JP7008844B2 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 175
- 238000000034 method Methods 0.000 title claims description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 239000000758 substrate Substances 0.000 claims description 102
- 229910052751 metal Inorganic materials 0.000 claims description 94
- 239000002184 metal Substances 0.000 claims description 94
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 46
- 229910044991 metal oxide Inorganic materials 0.000 claims description 46
- 150000004706 metal oxides Chemical class 0.000 claims description 46
- 239000001301 oxygen Substances 0.000 claims description 46
- 229910052760 oxygen Inorganic materials 0.000 claims description 46
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 26
- 239000001257 hydrogen Substances 0.000 claims description 26
- 229910052739 hydrogen Inorganic materials 0.000 claims description 26
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 11
- 239000003929 acidic solution Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 376
- 239000010408 film Substances 0.000 description 91
- 230000004888 barrier function Effects 0.000 description 69
- 230000000052 comparative effect Effects 0.000 description 45
- 230000015572 biosynthetic process Effects 0.000 description 18
- 230000008018 melting Effects 0.000 description 18
- 238000002844 melting Methods 0.000 description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 15
- 229910052799 carbon Inorganic materials 0.000 description 15
- 238000011109 contamination Methods 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 15
- 239000000126 substance Substances 0.000 description 13
- 238000004544 sputter deposition Methods 0.000 description 12
- 239000010409 thin film Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 3
- 239000003870 refractory metal Substances 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000007736 thin film deposition technique Methods 0.000 description 2
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 1
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Description
図1は、実施の形態1における半導体装置の構成を示す断面図である。半導体装置は、例えば、電力用半導体装置である。実施の形態1において、半導体装置は、IGBT(Insulated Gate Bipolar Transistor)である。ただし、半導体装置は、IGBTに限定されるものではなく、例えば、MOSFET(Metal Oxide Semiconductor Field Effect Transistor)またはダイオードであってもよい。
実施の形態2における半導体装置および半導体装置の製造方法を説明する。なお、実施の形態1と同様の構成および動作については説明を省略する。
Claims (5)
- 半導体基板と、
前記半導体基板の主面に積層された複数の層を含む電極と、を備え、
前記電極は、
Alを含み、前記半導体基板の前記主面に接触している第1金属層と、
金属と酸素とを含み、前記第1金属層の表面に設けられる酸化層と、
前記酸化層の表面に設けられる第2金属層と、を含み、
前記酸化層の酸素濃度は、8.0×1021/cm3以上4.0×1022/cm3以下であり、
前記酸化層の水素濃度は、前記酸化層の前記酸素濃度以上である、半導体装置。 - 前記酸化層の膜厚は、7nm以下である、請求項1に記載の半導体装置。
- 半導体基板を準備し、
前記半導体基板の主面に積層された複数の層を含む電極を形成し、
前記電極を形成することは、
Alを含み、前記半導体基板の前記主面に接触する第1金属層を形成し、
前記第1金属層の表面に、金属と酸素とを含む酸化層を形成し、
前記酸化層の表面に、第2金属層を形成することを含み、
前記酸化層の酸素濃度は、8.0×1021/cm3以上4.0×1022/cm3以下であり、
前記酸化層を形成することは、
前記第1金属層の表面を酸化して金属酸化膜を形成し、
前記金属酸化膜の表面をエッチングすることを含む、半導体装置の製造方法。 - 前記酸化層の膜厚は、7nm以下である、請求項3に記載の半導体装置の製造方法。
- 前記金属酸化膜の前記表面をエッチングすることは、
水素を含むプラズマまたは水素を含む酸性溶液によって前記金属酸化膜の前記表面をエッチングすることを含み、
前記酸化層の水素濃度は、前記酸化層の前記酸素濃度以上である、請求項3または請求項4に記載の半導体装置の製造方法。
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JP (1) | JP7008844B2 (ja) |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3171630B2 (ja) | 1992-01-13 | 2001-05-28 | 大阪瓦斯株式会社 | SiN膜の形成方法 |
JP5160128B2 (ja) | 2007-03-31 | 2013-03-13 | 株式会社大一商会 | 遊技機 |
JP2017135283A (ja) | 2016-01-28 | 2017-08-03 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP2018125352A (ja) | 2017-01-30 | 2018-08-09 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
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