã被èã®åäžé»çæ§ãæ¹è¯ããããšã«ã€ã
éæç 究ãéããçµæãããã±ã«ãã³ãã«ãåã³
éããéžã°ããéå±ã®æ°Žæº¶æ§å¡©ããã€ããã¹ãé
å±ã®ã€ãªã³æºãšãããã€ã液äžã«ã¢ã«ã«ãªéå±ã
ã¢ã«ã«ãªåé¡éå±åã³ã¢ã«ãããŠã ããéžã°ãã
éå±ã®æ°Žæº¶æ§ããã²ã³åç©ãç¡«é žå¡©åã³ã¹ã«ãã¢
ãã³é žå¡©ã®å°ãªããšãïŒçš®ã150ïœïŒä»¥äžãã
ã奜ãŸããã¯200ïœïŒä»¥äžã®é«æ¿åºŠã§å«æããã
ãã€ãç·©è¡å€ãšããŠææ©ã«ã«ãã³é žåã³ãã®å¡©ã
æ°Žé žåã¢ã³ã¢ããŠã ãã¢ã³ã¢ããŠã 塩䞊ã³ã«ã¢ã
ã³é¡ããéžã°ããïŒçš®åã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§åå
ç©ãæ·»å ããå Žåãåäžé»çæ§ãèããå¢å€§ãã
ããšãç¥èŠããããã®å ŽåãäŸãã°ãã¯ãã济ã¯
NiSO4ã»6H2Oã300ïœïŒçšåºŠå«æããéåžžã®ã¹
ã«ãã¢ãã³é žããã±ã«æµŽã¯ã¹ã«ãã¢ãã³é žããã±
ã«ã300ïœïŒä»¥äžå«æãããŸããåŸæ¥ããé«å¡©
åããã±ã«æµŽãšããŠNiCl2ã»6H2Oã300ïœïŒå«
æãããã€ã液ã¯ç¥ãããŠãããããããã¯äžè¿°
ãããããªåäžé»çæ§ã«å£ãããšããããç¡«é žã€
ãªã³ãããã²ã³ã€ãªã³åã¯ã¹ã«ãã¢ãã³é žã€ãªã³
ãNiïŒCoïŒFeçã®ç¡«é žå¡©ãããã²ã³åç©ãšããŠ
äžããã®ã§ã¯ãªããã¢ã«ã«ãªéå±ãã¢ã«ã«ãªåé¡
éå±ãæãã¯ã¢ã«ãããŠã ã®ç¡«é žå¡©ãããã²ã³å
ç©åã¯ã¹ã«ãã¢ãã³é žå¡©ãšããŠé«æ¿åºŠã§äžããã
ã€ç·©è¡å€ãšããŠææ©ã«ã«ãã³é žåã³ãã®å¡©ãæ°Žé ž
åã¢ã³ã¢ããŠã ãã¢ã³ã¢ããŠã 塩䞊ã³ã«ã¢ãã³é¡
ããéžã°ããïŒçš®åã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§ååç©ã
æ·»å ããå Žåã¯ãåäžé»çæ§ãé¡èã«å¢å€§ããã
ãšãèŠåºããæŽã«ç¡«é žãå¡©é žãæ·»å ããå Žåã¯ã
ãåäžé»çæ§ãå¢å€§ããããšããŸããã¢ãã³ãã©
ã³ååç©ãããã©ãžã³ååç©ãäºãªã³é žã次äºãª
ã³é žåã¯ãããã®å¡©ãæ·»å ãããšé«ç¡¬åºŠã®ãã€ã
被èãåŸããããªã©ã®ç¹é·ãä»äžãããããšãç¥
èŠããæ¬çºæããªãã«è³ã€ããã®ã§ããã 以äžãæ¬çºæã«ã€ãæŽã«è©³ãã説æããã æ¬çºæã«ä¿ãã¡ãã液ã¯ãããã±ã«ãã³ãã«ã
åã³éããéžã°ããéå±ã®æ°Žæº¶æ§å¡©ãå«æãããš
å ±ã«ãå°é»æ§å¡©ãšããŠã¢ã«ã«ãªéå±ãã¢ã«ã«ãªå
é¡éå±åã³ã¢ã«ãããŠã ããéžã°ããéå±ã®æ°Žæº¶
æ§ããã²ã³åç©ãç¡«é žå¡©åã³ã¹ã«ãã¢ãã³é žå¡©ã®
å°ãªããšãïŒçš®ã150ã800ïœïŒå«æããŠããã
ã®ã§ããã ããã§ãäžèšæ°Žæº¶æ§éå±å¡©ãšããŠã¯NiïŒFeïŒ
Coã®æ°Žæº¶æ§å¡©ã§ããã°ç¹ã«å¶éã¯ãªããäŸãã°ã
NiïŒFeïŒCoã®ç¡«é žå¡©ãã¹ã«ãã¢ãã³é žå¡©ããã
ã²ã³åç©çãå ·äœçã«ã¯ç¡«é žããã±ã«ãç¡«é žç¬¬ïŒ
éãç¡«é žã³ãã«ããèåããã±ã«ãå¡©åããã±
ã«ãå¡©å第ïŒéãå¡©åã³ãã«ããã¹ã«ãã¢ãã³é ž
ããã±ã«ãã¹ã«ãã¢ãã³é žç¬¬ïŒéãã¹ã«ãã¢ãã³
é žã³ãã«ããªã©ãæãããããããã®éå±å¡©ã¯ïŒ
ã400ïœïŒãç¹ã«ïŒã200ïœïŒããã奜é©ã«ã¯
ïŒã100ïœïŒã®æ¿åºŠã§äœ¿çšããããšãã§ããã
ãã®å Žåããããéå±å¡©ã®æ¿åºŠãäœããŠãæ¬çºæ
ã«ããã°ãããçããããããããåäžé»çæ§ã®
åäžãèšãããšãã§ãããåéãã€ã被èãåŸã
å Žåã«ã¯ãäžèšæ°Žæº¶æ§éå±å¡©ã®ïŒçš®ä»¥äžãããã
ã¯äžèšæ°Žæº¶æ§éå±å¡©ãäž»æåãšããããã«ã¿ã³ã°
ã¹ãã³é žåã³ãã®å¡©ãã¢ãªããã³é žåã³ãã®å¡©ã
ç¡«é žäºéãå¡©åäºéãªã©ã®äºééå±å¡©ãç¡«é žé ã
å¡©åé ãªã©ã®é éå±å¡©ãç¡«é žé«ãå¡©åé«ãªã©ã®é«
éå±å¡©ãªã©ãNiïŒFeïŒCoãšåéåãã¹ãææã®
éå±ã®æ°Žæº¶æ§å¡©ãéžæããŠäœ¿çšããããšãã§ã
ãããŸãããããåéåãã¹ãéå±å¡©ã®æ¿åºŠã¯å
éçµæã«ãããŠé©å®éžå®ãããããéåžžïŒã100
ïœïŒãç¹ã«ïŒã50ïœïŒã®ç¯å²ãšããããšãã§
ããã æ¬çºæã«ãããŠã¯ãäžèšæ°Žæº¶æ§éå±å¡©ããã€ã
ãã¹ãéå±ã®ã€ãªã³æºãšãããã€ã液äžã«å°é»æ§
å¡©ãšããŠã¢ã«ã«ãªéå±ãã¢ã«ã«ãªåé¡éå±ãã¢ã«
ãããŠã ããéžã°ããéå±ã®ããã²ã³åç©ãç¡«é ž
å¡©åã³ã¹ã«ãã¢ãã³é žå¡©ã®ïŒçš®åã¯ïŒçš®ä»¥äžæ·»å
ãããå ·äœçã«ã¯å¡©åãªããŠã ãå¡©åãããªãŠ
ã ãå¡©åã«ãªãŠã ãå¡©åã¢ã«ãããŠã ãå¡©åã¢ã³
ã¢ããŠã ãå¡©åãã°ãã·ãŠã ãèåãããªãŠã ã
èåã«ãªãŠã ãç¡«é žãªããŠã ãç¡«é žãããªãŠã ã
ç¡«é žã«ãªãŠã ãç¡«é žã¢ã«ãããŠã ãã¹ã«ãã¢ãã³
é žãããªãŠã ãã¹ã«ãã¢ãã³é žã«ãªãŠã ãªã©ãäŸ
瀺ãããã ãããã®å°é»æ§å¡©ã®äœ¿çšéã¯150ã800ïœïŒãš
ããããšãå¿ èŠã§ããããããå°é»æ§å¡©ã150
ïœïŒä»¥äžã®é«æ¿åºŠã§äœ¿çšããããšã«ããé«åäž
é»çæ§ãéæããããããã«å¯Ÿãããã®é åéã
150ïœïŒããå°ãªãå Žåã¯åäžé»çæ§ã®åäžã«
察ããå¹æãä¹ãããæ¬çºæã®ç®çãéæãåŸãª
ãããªããåèšå°é»æ§å¡©ã®ãã奜ãŸãã䜿çšéã¯
200ã500ïœïŒã§ããã æ¬çºæã®ãã€ã液ã«ã¯ãäžèšæåã«å ããŠæŽã«
ç·©è¡å€ãšããŠææ©ã«ã«ãã³é žåã³ãã®å¡©ãæ°Žé žå
ã¢ã³ã¢ããŠã ãã¢ã³ã¢ããŠã 塩䞊ã³ã«ã¢ãã³é¡ã
ãéžã°ããïŒçš®åã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§ååç©ãæ·»
å ãããã®ã§ãããããã§äžèšã®ç·©è¡å€ãšããŠã¯
ãªã³ãŽé žããªã³ãŽé žã¢ã³ã¢ããŠã ãã³ãã¯é žãã³
