JP7360368B2 - 樹脂成形装置及び樹脂成形品の製造方法 - Google Patents
樹脂成形装置及び樹脂成形品の製造方法 Download PDFInfo
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B29C2043/3433—Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Description
また、本発明に係る樹脂成形品の製造方法は、キャビティを形成する成形型に基板を搬送し、前記キャビティに対して直接的に開口する開口部が形成されたポットに樹脂材料を搬送した後に、成形型を型締めする型締め工程と、前記型締め工程の後に、前記ポット内に収容された樹脂材料をプランジャで押し出すことによって、前記開口部を介して樹脂材料を前記キャビティに向けて移送する移送工程と、を含み、前記移送工程では、前記プランジャの外径と同一、又は前記プランジャの外径よりも大きい内径を有する前記開口部を介して、樹脂材料が移送され、前記型締め工程より前に、前記基板のうち前記開口部と対向する部分に離型層を形成する離型層形成工程をさらに含むものである。
また、本発明に係る樹脂成形品の製造方法は、キャビティを形成する成形型に基板を搬送し、前記キャビティに対して直接的に開口する開口部が形成されたポットに樹脂材料を搬送した後に、成形型を型締めする型締め工程と、前記型締め工程の後に、前記ポット内に収容された樹脂材料をプランジャで押し出すことによって、前記開口部を介して樹脂材料を前記キャビティに向けて移送する移送工程と、を含み、前記移送工程では、前記プランジャの外径と同一、又は前記プランジャの外径よりも大きい内径を有する前記開口部を介して、樹脂材料が移送され、前記型締め工程より前に、前記開口部に対応する位置に貫通孔が形成された離型フィルムを前記成形型に配置するフィルム配置工程をさらに含むものである。
キャビティ110Cを形成する成形型110と、
前記成形型110に設けられ、樹脂材料を収容可能であり、前記キャビティ110Cに対して直接的に開口する開口部131aが形成されたポット131と、
前記ポット131内を摺動可能となるように設けられ、前記ポット131に収容された樹脂材料を押し出すことにより、前記開口部131aを介して樹脂材料を前記キャビティ110Cに向けて移送するプランジャ132と、
を具備し、
前記開口部131aの内径は、前記プランジャ132の外径と同一、又は前記プランジャの外径よりも大きく形成されている。
キャビティ110Cを形成する成形型110に基板10を搬送し、前記キャビティ110Cに対して直接的に開口する開口部131aが形成されたポット131に樹脂材料を搬送した後に、成形型110を型締めする型締め工程S40と、
前記型締め工程S40の後に、前記ポット131内に収容された樹脂材料をプランジャ132で押し出すことによって、前記開口部131aを介して樹脂材料を前記キャビティ110Cに向けて移送する移送工程S50と、
を含み、
前記移送工程S50では、前記プランジャ132の外径と同一、又は前記プランジャ132の外径よりも大きい内径を有する前記開口部131aを介して、樹脂材料が移送されるものである。
12 離型層
20 離型フィルム
21 貫通孔
100 樹脂成形装置
110 成形型
110C キャビティ
112b 空気排出溝
113 第一吸着部
120 型締め機構
130 樹脂注入機構
131 ポット
131a 開口部
132 プランジャ
150 押圧部材
151 連通溝
Claims (9)
- キャビティを形成する成形型と、
前記成形型に設けられ、樹脂材料を収容可能であり、前記キャビティに対して直接的に開口する開口部が形成されたポットと、
前記ポット内を摺動可能となるように設けられ、前記ポットに収容された樹脂材料を押し出すことにより、前記開口部を介して樹脂材料を前記キャビティに向けて移送するプランジャと、
を具備し、
前記開口部の内径は、前記プランジャの外径と同一、又は前記プランジャの外径よりも大きく形成され、
前記成形型は、前記開口部に対向する位置に貫通孔が形成された離型フィルムのうち前記貫通孔の周囲の部分を吸着する吸着部を具備する、
樹脂成形装置。 - 前記離型フィルムにおける前記貫通孔の周囲の一部又は全部を、前記成形型から剥離しないように押さえる押圧部材をさらに具備する、
請求項1に記載の樹脂成形装置。 - 前記押圧部材は、前記貫通孔の周囲を囲む環状に形成されると共に、内周面と外周面とを連通する放射状の連通部を具備する、
請求項2に記載の樹脂成形装置。 - 前記ポットは、前記キャビティの中央部に設けられている、
請求項1から請求項3までのいずれか一項に記載の樹脂成形装置。 - 前記成形型は、前記キャビティの外周部から前記キャビティ内の空気を外部へ排出可能な空気排出部を具備する、
請求項4に記載の樹脂成形装置。 - 請求項1から請求項5までのいずれか一項に記載の樹脂成形装置を用いて樹脂成形品を製造する樹脂成形品の製造方法。
- キャビティを形成する成形型に基板を搬送し、前記キャビティに対して直接的に開口する開口部が形成されたポットに樹脂材料を搬送した後に、成形型を型締めする型締め工程と、
前記型締め工程の後に、前記ポット内に収容された樹脂材料をプランジャで押し出すことによって、前記開口部を介して樹脂材料を前記キャビティに向けて移送する移送工程と、
を含み、
前記移送工程では、前記プランジャの外径と同一、又は前記プランジャの外径よりも大きい内径を有する前記開口部を介して、樹脂材料が移送され、
前記移送工程の後に、前記基板のうち前記開口部と対向する部分に形成された不要部分を除去する除去工程をさらに含む、
樹脂成形品の製造方法。 - キャビティを形成する成形型に基板を搬送し、前記キャビティに対して直接的に開口する開口部が形成されたポットに樹脂材料を搬送した後に、成形型を型締めする型締め工程と、
前記型締め工程の後に、前記ポット内に収容された樹脂材料をプランジャで押し出すことによって、前記開口部を介して樹脂材料を前記キャビティに向けて移送する移送工程と、
を含み、
前記移送工程では、前記プランジャの外径と同一、又は前記プランジャの外径よりも大きい内径を有する前記開口部を介して、樹脂材料が移送され、
前記型締め工程より前に、前記基板のうち前記開口部と対向する部分に離型層を形成する離型層形成工程をさらに含む、
樹脂成形品の製造方法。 - キャビティを形成する成形型に基板を搬送し、前記キャビティに対して直接的に開口する開口部が形成されたポットに樹脂材料を搬送した後に、成形型を型締めする型締め工程と、
前記型締め工程の後に、前記ポット内に収容された樹脂材料をプランジャで押し出すことによって、前記開口部を介して樹脂材料を前記キャビティに向けて移送する移送工程と、
を含み、
前記移送工程では、前記プランジャの外径と同一、又は前記プランジャの外径よりも大きい内径を有する前記開口部を介して、樹脂材料が移送され、
前記型締め工程より前に、前記開口部に対応する位置に貫通孔が形成された離型フィルムを前記成形型に配置するフィルム配置工程をさらに含む、
樹脂成形品の製造方法。
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JP2001326238A (ja) | 2000-05-17 | 2001-11-22 | Toshiba Corp | 半導体装置、半導体装置の製造方法、樹脂封止金型及び半導体製造システム |
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JPH11204558A (ja) * | 1998-01-12 | 1999-07-30 | Apic Yamada Corp | 半導体装置製造用基板の樹脂封止方法 |
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JP2007242924A (ja) * | 2006-03-09 | 2007-09-20 | Renesas Technology Corp | 半導体装置の製造方法 |
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JP2001326238A (ja) | 2000-05-17 | 2001-11-22 | Toshiba Corp | 半導体装置、半導体装置の製造方法、樹脂封止金型及び半導体製造システム |
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