JP7352754B2 - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
- Publication number
- JP7352754B2 JP7352754B2 JP2022557285A JP2022557285A JP7352754B2 JP 7352754 B2 JP7352754 B2 JP 7352754B2 JP 2022557285 A JP2022557285 A JP 2022557285A JP 2022557285 A JP2022557285 A JP 2022557285A JP 7352754 B2 JP7352754 B2 JP 7352754B2
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- Prior art keywords
- conductive
- resin
- semiconductor element
- semiconductor
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
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- H10W90/00—Package configurations
- H10W90/811—Multiple chips on leadframes
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- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
- H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
- B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
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- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
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- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
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- H10W74/01—Manufacture or treatment
- H10W74/016—Manufacture or treatment using moulds
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- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
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- H10W90/10—Configurations of laterally-adjacent chips
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- H10W99/00—Subject matter not provided for in other groups of this subclass
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- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/20—Arrangements for cooling
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- H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
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- H10W72/07631—Techniques
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/321—Structures or relative sizes of die-attach connectors
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- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
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- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/547—Dispositions of multiple bond wires
- H10W72/5473—Dispositions of multiple bond wires multiple bond wires connected to a common bond pad
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
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- H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
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- H10W72/00—Interconnections or connectors in packages
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
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- H10W72/5525—Materials of bond wires comprising metals or metalloids, e.g. silver comprising copper [Cu]
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/59—Bond pads specially adapted therefor
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/00—Interconnections or connectors in packages
- H10W72/60—Strap connectors, e.g. thick copper clips for grounding of power devices
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- H10W72/00—Interconnections or connectors in packages
- H10W72/60—Strap connectors, e.g. thick copper clips for grounding of power devices
- H10W72/691—Bond pads specially adapted therefor
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
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- H—ELECTRICITY
