JP7123078B2 - 酸素透過素子及びスパッタリングターゲット材 - Google Patents
酸素透過素子及びスパッタリングターゲット材 Download PDFInfo
- Publication number
- JP7123078B2 JP7123078B2 JP2019567025A JP2019567025A JP7123078B2 JP 7123078 B2 JP7123078 B2 JP 7123078B2 JP 2019567025 A JP2019567025 A JP 2019567025A JP 2019567025 A JP2019567025 A JP 2019567025A JP 7123078 B2 JP7123078 B2 JP 7123078B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- solid electrolyte
- intermediate layer
- anode
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
- H01M4/92—Metals of platinum group
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/62218—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic films, e.g. by using temporary supports
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/62222—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
- H01M4/9016—Oxides, hydroxides or oxygenated metallic salts
- H01M4/9025—Oxides specially used in fuel cell operating at high temperature, e.g. SOFC
- H01M4/9033—Complex oxides, optionally doped, of the type M1MeO3, M1 being an alkaline earth metal or a rare earth, Me being a metal, e.g. perovskites
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M8/124—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
- H01M8/1246—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3256—Molybdenum oxides, molybdates or oxide forming salts thereof, e.g. cadmium molybdate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3287—Germanium oxides, germanates or oxide forming salts thereof, e.g. copper germanate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3293—Tin oxides, stannates or oxide forming salts thereof, e.g. indium tin oxide [ITO]
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3298—Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3409—Boron oxide, borates, boric acids, or oxide forming salts thereof, e.g. borax
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/341—Silica or silicates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
- G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Structural Engineering (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Sustainable Energy (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Conductive Materials (AREA)
- Fuel Cell (AREA)
- Physical Vapour Deposition (AREA)
Description
前記アノード及び前記カソードの少なくとも一方と前記固体電解質との間に中間層を有し、
前記中間層がビスマスの酸化物を含み、
前記固体電解質がランタンの酸化物を含む、酸素透過素子を提供することによって前記の課題を解決したものである。
本実施例では、以下の(1)-(3)の工程に従い図1に示す構造の酸素透過素子10(ただし、アノード側中間層16は形成せず)を製造した。
(1)固体電解質層11の製造
La2O3の粉体とSiO2の粉体とをモル比で1:1となるように配合し、エタノールを加えてボールミルで混合した。この混合物を乾燥させ、乳鉢で粉砕し、白金るつぼを使用して大気雰囲気下に1650℃で3時間にわたり焼成した。この焼成物にエタノールを加え、遊星ボールミルで粉砕して焼成粉を得た。この焼成粉を、20mmφの成形器に入れて一方向から加圧して一軸成形した。更に600MPaで1分間冷間等方圧加圧(CIP)を行ってペレットを成形した。このペレット状成形体を、大気中、1600℃で3時間にわたり加熱してペレット状焼結体を得た。この焼結体を粉末X線回折測定及び化学分析に付したところ、La2SiO5の構造であることが確認された。
Bi2O3の粉体を、50mmφの成形器に入れて一方向から加圧して一軸成形し、引き続きホットプレス焼結を行った。この焼結の条件を、窒素ガス雰囲気、圧力30MPa、温度600℃、3時間とした。このようにしてスパッタリング用のターゲットを得た。このターゲットを用いて高周波スパッタリング法によって、LSBOからなる固体電解質層11の一面にスパッタリングを行った。スパッタリングの条件は、RF出力が30W、アルゴンガスの圧力が0.8Paであった。スパッタリング後、大気中、750℃にて1時間のアニーリングを行った。このようにしてカソード側中間層15を製造した。該中間層15の組成及び厚みは表1に示すとおりであった。
