JPH01242989A - テーブルの縦横移動旋回機構 - Google Patents

テーブルの縦横移動旋回機構

Info

Publication number
JPH01242989A
JPH01242989A JP63070625A JP7062588A JPH01242989A JP H01242989 A JPH01242989 A JP H01242989A JP 63070625 A JP63070625 A JP 63070625A JP 7062588 A JP7062588 A JP 7062588A JP H01242989 A JPH01242989 A JP H01242989A
Authority
JP
Japan
Prior art keywords
guide
longitudinal
movement
guide surfaces
horizontally moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63070625A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512678B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuya Hirose
和也 廣瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP63070625A priority Critical patent/JPH01242989A/ja
Priority to DE3909292A priority patent/DE3909292C2/de
Priority to US07/334,208 priority patent/US5031547A/en
Publication of JPH01242989A publication Critical patent/JPH01242989A/ja
Publication of JPH0512678B2 publication Critical patent/JPH0512678B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4852Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair
    • B23Q1/4866Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair followed perpendicularly by a single sliding pair
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • GPHYSICS
    • G12INSTRUMENT DETAILS
    • G12BCONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/20Control lever and linkage systems
    • Y10T74/20207Multiple controlling elements for single controlled element

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP63070625A 1988-03-24 1988-03-24 テーブルの縦横移動旋回機構 Granted JPH01242989A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP63070625A JPH01242989A (ja) 1988-03-24 1988-03-24 テーブルの縦横移動旋回機構
DE3909292A DE3909292C2 (de) 1988-03-24 1989-03-21 Längs- und Quer-Tischführungs- und -drehmechanismus
US07/334,208 US5031547A (en) 1988-03-24 1989-03-24 Mechanism for moving a table lengthwise and crosswise and for turning the table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63070625A JPH01242989A (ja) 1988-03-24 1988-03-24 テーブルの縦横移動旋回機構

Publications (2)

Publication Number Publication Date
JPH01242989A true JPH01242989A (ja) 1989-09-27
JPH0512678B2 JPH0512678B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-18

Family

ID=13436988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63070625A Granted JPH01242989A (ja) 1988-03-24 1988-03-24 テーブルの縦横移動旋回機構

Country Status (3)

Country Link
US (1) US5031547A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH01242989A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3909292C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03224006A (ja) * 1990-01-30 1991-10-03 Matsushita Electric Ind Co Ltd 数値制御装置
JPH03110399U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-02-28 1991-11-12
US6196138B1 (en) 1998-04-15 2001-03-06 Thk Co., Ltd Movable table unit
JP2007054953A (ja) * 2006-11-21 2007-03-08 Nsk Ltd 位置決め装置
JP2008138692A (ja) * 2006-11-30 2008-06-19 Hiihaisuto Seiko Kk 多自由度球面軸受
JP2010256298A (ja) * 2009-04-28 2010-11-11 Toshiba Teli Corp XYθステージ機構および引っ張りばねの脱着装置
CN107481767A (zh) * 2017-09-11 2017-12-15 河南理工大学 驱动组件及柔性精密定位平台