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
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- H—ELECTRICITY
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/761—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
- H10W90/764—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between a chip and a stacked insulating package substrate, interposer or RDL
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Inverter Devices (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023126991A JP7352763B1 (ja) | 2020-10-14 | 2023-08-03 | 半導体モジュール |
| JP2023150336A JP7411849B2 (ja) | 2020-10-14 | 2023-09-15 | 半導体モジュール |
| JP2023218317A JP7708844B2 (ja) | 2020-10-14 | 2023-12-25 | 半導体モジュール |
| JP2025112970A JP7731523B1 (ja) | 2020-10-14 | 2025-07-03 | 半導体モジュール |
| JP2025136571A JP7757566B1 (ja) | 2020-10-14 | 2025-08-19 | 半導体モジュール |
| JP2025170316A JP7776695B1 (ja) | 2020-10-14 | 2025-10-08 | 半導体モジュール |
| JP2025194203A JP7795042B1 (ja) | 2020-10-14 | 2025-11-13 | 半導体モジュール |
| JP2025265824A JP2026048909A (ja) | 2020-10-14 | 2025-12-18 | 半導体モジュール |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020173335 | 2020-10-14 | ||
| JP2020173335 | 2020-10-14 | ||
| PCT/JP2021/033676 WO2022080063A1 (ja) | 2020-10-14 | 2021-09-14 | 半導体モジュール |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023126991A Division JP7352763B1 (ja) | 2020-10-14 | 2023-08-03 | 半導体モジュール |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022080063A1 JPWO2022080063A1 (https=) | 2022-04-21 |
| JP7352754B2 true JP7352754B2 (ja) | 2023-09-28 |
Family
ID=81208361
Family Applications (9)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022557285A Active JP7352754B2 (ja) | 2020-10-14 | 2021-09-14 | 半導体モジュール |
| JP2023126991A Active JP7352763B1 (ja) | 2020-10-14 | 2023-08-03 | 半導体モジュール |
| JP2023150336A Active JP7411849B2 (ja) | 2020-10-14 | 2023-09-15 | 半導体モジュール |
| JP2023218317A Active JP7708844B2 (ja) | 2020-10-14 | 2023-12-25 | 半導体モジュール |
| JP2025112970A Active JP7731523B1 (ja) | 2020-10-14 | 2025-07-03 | 半導体モジュール |
| JP2025136571A Active JP7757566B1 (ja) | 2020-10-14 | 2025-08-19 | 半導体モジュール |
| JP2025170316A Active JP7776695B1 (ja) | 2020-10-14 | 2025-10-08 | 半導体モジュール |
| JP2025194203A Active JP7795042B1 (ja) | 2020-10-14 | 2025-11-13 | 半導体モジュール |
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| US20240290697A1 (en) * | 2023-02-24 | 2024-08-29 | Sentec E&E Co., Ltd. | Power module and manufacturing method and mold thereof |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008124522A (ja) | 2008-02-21 | 2008-05-29 | Fuji Electric Fa Components & Systems Co Ltd | 樹脂封止型半導体装置の設置方法 |
| JP2014123618A (ja) | 2012-12-20 | 2014-07-03 | Mitsubishi Electric Corp | 半導体モジュール、その製造方法およびその接続方法 |
| JP2015053241A (ja) | 2013-09-09 | 2015-03-19 | 新電元工業株式会社 | 半導体装置の端子案内部材、半導体装置及び半導体装置の製造方法 |
| JP2017108187A (ja) | 2012-07-19 | 2017-06-15 | 三菱電機株式会社 | 電力用半導体モジュール |
| WO2018047659A1 (ja) | 2016-09-07 | 2018-03-15 | 三菱電機株式会社 | 電力用半導体装置 |
| JP2020072106A (ja) | 2018-10-29 | 2020-05-07 | ローム株式会社 | 半導体装置 |
Family Cites Families (75)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927563A (ja) * | 1982-08-07 | 1984-02-14 | Mitsubishi Electric Corp | 半導体装置 |
| JP2993278B2 (ja) | 1992-06-26 | 1999-12-20 | 富士電機株式会社 | 半導体装置 |
| US5408141A (en) | 1993-01-04 | 1995-04-18 | Texas Instruments Incorporated | Sensed current driving device |
| US5544412A (en) | 1994-05-24 | 1996-08-13 | Motorola, Inc. | Method for coupling a power lead to a bond pad in an electronic module |