ãã¯é žã¢ã³ã¢ããŠã ãé ¢é žã«ãªãŠã ãé ¢é žãããª
ãŠã ãé ç³é žã¢ã³ã¢ããŠã ãã¢ã¹ã³ã«ãã³é žãã¯
ãšã³é žãã¯ãšã³é žã¢ã³ã¢ããŠã ãä¹³é žããã«ãã³
é žãããããªã³é žãé ªé žãã®é žãé ¢é žãã°ãªã³ãŒ
ã«é žããªããµã«é ¢é žãã¢ã³ã¢ãã¢æ°Žããšãã¬ã³ãž
ã¢ãã³ãããªãšã¿ããŒã«ã¢ãã³ããšã¿ããŒã«ã¢ã
ã³ãå¡©åã¢ã³ã¢ããŠã ãèåã¢ã³ã¢ããŠã ãªã©ã
æããããããããã®äžã§ã¯ãã«ã«ãã³é žåã³ã
ã®å¡©ãç¹ã«ã¯ãšã³é žåã³ãã®å¡©ã奜é©ã§ãããã
ã®å¡©ãšããŠã¯ã¢ã³ã¢ããŠã å¡©ã奜ãŸããããšãã
ãã¯ãšã³é žäžã¢ã³ã¢ããŠã ããã€ãå€èŠ³ãç©æ§
ïŒäœå¿åãæè»æ§ïŒã®ç¹ãããæå¹ã§ããããã®
䜿çšéã¯å¿ ãããå¶éãããªãããã«ã«ãã³é žå
ã³ãã®å¡©ãçšããå Žåã¯ïŒã300ïœïŒãç¹ã«10
ã200ïœïŒãšããããšã奜ãŸããããŸããæ°Žé ž
åã¢ã³ã¢ããŠã ãã«ã«ãã³é žã¢ã³ã¢ããŠã 以å€ã®
ã¢ã³ã¢ããŠã å¡©ãã¢ãã³é¡ãçšããå Žåã¯10ã
100ïœïŒãç¹ã«10ã50ïœïŒãšããããšã奜ãŸ
ããããã®å ŽåãåèšNiïŒFeïŒCoã€ãªã³ãšãã
ãç·©è¡å€ãšã®æ¯çã¯ééæ¯ãšããŠïŒïŒïŒãïŒïŒïŒ
ãšããããšãåäžé»çæ§ãããé«ããç¹ãã奜ãŸ
ããããŸããã«ã«ãã³é žã¢ã³ã¢ããŠã ãçšããå Ž
åã¯ãNiïŒFeïŒCoã€ãªã³ã®æ¿åºŠãïŒã100ïœïŒ
ãç¹ã«ïŒã60ïœïŒçšåºŠã®äœæ¿åºŠã«ããŠããã
ãªã©ã®ãªãè¯å¥œãªãã€ããè¡ãªãããäžãåäžé»
çæ§ãæŽã«åäžãããããšãã§ããã®ã§ãNiïŒ
FeïŒCoã€ãªã³æ¿åºŠã¯äžèšäœæ¿åºŠãšããããšã奜
ãŸããã æŽã«æ¬çºæã®ãã€ã液ã«ã¯ãå¡©é žåã¯ç¡«é žãæ·»
å ããããšãã§ããããã«ããåäžé»çæ§ãæ¹è¯
ããããšãã§ããããã®äœ¿çšéã¯0.1ã30ïœïŒã
ç¹ã«ïŒãïŒïœïŒãšããããšã奜ãŸããããªãã
ã®å ŽåãåèšNiïŒFeïŒCoã®æ°Žæº¶æ§å¡©ã®æ¿åºŠãïŒ
ã100ïœïŒã®äœæ¿åºŠãšããããšãé«åäžé»çæ§
ã®ãã€ã被èãåŸãããšãã奜ãŸããã æ¬çºæã®ãã€ã液ã«ã¯ã次äºãªã³é žãäºãªã³
é žãåã³ãããã®å¡©ãã¢ãã³ãã©ã³ååç©ããã
ã©ãžã³ååç©ãïŒã100ïœïŒçšåºŠæ·»å ããããš
ãã§ããããã«ãããªã³å«æåã¯ããŠçŽ å«æãã€
ã被èãåŸãããšãã§ããããã®ãããªãªã³åã¯
ããŠçŽ å«æãã€ã被èã¯ããã€ã¯ãããã«ãŒã¹ç¡¬
床Hv500ã800ã®ç¡¬è³ªè¢«èãšãªããååŠããã±ã«
ãã€ã被èãšåæ§ã«å ç±åŠçã«ããæŽã«é«ç¡¬åºŠã®
被èãåŸãããšãã§ããããŸããããŠçŽ å«æåé
ãã€ã被èã¯ãåªããåç°ä»ãæ§ããã³ãã€ã³ã°
æ§ãèç±æ§ãèæ©èæ§ãçºæ®ããããã«ãªãã ãªããŸããæ¬çºæã®é»æ°ãã€ã液ã«ã¯ãå æ²¢
å€ãã¬ããªã³ã°å€ãªã©ã®æ·»å å€ãšããŠéåžžçšãã
ããæ·»å å€ãäŸãã°ãµãã«ãªã³ãããã¿ã¬ã³ãžã¹
ã«ãã³é žãããªãŠã ãããã¿ã¬ã³ããªã¹ã«ãã³é ž
ãããªãŠã ãã¢ãªã«ã¹ã«ãã³é žãããªãŠã ããã
ãã®ã«ã¹ã«ãã³é žãããªãŠã ãããã³ãžãªãŒã«ã
ãããã®ã«ã¢ã«ã³ãŒã«ãã¯ããªã³ããã«ããªã³ãª
ã©ãé©éæ·»å ããããšãã§ããã æ¬çºæã®ãã€ã液ã®PHã¯ïŒã12ãç¹ã«ïŒã10ã
奜é©ã§ãããé žæ§æµŽãäžæ§æµŽãã¢ã«ã«ãªæ§æµŽã®ã
ããã§ãã€ãŠããããããšãããé žæ§ãã€ãã«ã
ããŠæ¬çºæã®å¹æãæå¹ã«çºæ®ããã æ¬çºæã®ãã€ã液ãçšããŠãã€ãããå Žåã®ã
ã€ãæ¡ä»¶ã¯å ¬ç¥ã®NiïŒFeïŒCoãããã¯ãããã®
åéãã€ããšåæ§ã®æ¡ä»¶ãæ¡çšãåŸãäŸãã°ãã€
ã枩床ã¯10ã70âãé°æ¥µé»æµå¯åºŠ0.01ã50AïŒïœ
m2ã®æ¡ä»¶ãæ¡çšããåŸãããŸããå¿ èŠã«å¿ãã空
æ°æ¹æãã«ãœãŒããããã³ã°ããã³ãçã«ãã液
埪ç°ããããã©æ¹æãªã©ã®æ¹æ³ã§æ¹æãè¡ãªãã
ãšãã§ãããã¢ããŒãã¯ãã®ãã€ã液ã®çš®é¡ã«å¿
ãéžå®ãããäŸãã°é»æ°ããã±ã«ãç¡«é»å«æãã
ã±ã«ãã«ãŒããã€ãºãããã±ã«ãéãã³ãã«ãã
åéã¢ããŒãçã®å¯æº¶æ§éœæ¥µãçšãããããŸãå Ž
åã«ãã€ãŠã¯çœéãã«ãŒãã³çã®äžæº¶æ§éœæ¥µã䜿
çšããããšãã§ããã ãªããæ¬çºæã®ãã€ã液ãçšããŠãã€ãããå Ž
åãé»æµå¹çã¯60ã100ïŒ ã«ãªãããã«ããããš
ãé«åäžé»çæ§ãéæããäœé»æµå¯åºŠéšåã®ãã€
ãèåãåããåŸãç¹ãã奜ãŸããã æ¬çºæã®ãã€ã液ãçšããŠãã€ããã補åã®æ
質ã«å¶éã¯ãªããé»æ°ãã€ãå¯èœãªæ質ã§ããã°
ãããã®ãã®ããã€ããåŸãäŸãã°éå±ãå°é»å
ããããã©ã¹ããã¯ãã»ã©ããã¯çããã€ããã
ãããããã¯å ¬ç¥ã®ååŠçãæœããææã®äžå°ã
ã€ããæœããåŸãæ¬çºæã®ãã€ã液ãçšããŠãã€
ãããããšãã§ãããŸãæ¬çºæã®ãã€ã液ã«ãã
ãã€ãåŸããã®äžã«ã¯ãã ãã€ããéãã€ããã
ã®ä»ææã®ãã€ããæœããªã©ã®å ¬ç¥ã®åŸåŠçãæœ
ãããšãã§ããã çºæã®å¹æ æ¬çºæã«ä¿ãé»æ°ãã€ã液ã¯ãããã±ã«ãã³ã
ã«ãåã³éããéžã°ããéå±ã®æ°Žæº¶æ§å¡©ãå«æ
ããã¢ã«ã«ãªéå±ãã¢ã«ã«ãªåé¡éå±åã³ã¢ã«ã
ããŠã ããéžã°ããéå±ã®æ°Žæº¶æ§ããã²ã³åç©ã
ç¡«é žå¡©åã³ã¹ã«ãã¢ãã³é žå¡©ã®å°ãªããšãïŒçš®ã
150ã800ïœïŒãå«æããæŽã«ç·©è¡å€ãšããŠææ©
ã«ã«ãã³é žåã³ãã®å¡©ãæ°Žé žåã¢ã³ã¢ããŠã ãã¢
ã³ã¢ããŠã 塩䞊ã³ã«ã¢ãã³é¡ããéžã°ããïŒçš®å
ã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§ååç©ãå«æããããšã«ã
ããåäžé»çæ§ã«åªããé«é»æµå¯åºŠéšåãšäœé»æµ
å¯åºŠéšåãšã®èåå·®ã®å°ãªããã€ã被èãåŸãã
ãããã®ãããæ¬çºæãã€ã液ã¯ãé»åéšåïŒã
ãªã³ãåºæ¿ã®ãšããã³ã°ã¬ãžã¹ãçšãã€ãã端å
