JP6960892B2 - 光学コーティング方法、機器、および製品 - Google Patents
光学コーティング方法、機器、および製品 Download PDFInfo
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- JP6960892B2 JP6960892B2 JP2018162776A JP2018162776A JP6960892B2 JP 6960892 B2 JP6960892 B2 JP 6960892B2 JP 2018162776 A JP2018162776 A JP 2018162776A JP 2018162776 A JP2018162776 A JP 2018162776A JP 6960892 B2 JP6960892 B2 JP 6960892B2
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
- B05D5/061—Special surface effect
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
- C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/76—Hydrophobic and oleophobic coatings
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
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- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Glass (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Description
(1)格納可能なピン138aは、図6において説明および図示されるように、ドーム110上に接して位置決めされておらず、ならびに
(2)ガラス基板140の上面140aは、ピン138aのヘッド138hより1mmを超えて下方に位置されており、ならびに
(3)サイドストッパー150の上部は、上面140aよりも低い位置にある、
場合には、基板を保持するこれらの要素および他の要素が位置されているエリアでは光学コーティングの被着は不均一となるであろうという事実を意味する。結果として、当該光学コーティングは、これらの要素の近くにおいてより薄く、それらから離れるほどより厚くなるであろう。この結果は、不均一な光学被着または物品の使用者が認識できる「影」である。そのような影は、本開示において説明される機器および方法を使用することにより避けることができる。
102 真空槽
110 ドーム
110a セグメント
112 光ファイバー
114 クォーツモニター
116 透明ガラスプレート
116a 開口部
116b 透明ガラスプレートの表面
117 回転シャフト
118 プラズマ源
119 真空密封ベアリング
120 電子ビーム源
122 電子ビーム反射板
124 光学コーティングキャリア
125 シャドウマスク
125a 支持体
126 舟形容器
128 熱蒸発源
130 固定式基板キャリア
130a 調節可能な基板キャリア
131 非磁性基板キャリアベース
131a 基板キャリアベース表面
131b ベース
132 バネシステム
133 バネ
134 磁石
136 ピン
137 トラック
138a 格納可能なピン
138aa ハウジング
138b 固定されたピン
138h ヘッド
139 可動式のピン
140 ガラス基板
140a ガラス基板の上面
140b ガラス基板の底面
141 ガラス基板の端部
150 サイドストッパー
160 フレーム
161 リップ/リム
162 スポーク
164 開口部
168 ドームセグメントの側端部
206 光ファイバー
208 GRINレンズ
300 ドームキャリア
302 開口部
304 レンズ
306 肩部
Claims (1)
- 光学コーティングおよびクリーニング容易な(ETC)コーティングでガラス物品をコーティングする方法であって、
ガラス基板を、下面を有する基板キャリアベースを有してなる磁性基板キャリアの上に載置し、前記ガラス基板の上面が光学コーティング及びクリーニング容易な(ETC)コーティングでコーティングされるように、前記ガラス基板を載置した前記磁性基板キャリアを、真空槽中の回転可能な磁性ドームに取り付ける工程であって、前記基板キャリアが、前記ガラス基板を支持する複数のピンを含む、工程;
前記真空槽を脱気する工程;
前記回転可能な磁性ドームを回転させて、前記ガラス基板上に前記光学コーティングを被着させる工程;
前記光学コーティングの被着の後に、前記回転可能な磁性ドームを回転させて前記光学コーティングの上に前記ETCコーティングを被着させる工程であって、前記ETCコーティングの被着の前に前記光学コーティングが周囲大気に晒されない、工程;および
前記光学コーティングおよび前記ETCコーティングを有する前記ガラス基板を前記真空槽から取り出して、均一な、シャドウフリーの、前記ガラス基板上に被着された前記光学コーティングおよび前記光学コーティング上に被着された前記ETCコーティングを有するガラス基板を得る工程;
前記基板キャリア上に前記ガラス基板を位置決めし、前記ガラス基板を、(i)前記複数のピン、(ii)前記基板が前記基板キャリア上に位置決めされたときに、前記ガラス基板と接触するようにバネにより付勢されて位置決めされた、格納可能なピンを含むバネシステム、および、(iii)前記基板キャリアベースから伸ばされた複数のサイドストッパーであって、当該複数のサイドストッパーの上部が前記ガラス基板の前記上面よりも下に位置するような距離だけ延ばされたサイドストッパー、により支持する工程;
を含み、
前記ガラス基板が、成形された端部を有し、前記複数のピンの少なくとも1つが、前記基板キャリア上に前記ガラス基板を位置決めする工程において、前記成形された端部に接触している、方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US201161565024P | 2011-11-30 | 2011-11-30 | |
US61/565,024 | 2011-11-30 | ||
US201261709423P | 2012-10-04 | 2012-10-04 | |
US61/709,423 | 2012-10-04 | ||
JP2017078065A JP6397532B2 (ja) | 2011-11-30 | 2017-04-11 | 光学コーティング方法、機器、および製品 |
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JP2019014649A JP2019014649A (ja) | 2019-01-31 |
JP6960892B2 true JP6960892B2 (ja) | 2021-11-05 |
