JP7763476B2 - 流量制御装置、流量制御方法、流量制御装置の制御プログラム - Google Patents

流量制御装置、流量制御方法、流量制御装置の制御プログラム

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Publication number
JP7763476B2
JP7763476B2 JP2021519340A JP2021519340A JP7763476B2 JP 7763476 B2 JP7763476 B2 JP 7763476B2 JP 2021519340 A JP2021519340 A JP 2021519340A JP 2021519340 A JP2021519340 A JP 2021519340A JP 7763476 B2 JP7763476 B2 JP 7763476B2
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JP
Japan
Prior art keywords
flow rate
sensor
flow
filter
response adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021519340A
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English (en)
Japanese (ja)
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JPWO2020230574A1 (https=
Inventor
崇浩 野澤
剛 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of JPWO2020230574A1 publication Critical patent/JPWO2020230574A1/ja
Application granted granted Critical
Publication of JP7763476B2 publication Critical patent/JP7763476B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B6/00—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential
    • G05B6/02—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
JP2021519340A 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム Active JP7763476B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019091491 2019-05-14
JP2019091491 2019-05-14
PCT/JP2020/017480 WO2020230574A1 (ja) 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Publications (2)

Publication Number Publication Date
JPWO2020230574A1 JPWO2020230574A1 (https=) 2020-11-19
JP7763476B2 true JP7763476B2 (ja) 2025-11-04

Family

ID=73290189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021519340A Active JP7763476B2 (ja) 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Country Status (6)

Country Link
US (1) US12123760B2 (https=)
JP (1) JP7763476B2 (https=)
KR (1) KR102608260B1 (https=)
CN (1) CN113544620A (https=)
TW (1) TWI755704B (https=)
WO (1) WO2020230574A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12003626B2 (en) 2020-11-25 2024-06-04 Qubit Moving And Storage, Llc System and method of verification, authentication, and/or certification using entangled photons
KR20240007170A (ko) * 2021-05-13 2024-01-16 가부시키가이샤 호리바 에스텍 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005174082A (ja) 2003-12-12 2005-06-30 Yaskawa Electric Corp 位置決め制御装置
WO2006051589A1 (ja) 2004-11-11 2006-05-18 Hitachi, Ltd. 熱式流量測定装置
JP2009535716A (ja) 2006-04-28 2009-10-01 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 応答時間による適応閉ループ制御アルゴリズム
US20110015791A1 (en) 2009-07-14 2011-01-20 Advanced Energy Industries, Inc. Thermal mass flow sensor with improved response across fluid types
WO2013115298A1 (ja) 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム
JP2016513828A (ja) 2013-03-08 2016-05-16 日立金属株式会社 マスフローコントローラの改善された表示流量のためのシステム及び方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
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JP2802246B2 (ja) * 1995-06-29 1998-09-24 久 高橋 遅れ補償機能付流量制御弁
JP4030747B2 (ja) * 2001-11-19 2008-01-09 東芝機械株式会社 ロストモーション補正方法およびロストモーション補正装置
WO2004010234A2 (en) 2002-07-19 2004-01-29 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
US6963184B2 (en) 2002-09-26 2005-11-08 3M Innovative Properties Company Adaptable spatial notch filter
MX2007000685A (es) 2004-10-20 2007-03-30 Fisher Controls Int Arreglo de filtro de entrada de avance-retardo para ciclos de control electro-neumatico.
US20070255125A1 (en) 2006-04-28 2007-11-01 Moberg Sheldon B Monitor devices for networked fluid infusion systems
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
JP5499381B2 (ja) 2009-10-20 2014-05-21 日立金属株式会社 流量制御装置
WO2011067877A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧力式流量制御装置
KR101599343B1 (ko) * 2011-05-10 2016-03-03 가부시키가이샤 후지킨 유량 모니터 부착 압력식 유량 제어 장치
JP5847106B2 (ja) * 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
JP6475516B2 (ja) * 2015-02-26 2019-02-27 株式会社フジキン 圧力制御装置
JP7039176B2 (ja) * 2017-03-21 2022-03-22 株式会社日立産機システム 遅れ補償器のフィルタの設計方法、及びそれを用いたフィードバック制御方法、モータ制御装置
CN110431508A (zh) * 2017-03-28 2019-11-08 株式会社富士金 压力式流量控制裝置以及流量控制方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005174082A (ja) 2003-12-12 2005-06-30 Yaskawa Electric Corp 位置決め制御装置
WO2006051589A1 (ja) 2004-11-11 2006-05-18 Hitachi, Ltd. 熱式流量測定装置
JP2009535716A (ja) 2006-04-28 2009-10-01 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 応答時間による適応閉ループ制御アルゴリズム
US20110015791A1 (en) 2009-07-14 2011-01-20 Advanced Energy Industries, Inc. Thermal mass flow sensor with improved response across fluid types
WO2013115298A1 (ja) 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム
JP2016513828A (ja) 2013-03-08 2016-05-16 日立金属株式会社 マスフローコントローラの改善された表示流量のためのシステム及び方法

Also Published As

Publication number Publication date
TWI755704B (zh) 2022-02-21
JPWO2020230574A1 (https=) 2020-11-19
WO2020230574A1 (ja) 2020-11-19
TW202045847A (zh) 2020-12-16
KR20210124364A (ko) 2021-10-14
US12123760B2 (en) 2024-10-22
KR102608260B1 (ko) 2023-11-30
US20220307882A1 (en) 2022-09-29
CN113544620A (zh) 2021-10-22

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