ãã€ããICãLSIã®é ç·ããªãŒããã¬ãŒã çïŒã
éåãããªã³ãé ç·åºæ¿ãæºåéšåãé»é³åãžã®
ãã€ãããã¬ã«ãã€ããè€éãªåœ¢ç¶ãæãããã©
ã¹ããã¯ãé»ç£æ³¢é害é²æ¢çšããã±ãŒãžãå€åæ§
çŽ æãžã®éå±è¢«èãã¢ã«ãã€ãæè²ãã€ããªã©ã«
奜é©ã«çšããããã 以äžã«å®æœäŸã瀺ããŠæ¬çºæãå ·äœçã«èª¬æã
ãããæ¬çºæã®ç¯å²ã¯ããã«éå®ããããã®ã§ã¯
ãªãã å®æœäŸ ïŒ NiSO4ã»6H2O 20ïœïŒ NiCl2ã»6H2O 20 ã NaCl 300 ã ã¯ãšã³é ž 20 ã æ¿ç¡«é ž 1.5mlïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããã¯ãã济ããåŸããããã€ã
ã«ãã䌌ãå€èŠ³ãæããNiãã€ã被èãåŸãã
ãã å®æœäŸ ïŒ NiSO4ã»6H2O 20ïœïŒ NiCl2ã»6H2O 20 ã KCl 300 ã ã¯ãšã³é žãããªãŠã 40 ã PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããéçœè²å æ²¢ç¶ã®æè»æ§ã®ãã
Niãã€ã被èãåŸãããã å®æœäŸ ïŒ ã¹ã«ãã¢ãã³é žããã±ã« 40ïœïŒ Na2SO4 250 ã NaCl 30 ã ãªã³ãŽé ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 60mlïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããé»ã¿ã®ããç¡å æ²¢ã®äœå¿åã§
æè»æ§ã®ããNiãã€ã被èãåŸãããã å®æœäŸ ïŒ NiCl2ã»6H2O 40ïœïŒ KCl 300 ã NH4Cl 60 ã H3BO3 10 ã PH 3.5 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããé»ã¿ããç¡å æ²¢ã®æè»æ§ã®ã
ãNiãã€ã被èãåŸãããã å®æœäŸ ïŒ NiCl2ã»6H2O 100ïœïŒ KCl 270 ã ã¯ãšã³é žäžã¢ã³ã¢ããŠã 15 ã PH 5.0 ã äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããè€ç°è²ã§ç¡å æ²¢ã®Niãã€ã
被èãåŸãããã å®æœäŸ ïŒ NiSO4ã»6H2O 50ïœïŒ LiCl 300 ã ã³ãã¯é ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 70mlïŒ ãžã¡ãã«ã¢ãã³ãã©ã³ ïŒïœïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããå®å šå æ²¢ã®Niâåéãã€
ããåŸãããã å®æœäŸ ïŒ NiSO4ã»6H2O 60ïœïŒ KCl 250 ã ã³ãã¯é ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 70mlïŒ äºãªã³é ž 50ïœïŒ æ¿ç¡«é ž 1.5mlïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããå®å šå æ²¢ã®Niâåéãã€
ããåŸãããã å®æœäŸ ïŒ NiSO4ã»6H2O 20ïœïŒ NiCl2ã»6H2O 30 ã Na2SO4 300 ã ã¯ãšã³é žäžã¢ã³ã¢ããŠã 10 ã ãµãã«ãªã³ãããªãŠã ïŒ ã ïŒâããã³âïŒïŒïŒâãžãªãŒã« 0.2 ã PH 4.8 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããå®å šå æ²¢ã®Niãã€ããåŸã
ããã å®æœäŸ ïŒ NiCl2ã»6H2O 40ïœïŒ ã¢ãªããã³é žãããªãŠã 10 ã KCl 250 ã ã³ãã¯é ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 70mlïŒ PH 10 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããåå æ²¢ãæããNiâMoåé
ãã€ã被èãåŸãããã å®æœäŸ 10 CoSO4ã»7H2O 50ïœïŒ KBr 300 ã ã¯ãšã³é žäžã¢ã³ã¢ããŠã 10 ã PH 4.8 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããç¡å æ²¢ã§æè»æ§ã®ããCoã
ã€ã被èãåŸãããã å®æœäŸ 11 FeSO4ã»7H2O 40ïœïŒ NaBr 250 ã é ¢é žã¢ã³ã¢ããŠã 20 ã PH 3.5 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããç¡å æ²¢ã§æè»æ§ã®ããFeã
ã€ã被èãåŸãããã æ¯èŒäŸ ïŒ NiSO4ã»6H2O 280ïœïŒ NiCl2ã»6H2O 45 ã H3BO3 40 ã PH 4.4 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiãã€ã被èãåŸãã æ¯èŒäŸ ïŒ ã¹ã«ãã¢ãã³é žNi 300ïœïŒ NiCl2ã»6H2O 30 ã H3BO3 40 ã PH 4.4 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiãã€ã被èãåŸãã æ¯èŒäŸ ïŒ NiSO4ã»6H2O 280ïœïŒ NiCl2ã»6H2O 40 ã CoSO4ã»7H2O 35 ã ã®é žãããªãŠã 25 ã H3BO3 40 ã PH 4.2 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiâCoåéãã€ã被èãåŸãã æ¯èŒäŸ ïŒ NiCl2ã»6H2O 300ïœïŒ H3BO3 35 ã PH 4.2 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiãã€ã被èãåŸãã ãŸããäžèšå®æœäŸïŒã11åã³æ¯èŒäŸïŒãïŒã®é»
æ°ãã€ã液ã«ã€ãããã€ãè©ŠéšåšãšããŠå±±æ¬éé
è©Šéšåšç€Ÿè£œæ¹è¯åããŒãªã³ã°ã»ã«ãçšããŠåäžé»
çæ§ã調ã¹ãããã®å Žåãéœæ¥µã«ã¯é»æ°ããã±ã«
æ¿ãé°æ¥µã«ã¯ããããè£é¢ã«ããŒãã³ãŒãã€ã³ã°
ãæœãã61Ã100Ã0.3mmãµã€ãºã®é æ¿ïŒæãçš
ããè·é¢æ¯ïŒïŒïŒã«ãŠãé»æ°ãã€ã液ã液枩55â
ã«ä¿ã¡ãããã空æ°æ¹æãè¡ãªããªããç·é»æµ
2Aã«ãŠ30åééé»ãããåŸããããã€ãã®åäž
é»çæ§ïŒïŒŽïŒïŒ ïŒïŒã¯ãé°æ¥µã«æåºãããã€ã被è
ééã秀éããäžèšã®åŒã«åŸãç®åºããã ïŒïŒ ïŒïŒïŒ°âïŒïŒïŒ°ïŒïŒâïŒÃ100 äœããïŒåäžé»çæ§ ïŒ°ïŒè·é¢æ¯ïŒæ¬å®éšã§ã¯ïŒïŒ ïŒïŒé°æ¥µã«æåºãããã€ã被èééæ¯ ãM1ïŒM2ïŒM1ã¯éœæ¥µã«è¿ãæ¹ã®é°æ¥µéé
