JP7763476B2 - 流量制御装置、流量制御方法、流量制御装置の制御プログラム - Google Patents

流量制御装置、流量制御方法、流量制御装置の制御プログラム

Info

Publication number
JP7763476B2
JP7763476B2 JP2021519340A JP2021519340A JP7763476B2 JP 7763476 B2 JP7763476 B2 JP 7763476B2 JP 2021519340 A JP2021519340 A JP 2021519340A JP 2021519340 A JP2021519340 A JP 2021519340A JP 7763476 B2 JP7763476 B2 JP 7763476B2
Authority
JP
Japan
Prior art keywords
flow rate
sensor
flow
filter
response adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021519340A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2020230574A1 (https=
Inventor
崇浩 野澤
剛 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of JPWO2020230574A1 publication Critical patent/JPWO2020230574A1/ja
Application granted granted Critical
Publication of JP7763476B2 publication Critical patent/JP7763476B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B6/00—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential
    • G05B6/02—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
JP2021519340A 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム Active JP7763476B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019091491 2019-05-14
JP2019091491 2019-05-14
PCT/JP2020/017480 WO2020230574A1 (ja) 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Publications (2)

Publication Number Publication Date
JPWO2020230574A1 JPWO2020230574A1 (https=) 2020-11-19
JP7763476B2 true JP7763476B2 (ja) 2025-11-04

Family

ID=73290189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021519340A Active JP7763476B2 (ja) 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Country Status (6)

Country Link
US (1) US12123760B2 (https=)
JP (1) JP7763476B2 (https=)
KR (1) KR102608260B1 (https=)
CN (1) CN113544620A (https=)
TW (1) TWI755704B (https=)
WO (1) WO2020230574A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12003626B2 (en) 2020-11-25 2024-06-04 Qubit Moving And Storage, Llc System and method of verification, authentication, and/or certification using entangled photons
WO2022239447A1 (ja) * 2021-05-13 2022-11-17 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005174082A (ja) 2003-12-12 2005-06-30 Yaskawa Electric Corp 位置決め制御装置
WO2006051589A1 (ja) 2004-11-11 2006-05-18 Hitachi, Ltd. 熱式流量測定装置
JP2009535716A (ja) 2006-04-28 2009-10-01 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 応答時間による適応閉ループ制御アルゴリズム
US20110015791A1 (en) 2009-07-14 2011-01-20 Advanced Energy Industries, Inc. Thermal mass flow sensor with improved response across fluid types
WO2013115298A1 (ja) 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム
JP2016513828A (ja) 2013-03-08 2016-05-16 日立金属株式会社 マスフローコントローラの改善された表示流量のためのシステム及び方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2802246B2 (ja) * 1995-06-29 1998-09-24 久 高橋 遅れ補償機能付流量制御弁
JP4030747B2 (ja) * 2001-11-19 2008-01-09 東芝機械株式会社 ロストモーション補正方法およびロストモーション補正装置
KR20050031109A (ko) 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
US6963184B2 (en) * 2002-09-26 2005-11-08 3M Innovative Properties Company Adaptable spatial notch filter
MX2007000685A (es) 2004-10-20 2007-03-30 Fisher Controls Int Arreglo de filtro de entrada de avance-retardo para ciclos de control electro-neumatico.
US20070255125A1 (en) 2006-04-28 2007-11-01 Moberg Sheldon B Monitor devices for networked fluid infusion systems
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
JP5499381B2 (ja) 2009-10-20 2014-05-21 日立金属株式会社 流量制御装置
KR101375678B1 (ko) * 2009-12-01 2014-04-01 가부시키가이샤 후지킨 압력식 유량 제어 장치
WO2012153454A1 (ja) * 2011-05-10 2012-11-15 株式会社フジキン 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法
JP5847106B2 (ja) * 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
JP6475516B2 (ja) * 2015-02-26 2019-02-27 株式会社フジキン 圧力制御装置
JP7039176B2 (ja) * 2017-03-21 2022-03-22 株式会社日立産機システム 遅れ補償器のフィルタの設計方法、及びそれを用いたフィードバック制御方法、モータ制御装置
KR102250967B1 (ko) * 2017-03-28 2021-05-12 가부시키가이샤 후지킨 압력식 유량 제어 장치 및 유량 제어 방법

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005174082A (ja) 2003-12-12 2005-06-30 Yaskawa Electric Corp 位置決め制御装置
WO2006051589A1 (ja) 2004-11-11 2006-05-18 Hitachi, Ltd. 熱式流量測定装置
JP2009535716A (ja) 2006-04-28 2009-10-01 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 応答時間による適応閉ループ制御アルゴリズム
US20110015791A1 (en) 2009-07-14 2011-01-20 Advanced Energy Industries, Inc. Thermal mass flow sensor with improved response across fluid types
WO2013115298A1 (ja) 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム
JP2016513828A (ja) 2013-03-08 2016-05-16 日立金属株式会社 マスフローコントローラの改善された表示流量のためのシステム及び方法

Also Published As

Publication number Publication date
WO2020230574A1 (ja) 2020-11-19
CN113544620A (zh) 2021-10-22
TWI755704B (zh) 2022-02-21
KR20210124364A (ko) 2021-10-14
JPWO2020230574A1 (https=) 2020-11-19
TW202045847A (zh) 2020-12-16
KR102608260B1 (ko) 2023-11-30
US20220307882A1 (en) 2022-09-29
US12123760B2 (en) 2024-10-22

Similar Documents

Publication Publication Date Title
KR101722304B1 (ko) 매스 플로우 컨트롤러
JP4528617B2 (ja) マスフローコントローラにおける圧力補償のための方法および装置
KR102384035B1 (ko) 유량 제어 장치, 유량 제어 장치용 프로그램을 기억한 기억 매체 및 유량 제어 방법
US7905139B2 (en) Mass flow controller with improved dynamic
US8195312B2 (en) Multi-mode control loop with improved performance for mass flow controller
JPH1145122A (ja) 動的ガス流コントローラ
CN114063658A (zh) 流量控制装置、流量控制方法和程序存储介质
CN101454735A (zh) 自适应响应时间闭环控制算法
JP7763476B2 (ja) 流量制御装置、流量制御方法、流量制御装置の制御プログラム
WO2001004717A1 (en) System and method for a variable gain proportional-integral (pi) controller
KR20120093788A (ko) 유체제어장치 및 압력제어장치
JP2020013269A (ja) 流量制御装置
JP2023080611A (ja) 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
JP7531881B2 (ja) 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム
US8056579B2 (en) Mass flow controller
JP3893115B2 (ja) マスフローコントローラ
KR20180051520A (ko) 질량 유량 제어 장치
JP7262745B2 (ja) マスフローコントローラ
JP6799862B2 (ja) 流量信号補正方法およびこれを用いた流量制御装置
JP2002082722A (ja) 質量流量制御装置
JP7194421B2 (ja) 流量制御装置および流量制御方法
JP2012168824A (ja) 流体制御装置
JP3523974B2 (ja) 流体圧力制御装置
JP5868815B2 (ja) 流量制御装置
JP2004013249A (ja) ガス供給システム

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230411

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240112

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20240328

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240610

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20240618

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20240802

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20251015

R150 Certificate of patent or registration of utility model

Ref document number: 7763476

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150