| US5532512A (en) | 1994-10-03 | 1996-07-02 | General Electric Company | Direct stacked and flip chip power semiconductor device structures |
| JPH09148523A (ja) | 1995-11-21 | 1997-06-06 | Toshiba Corp | 半導体装置 |
| JPH104167A (ja) * | 1996-06-18 | 1998-01-06 | Toshiba Corp | 半導体装置 |
| JP3491481B2 (ja) | 1996-08-20 | 2004-01-26 | 株式会社日立製作所 | 半導体装置とその製造方法 |
| TW408453B (en) * | 1997-12-08 | 2000-10-11 | Toshiba Kk | Package for semiconductor power device and method for assembling the same |
| JP3547333B2 (ja) | 1999-02-22 | 2004-07-28 | 株式会社日立産機システム | 電力変換装置 |
| JP4220094B2 (ja) | 1999-04-05 | 2009-02-04 | 三菱電機株式会社 | パワー半導体モジュール |
| JP3630070B2 (ja) | 2000-03-30 | 2005-03-16 | 株式会社デンソー | 半導体チップおよび半導体装置 |
| US6703703B2 (en) | 2000-01-12 | 2004-03-09 | International Rectifier Corporation | Low cost power semiconductor module without substrate |
| JP4177571B2 (ja) | 2001-09-20 | 2008-11-05 | 三菱電機株式会社 | 半導体装置 |
| DE10231091A1 (de) | 2002-07-10 | 2004-01-22 | Robert Bosch Gmbh | Aktivgleichrichter-Modul für Drehstromgeneratoren von Fahrzeugen |
| JP2004107728A (ja) | 2002-09-18 | 2004-04-08 | Ebara Corp | 接合材料及び接合方法 |
| JP4007143B2 (ja) * | 2002-10-09 | 2007-11-14 | 日産自動車株式会社 | 電子部品、電子部品の製造方法及び製造装置 |
| US6992283B2 (en) | 2003-06-06 | 2006-01-31 | Micromass Uk Limited | Mass spectrometer |
| JP2005116556A (ja) * | 2003-10-02 | 2005-04-28 | Fuji Electric Fa Components & Systems Co Ltd | 樹脂封止型半導体装置の製造方法および設置方法 |
| JP2005136264A (ja) | 2003-10-31 | 2005-05-26 | Mitsubishi Electric Corp | 電力用半導体装置及び電力用半導体モジュール |
| JP4004460B2 (ja) | 2003-12-16 | 2007-11-07 | 三菱電機株式会社 | 半導体装置 |
| JP4196001B2 (ja) | 2004-02-17 | 2008-12-17 | パナソニック株式会社 | 半導体パワーモジュール |
| JP2006108247A (ja) | 2004-10-01 | 2006-04-20 | Ryosan Co Ltd | 液冷ヒートシンク |
| JP2006190972A (ja) | 2004-12-08 | 2006-07-20 | Mitsubishi Electric Corp | 電力用半導体装置 |
| US7262444B2 (en) | 2005-08-17 | 2007-08-28 | General Electric Company | Power semiconductor packaging method and structure |
| JP4429251B2 (ja) | 2005-10-17 | 2010-03-10 | 三菱電機株式会社 | 電力変換装置 |
| JP4450230B2 (ja) | 2005-12-26 | 2010-04-14 | 株式会社デンソー | 半導体装置 |
| US8680666B2 (en) | 2006-05-24 | 2014-03-25 | International Rectifier Corporation | Bond wireless power module with double-sided single device cooling and immersion bath cooling |
| CN101819965B (zh) | 2006-06-09 | 2013-01-16 | 本田技研工业株式会社 | 半导体装置 |
| JP5076440B2 (ja) | 2006-10-16 | 2012-11-21 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP5252819B2 (ja) | 2007-03-26 | 2013-07-31 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| US7759777B2 (en) | 2007-04-16 | 2010-07-20 | Infineon Technologies Ag | Semiconductor module |
| JP4924411B2 (ja) | 2007-12-27 | 2012-04-25 | 三菱電機株式会社 | 電力半導体装置 |
| EP2340560B1 (en) | 2008-01-25 | 2013-07-10 | Letrika Lab d.o.o. | Power switching module |
| JP2009200416A (ja) | 2008-02-25 | 2009-09-03 | Mitsubishi Electric Corp | 半導体装置および半導体装置の製造方法 |
| JP4576448B2 (ja) | 2008-07-18 | 2010-11-10 | 三菱電機株式会社 | 電力用半導体装置 |
| JP4634498B2 (ja) | 2008-11-28 | 2011-02-16 | 三菱電機株式会社 | 電力用半導体モジュール |
| JP4766162B2 (ja) | 2009-08-06 | 2011-09-07 | オムロン株式会社 | パワーモジュール |
| JP2011086889A (ja) | 2009-10-19 | 2011-04-28 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
| JP2011160173A (ja) * | 2010-02-01 | 2011-08-18 | Seiko Epson Corp | 圧電振動子、及び圧電発振器 |
| CN102802846B (zh) | 2010-03-15 | 2017-05-24 | 同和电子科技有限公司 | 接合材料及使用其的接合方法 |
| JP2011238645A (ja) | 2010-05-06 | 2011-11-24 | Denso Corp | パワー半導体モジュール |