å¢å ãM2ã¯é°æ¥µã«è¿ãæ¹ã®é°æ¥µééå¢å ã
ãåéã®åäžé»çæ§ã«åªãããã€ã被èãäžãã
ããšãã§ããé»æ°ãã€ã液ã«é¢ããã åŸæ¥ã®æè¡åã³çºæã解決ããããšããåé¡ç¹ åŸæ¥ãããã±ã«åã³ããã±ã«åéé»æ°ãã€ã液
ãšããŠãã¯ãã济ãã¯ã€ãºãã«ã°æµŽãé«ç¡«é žãã
ã±ã«æµŽãé«å¡©åç©æµŽãã¹ã«ãã¢ãã³é žããã±ã«æµŽ
ãªã©ãç¥ãããŠãããããããã®æµŽã¯ããããå
äžé»çæ§ã®ç¹ã§åé¡ããããäœé»æµå¯åºŠéšåã®è
åäžè¶³ã«ããèé£æ§ãå æ²¢ã»ã¬ããªã³ã°ã®äœäžã
éã«äœé»æµå¯åºŠéšåã®èåã確ä¿ããããã«çã
ããã€ãæéã®å¢å€§ãé«é»æµå¯åºŠéšåãžã®éå°é»
æã«ãããã€ã補åã®å¯žæ³ç²ŸåºŠã®äœäžããã€ãé
å±ã®ç¡é§ãªæ¶è²»ãªã©ã®åé¡ãèµ·ãããç¹ã«æè¿ã«
ãããŠã¯ãããªã³ãåºæ¿ã®ãšããã³ã°ã¬ãžã¹ãçš
ãã€ãã端åãã€ããICãLSIã®é ç·ããªãŒãã
ã¬ãŒã çãžã®éãã€ãäžå°ãªã©ã«ããã±ã«ã¡ãã
ãããã±ã«âã³ãã«ãåéãã€ããåºã䜿çšãã
ãŠãããããããã®ãã€ãã«çšããå Žåã¯ãäžè¿°
ããããã«åäžé»çæ§ã«å£ããäœé»æµå¯åºŠéšåã®
被èŠåãä¹ããã®ã§ããã³ãã€ã³ã°ãåç°ä»ãäž
è¯ãèé£æ§äžè¯ãçãããããããé²æ¢ãããã
äœé»æµå¯åºŠéšåã®ãã€ãåããåããããšãé«é»
æµå¯åºŠéšåã®ãã€ãåããå¢å€§ããå¿åãäžæã
ãŠå¯çäžè¯ãçãããªã©ã®æ¬ ç¹ããããICãLSI
çã®è£œé äžå€§ããªåé¡ãšãªã€ãŠãããæŽã«ããã©
ã¹ããã¯ãäºéãã€ãã€ã¹ã補åã«ãã€ããã
ããEMIïŒé»ç£æ³¢é害ïŒé²æ¢çšããã±ãŒãžã«ãã€
ããããããå Žåã¯ãããã補åã¯è€éãªåœ¢ç¶ã®
ãã®ãå€ãã®ã§ãäœé»æµå¯åºŠéšåã®å æ²¢äžè¯ã
EMIé²æ¢èœã®äœäžãªã©ã®åé¡ããã€ãã ãã®å Žåããã€ãåããåäžã«ããã«ã¯ååŠã
ã€ãæ³ãæ¡çšããããšãèããããããååŠãã€
ãæ³ã¯ãã€ãé床ãé ãäžãéå±ã€ãªã³ã®éå å€
ãå¿ èŠãšããããšãããã€ãã³ã¹ããå¢å€§ãããŸ
ãçŸåšååŠãã€ãå¯èœãªéå±ãåéã®çš®é¡ãéã
ãããããéåžžã¯éå±ã€ãªã³ãé¯åãããŠããã®
ã§ææ°ŽåŠçã«æéãèŠãããªã©ã®åé¡ãããã åŸã€ãŠãåŸæ¥ããããã±ã«ãã³ãã«ããéãã
ããã®åéé»æ°ãã€ã液ãšããŠåäžé»çæ§ã«åªã
ããã®ãæãŸããŠããã æ¬çºæã¯äžèšäºæ ã«éã¿ãªããããã®ã§ãåäž
é»çæ§ãåªããããã±ã«ãã³ãã«ããéåã¯ãã
ãã®åéãã€ã被èãåŸãããé»æ°ãã€ã液ãæ
äŸããããšãç®çãšããã åé¡ç¹ã解決ããããã®æ段 å³ã¡ãæ¬çºæè ã¯ãããã±ã«ãããã±ã«åéç
ã®ãã€ã被èã®åäžé»çæ§ãæ¹è¯ããããšã«ã€ã
éæç 究ãéããçµæãããã±ã«ãã³ãã«ãåã³
éããéžã°ããéå±ã®æ°Žæº¶æ§å¡©ããã€ããã¹ãé
å±ã®ã€ãªã³æºãšãããã€ã液äžã«ã¢ã«ã«ãªéå±ã
ã¢ã«ã«ãªåé¡éå±åã³ã¢ã«ãããŠã ããéžã°ãã
éå±ã®æ°Žæº¶æ§ããã²ã³åç©ãç¡«é žå¡©åã³ã¹ã«ãã¢
ãã³é žå¡©ã®å°ãªããšãïŒçš®ã150ïœïŒä»¥äžãã
ã奜ãŸããã¯200ïœïŒä»¥äžã®é«æ¿åºŠã§å«æããã
ãã€ãç·©è¡å€ãšããŠææ©ã«ã«ãã³é žåã³ãã®å¡©ã
æ°Žé žåã¢ã³ã¢ããŠã ãã¢ã³ã¢ããŠã 塩䞊ã³ã«ã¢ã
ã³é¡ããéžã°ããïŒçš®åã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§åå
ç©ãæ·»å ããå Žåãåäžé»çæ§ãèããå¢å€§ãã
ããšãç¥èŠããããã®å ŽåãäŸãã°ãã¯ãã济ã¯
NiSO4ã»6H2Oã300ïœïŒçšåºŠå«æããéåžžã®ã¹
ã«ãã¢ãã³é žããã±ã«æµŽã¯ã¹ã«ãã¢ãã³é žããã±
ã«ã300ïœïŒä»¥äžå«æãããŸããåŸæ¥ããé«å¡©
åããã±ã«æµŽãšããŠNiCl2ã»6H2Oã300ïœïŒå«
æãããã€ã液ã¯ç¥ãããŠãããããããã¯äžè¿°
ãããããªåäžé»çæ§ã«å£ãããšããããç¡«é žã€
ãªã³ãããã²ã³ã€ãªã³åã¯ã¹ã«ãã¢ãã³é žã€ãªã³
ãNiïŒCoïŒFeçã®ç¡«é žå¡©ãããã²ã³åç©ãšããŠ
äžããã®ã§ã¯ãªããã¢ã«ã«ãªéå±ãã¢ã«ã«ãªåé¡
éå±ãæãã¯ã¢ã«ãããŠã ã®ç¡«é žå¡©ãããã²ã³å
ç©åã¯ã¹ã«ãã¢ãã³é žå¡©ãšããŠé«æ¿åºŠã§äžããã
ã€ç·©è¡å€ãšããŠææ©ã«ã«ãã³é žåã³ãã®å¡©ãæ°Žé ž
åã¢ã³ã¢ããŠã ãã¢ã³ã¢ããŠã 塩䞊ã³ã«ã¢ãã³é¡
ããéžã°ããïŒçš®åã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§ååç©ã
æ·»å ããå Žåã¯ãåäžé»çæ§ãé¡èã«å¢å€§ããã
ãšãèŠåºããæŽã«ç¡«é žãå¡©é žãæ·»å ããå Žåã¯ã
ãåäžé»çæ§ãå¢å€§ããããšããŸããã¢ãã³ãã©
ã³ååç©ãããã©ãžã³ååç©ãäºãªã³é žã次äºãª
ã³é žåã¯ãããã®å¡©ãæ·»å ãããšé«ç¡¬åºŠã®ãã€ã
被èãåŸããããªã©ã®ç¹é·ãä»äžãããããšãç¥
èŠããæ¬çºæããªãã«è³ã€ããã®ã§ããã 以äžãæ¬çºæã«ã€ãæŽã«è©³ãã説æããã æ¬çºæã«ä¿ãã¡ãã液ã¯ãããã±ã«ãã³ãã«ã
åã³éããéžã°ããéå±ã®æ°Žæº¶æ§å¡©ãå«æãããš
å ±ã«ãå°é»æ§å¡©ãšããŠã¢ã«ã«ãªéå±ãã¢ã«ã«ãªå
é¡éå±åã³ã¢ã«ãããŠã ããéžã°ããéå±ã®æ°Žæº¶
æ§ããã²ã³åç©ãç¡«é žå¡©åã³ã¹ã«ãã¢ãã³é žå¡©ã®
å°ãªããšãïŒçš®ã150ã800ïœïŒå«æããŠããã
ã®ã§ããã ããã§ãäžèšæ°Žæº¶æ§éå±å¡©ãšããŠã¯NiïŒFeïŒ
Coã®æ°Žæº¶æ§å¡©ã§ããã°ç¹ã«å¶éã¯ãªããäŸãã°ã
NiïŒFeïŒCoã®ç¡«é žå¡©ãã¹ã«ãã¢ãã³é žå¡©ããã
ã²ã³åç©çãå ·äœçã«ã¯ç¡«é žããã±ã«ãç¡«é žç¬¬ïŒ
éãç¡«é žã³ãã«ããèåããã±ã«ãå¡©åããã±
ã«ãå¡©å第ïŒéãå¡©åã³ãã«ããã¹ã«ãã¢ãã³é ž
ããã±ã«ãã¹ã«ãã¢ãã³é žç¬¬ïŒéãã¹ã«ãã¢ãã³
é žã³ãã«ããªã©ãæãããããããã®éå±å¡©ã¯ïŒ
ã400ïœïŒãç¹ã«ïŒã200ïœïŒããã奜é©ã«ã¯
ïŒã100ïœïŒã®æ¿åºŠã§äœ¿çšããããšãã§ããã
ãã®å Žåããããéå±å¡©ã®æ¿åºŠãäœããŠãæ¬çºæ
ã«ããã°ãããçããããããããåäžé»çæ§ã®
åäžãèšãããšãã§ãããåéãã€ã被èãåŸã
å Žåã«ã¯ãäžèšæ°Žæº¶æ§éå±å¡©ã®ïŒçš®ä»¥äžãããã
ã¯äžèšæ°Žæº¶æ§éå±å¡©ãäž»æåãšããããã«ã¿ã³ã°
ã¹ãã³é žåã³ãã®å¡©ãã¢ãªããã³é žåã³ãã®å¡©ã
ç¡«é žäºéãå¡©åäºéãªã©ã®äºééå±å¡©ãç¡«é žé ã
å¡©åé ãªã©ã®é éå±å¡©ãç¡«é žé«ãå¡©åé«ãªã©ã®é«
éå±å¡©ãªã©ãNiïŒFeïŒCoãšåéåãã¹ãææã®
éå±ã®æ°Žæº¶æ§å¡©ãéžæããŠäœ¿çšããããšãã§ã
ãããŸãããããåéåãã¹ãéå±å¡©ã®æ¿åºŠã¯å
éçµæã«ãããŠé©å®éžå®ãããããéåžžïŒã100
ïœïŒãç¹ã«ïŒã50ïœïŒã®ç¯å²ãšããããšãã§
ããã æ¬çºæã«ãããŠã¯ãäžèšæ°Žæº¶æ§éå±å¡©ããã€ã
ãã¹ãéå±ã®ã€ãªã³æºãšãããã€ã液äžã«å°é»æ§
å¡©ãšããŠã¢ã«ã«ãªéå±ãã¢ã«ã«ãªåé¡éå±ãã¢ã«
ãããŠã ããéžã°ããéå±ã®ããã²ã³åç©ãç¡«é ž
å¡©åã³ã¹ã«ãã¢ãã³é žå¡©ã®ïŒçš®åã¯ïŒçš®ä»¥äžæ·»å
ãããå ·äœçã«ã¯å¡©åãªããŠã ãå¡©åãããªãŠ
ã ãå¡©åã«ãªãŠã ãå¡©åã¢ã«ãããŠã ãå¡©åã¢ã³
ã¢ããŠã ãå¡©åãã°ãã·ãŠã ãèåãããªãŠã ã
èåã«ãªãŠã ãç¡«é žãªããŠã ãç¡«é žãããªãŠã ã
ç¡«é žã«ãªãŠã ãç¡«é žã¢ã«ãããŠã ãã¹ã«ãã¢ãã³
é žãããªãŠã ãã¹ã«ãã¢ãã³é žã«ãªãŠã ãªã©ãäŸ
瀺ãããã ãããã®å°é»æ§å¡©ã®äœ¿çšéã¯150ã800ïœïŒãš
ããããšãå¿ èŠã§ããããããå°é»æ§å¡©ã150
ïœïŒä»¥äžã®é«æ¿åºŠã§äœ¿çšããããšã«ããé«åäž
é»çæ§ãéæããããããã«å¯Ÿãããã®é åéã
150ïœïŒããå°ãªãå Žåã¯åäžé»çæ§ã®åäžã«
察ããå¹æãä¹ãããæ¬çºæã®ç®çãéæãåŸãª
ãããªããåèšå°é»æ§å¡©ã®ãã奜ãŸãã䜿çšéã¯
200ã500ïœïŒã§ããã æ¬çºæã®ãã€ã液ã«ã¯ãäžèšæåã«å ããŠæŽã«
ç·©è¡å€ãšããŠææ©ã«ã«ãã³é žåã³ãã®å¡©ãæ°Žé žå
ã¢ã³ã¢ããŠã ãã¢ã³ã¢ããŠã 塩䞊ã³ã«ã¢ãã³é¡ã
ãéžã°ããïŒçš®åã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§ååç©ãæ·»
å ãããã®ã§ãããããã§äžèšã®ç·©è¡å€ãšããŠã¯
ãªã³ãŽé žããªã³ãŽé žã¢ã³ã¢ããŠã ãã³ãã¯é žãã³
ãã¯é žã¢ã³ã¢ããŠã ãé ¢é žã«ãªãŠã ãé ¢é žãããª
ãŠã ãé ç³é žã¢ã³ã¢ããŠã ãã¢ã¹ã³ã«ãã³é žãã¯
ãšã³é žãã¯ãšã³é žã¢ã³ã¢ããŠã ãä¹³é žããã«ãã³
é žãããããªã³é žãé ªé žãã®é žãé ¢é žãã°ãªã³ãŒ
ã«é žããªããµã«é ¢é žãã¢ã³ã¢ãã¢æ°Žããšãã¬ã³ãž
ã¢ãã³ãããªãšã¿ããŒã«ã¢ãã³ããšã¿ããŒã«ã¢ã
ã³ãå¡©åã¢ã³ã¢ããŠã ãèåã¢ã³ã¢ããŠã ãªã©ã
æããããããããã®äžã§ã¯ãã«ã«ãã³é žåã³ã
ã®å¡©ãç¹ã«ã¯ãšã³é žåã³ãã®å¡©ã奜é©ã§ãããã
ã®å¡©ãšããŠã¯ã¢ã³ã¢ããŠã å¡©ã奜ãŸããããšãã
ãã¯ãšã³é žäžã¢ã³ã¢ããŠã ããã€ãå€èŠ³ãç©æ§
ïŒäœå¿åãæè»æ§ïŒã®ç¹ãããæå¹ã§ããããã®
䜿çšéã¯å¿ ãããå¶éãããªãããã«ã«ãã³é žå
ã³ãã®å¡©ãçšããå Žåã¯ïŒã300ïœïŒãç¹ã«10
ã200ïœïŒãšããããšã奜ãŸããããŸããæ°Žé ž
åã¢ã³ã¢ããŠã ãã«ã«ãã³é žã¢ã³ã¢ããŠã 以å€ã®
ã¢ã³ã¢ããŠã å¡©ãã¢ãã³é¡ãçšããå Žåã¯10ã
100ïœïŒãç¹ã«10ã50ïœïŒãšããããšã奜ãŸ
ããããã®å ŽåãåèšNiïŒFeïŒCoã€ãªã³ãšãã
ãç·©è¡å€ãšã®æ¯çã¯ééæ¯ãšããŠïŒïŒïŒãïŒïŒïŒ
ãšããããšãåäžé»çæ§ãããé«ããç¹ãã奜ãŸ
ããããŸããã«ã«ãã³é žã¢ã³ã¢ããŠã ãçšããå Ž
åã¯ãNiïŒFeïŒCoã€ãªã³ã®æ¿åºŠãïŒã100ïœïŒ
ãç¹ã«ïŒã60ïœïŒçšåºŠã®äœæ¿åºŠã«ããŠããã
ãªã©ã®ãªãè¯å¥œãªãã€ããè¡ãªãããäžãåäžé»
çæ§ãæŽã«åäžãããããšãã§ããã®ã§ãNiïŒ
FeïŒCoã€ãªã³æ¿åºŠã¯äžèšäœæ¿åºŠãšããããšã奜
ãŸããã æŽã«æ¬çºæã®ãã€ã液ã«ã¯ãå¡©é žåã¯ç¡«é žãæ·»
å ããããšãã§ããããã«ããåäžé»çæ§ãæ¹è¯
ããããšãã§ããããã®äœ¿çšéã¯0.1ã30ïœïŒã
ç¹ã«ïŒãïŒïœïŒãšããããšã奜ãŸããããªãã
ã®å ŽåãåèšNiïŒFeïŒCoã®æ°Žæº¶æ§å¡©ã®æ¿åºŠãïŒ
ã100ïœïŒã®äœæ¿åºŠãšããããšãé«åäžé»çæ§
ã®ãã€ã被èãåŸãããšãã奜ãŸããã æ¬çºæã®ãã€ã液ã«ã¯ã次äºãªã³é žãäºãªã³
é žãåã³ãããã®å¡©ãã¢ãã³ãã©ã³ååç©ããã
ã©ãžã³ååç©ãïŒã100ïœïŒçšåºŠæ·»å ããããš
ãã§ããããã«ãããªã³å«æåã¯ããŠçŽ å«æãã€
ã被èãåŸãããšãã§ããããã®ãããªãªã³åã¯
ããŠçŽ å«æãã€ã被èã¯ããã€ã¯ãããã«ãŒã¹ç¡¬
床Hv500ã800ã®ç¡¬è³ªè¢«èãšãªããååŠããã±ã«
ãã€ã被èãšåæ§ã«å ç±åŠçã«ããæŽã«é«ç¡¬åºŠã®
被èãåŸãããšãã§ããããŸããããŠçŽ å«æåé
ãã€ã被èã¯ãåªããåç°ä»ãæ§ããã³ãã€ã³ã°
æ§ãèç±æ§ãèæ©èæ§ãçºæ®ããããã«ãªãã ãªããŸããæ¬çºæã®é»æ°ãã€ã液ã«ã¯ãå æ²¢
å€ãã¬ããªã³ã°å€ãªã©ã®æ·»å å€ãšããŠéåžžçšãã
ããæ·»å å€ãäŸãã°ãµãã«ãªã³ãããã¿ã¬ã³ãžã¹
ã«ãã³é žãããªãŠã ãããã¿ã¬ã³ããªã¹ã«ãã³é ž
ãããªãŠã ãã¢ãªã«ã¹ã«ãã³é žãããªãŠã ããã
ãã®ã«ã¹ã«ãã³é žãããªãŠã ãããã³ãžãªãŒã«ã