白金ペーストを、カソード側中間層15の表面に塗布して塗膜を形成した。また、固体電解質層11の2つの面のうち、カソード側中間層15が形成されていない方の面に白金ペーストを塗布し塗膜を形成した。これらの塗膜を大気中で、700℃で1時間焼成して、多孔質体からなるカソード12及びアノード13を得た。
カソード側中間層15として表1に示す材料を用いた。この材料からなるカソード側中間層15は、以下の方法で製造されたターゲットを用い、スパッタリング法によって形成した。これら以外は実施例1と同様にして酸素透過素子10を得た。
〔ターゲットの製造〕
La2O3の粉体とBi2O3の粉体とを所定量配合し、エタノールを加えてボールミルで混合した。この混合物を乾燥させ、乳鉢で粉砕し、アルミナるつぼを使用して大気雰囲気下700℃で3時間にわたり焼成した。次いで、この焼成物にエタノールを加えて遊星ボールミルで粉砕し、焼成粉を得た。この焼成粉を、50mmφの成形器に入れて一方向から加圧して一軸成形し、引き続きホットプレス焼結を行った。焼結の条件は、窒素ガス雰囲気、圧力30MPa、温度600℃、3時間とした。このようにしてスパッタリング用のターゲットを得た。
実施例2において、La2O3に代えてY2O3を用いてターゲットを製造し、これを用いてカソード側中間層15を製造した。これら以外は実施例2と同様にして酸素透過素子10を得た。
実施例3においてカソード側中間層15を形成することに代えて、アノード側中間層16を形成した。これ以外は実施例3と同様にして酸素透過素子10を得た。
実施例2において、La2O3に代えてGd2O3を用いてターゲットを製造し、このターゲットを用いてカソード側中間層15を製造した。これら以外は実施例2と同様にして酸素透過素子10を得た。
実施例5においてカソード側中間層15を形成することに代えて、アノード側中間層16を形成した。これ以外は実施例5と同様にして酸素透過素子10を得た。
実施例2において、カソード側中間層15におけるLaとBiのモル比を表1に示す値とした。これ以外は実施例2と同様にして酸素透過素子10を得た。
実施例7においてカソード側中間層15を形成することに代えて、アノード側中間層16を形成した。これ以外は実施例7と同様にして酸素透過素子10を得た。
実施例2においてカソード側中間層15の厚みを表1に示す値とした。これ以外は実施例2と同様にして酸素透過素子10を得た。
実施例2においてカソード側中間層15に加えてアノード側中間層16も形成した。厚みは表1に示すとおりとした。これ以外は実施例2と同様にして酸素透過素子10を得た。
実施例1においてカソード側中間層15を形成せず、固体電解質層11の表面に直接、カソード12を形成した。これ以外は実施例2と同様にして酸素透過素子を得た。
実施例1において、カソード側中間層15として表1に示す材料からなるものを形成した。このカソード側中間層15はスパッタリングによって形成した。スパッタリング完了後、この中間層15を大気中で1400℃にて1時間アニーリングした。これ以外は実施例2と同様にして酸素透過素子を得た。
実施例及び比較例で得られた酸素透過素子について、電極間での電気抵抗を以下の方法で測定した。また、実施例13及び比較例1で得られた酸素透過素子について、酸素透過速度を以下の方法で測定した。これらの結果を以下の表1及び2に示す。
測定は600℃で行った。大気中で素子電極間に直流1Vを印加し、得られた電流値から電気抵抗値を算出した。
測定は600℃で行った。酸素供給素子のカソード側に空気を、アノード側にN2ガスを、それぞれ200ml/minで供給し、電極間に直流1Vを印加した。アノード側に酸素センサを取り付け、電圧印加前後のアノード側雰囲気中の酸素濃度の変化を測定し、酸素透過速度(ml・cm-2・min-1)を算出した。また、表2中の効率は、〔酸素濃度計で計測した酸素透過速度〕/〔電流密度から算出した酸素透過速度〕×100で算出した。
Claims (8)
- アノードと、カソードと、両極間に位置する固体電解質とを有し、該アノードと該カソードとの間に電圧が印加されることで、該カソード側の雰囲気中に含まれる酸素ガスを、該固体電解質を通じて該アノード側に透過させる酸素透過素子であって、
前記アノード及び前記カソードの少なくとも一方と前記固体電解質との間に中間層を有し、
前記中間層がビスマスの酸化物を含み、
前記固体電解質がランタンの酸化物を含む、酸素透過素子。 - 前記固体電解質が、ランタン及びケイ素の複合酸化物を含む請求項1に記載の酸素透過素子。
- 前記固体電解質が、La9.33+x[T6.00-yMy]O26.0+z(式中のTは、Si若しくはGe又はその両方を含む元素である。式中のMは、B、Ge、Zn、Sn、W及びMoからなる群から選ばれた一種又は二種以上の元素である。)で表され、式中のxは-1.00以上1.00以下の数であり、式中のyは1.00以上3.00以下の数であり、式中のzは-2.00以上2.00以下の数であり、Mのモル数に対するLaのモル数の比率が3.00以上10.0以下である複合酸化物を含む請求項1に記載の酸素透過素子。
- 前記中間層は、その厚みが1nm以上350nm以下である請求項1ないし3のいずれか一項に記載の酸素透過素子。
- 前記中間層が、ビスマスと希土類元素との複合酸化物を含む請求項1ないし4のいずれか一項に記載の酸素透過素子。
- 前記中間層が、ビスマスと、ランタン、ガドリニウム又はイットリウムとの複合酸化物を含む請求項5に記載の酸素透過素子。
- 前記アノード又は前記カソードが、白金族の元素を含む請求項1ないし6のいずれか一項に記載の酸素透過素子。
- 前記アノードと前記カソードのいずれもが前記固体電解質との間にビスマスの酸化物を含む中間層を有する請求項1ないし7のいずれか一項に記載の酸素透過素子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018013091 | 2018-01-29 | ||
JP2018013091 | 2018-01-29 | ||
PCT/JP2019/001283 WO2019146493A1 (ja) | 2018-01-29 | 2019-01-17 | 酸素透過素子及びスパッタリングターゲット材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019146493A1 JPWO2019146493A1 (ja) | 2021-01-28 |
JP7123078B2 true JP7123078B2 (ja) | 2022-08-22 |