| JP5319601B2 (ja) | 2010-05-10 | 2013-10-16 | 株式会社東芝 | 半導体装置及び電力用半導体装置 |
| JP5253455B2 (ja) | 2010-06-01 | 2013-07-31 | 三菱電機株式会社 | パワー半導体装置 |
| JP5858914B2 (ja) | 2010-08-04 | 2016-02-10 | ローム株式会社 | パワーモジュールおよび出力回路 |
| JP5819052B2 (ja) * | 2010-09-09 | 2015-11-18 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
| JP5601376B2 (ja) | 2010-12-01 | 2014-10-08 | 株式会社安川電機 | 電力変換装置 |
| JP5464159B2 (ja) | 2011-03-08 | 2014-04-09 | 三菱電機株式会社 | パワーモジュール |
| JP5287919B2 (ja) | 2011-04-01 | 2013-09-11 | トヨタ自動車株式会社 | ヒートシンク、およびヒートシンク付き電子部品 |
| JP5602095B2 (ja) | 2011-06-09 | 2014-10-08 | 三菱電機株式会社 | 半導体装置 |
| JP5642022B2 (ja) | 2011-06-17 | 2014-12-17 | カルソニックカンセイ株式会社 | 半導体装置および半導体装置の製造方法 |
| JP2013183023A (ja) | 2012-03-01 | 2013-09-12 | Toyota Industries Corp | 電力変換装置 |
| JP2013258387A (ja) | 2012-05-15 | 2013-12-26 | Rohm Co Ltd | パワーモジュール半導体装置 |
| US9351423B2 (en) * | 2012-06-29 | 2016-05-24 | Denso Corporation | Semiconductor device and semiconductor device connection structure |
| JP5924164B2 (ja) | 2012-07-06 | 2016-05-25 | 株式会社豊田自動織機 | 半導体装置 |
| WO2014046058A1 (ja) | 2012-09-20 | 2014-03-27 | ローム株式会社 | パワーモジュール半導体装置およびインバータ装置、およびパワーモジュール半導体装置の製造方法、および金型 |
| JP2012248907A (ja) | 2012-09-21 | 2012-12-13 | Mitsubishi Electric Corp | 電力半導体装置 |
| CN105794094B (zh) * | 2013-12-04 | 2018-09-28 | 三菱电机株式会社 | 半导体装置 |
| JP6252293B2 (ja) | 2014-03-26 | 2017-12-27 | 株式会社デンソー | 半導体装置 |
| JP2014135527A (ja) | 2014-04-30 | 2014-07-24 | Rohm Co Ltd | 半導体パワーモジュールおよびその製造方法 |
| JP6300633B2 (ja) | 2014-05-20 | 2018-03-28 | 三菱電機株式会社 | パワーモジュール |
| JP2016039202A (ja) | 2014-08-06 | 2016-03-22 | スズキ株式会社 | インバータ装置 |
| WO2016152258A1 (ja) | 2015-03-23 | 2016-09-29 | 株式会社日立製作所 | 半導体装置 |
| WO2017144599A1 (en) | 2016-02-24 | 2017-08-31 | Abb Schweiz Ag | Power module based on multi-layer circuit board |
| EP3246945B1 (en) | 2016-05-19 | 2018-10-03 | ABB Schweiz AG | Power module with low stray inductance |
| JP6920790B2 (ja) | 2016-05-24 | 2021-08-18 | ローム株式会社 | インテリジェントパワーモジュール、電気自動車またはハイブリッドカー、およびインテリジェントパワーモジュールの組み立て方法 |
| JP6834462B2 (ja) | 2016-12-22 | 2021-02-24 | 住友金属鉱山株式会社 | 放熱基板 |
| DE212018000073U1 (de) * | 2017-04-20 | 2019-04-03 | Rohm Co., Ltd. | Halbleiterbauelement |
| EP3613077B1 (en) | 2017-05-02 | 2020-10-07 | ABB Power Grids Switzerland AG | Half-bridge module with coaxial arrangement of the dc terminals |
| US10074590B1 (en) | 2017-07-02 | 2018-09-11 | Infineon Technologies Ag | Molded package with chip carrier comprising brazed electrically conductive layers |
| JP6717270B2 (ja) * | 2017-07-27 | 2020-07-01 | 株式会社デンソー | 半導体モジュール |
| CN118213346A (zh) | 2018-10-24 | 2024-06-18 | 罗姆股份有限公司 | 半导体装置 |
| CN113169144B (zh) | 2018-12-03 | 2023-11-10 | 罗姆股份有限公司 | 半导体装置 |
| JP2020092108A (ja) | 2018-12-03 | 2020-06-11 | ローム株式会社 | 半導体装置 |
| CN116034473A (zh) | 2020-10-14 | 2023-04-28 | 罗姆股份有限公司 | 半导体模块 |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008124522A (ja) | 2008-02-21 | 2008-05-29 | Fuji Electric Fa Components & Systems Co Ltd | 樹脂封止型半導体装置の設置方法 |
| JP2017108187A (ja) | 2012-07-19 | 2017-06-15 | 三菱電機株式会社 | 電力用半導体モジュール |
| JP2014123618A (ja) | 2012-12-20 | 2014-07-03 | Mitsubishi Electric Corp | 半導体モジュール、その製造方法およびその接続方法 |
| JP2015053241A (ja) | 2013-09-09 | 2015-03-19 | 新電元工業株式会社 | 半導体装置の端子案内部材、半導体装置及び半導体装置の製造方法 |
| WO2018047659A1 (ja) | 2016-09-07 | 2018-03-15 | 三菱電機株式会社 | 電力用半導体装置 |
| JP2020072106A (ja) | 2018-10-29 | 2020-05-07 | ローム株式会社 | 半導体装置 |
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