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2523177B2 (ja) * 1989-04-28 1996-08-07 日本写真印刷株式会社 位置決めテ―ブル
JPH03159148A (ja) * 1989-11-16 1991-07-09 Advantest Corp 位置決め装置及びこの位置決め装置を利用したic試験装置
DE4107881C2 (de) * 1990-03-13 1997-04-17 Ntn Toyo Bearing Co Ltd Verstellbarer Tisch
JP3158485B2 (ja) * 1991-04-23 2001-04-23 ソニー株式会社 陰極線管位置決め装置
DE4325450A1 (de) * 1993-07-29 1995-02-02 Bacher Graphische Geraete Gmbh Tischverstellvorrichtung
DE69500707T2 (de) * 1994-02-07 1998-02-12 Ushiodenki K.K., Tokio/Tokyo Haltevorrichtung
US6246204B1 (en) 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5548195A (en) * 1994-12-22 1996-08-20 International Business Machines Corporation Compensated servo control stage positioning apparatus
JPH08190430A (ja) * 1995-01-12 1996-07-23 Matsushita Electric Ind Co Ltd 位置決めテーブル
JP2940663B2 (ja) * 1995-12-01 1999-08-25 和也 廣瀬 ステージの縦横移動旋回支持機構
JP2759912B2 (ja) * 1996-02-07 1998-05-28 和也 廣瀬 多自由度テーブル機構用支持ユニット並びに多自由度テーブル機構
GB2343399B (en) * 1997-03-28 2001-04-18 Preco Ind Inc Web or sheet-fed apparatus having high-speed positioning mechanism
JPH11154698A (ja) * 1997-11-21 1999-06-08 Nikon Corp テーブル支持装置
DE19938791B4 (de) * 1999-08-16 2004-07-29 Erich Neumayer Gmbh & Co Kg Verfahren zur Herstellung einer gebauten Welle und Vorrichtung zur Durchführung dieses Verfahrens
JP2001328043A (ja) * 2000-05-24 2001-11-27 Harmonic Drive Syst Ind Co Ltd テーブル位置決め装置
US6463664B1 (en) * 2000-10-19 2002-10-15 Sandia Corporation Multi-axis planar slide system
DE10112978C2 (de) * 2001-03-17 2003-06-12 Karlsruhe Forschzent Transportable Feinjustiervorrichtung
JP4560235B2 (ja) * 2001-05-16 2010-10-13 日本トムソン株式会社 角度調整テーブル装置
US6824343B2 (en) * 2002-02-22 2004-11-30 Applied Materials, Inc. Substrate support
US6892652B2 (en) * 2002-08-19 2005-05-17 Branson Ultrasonics Corporation Self-adjusting dynamic floating fixture
JP4628012B2 (ja) * 2004-04-15 2011-02-09 津田駒工業株式会社 傾斜テーブル装置
US7240580B2 (en) * 2004-11-02 2007-07-10 Everman Michael R Single degree of freedom axis positioner
US7887239B2 (en) * 2005-08-31 2011-02-15 Thk Co., Ltd. Guide table device
DE102005053753A1 (de) * 2005-11-10 2007-05-16 Maquet Gmbh & Co Kg Hydraulische Säulenklemmung
DE102005053754A1 (de) 2005-11-10 2007-05-16 Maquet Gmbh & Co Kg Einrichtung zum Verstellen der Liegefläche eines Operationstisches
DE102005054230A1 (de) 2005-11-14 2007-05-24 Maquet Gmbh & Co. Kg Verfahren und Einrichtung zur bidirektionalen IR-Datenübertragung zwischen einem Operationstisch und einem Bediengerät
DE102005054222A1 (de) 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Operationstisch
DE102005054221A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Patientenlagersystem
DE102005054174A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Patientenlagerfläche für einen Operationstisch
DE102005054175A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Gelenkanordnung zur Verbindung zweier Segmente einer Patientenlagerfläche
DE102005054223A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Einrichtung zum Verstellen eines Operationstisches
DE102005054224A1 (de) * 2005-11-14 2007-05-16 Maquet Gmbh & Co Kg Patientenlagersystem
US7707907B2 (en) * 2005-11-17 2010-05-04 Socovar, Société En Commandite Planar parallel mechanism and method
US8141452B2 (en) * 2006-10-26 2012-03-27 Barry Lynn Wood Rotational motion-positioning apparatus
JP5175743B2 (ja) * 2006-12-14 2013-04-03 アイエス・テクノロジー・ジャパン株式会社 円板保持装置および欠陥異物検出装置
US8151660B2 (en) * 2007-02-23 2012-04-10 RPY Motion, Inc. Three axes rotational motion-positioning apparatus
TWI347469B (en) * 2007-04-27 2011-08-21 Hon Hai Prec Ind Co Ltd Fixation device and method for controlling thereof
US20090057520A1 (en) * 2007-09-05 2009-03-05 Makoto Tada Displacement Platform with a Precision Plane
US7607234B2 (en) * 2007-09-05 2009-10-27 Hiwin Mikrosystem Corp. Positive load alignment mechanism
DE102007047184A1 (de) * 2007-10-02 2009-04-09 Carl Zeiss Microimaging Gmbh Kreuzdrehtisch, insbesondere für Mikroskope
JP5208552B2 (ja) * 2008-03-27 2013-06-12 Necエンベデッドプロダクツ株式会社 位置決め冶具
US8556246B2 (en) * 2008-06-27 2013-10-15 Qem, Inc. Low-profile X-Y table
TW201013835A (en) * 2008-09-26 2010-04-01 Gudeng Prec Industral Co Ltd Sheet clamping apparatus
DE102011016288A1 (de) * 2011-04-07 2012-10-11 Gildemeister Drehmaschinen Gmbh Drehmaschine
US9082799B2 (en) * 2012-09-20 2015-07-14 Varian Semiconductor Equipment Associates, Inc. System and method for 2D workpiece alignment
CN103777383B (zh) * 2013-12-31 2016-06-08 深圳市华星光电技术有限公司 液晶基板配向检查系统
JP5819998B2 (ja) * 2014-01-29 2015-11-24 ファナック株式会社 二つの基準面にワークを位置決めするワーク位置決め装置
JP2015229211A (ja) * 2014-06-04 2015-12-21 日本精工株式会社 ワークの自動芯出し装置及び自動芯出し方法
US9715838B2 (en) * 2014-07-22 2017-07-25 Humanetics Innovative Solutions, Inc. Positioning table assembly for crash test dummy
DE102015208738B4 (de) * 2015-05-12 2018-11-08 Volkswagen Aktiengesellschaft Head-up-Display für ein Fahrzeug
FR3046451B1 (fr) * 2016-01-06 2018-07-06 Micro-Controle - Spectra-Physics Systeme de generation de deplacement d'une plaque de support selon six degres de liberte.
MX395162B (es) * 2016-08-30 2025-03-25 Hella Gmbh & Co Kgaa Dispositivo y metodo para junta de luna de faro con carcasa de equipo de iluminacion
US10612590B2 (en) 2018-01-24 2020-04-07 New-Field Energy, LLC Buoyancy-enhanced helical loop drive system
KR102217780B1 (ko) * 2018-06-12 2021-02-19 피에스케이홀딩스 (주) 정렬 장치
CN113210745B (zh) * 2021-05-19 2021-12-21 无锡市星达石化配件有限公司 一种法兰端面加工方法
CN115071644B (zh) * 2022-06-21 2024-10-01 中国科学院长春光学精密机械与物理研究所 一种车载光电测量设备对中机构
CN114905470B (zh) * 2022-07-19 2022-11-08 深圳市易天自动化设备股份有限公司 移动对位平台