Family
ID=67394960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019567025A Active JP7123078B2 (ja) | 2018-01-29 | 2019-01-17 | 酸素透過素子及びスパッタリングターゲット材 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20210057759A1 (ja) |
EP (1) | EP3748033A4 (ja) |
JP (1) | JP7123078B2 (ja) |
CN (1) | CN111587299A (ja) |
TW (1) | TW201932627A (ja) |
WO (1) | WO2019146493A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7291031B2 (ja) * | 2019-08-06 | 2023-06-14 | 三井金属鉱業株式会社 | 固体電解質接合体 |
JP7291057B2 (ja) * | 2019-10-16 | 2023-06-14 | 三井金属鉱業株式会社 | 排気ガス用酸素センサ素子 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007169779A (ja) | 2005-11-24 | 2007-07-05 | Ricoh Co Ltd | スパッタリングターゲット及びその製造方法、並びに光記録媒体及びその製造方法 |
WO2009084404A1 (ja) | 2007-12-28 | 2009-07-09 | Honda Motor Co., Ltd. | 電解質・電極接合体及びその製造方法 |
JP2011181262A (ja) | 2010-02-26 | 2011-09-15 | Kyocera Corp | 固体電解質形燃料電池セル |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6276710A (ja) * | 1985-09-30 | 1987-04-08 | Nippon Sheet Glass Co Ltd | 磁性薄膜の製造方法 |
JPH0827254B2 (ja) | 1991-10-04 | 1996-03-21 | 株式会社フジクラ | 薄膜型ガスセンサ |
JP2516123B2 (ja) * | 1991-10-15 | 1996-07-10 | 株式会社フジクラ | 金属と固体電解質との接合方法 |
JPH07140099A (ja) * | 1993-11-16 | 1995-06-02 | Matsushita Electric Ind Co Ltd | 電気化学装置 |
JP3018925B2 (ja) | 1994-11-09 | 2000-03-13 | 松下電器産業株式会社 | 電気化学素子 |
JP3427003B2 (ja) * | 1999-03-31 | 2003-07-14 | 株式会社東芝 | 燃料電池 |
JP2007019037A (ja) * | 2001-01-17 | 2007-01-25 | Nissan Motor Co Ltd | 固体電解質型燃料電池 |
JP4889166B2 (ja) * | 2001-08-06 | 2012-03-07 | 東邦瓦斯株式会社 | 低温焼結性固体電解質材料、電解質電極接合体及びこれを用いた固体酸化物形燃料電池 |
US7153601B2 (en) * | 2002-10-29 | 2006-12-26 | Hewlett-Packard Development Company, L.P. | Fuel cell with embedded current collector |
DE602008005190D1 (de) * | 2007-11-27 | 2011-04-07 | Honda Motor Co Ltd | Freistehende membranelektrolyt-elektrodenanordnung |
US8669015B2 (en) * | 2009-04-02 | 2014-03-11 | Samsung Electronics Co., Ltd. | Solid-state fuel cell including anode and cathode chemical electrolyte protection layers and a hydrogen ion conductive solid oxide dense film |
US20100325878A1 (en) * | 2009-06-24 | 2010-12-30 | Gong Zhang | Bi Containing Solid Oxide Fuel Cell System With Improved Performance and Reduced Manufacturing Costs |
KR20110118544A (ko) * | 2010-04-23 | 2011-10-31 | 삼성전자주식회사 | 나노-그레인 ysz를 전해질층의 보호층으로 갖는 프로톤 전도성 세라믹 연료전지 및 이의 제조방법 |
JP5666404B2 (ja) * | 2011-08-31 | 2015-02-12 | 本田技研工業株式会社 | 電解質・電極接合体及びその製造方法 |
WO2013048654A1 (en) * | 2011-09-28 | 2013-04-04 | Phillips 66 Company | Composite solid oxide fuel cell electrolyte |
KR20130099704A (ko) * | 2012-02-29 | 2013-09-06 | 삼성전자주식회사 | 고체산화물 연료전지용 기능층 소재, 및 상기 소재를 이용하여 제조된 기능층과 상기 기능층을 포함하는 고체산화물 연료전지 |
KR20170082511A (ko) * | 2014-11-13 | 2017-07-14 | 스미토모덴키고교가부시키가이샤 | 셀 구조체, 그 제조 방법, 및, 연료 전지 |
US10727493B2 (en) | 2015-01-07 | 2020-07-28 | Mitsui Mining & Smelting Co., Ltd. | Oriented apatite-type doped rare earth silicate and/or germanate ion conductor and method for manufacturing same |