ãããã®ã«ã¢ã«ã³ãŒã«ãã¯ããªã³ããã«ããªã³ãª
ã©ãé©éæ·»å ããããšãã§ããã æ¬çºæã®ãã€ã液ã®PHã¯ïŒã12ãç¹ã«ïŒã10ã
奜é©ã§ãããé žæ§æµŽãäžæ§æµŽãã¢ã«ã«ãªæ§æµŽã®ã
ããã§ãã€ãŠããããããšãããé žæ§ãã€ãã«ã
ããŠæ¬çºæã®å¹æãæå¹ã«çºæ®ããã æ¬çºæã®ãã€ã液ãçšããŠãã€ãããå Žåã®ã
ã€ãæ¡ä»¶ã¯å ¬ç¥ã®NiïŒFeïŒCoãããã¯ãããã®
åéãã€ããšåæ§ã®æ¡ä»¶ãæ¡çšãåŸãäŸãã°ãã€
ã枩床ã¯10ã70âãé°æ¥µé»æµå¯åºŠ0.01ã50AïŒïœ
m2ã®æ¡ä»¶ãæ¡çšããåŸãããŸããå¿ èŠã«å¿ãã空
æ°æ¹æãã«ãœãŒããããã³ã°ããã³ãçã«ãã液
埪ç°ããããã©æ¹æãªã©ã®æ¹æ³ã§æ¹æãè¡ãªãã
ãšãã§ãããã¢ããŒãã¯ãã®ãã€ã液ã®çš®é¡ã«å¿
ãéžå®ãããäŸãã°é»æ°ããã±ã«ãç¡«é»å«æãã
ã±ã«ãã«ãŒããã€ãºãããã±ã«ãéãã³ãã«ãã
åéã¢ããŒãçã®å¯æº¶æ§éœæ¥µãçšãããããŸãå Ž
åã«ãã€ãŠã¯çœéãã«ãŒãã³çã®äžæº¶æ§éœæ¥µã䜿
çšããããšãã§ããã ãªããæ¬çºæã®ãã€ã液ãçšããŠãã€ãããå Ž
åãé»æµå¹çã¯60ã100ïŒ ã«ãªãããã«ããããš
ãé«åäžé»çæ§ãéæããäœé»æµå¯åºŠéšåã®ãã€
ãèåãåããåŸãç¹ãã奜ãŸããã æ¬çºæã®ãã€ã液ãçšããŠãã€ããã補åã®æ
質ã«å¶éã¯ãªããé»æ°ãã€ãå¯èœãªæ質ã§ããã°
ãããã®ãã®ããã€ããåŸãäŸãã°éå±ãå°é»å
ããããã©ã¹ããã¯ãã»ã©ããã¯çããã€ããã
ãããããã¯å ¬ç¥ã®ååŠçãæœããææã®äžå°ã
ã€ããæœããåŸãæ¬çºæã®ãã€ã液ãçšããŠãã€
ãããããšãã§ãããŸãæ¬çºæã®ãã€ã液ã«ãã
ãã€ãåŸããã®äžã«ã¯ãã ãã€ããéãã€ããã
ã®ä»ææã®ãã€ããæœããªã©ã®å ¬ç¥ã®åŸåŠçãæœ
ãããšãã§ããã çºæã®å¹æ æ¬çºæã«ä¿ãé»æ°ãã€ã液ã¯ãããã±ã«ãã³ã
ã«ãåã³éããéžã°ããéå±ã®æ°Žæº¶æ§å¡©ãå«æ
ããã¢ã«ã«ãªéå±ãã¢ã«ã«ãªåé¡éå±åã³ã¢ã«ã
ããŠã ããéžã°ããéå±ã®æ°Žæº¶æ§ããã²ã³åç©ã
ç¡«é žå¡©åã³ã¹ã«ãã¢ãã³é žå¡©ã®å°ãªããšãïŒçš®ã
150ã800ïœïŒãå«æããæŽã«ç·©è¡å€ãšããŠææ©
ã«ã«ãã³é žåã³ãã®å¡©ãæ°Žé žåã¢ã³ã¢ããŠã ãã¢
ã³ã¢ããŠã 塩䞊ã³ã«ã¢ãã³é¡ããéžã°ããïŒçš®å
ã¯ïŒçš®ä»¥äžã®æ°Žæº¶æ§ååç©ãå«æããããšã«ã
ããåäžé»çæ§ã«åªããé«é»æµå¯åºŠéšåãšäœé»æµ
å¯åºŠéšåãšã®èåå·®ã®å°ãªããã€ã被èãåŸãã
ãããã®ãããæ¬çºæãã€ã液ã¯ãé»åéšåïŒã
ãªã³ãåºæ¿ã®ãšããã³ã°ã¬ãžã¹ãçšãã€ãã端å
ãã€ããICãLSIã®é ç·ããªãŒããã¬ãŒã çïŒã
éåãããªã³ãé ç·åºæ¿ãæºåéšåãé»é³åãžã®
ãã€ãããã¬ã«ãã€ããè€éãªåœ¢ç¶ãæãããã©
ã¹ããã¯ãé»ç£æ³¢é害é²æ¢çšããã±ãŒãžãå€åæ§
çŽ æãžã®éå±è¢«èãã¢ã«ãã€ãæè²ãã€ããªã©ã«
奜é©ã«çšããããã 以äžã«å®æœäŸã瀺ããŠæ¬çºæãå ·äœçã«èª¬æã
ãããæ¬çºæã®ç¯å²ã¯ããã«éå®ããããã®ã§ã¯
ãªãã å®æœäŸ ïŒ NiSO4ã»6H2O 20ïœïŒ NiCl2ã»6H2O 20 ã NaCl 300 ã ã¯ãšã³é ž 20 ã æ¿ç¡«é ž 1.5mlïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããã¯ãã济ããåŸããããã€ã
ã«ãã䌌ãå€èŠ³ãæããNiãã€ã被èãåŸãã
ãã å®æœäŸ ïŒ NiSO4ã»6H2O 20ïœïŒ NiCl2ã»6H2O 20 ã KCl 300 ã ã¯ãšã³é žãããªãŠã 40 ã PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããéçœè²å æ²¢ç¶ã®æè»æ§ã®ãã
Niãã€ã被èãåŸãããã å®æœäŸ ïŒ ã¹ã«ãã¢ãã³é žããã±ã« 40ïœïŒ Na2SO4 250 ã NaCl 30 ã ãªã³ãŽé ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 60mlïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããé»ã¿ã®ããç¡å æ²¢ã®äœå¿åã§
æè»æ§ã®ããNiãã€ã被èãåŸãããã å®æœäŸ ïŒ NiCl2ã»6H2O 40ïœïŒ KCl 300 ã NH4Cl 60 ã H3BO3 10 ã PH 3.5 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããé»ã¿ããç¡å æ²¢ã®æè»æ§ã®ã
ãNiãã€ã被èãåŸãããã å®æœäŸ ïŒ NiCl2ã»6H2O 100ïœïŒ KCl 270 ã ã¯ãšã³é žäžã¢ã³ã¢ããŠã 15 ã PH 5.0 ã äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããè€ç°è²ã§ç¡å æ²¢ã®Niãã€ã
被èãåŸãããã å®æœäŸ ïŒ NiSO4ã»6H2O 50ïœïŒ LiCl 300 ã ã³ãã¯é ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 70mlïŒ ãžã¡ãã«ã¢ãã³ãã©ã³ ïŒïœïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããå®å šå æ²¢ã®Niâåéãã€
ããåŸãããã å®æœäŸ ïŒ NiSO4ã»6H2O 60ïœïŒ KCl 250 ã ã³ãã¯é ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 70mlïŒ äºãªã³é ž 50ïœïŒ æ¿ç¡«é ž 1.5mlïŒ PH ïŒ äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããå®å šå æ²¢ã®Niâåéãã€
ããåŸãããã å®æœäŸ ïŒ NiSO4ã»6H2O 20ïœïŒ NiCl2ã»6H2O 30 ã Na2SO4 300 ã ã¯ãšã³é žäžã¢ã³ã¢ããŠã 10 ã ãµãã«ãªã³ãããªãŠã ïŒ ã ïŒâããã³âïŒïŒïŒâãžãªãŒã« 0.2 ã PH 4.8 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããå®å šå æ²¢ã®Niãã€ããåŸã