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JPS62282294A (ja) * 1986-05-30 1987-12-08 松下電器産業株式会社 位置決めテ−プル

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US3270423A (en) * 1963-09-30 1966-09-06 Sheffield Corp Positioning device
US3744902A (en) * 1968-10-23 1973-07-10 Siemens Ag Device for producing a photo-varnish mask
US3849857A (en) * 1973-07-05 1974-11-26 M Murray Machine element alignment positioner
JPS5650517Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-02-09 1981-11-26
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JPS62282294A (ja) * 1986-05-30 1987-12-08 松下電器産業株式会社 位置決めテ−プル

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03224006A (ja) * 1990-01-30 1991-10-03 Matsushita Electric Ind Co Ltd 数値制御装置
JPH03110399U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-02-28 1991-11-12
US6196138B1 (en) 1998-04-15 2001-03-06 Thk Co., Ltd Movable table unit
JP2007054953A (ja) * 2006-11-21 2007-03-08 Nsk Ltd 位置決め装置
JP2008138692A (ja) * 2006-11-30 2008-06-19 Hiihaisuto Seiko Kk 多自由度球面軸受
JP2010256298A (ja) * 2009-04-28 2010-11-11 Toshiba Teli Corp XYθステージ機構および引っ張りばねの脱着装置
CN107481767A (zh) * 2017-09-11 2017-12-15 河南理工大学 驱动组件及柔性精密定位平台

Also Published As

Publication number Publication date
DE3909292A1 (de) 1989-10-26
JPH0512678B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-18
US5031547A (en) 1991-07-16
DE3909292C2 (de) 2000-06-21

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