KR102608260B1 - 유량 제어 장치, 유량 제어 방법, 기록 매체 - Google Patents

유량 제어 장치, 유량 제어 방법, 기록 매체 Download PDF

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Publication number
KR102608260B1
KR102608260B1 KR1020217028217A KR20217028217A KR102608260B1 KR 102608260 B1 KR102608260 B1 KR 102608260B1 KR 1020217028217 A KR1020217028217 A KR 1020217028217A KR 20217028217 A KR20217028217 A KR 20217028217A KR 102608260 B1 KR102608260 B1 KR 102608260B1
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KR
South Korea
Prior art keywords
flow rate
sensor
flow
response adjustment
filter
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KR1020217028217A
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English (en)
Korean (ko)
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KR20210124364A (ko
Inventor
타카히로 노자와
타케시 나카무라
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가부시키가이샤 후지킨
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B6/00—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential
    • G05B6/02—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
KR1020217028217A 2019-05-14 2020-04-23 유량 제어 장치, 유량 제어 방법, 기록 매체 Active KR102608260B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019091491 2019-05-14
JPJP-P-2019-091491 2019-05-14
PCT/JP2020/017480 WO2020230574A1 (ja) 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Publications (2)

Publication Number Publication Date
KR20210124364A KR20210124364A (ko) 2021-10-14
KR102608260B1 true KR102608260B1 (ko) 2023-11-30

Family

ID=73290189

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217028217A Active KR102608260B1 (ko) 2019-05-14 2020-04-23 유량 제어 장치, 유량 제어 방법, 기록 매체

Country Status (6)

Country Link
US (1) US12123760B2 (https=)
JP (1) JP7763476B2 (https=)
KR (1) KR102608260B1 (https=)
CN (1) CN113544620A (https=)
TW (1) TWI755704B (https=)
WO (1) WO2020230574A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12003626B2 (en) 2020-11-25 2024-06-04 Qubit Moving And Storage, Llc System and method of verification, authentication, and/or certification using entangled photons
WO2022239447A1 (ja) * 2021-05-13 2022-11-17 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008517404A (ja) * 2004-10-20 2008-05-22 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー 電空制御ループのためのリード・ラグ入力フィルタ装置
WO2013115298A1 (ja) * 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2802246B2 (ja) * 1995-06-29 1998-09-24 久 高橋 遅れ補償機能付流量制御弁
JP4030747B2 (ja) * 2001-11-19 2008-01-09 東芝機械株式会社 ロストモーション補正方法およびロストモーション補正装置
KR20050031109A (ko) 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
US6963184B2 (en) * 2002-09-26 2005-11-08 3M Innovative Properties Company Adaptable spatial notch filter
JP2005174082A (ja) 2003-12-12 2005-06-30 Yaskawa Electric Corp 位置決め制御装置
JP4602973B2 (ja) 2004-11-11 2010-12-22 日立オートモティブシステムズ株式会社 熱式流量測定装置
US7603186B2 (en) 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US20070255125A1 (en) 2006-04-28 2007-11-01 Moberg Sheldon B Monitor devices for networked fluid infusion systems
US8160833B2 (en) 2009-07-14 2012-04-17 Hitachi Metals, Ltd Thermal mass flow sensor with improved response across fluid types
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
JP5499381B2 (ja) 2009-10-20 2014-05-21 日立金属株式会社 流量制御装置
KR101375678B1 (ko) * 2009-12-01 2014-04-01 가부시키가이샤 후지킨 압력식 유량 제어 장치
WO2012153454A1 (ja) * 2011-05-10 2012-11-15 株式会社フジキン 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法
US10473500B2 (en) 2013-03-08 2019-11-12 Hitachi Metals, Ltd. System and method for improved indicated flow in mass flow controllers
JP5847106B2 (ja) * 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
JP6475516B2 (ja) * 2015-02-26 2019-02-27 株式会社フジキン 圧力制御装置
JP7039176B2 (ja) * 2017-03-21 2022-03-22 株式会社日立産機システム 遅れ補償器のフィルタの設計方法、及びそれを用いたフィードバック制御方法、モータ制御装置
KR102250967B1 (ko) * 2017-03-28 2021-05-12 가부시키가이샤 후지킨 압력식 유량 제어 장치 및 유량 제어 방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008517404A (ja) * 2004-10-20 2008-05-22 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー 電空制御ループのためのリード・ラグ入力フィルタ装置
WO2013115298A1 (ja) * 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム

Also Published As

Publication number Publication date
WO2020230574A1 (ja) 2020-11-19
CN113544620A (zh) 2021-10-22
TWI755704B (zh) 2022-02-21
KR20210124364A (ko) 2021-10-14
JPWO2020230574A1 (https=) 2020-11-19
TW202045847A (zh) 2020-12-16
US20220307882A1 (en) 2022-09-29
US12123760B2 (en) 2024-10-22
JP7763476B2 (ja) 2025-11-04

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