KR101886321B1 (ko) * | 2016-06-15 | 2018-08-09 | 한국과학기술연구원 | 연료전지의 연료극용 금속-세라믹 복합체 및 이의 제조방법 |
KR20180040885A (ko) * | 2016-10-13 | 2018-04-23 | 한국과학기술연구원 | 박막 전해질 고체 산화물 셀 연료극용 촉매 중간층 및 이의 형성방법 |
CN111919113B (zh) * | 2018-04-17 | 2023-04-04 | 三井金属矿业株式会社 | 具有中间层的固体电解质接合体 |
US20210126272A1 (en) * | 2018-04-17 | 2021-04-29 | Mitsui Mining & Smelting Co., Ltd. | Solid electrolyte assembly |
US20200136155A1 (en) * | 2018-10-30 | 2020-04-30 | Phillips 66 Company | Fuel cells with a layered electrolyte |
-
2019
- 2019-01-17 EP EP19743811.2A patent/EP3748033A4/en active Pending
- 2019-01-17 US US16/961,540 patent/US20210057759A1/en not_active Abandoned
- 2019-01-17 JP JP2019567025A patent/JP7123078B2/ja active Active
- 2019-01-17 WO PCT/JP2019/001283 patent/WO2019146493A1/ja unknown
- 2019-01-17 CN CN201980007937.2A patent/CN111587299A/zh active Pending
- 2019-01-24 TW TW108102696A patent/TW201932627A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007169779A (ja) | 2005-11-24 | 2007-07-05 | Ricoh Co Ltd | スパッタリングターゲット及びその製造方法、並びに光記録媒体及びその製造方法 |
WO2009084404A1 (ja) | 2007-12-28 | 2009-07-09 | Honda Motor Co., Ltd. | 電解質・電極接合体及びその製造方法 |
JP2011181262A (ja) | 2010-02-26 | 2011-09-15 | Kyocera Corp | 固体電解質形燃料電池セル |
Non-Patent Citations (1)
Title |
---|
JIANG Zhiyi, et al.,Bismuth oxide-coated (La,Sr)MnO3 cathods for intermediate temperature solid oxide fuel cells with yt,Electrochimica Acta,2009年04月15日,Vol.54 No.11,Page.3059-3065 |
Also Published As
Publication number | Publication date |
---|---|
EP3748033A4 (en) | 2021-07-07 |
EP3748033A1 (en) | 2020-12-09 |
US20210057759A1 (en) | 2021-02-25 |
JPWO2019146493A1 (ja) | 2021-01-28 |
TW201932627A (zh) | 2019-08-16 |
WO2019146493A1 (ja) | 2019-08-01 |
CN111587299A (zh) | 2020-08-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7278266B2 (ja) | 中間層を有する固体電解質接合体 | |
JP7291031B2 (ja) | 固体電解質接合体 | |
JP7123078B2 (ja) | 酸素透過素子及びスパッタリングターゲット材 | |
EP1864955B1 (en) | Ion conductor | |
JP7265538B2 (ja) | 固体電解質接合体 | |
JP2006134871A (ja) | 固体電解質 | |
JP3121993B2 (ja) | 導電性セラミックスの製造方法 | |
JP7291057B2 (ja) | 排気ガス用酸素センサ素子 | |
JP7309702B2 (ja) | 固体電解質及び固体電解質接合体 | |
JP3342541B2 (ja) | 固体電解質型燃料電池セル | |
JP3446649B2 (ja) | 酸化物イオン伝導体の製造方法 | |
JP4038628B2 (ja) | 酸化物イオン導電体およびその製造法並びに固体電解質型燃料電池 | |
JP7300440B2 (ja) | 固体電解質接合体 | |
JP2022130974A (ja) | 固体電解質接合体及びその製造方法 | |
JP2022170723A (ja) | 積層体 | |
WO2022270448A1 (ja) | 一酸化炭素ガスセンサ | |
JP3444347B2 (ja) | 酸化物イオン伝導体及びその製造方法 | |
JP3389407B2 (ja) | 導電性セラミックス及び燃料電池セル | |
JP4428735B2 (ja) | 酸化物イオン導電体および固体電解質型燃料電池 | |
JP2003048778A (ja) | 酸化物イオン導電体及びその製造方法 | |
JP2003212653A (ja) | 酸化物イオン導電体および固体酸化物型燃料電池 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211108 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220628 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220707 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220802 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220809 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7123078 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |