CN113544620A - 流量控制装置、流量控制方法、流量控制装置的控制程序 - Google Patents

流量控制装置、流量控制方法、流量控制装置的控制程序 Download PDF

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Publication number
CN113544620A
CN113544620A CN202080018374.XA CN202080018374A CN113544620A CN 113544620 A CN113544620 A CN 113544620A CN 202080018374 A CN202080018374 A CN 202080018374A CN 113544620 A CN113544620 A CN 113544620A
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CN
China
Prior art keywords
flow rate
flow
sensor
control device
sensitivity adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080018374.XA
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English (en)
Chinese (zh)
Inventor
野泽崇浩
中村刚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
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Fujikin Inc
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Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of CN113544620A publication Critical patent/CN113544620A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B6/00—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential
    • G05B6/02—Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
CN202080018374.XA 2019-05-14 2020-04-23 流量控制装置、流量控制方法、流量控制装置的控制程序 Pending CN113544620A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019091491 2019-05-14
JP2019-091491 2019-05-14
PCT/JP2020/017480 WO2020230574A1 (ja) 2019-05-14 2020-04-23 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Publications (1)

Publication Number Publication Date
CN113544620A true CN113544620A (zh) 2021-10-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080018374.XA Pending CN113544620A (zh) 2019-05-14 2020-04-23 流量控制装置、流量控制方法、流量控制装置的控制程序

Country Status (6)

Country Link
US (1) US12123760B2 (https=)
JP (1) JP7763476B2 (https=)
KR (1) KR102608260B1 (https=)
CN (1) CN113544620A (https=)
TW (1) TWI755704B (https=)
WO (1) WO2020230574A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12003626B2 (en) 2020-11-25 2024-06-04 Qubit Moving And Storage, Llc System and method of verification, authentication, and/or certification using entangled photons
KR20240007170A (ko) * 2021-05-13 2024-01-16 가부시키가이샤 호리바 에스텍 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0916268A (ja) * 1995-06-29 1997-01-17 Hisashi Takahashi 遅れ補償機能付流量制御弁
JP2003157114A (ja) * 2001-11-19 2003-05-30 Toshiba Mach Co Ltd ロストモーション補正方法およびロストモーション補正装置
CN103518165A (zh) * 2011-05-10 2014-01-15 株式会社富士金 带有流量监测器的压力式流量控制装置
CN104220946A (zh) * 2012-02-03 2014-12-17 日立金属株式会社 流量控制装置以及程序

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004010234A2 (en) 2002-07-19 2004-01-29 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
US6963184B2 (en) 2002-09-26 2005-11-08 3M Innovative Properties Company Adaptable spatial notch filter
JP2005174082A (ja) 2003-12-12 2005-06-30 Yaskawa Electric Corp 位置決め制御装置
MX2007000685A (es) 2004-10-20 2007-03-30 Fisher Controls Int Arreglo de filtro de entrada de avance-retardo para ciclos de control electro-neumatico.
US7613582B2 (en) 2004-11-11 2009-11-03 Hitachi, Ltd. Thermal type flow rate measurement apparatus
US7603186B2 (en) 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US20070255125A1 (en) 2006-04-28 2007-11-01 Moberg Sheldon B Monitor devices for networked fluid infusion systems
US8160833B2 (en) 2009-07-14 2012-04-17 Hitachi Metals, Ltd Thermal mass flow sensor with improved response across fluid types
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
JP5499381B2 (ja) 2009-10-20 2014-05-21 日立金属株式会社 流量制御装置
WO2011067877A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧力式流量制御装置
US10473500B2 (en) 2013-03-08 2019-11-12 Hitachi Metals, Ltd. System and method for improved indicated flow in mass flow controllers
JP5847106B2 (ja) * 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
JP6475516B2 (ja) * 2015-02-26 2019-02-27 株式会社フジキン 圧力制御装置
JP7039176B2 (ja) * 2017-03-21 2022-03-22 株式会社日立産機システム 遅れ補償器のフィルタの設計方法、及びそれを用いたフィードバック制御方法、モータ制御装置
CN110431508A (zh) * 2017-03-28 2019-11-08 株式会社富士金 压力式流量控制裝置以及流量控制方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0916268A (ja) * 1995-06-29 1997-01-17 Hisashi Takahashi 遅れ補償機能付流量制御弁
JP2003157114A (ja) * 2001-11-19 2003-05-30 Toshiba Mach Co Ltd ロストモーション補正方法およびロストモーション補正装置
CN103518165A (zh) * 2011-05-10 2014-01-15 株式会社富士金 带有流量监测器的压力式流量控制装置
CN104220946A (zh) * 2012-02-03 2014-12-17 日立金属株式会社 流量控制装置以及程序

Also Published As

Publication number Publication date
TWI755704B (zh) 2022-02-21
JPWO2020230574A1 (https=) 2020-11-19
JP7763476B2 (ja) 2025-11-04
WO2020230574A1 (ja) 2020-11-19
TW202045847A (zh) 2020-12-16
KR20210124364A (ko) 2021-10-14
US12123760B2 (en) 2024-10-22
KR102608260B1 (ko) 2023-11-30
US20220307882A1 (en) 2022-09-29

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Application publication date: 20211022