ããã å®æœäŸ ïŒ NiCl2ã»6H2O 40ïœïŒ ã¢ãªããã³é žãããªãŠã 10 ã KCl 250 ã ã³ãã¯é ž 40 ã ã¢ã³ã¢ãã¢æ°Ž 70mlïŒ PH 10 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããåå æ²¢ãæããNiâMoåé
ãã€ã被èãåŸãããã å®æœäŸ 10 CoSO4ã»7H2O 50ïœïŒ KBr 300 ã ã¯ãšã³é žäžã¢ã³ã¢ããŠã 10 ã PH 4.8 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããç¡å æ²¢ã§æè»æ§ã®ããCoã
ã€ã被èãåŸãããã å®æœäŸ 11 FeSO4ã»7H2O 40ïœïŒ NaBr 250 ã é ¢é žã¢ã³ã¢ããŠã 20 ã PH 3.5 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªã€ããšãããç¡å æ²¢ã§æè»æ§ã®ããFeã
ã€ã被èãåŸãããã æ¯èŒäŸ ïŒ NiSO4ã»6H2O 280ïœïŒ NiCl2ã»6H2O 45 ã H3BO3 40 ã PH 4.4 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiãã€ã被èãåŸãã æ¯èŒäŸ ïŒ ã¹ã«ãã¢ãã³é žNi 300ïœïŒ NiCl2ã»6H2O 30 ã H3BO3 40 ã PH 4.4 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiãã€ã被èãåŸãã æ¯èŒäŸ ïŒ NiSO4ã»6H2O 280ïœïŒ NiCl2ã»6H2O 40 ã CoSO4ã»7H2O 35 ã ã®é žãããªãŠã 25 ã H3BO3 40 ã PH 4.2 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiâCoåéãã€ã被èãåŸãã æ¯èŒäŸ ïŒ NiCl2ã»6H2O 300ïœïŒ H3BO3 35 ã PH 4.2 äžèšã®é»æ°ãã€ã液ãçšããŠã枩床55âãé°æ¥µ
é»æµå¯åºŠ2AïŒïœm2ã«ãããŠç©ºæ°æ¹æäžã§ãã€ã
ãè¡ãªããNiãã€ã被èãåŸãã ãŸããäžèšå®æœäŸïŒã11åã³æ¯èŒäŸïŒãïŒã®é»
æ°ãã€ã液ã«ã€ãããã€ãè©ŠéšåšãšããŠå±±æ¬éé
è©Šéšåšç€Ÿè£œæ¹è¯åããŒãªã³ã°ã»ã«ãçšããŠåäžé»
çæ§ã調ã¹ãããã®å Žåãéœæ¥µã«ã¯é»æ°ããã±ã«
æ¿ãé°æ¥µã«ã¯ããããè£é¢ã«ããŒãã³ãŒãã€ã³ã°
ãæœãã61Ã100Ã0.3mmãµã€ãºã®é æ¿ïŒæãçš
ããè·é¢æ¯ïŒïŒïŒã«ãŠãé»æ°ãã€ã液ã液枩55â
ã«ä¿ã¡ãããã空æ°æ¹æãè¡ãªããªããç·é»æµ
2Aã«ãŠ30åééé»ãããåŸããããã€ãã®åäž
é»çæ§ïŒïŒŽïŒïŒ ïŒïŒã¯ãé°æ¥µã«æåºãããã€ã被è
ééã秀éããäžèšã®åŒã«åŸãç®åºããã ïŒïŒ ïŒïŒïŒ°âïŒïŒïŒ°ïŒïŒâïŒÃ100 äœããïŒåäžé»çæ§ ïŒ°ïŒè·é¢æ¯ïŒæ¬å®éšã§ã¯ïŒïŒ ïŒïŒé°æ¥µã«æåºãããã€ã被èééæ¯ ãM1ïŒM2ïŒM1ã¯éœæ¥µã«è¿ãæ¹ã®é°æ¥µéé
å¢å ãM2ã¯é°æ¥µã«è¿ãæ¹ã®é°æ¥µééå¢å ã
ãè¡šã
äžèšã®çµæãããæ¬çºæã«ä¿ãå°é»æ§å¡©ã150
ã800ïœïŒã䞊ã³ã«æ¬çºæã«ä¿ãç·©è¡å€ãå«æ
ããé»æ°ãã€ã液ïŒå®æœäŸïŒã¯ããããã®å°é»æ§
å¡©ãå«ãŸããåŸã€ãŠæ¬çºæã«ä¿ãå°é»æ§å¡©ãšæ¬çº
æã«ä¿ãç·©è¡å€ãšãå ±ã«å«æããŠããªãé»æ°ãã€
ã液ïŒæ¯èŒäŸïŒã«æ¯ãããã€ã被èã®åäžé»çæ§
ãã¯ããã«åªããŠããããšã確èªãããã
ã800ïœïŒã䞊ã³ã«æ¬çºæã«ä¿ãç·©è¡å€ãå«æ
ããé»æ°ãã€ã液ïŒå®æœäŸïŒã¯ããããã®å°é»æ§
å¡©ãå«ãŸããåŸã€ãŠæ¬çºæã«ä¿ãå°é»æ§å¡©ãšæ¬çº
æã«ä¿ãç·©è¡å€ãšãå ±ã«å«æããŠããªãé»æ°ãã€
ã液ïŒæ¯èŒäŸïŒã«æ¯ãããã€ã被èã®åäžé»çæ§
ãã¯ããã«åªããŠããããšã確èªãããã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ ããã±ã«ãã³ãã«ãåã³éããéžã°ããéå±
ã®æ°Žæº¶æ§å¡©ãå«æãããšå ±ã«ãå°é»æ§å¡©ãšããŠã¢
ã«ã«ãªéå±ãã¢ã«ã«ãªåé¡éå±åã³ã¢ã«ãããŠã
ããéžã°ããéå±ã®æ°Žæº¶æ§ããã²ã³åç©ãç¡«é žå¡©
åã³ã¹ã«ãã¢ãã³é žå¡©ã®å°ãªããšãïŒçš®ã150ã
800ïœïŒå«æãããã€ç·©è¡å€ãšããŠææ©ã«ã«ã
ã³é žåã³ãã®å¡©ãæ°Žé žåã¢ã³ã¢ããŠã ãã¢ã³ã¢ã
ãŠã 塩䞊ã³ã«ã¢ãã³é¡ããéžã°ããïŒçš®åã¯ïŒçš®
以äžã®æ°Žæº¶æ§ååç©ãå«æããŠãªãããšãç¹åŸŽãš
ããé»æ°ãã€ã液ã ïŒ H2SO4åã³ïŒåã¯HClã0.1ã30ïœïŒæ·»å
ããç¹èš±è«æ±ã®ç¯å²ç¬¬ïŒé èšèŒã®é»æ°ãã€ã液ã ïŒ ã¢ãã³ãã©ã³ååç©ãããã©ãžã³ååç©ãäº
ãªã³é žã次äºãªã³é žåã¯ãããã®å¡©ãæ·»å ããç¹
èš±è«æ±ã®ç¯å²ç¬¬ïŒé åã¯ç¬¬ïŒé èšèŒã®é»æ°ãã€ã
液ã
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60-167014 | 1985-07-29 | ||
JP16701485 | 1985-07-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62103387A JPS62103387A (ja) | 1987-05-13 |
JPH0319308B2 true JPH0319308B2 (ja) | 1991-03-14 |
Family
ID=15841785
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP305886A Granted JPS62109991A (ja) | 1985-07-29 | 1986-01-10 | é»æ°ãã€ã液 |
JP305786A Granted JPS62103387A (ja) | 1985-07-29 | 1986-01-10 | é»æ°ãã€ã液 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP305886A Granted JPS62109991A (ja) | 1985-07-29 | 1986-01-10 | é»æ°ãã€ã液 |
Country Status (1)
Country | Link |
---|---|