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JP2014544942A Expired - Fee Related JP6157496B2 (ja) | 2011-11-30 | 2012-11-30 | 光学コーティング方法、機器、および製品 |
JP2017078065A Expired - Fee Related JP6397532B2 (ja) | 2011-11-30 | 2017-04-11 | 光学コーティング方法、機器、および製品 |
JP2018162776A Active JP6960892B2 (ja) | 2011-11-30 | 2018-08-31 | 光学コーティング方法、機器、および製品 |
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JP2014544942A Expired - Fee Related JP6157496B2 (ja) | 2011-11-30 | 2012-11-30 | 光学コーティング方法、機器、および製品 |
JP2017078065A Expired - Fee Related JP6397532B2 (ja) | 2011-11-30 | 2017-04-11 | 光学コーティング方法、機器、および製品 |
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US (3) | US20130135741A1 (ja) |
EP (2) | EP2785661B1 (ja) |
JP (3) | JP6157496B2 (ja) |
KR (2) | KR20180105248A (ja) |
CN (2) | CN104302589B (ja) |
TW (2) | TWI661065B (ja) |
WO (1) | WO2013082488A2 (ja) |
Families Citing this family (69)
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US8945684B2 (en) * | 2005-11-04 | 2015-02-03 | Essilor International (Compagnie Generale D'optique) | Process for coating an article with an anti-fouling surface coating by vacuum evaporation |
US10077207B2 (en) | 2011-11-30 | 2018-09-18 | Corning Incorporated | Optical coating method, apparatus and product |
US9957609B2 (en) | 2011-11-30 | 2018-05-01 | Corning Incorporated | Process for making of glass articles with optical and easy-to-clean coatings |
WO2013082488A2 (en) * | 2011-11-30 | 2013-06-06 | Corning Incorporated | Optical coating method, apparatus and product |
EP2925696B1 (en) | 2012-11-30 | 2021-07-07 | Corning Incorporated | Reduced reflection glass articles and methods for making and using same |
US9366784B2 (en) | 2013-05-07 | 2016-06-14 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
CN105579407A (zh) * | 2013-09-25 | 2016-05-11 | 旭硝子株式会社 | 玻璃板及化学强化玻璃板 |
WO2015046106A1 (ja) * | 2013-09-25 | 2015-04-02 | 旭硝子株式会社 | ガラス板 |
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KR101860710B1 (ko) | 2011-07-27 | 2018-05-25 | 삼성전자주식회사 | 내지문성 코팅 조성물 및 이를 이용한 피막 |
WO2013082488A2 (en) * | 2011-11-30 | 2013-06-06 | Corning Incorporated | Optical coating method, apparatus and product |
CN104024175A (zh) | 2011-12-28 | 2014-09-03 | 旭硝子株式会社 | 带防污膜的基体及其制造方法 |
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WO2013082488A3 (en) | 2013-08-22 |
US20140016201A1 (en) | 2014-01-16 |
US20130135741A1 (en) | 2013-05-30 |
CN107777894A (zh) | 2018-03-09 |
WO2013082488A2 (en) | 2013-06-06 |
CN104302589B (zh) | 2017-11-28 |
EP2785661A2 (en) | 2014-10-08 |
TWI564409B (zh) | 2017-01-01 |
KR20180105248A (ko) | 2018-09-27 |
JP2017165649A (ja) | 2017-09-21 |
CN104302589A (zh) | 2015-01-21 |
US9013795B2 (en) | 2015-04-21 |
EP3696293A1 (en) | 2020-08-19 |
TWI661065B (zh) | 2019-06-01 |
TW201710529A (zh) | 2017-03-16 |
KR20140098176A (ko) | 2014-08-07 |
JP2019014649A (ja) | 2019-01-31 |
KR101900132B1 (ko) | 2018-09-18 |
TW201329259A (zh) | 2013-07-16 |
CN107777894B (zh) | 2021-05-11 |
EP2785661B1 (en) | 2020-05-06 |
JP6157496B2 (ja) | 2017-07-05 |
JP6397532B2 (ja) | 2018-09-26 |
JP2015506895A (ja) | 2015-03-05 |
US20150015959A1 (en) | 2015-01-15 |
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