JP (2) | JPS62109991A (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH049492A (ja) * | 1990-04-26 | 1992-01-14 | Nippon Kagaku Sangyo Kk | 硬質ããã±ã«åéãã£ã济 |
JPH04116191A (ja) * | 1990-09-04 | 1992-04-16 | C Uyemura & Co Ltd | é»æ°ãã£ãæ¹æ³ |
JPH05331677A (ja) * | 1992-05-27 | 1993-12-14 | Sumitomo Metal Mining Co Ltd | é»æ°éãã£ã液 |
JPH05331676A (ja) * | 1992-05-27 | 1993-12-14 | Sumitomo Metal Mining Co Ltd | é»æ°éãã£ã液 |
JP4737790B2 (ja) * | 1999-10-01 | 2011-08-03 | æ ªåŒäŒç€Ÿã·ã㺠| ã»ãé žãå«ãŸãªãããã±ã«ãã£ã济 |
JP4740528B2 (ja) * | 2003-09-08 | 2011-08-03 | 倧éªåº | ããã±ã«âã¢ãªããã³åéãã£ã液ãšãã®ãã£ãç®èåã³ãã£ãç©å |
US7494578B2 (en) * | 2004-03-01 | 2009-02-24 | Atotech Deutschland Gmbh | Iron-phosphorus electroplating bath and method |
JP2007262430A (ja) * | 2006-03-27 | 2007-10-11 | C Uyemura & Co Ltd | é»æ°ãã£ãæ¹æ³ |
JP5201315B2 (ja) * | 2007-09-26 | 2013-06-05 | äžæå·¥æ¥æ ªåŒäŒç€Ÿ | é»æ°ãã£ãæ¹æ³ |
JP4994422B2 (ja) | 2009-05-13 | 2012-08-08 | ãªãºã æèšå·¥æ¥æ ªåŒäŒç€Ÿ | æ€ç¥ã·ã¹ãã ãæ€ç¥ã·ã¹ãã ã®ä¿¡å·åŠçæ¹æ³ãããã³ãç æç¥åš |
JP5631775B2 (ja) * | 2011-02-24 | 2014-11-26 | æ°å é»æ°å·¥æ¥æ ªåŒäŒç€Ÿ | è€åãã£ã液 |
JP2014227570A (ja) * | 2013-05-22 | 2014-12-08 | æ¥æ±é»å·¥æ ªåŒäŒç€Ÿ | ç¡é»è§£ãã£ãæ¹æ³ãå€å±€åºæã®è£œé æ¹æ³ãå€å±€åºæããã³å ¥åè£ çœ® |
EP3061851A4 (en) * | 2013-10-25 | 2017-06-21 | OM Sangyo Co., Ltd. | Method for producing plated article |
KR101616194B1 (ko) * | 2014-09-03 | 2016-04-27 | ì°ìžëíêµ ì°ííë ¥ëš | ì ìžì ì¡°ëª ì ìŽì©í ê°ì²Ž ì¶ì¶ ë°©ë² ë° ê·ž ì¥ì¹ |
CN108468072B (zh) * | 2018-03-13 | 2020-05-05 | é¿åŸ·ææ³°å å šçæéå ¬åž | ééåéè«çœ©åå ¶å¶å€æ¹æ³ |
WO2019179897A1 (en) * | 2018-03-20 | 2019-09-26 | Aveni | Process for electrodeposition of cobalt |
FR3079242B1 (fr) * | 2018-03-20 | 2020-04-10 | Aveni | Procede d'electrodeposition de cobalt |
WO2019201623A2 (en) | 2018-04-19 | 2019-10-24 | Basf Se | Composition for cobalt or cobalt alloy electroplating |
-
1986
- 1986-01-10 JP JP305886A patent/JPS62109991A/ja active Granted
- 1986-01-10 JP JP305786A patent/JPS62103387A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62109991A (ja) | 1987-05-21 |
JPH0319309B2 (ja) | 1991-03-14 |
JPS62103387A (ja) | 1987-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2159268C (en) | Alkaline zinc and zinc alloy electroplating baths and processes | |
JPH0319308B2 (ja) | ||
JP4263363B2 (ja) | äºé被èãŸãã¯äºéåé被èã®ãã£ãå ç©ã®ããã®ã·ã¢ã³åç©ãå«ãŸãªãæ°Žæ§ã¢ã«ã«ãªæµŽ | |
US4889602A (en) | Electroplating bath and method for forming zinc-nickel alloy coating | |
CN101165220B (zh) | 硬éåéçµé济 | |
US4033835A (en) | Tin-nickel plating bath | |
JPS6362595B2 (ja) | ||
JP2001516400A (ja) | ã·ã¢ã³ãå«ãŸãªãïŒäŸ¡é é»æ°ãã£ã液 | |
US5552031A (en) | Palladium alloy plating compositions | |
JP3674887B2 (ja) | é âã¹ãºåéã¡ããçšãããªã³é žæµŽ | |
JPS62278293A (ja) | é»åéšåã®è£œé æ¹æ³ | |
US20040074775A1 (en) | Pulse reverse electrolysis of acidic copper electroplating solutions | |
JP3171117B2 (ja) | ããã±ã«ãã³ãã«ãåã¯ããã±ã«ã»ã³ãã«ãåéãšãªã³ãšã®åéãã£ã济åã³ãã£ãæ¹æ³ | |
JP5517164B2 (ja) | ãã¬ã«ãã£ãã«ããïŒäŸ¡ã¯ãã ãã£ãæ¹æ³ | |
JPS6141999B2 (ja) | ||
JP2769614B2 (ja) | äºéâããã±ã«åéçšãã€ã济 | |
JPH07233494A (ja) | éæåéé»æ°ãã£ã济 | |
JPS63114997A (ja) | é»æ°ãã€ãæ¹æ³ | |
JPH02301588A (ja) | é«ïŒéïŒé«âéåéé»æ°ãã£ã济åã³é»æ°ãã£ãæ¹æ³ | |
JP2003171781A (ja) | ããªã³ãé ç·æ¿çšé ç®åã³ãã®è£œé æ¹æ³ | |
JPH0222158B2 (ja) | ||
JP2560842B2 (ja) | èé£æ§ç®èã®è£œé æ¹æ³ | |
US4470886A (en) | Gold alloy electroplating bath and process | |
JPS6029483A (ja) | çŽéã¡ãã液 | |
JPH0319310B2 (ja) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |