JP2019014649A - 光学コーティング方法、機器、および製品 - Google Patents
光学コーティング方法、機器、および製品 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
- B05D5/061—Special surface effect
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
- C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
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- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/76—Hydrophobic and oleophobic coatings
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
Abstract
Description
(1)格納可能なピン138aは、図6において説明および図示されるように、ドーム110上に接して位置決めされておらず、ならびに
(2)ガラス基板140の上面140aは、ピン138aのヘッド138hより1mmを超えて下方に位置されており、ならびに
(3)サイドストッパー150の上部は、上面140aよりも低い位置にある、
場合には、基板を保持するこれらの要素および他の要素が位置されているエリアでは光学コーティングの被着は不均一となるであろうという事実を意味する。結果として、当該光学コーティングは、これらの要素の近くにおいてより薄く、それらから離れるほどより厚くなるであろう。この結果は、不均一な光学被着または物品の使用者が認識できる「影」である。そのような影は、本開示において説明される機器および方法を使用することにより避けることができる。
102 真空槽
110 ドーム
110a セグメント
112 光ファイバー
114 クォーツモニター
116 透明ガラスプレート
116a 開口部
116b 透明ガラスプレートの表面
117 回転シャフト
118 プラズマ源
119 真空密封ベアリング
120 電子ビーム源
122 電子ビーム反射板
124 光学コーティングキャリア
125 シャドウマスク
125a 支持体
126 舟形容器
128 熱蒸発源
130 固定式基板キャリア
130a 調節可能な基板キャリア
131 非磁性基板キャリアベース
131a 基板キャリアベース表面
131b ベース
132 バネシステム
133 バネ
134 磁石
136 ピン
137 トラック
138a 格納可能なピン
138aa ハウジング
138b 固定されたピン
138h ヘッド
139 可動式のピン
140 ガラス基板
140a ガラス基板の上面
140b ガラス基板の底面
141 ガラス基板の端部
150 サイドストッパー
160 フレーム
161 リップ/リム
162 スポーク
164 開口部
168 ドームセグメントの側端部
206 光ファイバー
208 GRINレンズ
300 ドームキャリア
302 開口部
304 レンズ
306 肩部
Claims (12)
- 光学コーティングおよびクリーニング容易な(ETC)コーティングでガラス物品をコーティングする方法であって、
ガラス基板を、下面を有する基板キャリアベースを有してなる磁性基板キャリアの上に載置し、前記ガラス基板の一側面が光学コーティング及びクリーニング容易な(ETC)コーティングでコーティングされるように、前記ガラス基板を載置した前記磁性基板キャリアを、真空槽中の回転可能な磁性ドームに取り付ける工程であって、前記基板キャリアが、前記ガラス基板を支持する複数のピンを含み、前記ガラス基板の前記一側面の上に飛び出す部品を含まない、工程;
前記真空槽を脱気する工程;
前記回転可能な磁性ドームを回転させて、前記ガラス基板上に前記光学コーティングを被着させる工程;
前記光学コーティングの被着の後に、前記回転可能な磁性ドームを回転させて前記光学コーティングの上に前記ETCコーティングを被着させる工程であって、前記ETCコーティングの被着の前に前記光学コーティングが周囲大気に晒されない、工程;および
前記光学コーティングおよび前記ETCコーティングを有する前記ガラス基板を前記真空槽から取り出して、均一な、シャドウフリーの、前記ガラス基板上に被着された前記光学コーティングおよび前記光学コーティング上に被着された前記ETCコーティングを有するガラス基板を得る工程;
を含む、方法。 - 前記ガラス基板を載置した前記磁性基板キャリアを前記回転可能な磁性ドームに取り付ける工程が、前記基板キャリアベースに結合され、前記複数のピンよりも前記基板キャリアの周囲に近づけて位置決めされた、複数の磁石を使用することを含む、請求項1記載の方法。
- 前記基板キャリア上に前記ガラス基板を位置決めし、前記ガラス基板を、(i)前記複数のピン、(ii)前記基板が前記基板キャリア上に位置決めされたときに、前記ガラス基板と接触するようにバネにより付勢されて位置決めされた、格納可能なピンを含むバネシステム、および、(iii)前記基板キャリアベースから伸ばされた複数のサイドストッパーであって、当該複数のサイドストッパーの上部が前記ガラス基板の前記一側面よりも下に位置するような距離だけ延ばされたサイドストッパー、により支持する工程をさらに含む、請求項1に記載の方法。
- (i)前記複数のピン、(ii)格納可能なピンを備えたハウジングであって、前記格納可能なピンはバネにより所定の位置に保持され、前記格納可能なピンは、前記ハウジングから外側に向かって付勢されて、前記ガラス基板が前記基板キャリアの上に位置決めされるとき前記ガラス基板と接触する、ハウジング、および、(iii) 前記基板キャリアの上に前記ガラス基板が位置決めされたとき、前記ガラス基板の端部を保持するための複数の可動ピンであって、前記複数の可動ピンの位置は、異なる形状、大きさを有する基板を保持するように調整可能である、複数の可動ピン、により、前記基板キャリアベース上に、前記ガラス基板を支持する工程をさらに含む、請求項1記載の方法。
- 前記ETCコーティングを室温の空気中で、または、前記ETCコーティングを加熱して、硬化させる工程をさらに含む、請求項1記載の方法。
- 前記真空槽が、10−4Torr以下の圧力まで、脱気される、請求項1記載の方法。
- 前記光学コーティングを被着させるときに、前記光学コーティングを高密度化させる工程をさらにに含む、請求項1記載の方法。
- 前記真空槽が、前記光学コーティングのための供給源材料を蒸発させるために少なくとも1つの電子ビーム源を含む、請求項1記載の方法。
- 前記光学コーティングを被着させる工程が、高屈折率材料と低屈折率材料による少なくとも1つの周期を含む多層の光学コーティングを被着させる工程を含み、
前記高屈折率材料が、ZrO2、HfO2、Ta2O5、Nb2O5、TiO2、Y2O3、Si3N4、SrTiO3、およびWO3からなる群より選択され、
前記低屈折率材料が、SiO2、MgF2、YF3、YbF3、およびAl2O3からなる群より選択される、請求項1記載の方法。 - 前記ガラス基板が、イオン交換シリカガラス、非イオン交換シリカガラス、アルミノケイ酸塩ガラス、ホウケイ酸ガラス、アルミノホウケイ酸塩ガラス、または、ソーダ石灰ガラスから形成されている、請求項1記載の方法。
- 前記ETCコーティングの供給源材料が、式(RF)xSiX4−xで表されるアルキルペルフルオロカーボンシランであって、前記式中、RFは直鎖状C6〜C30アルキルペルフルオロカーボンであり、XはClまたは−OCH3−であり、かつ、x=2または3である、請求項1記載の方法。
- 前記ガラス基板の前記光学コーティングの第一端部から第二端部までにおける前記光学コーティングの厚さの変動が2%以下である、請求項1に記載の方法。
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US201161565024P | 2011-11-30 | 2011-11-30 | |
US61/565,024 | 2011-11-30 | ||
US201261709423P | 2012-10-04 | 2012-10-04 | |
US61/709,423 | 2012-10-04 | ||
JP2017078065A JP6397532B2 (ja) | 2011-11-30 | 2017-04-11 | 光学コーティング方法、機器、および製品 |
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Families Citing this family (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8945684B2 (en) * | 2005-11-04 | 2015-02-03 | Essilor International (Compagnie Generale D'optique) | Process for coating an article with an anti-fouling surface coating by vacuum evaporation |
US9957609B2 (en) | 2011-11-30 | 2018-05-01 | Corning Incorporated | Process for making of glass articles with optical and easy-to-clean coatings |
US10077207B2 (en) | 2011-11-30 | 2018-09-18 | Corning Incorporated | Optical coating method, apparatus and product |
CN104302589B (zh) * | 2011-11-30 | 2017-11-28 | 康宁股份有限公司 | 光学涂覆方法、设备和产品 |
CN108706887A (zh) | 2012-11-30 | 2018-10-26 | 康宁股份有限公司 | 减反射玻璃制品及其制备和使用方法 |
US9366784B2 (en) | 2013-05-07 | 2016-06-14 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
JPWO2015046113A1 (ja) * | 2013-09-25 | 2017-03-09 | 旭硝子株式会社 | ガラス板及び化学強化ガラス板 |
CN105579406B (zh) * | 2013-09-25 | 2018-10-19 | Agc株式会社 | 玻璃板 |
JP6669498B2 (ja) * | 2013-10-25 | 2020-03-18 | 日本板硝子株式会社 | ガラス板の製造方法及びガラス板 |
KR101474969B1 (ko) * | 2013-11-29 | 2014-12-22 | 주식회사 원익아이피에스 | 기판 처리 장치, 투광 부재 및 뷰포트를 갖는 챔버 |
US9982156B1 (en) | 2014-04-17 | 2018-05-29 | Lockheed Martin Corporation | Transmissive surfaces and polymeric coatings therefore, for fortification of visible, infrared, and laser optical devices |
US9616459B1 (en) | 2014-04-17 | 2017-04-11 | Lockheed Martin Corporation | Polymeric coatings for fortification of visible, infrared, and laser optical devices |
US9335444B2 (en) * | 2014-05-12 | 2016-05-10 | Corning Incorporated | Durable and scratch-resistant anti-reflective articles |
US11267973B2 (en) | 2014-05-12 | 2022-03-08 | Corning Incorporated | Durable anti-reflective articles |
KR20220084430A (ko) | 2014-05-23 | 2022-06-21 | 코닝 인코포레이티드 | 감소된 스크래치 및 지문 가시성을 갖는 저 명암의 반사-방지 제품 |
US9790593B2 (en) | 2014-08-01 | 2017-10-17 | Corning Incorporated | Scratch-resistant materials and articles including the same |
CN105446513A (zh) * | 2014-08-21 | 2016-03-30 | 宸鸿科技(厦门)有限公司 | 复合基板结构及触控装置 |
DE102014013527A1 (de) * | 2014-09-12 | 2016-03-17 | Schott Ag | Verfahren zur Herstellung eines beschichteten, chemisch vorgespannten Glassubstrats mit Antifingerprint-Eigenschaften sowie das hergestellte Glassubstrat |
WO2016107689A1 (en) * | 2014-12-31 | 2016-07-07 | Essilor International (Compagnie Générale d'Optique) | Systems and methods with improved thermal evaporation of optical coatings onto ophthalmic lens substrates |
US10574180B2 (en) * | 2015-05-15 | 2020-02-25 | Pellucere Technologies, Inc. | Sensor for measuring reflected light for optimizing deposited performance enhancement coatings on substrates |
EP3124646A1 (en) * | 2015-07-30 | 2017-02-01 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Machine for coating an optical article and assembly and method including or carrying out this machine |
KR101795142B1 (ko) * | 2015-07-31 | 2017-11-07 | 현대자동차주식회사 | 눈부심 방지 다층코팅을 구비한 투명기판 |
CN107922257A (zh) * | 2015-09-02 | 2018-04-17 | 康宁股份有限公司 | 抗微生物‑抗反射制品及其制造方法 |
WO2017048700A1 (en) | 2015-09-14 | 2017-03-23 | Corning Incorporated | High light transmission and scratch-resistant anti-reflective articles |
US10548234B2 (en) * | 2015-10-22 | 2020-01-28 | Corning Incorporated | Ultraviolet light-resistant articles and methods for making the same |
CN105220115B (zh) * | 2015-10-31 | 2018-06-26 | 华有光电(东莞)有限公司 | 一种对镀膜产品二次清洁的离子净化系统及其净化方法 |
US10134198B2 (en) * | 2016-04-19 | 2018-11-20 | Adobe Systems Incorporated | Image compensation for an occluding direct-view augmented reality system |
JP2017206392A (ja) * | 2016-05-16 | 2017-11-24 | 旭硝子株式会社 | ガラス物品 |
US20180081086A1 (en) * | 2016-09-19 | 2018-03-22 | Apple Inc. | Electronic Devices Having Scratch-Resistant Antireflection Coatings |
DE102016219344A1 (de) * | 2016-10-06 | 2018-04-12 | Bayerische Motoren Werke Aktiengesellschaft | Vorrichtung zur Entlüftung eines Kurbelgehäuses einer Verbrennungskraftmaschine |
CN106319472B (zh) * | 2016-10-27 | 2019-04-09 | 中国电子科技集团公司第十三研究所 | 光纤圆弧面镀膜夹具及使用方法 |
CN109890732A (zh) * | 2016-10-27 | 2019-06-14 | 康宁股份有限公司 | 用于固定制品的方法和设备 |
KR20180050452A (ko) | 2016-11-04 | 2018-05-15 | 코닝 인코포레이티드 | 코팅 과정에서의 글래스 기반 제품의 마스킹 및 고정, 및 이에 의해 제조된 제품 |
KR20180050457A (ko) | 2016-11-04 | 2018-05-15 | 코닝 인코포레이티드 | 코팅 과정 동안에 글래스 기반 제품의 주변 에지를 마스킹하는 장치 및 방법, 그리고 이에 의해 제조된 제품 |
US11161778B2 (en) | 2016-11-09 | 2021-11-02 | Corning Incorporated | Coated glass articles and processes for producing the same |
EP3346023A1 (en) * | 2017-01-05 | 2018-07-11 | Essilor International | Method for layer by layer optimization of a thin film |
US20190382883A1 (en) | 2017-02-13 | 2019-12-19 | Corning Incorporated | Substrate supports for a sputtering device |
CN108855834A (zh) * | 2017-05-08 | 2018-11-23 | 张伟平 | 一种不粘锅的制造方法 |
JP2020523633A (ja) | 2017-06-09 | 2020-08-06 | コーニング インコーポレイテッド | 異方性層を含む曲げ可能な積層物品 |
TW201906798A (zh) | 2017-06-23 | 2019-02-16 | 美商康寧公司 | 包括結構化島狀層的可折曲疊層製品及其製造方法 |
US11065960B2 (en) | 2017-09-13 | 2021-07-20 | Corning Incorporated | Curved vehicle displays |
US11709291B2 (en) | 2018-01-25 | 2023-07-25 | Corning Incorporated | Fiberglass composite cover for foldable electronic display and methods of making the same |
WO2019160723A1 (en) | 2018-02-14 | 2019-08-22 | Corning Incorporated | Foldable glass article including an optically transparent polymeric hard-coat and methods of making the same |
CN111936891B (zh) * | 2018-03-02 | 2023-03-24 | 康宁公司 | 抗反射涂层及制品与形成抗反射涂层及制品的方法 |
WO2019199791A1 (en) | 2018-04-09 | 2019-10-17 | Corning Incorporated | Locally strengthened glass-ceramics and methods of making the same |
US20200001423A1 (en) * | 2018-06-27 | 2020-01-02 | Edmund Optics, Inc. | Power polishing apparatuses and methods for in-situ finishing and coating of optical component |
DE102019211258A1 (de) * | 2018-08-01 | 2020-03-19 | Schott Ag | Geschichteter optischer verbundwerkstoff mit zwei gruppierungen von beschichtungsschichten und seine augmented-reality-anwendung |
EP3605189A1 (en) | 2018-08-01 | 2020-02-05 | Schott AG | Optical layered composite having a coating thickness below a threshold and its application in augmented reality |
JP7228028B2 (ja) | 2018-08-17 | 2023-02-22 | コーニング インコーポレイテッド | 薄い耐久性の反射防止構造を有する無機酸化物物品 |
EP3840947A1 (en) | 2018-08-24 | 2021-06-30 | Corning Incorporated | Article comprising puncture resistant laminate with ultra-thin glass layer |
US20200105949A1 (en) * | 2018-09-30 | 2020-04-02 | John Arthur DeVos | Method for Forming a Nanostructured Thin Film with Porosity Gradient on an Array of Sloped Outdoor Panel Surfaces Using Meniscus Drag |
CN109180016A (zh) * | 2018-10-12 | 2019-01-11 | 江西沃格光电股份有限公司 | 玻璃面板镀膜装片方法 |
CN113039166B (zh) | 2018-11-09 | 2023-04-04 | 康宁股份有限公司 | 具有聚合物涂层的挠性玻璃盖板 |
US11189516B2 (en) | 2019-05-24 | 2021-11-30 | Applied Materials, Inc. | Method for mask and substrate alignment |
WO2020242611A1 (en) | 2019-05-24 | 2020-12-03 | Applied Materials, Inc. | System and method for aligning a mask with a substrate |
CN110331381A (zh) * | 2019-06-11 | 2019-10-15 | 康佳集团股份有限公司 | 一种外延片生长炉、设备、mocvd方法及外延片 |
US10916464B1 (en) | 2019-07-26 | 2021-02-09 | Applied Materials, Inc. | Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency |
US11196360B2 (en) | 2019-07-26 | 2021-12-07 | Applied Materials, Inc. | System and method for electrostatically chucking a substrate to a carrier |
US11756816B2 (en) | 2019-07-26 | 2023-09-12 | Applied Materials, Inc. | Carrier FOUP and a method of placing a carrier |
KR20220044775A (ko) | 2019-08-07 | 2022-04-11 | 코닝 인코포레이티드 | 파편 보존 하드 코팅을 갖는 얇은 플렉서블 유리 커버 |
WO2021041035A1 (en) | 2019-08-28 | 2021-03-04 | Corning Incorporated | Bendable articles including adhesive layer with a dynamic elastic modulus |
EP3798687A1 (en) | 2019-09-27 | 2021-03-31 | Schott AG | Layered optical composite having a reduced content of highly refractive layers and its application in augmented reality |
JP2023007511A (ja) * | 2019-12-03 | 2023-01-19 | コニカミノルタ株式会社 | 光学部材及びその製造方法 |
JP2022110326A (ja) * | 2021-01-18 | 2022-07-29 | ホヤ レンズ タイランド リミテッド | 光学素子ホルダ、光学素子保持装置、及び、蒸着装置 |
KR102349212B1 (ko) | 2021-04-28 | 2022-01-07 | 권순영 | 조성 조절이 가능한 코팅층 형성방법 |
CN113493901A (zh) * | 2021-06-22 | 2021-10-12 | 上海天马有机发光显示技术有限公司 | 真空镀膜机 |
CN114457315B (zh) * | 2021-12-28 | 2023-07-25 | 凯盛信息显示材料(洛阳)有限公司 | 一种玻璃磁控溅射镀膜系统 |
TW202331364A (zh) | 2022-01-24 | 2023-08-01 | 美商康寧公司 | 包括圓形偏光層的顯示模組 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003014904A (ja) * | 2001-04-27 | 2003-01-15 | Hoya Corp | 撥水性薄膜を有する光学部材の製造方法 |
US20030180544A1 (en) * | 2002-03-25 | 2003-09-25 | Murphy Nestor P. | Anti-reflective hydrophobic coatings and methods |
JP2011202190A (ja) * | 2008-06-26 | 2011-10-13 | Canon Anelva Corp | スパッタリング装置及びスパッタリング方法 |
Family Cites Families (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2338234A (en) * | 1941-01-02 | 1944-01-04 | Rca Corp | Evaporation of transparent material on glass |
JPS5231727Y2 (ja) * | 1973-05-12 | 1977-07-19 | ||
JPS5843402A (ja) * | 1981-09-09 | 1983-03-14 | Ricoh Co Ltd | 高反射鏡の製造方法 |
JPH0629332B2 (ja) | 1985-04-26 | 1994-04-20 | 旭硝子株式会社 | 防汚性・低反射性プラスチツク |
US5783299A (en) | 1986-01-21 | 1998-07-21 | Seiko Epson Corporation | Polarizer plate with anti-stain layer |
US5759643A (en) | 1987-01-16 | 1998-06-02 | Seiko Epson Corporation | Polarizing plate and method of production |
DE3921672C2 (de) * | 1989-07-01 | 1996-12-05 | Leybold Ag | Vorrichtung zum Halten und Wenden von Linsen, insbesondere für in einer Hochvakuum-Aufdampfanlage oder -Sputteranlage zu beschichtende Brillenglaslinsen |
US5352294A (en) | 1993-01-28 | 1994-10-04 | White John M | Alignment of a shadow frame and large flat substrates on a support |
FR2702486B1 (fr) | 1993-03-08 | 1995-04-21 | Essilor Int | Compositions de revêtement antiabrasion à base d'hydrolysats de silanes et de composés de l'aluminium, et articles revêtus correspondants résistants à l'abrasion et aux chocs. |
JPH07145481A (ja) * | 1993-11-22 | 1995-06-06 | Shin Etsu Chem Co Ltd | 基板および基板ホルダーの保持方法 |
FR2722493B1 (fr) * | 1994-07-13 | 1996-09-06 | Saint Gobain Vitrage | Vitrage hydrophobe multicouches |
CA2162451A1 (en) * | 1994-12-22 | 1996-06-23 | John P. Murphy | Anti-reflective clarifier film for eyeglasses |
JPH1036142A (ja) | 1996-07-24 | 1998-02-10 | Matsushita Electric Ind Co Ltd | 撥水性ガラスコート膜の製造方法 |
US6119626A (en) | 1996-11-14 | 2000-09-19 | Canon Kabushiki Kaisha | Vacuum apparatus for forming a thin-film and method for forming thin-film |
GB9700158D0 (en) | 1997-01-07 | 1997-02-26 | Gencoa Limited | Versatile coating deposition system |
JP4733798B2 (ja) | 1998-01-31 | 2011-07-27 | 凸版印刷株式会社 | 防汚剤、防汚層の形成方法、光学部材、反射防止光学部材、光学機能性部材及び表示装置 |
US6264751B1 (en) | 1998-05-18 | 2001-07-24 | Hoya Corporation | Mechanism for performing water repellency processing on both sides simultaneously |
DE19825100A1 (de) | 1998-06-05 | 1999-12-16 | Merck Patent Gmbh | Mittel zur Herstellung von wasserabweisenden Beschichtungen auf optischen Substraten |
EP1136973A4 (en) | 1999-09-06 | 2005-03-09 | Seiko Epson Corp | RECOVERY GLASS |
JP2001080941A (ja) | 1999-09-08 | 2001-03-27 | Inax Corp | ガラス層をもつ基体の防汚処理方法及びその製品 |
US6583858B2 (en) * | 2000-03-16 | 2003-06-24 | Asml Netherlands B.V. | Substrate holder for lithographic apparatus |
AU756842B2 (en) * | 2000-08-29 | 2003-01-23 | Hoya Corporation | Optical element having antireflection film |
FR2814094B1 (fr) | 2000-09-20 | 2003-08-15 | Saint Gobain | Substrat a revetement photocatalytique et son procede de fabrication |
US6743516B2 (en) | 2000-09-29 | 2004-06-01 | Guardian Industries Corporation | Highly durable hydrophobic coatings and methods |
TWI230002B (en) | 2000-10-17 | 2005-03-21 | Nissha Printing | Antireflective molded product and its manufacture method, mold for antireflective molded product |
US6929822B2 (en) * | 2001-04-27 | 2005-08-16 | Hoya Corporation | Method for manufacturing optical member having water-repellent thin film |
CA2450296A1 (en) * | 2001-05-29 | 2002-12-05 | Essilor International Compagnie Generale D'optique | Method for transferring from a mold a hydrophobic top coat onto an optical substrate. |
US6592659B1 (en) | 2001-11-15 | 2003-07-15 | 3M Innovative Properties Company | Compositions for aqueous delivery of fluorinated silanes |
KR100422487B1 (ko) * | 2001-12-10 | 2004-03-11 | 에이엔 에스 주식회사 | 전자석을 이용한 유기전계발광소자 제작용 증착장치 및그를 이용한 증착방법 |
JP2004029240A (ja) | 2002-06-24 | 2004-01-29 | Fuji Photo Film Co Ltd | 防眩性反射防止フィルムの製造方法 |
US20040076750A1 (en) | 2002-10-22 | 2004-04-22 | Vision-Ease Lens, Inc. | Method for applying a coating to an optical substrate by thermal vaporization of an organosilicon compound using a non-sintered porous inorganic oxide matrix material |
CA2448410A1 (en) | 2002-11-06 | 2004-05-06 | Pentax Corporation | Anti-relfection spectacle lens and its production method |
TW200420979A (en) * | 2003-03-31 | 2004-10-16 | Zeon Corp | Protective film for polarizing plate and method for preparation thereof |
DE10336544A1 (de) | 2003-08-05 | 2005-02-24 | Degussa Ag | Zweikomponentenbeschichtungssystem für die Ausstattung glatter Oberflächen mit "Easy-to-clean" - Eigenschaften |
JP4448924B2 (ja) * | 2004-08-19 | 2010-04-14 | 株式会社昭和真空 | 真空装置 |
PT1630260E (pt) * | 2004-08-20 | 2011-10-19 | Jds Uniphase Inc | Fecho magnético para um sistema de deposição em fase vapor |
KR100927561B1 (ko) * | 2004-08-30 | 2009-11-23 | 가부시키가이샤 알박 | 성막 장치 |
JP2006171204A (ja) * | 2004-12-14 | 2006-06-29 | Ito Kogaku Kogyo Kk | 光学要素の製造方法 |
KR20070092291A (ko) | 2004-12-21 | 2007-09-12 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 기판 상에 패턴화 불소중합체 필름을 형성하는 방법 |
JP2006227568A (ja) * | 2005-01-19 | 2006-08-31 | Konica Minolta Opto Inc | 反射防止膜、光学素子及び光送受信モジュール |
CN100468083C (zh) | 2005-02-16 | 2009-03-11 | 柯尼卡美能达精密光学株式会社 | 防反射膜、防反射膜的制法、偏振片及显示装置 |
CN103551075B (zh) | 2005-04-01 | 2016-07-06 | 大金工业株式会社 | 表面改性剂 |
CN101189278B (zh) | 2005-04-01 | 2012-03-21 | 大金工业株式会社 | 表面改性剂及其应用 |
WO2007034715A1 (ja) | 2005-09-21 | 2007-03-29 | Konica Minolta Opto, Inc. | 防眩性反射防止フィルム及び防眩性反射防止フィルムの製造方法 |
US8945684B2 (en) | 2005-11-04 | 2015-02-03 | Essilor International (Compagnie Generale D'optique) | Process for coating an article with an anti-fouling surface coating by vacuum evaporation |
US20070184183A1 (en) | 2006-02-07 | 2007-08-09 | Jau-Jier Chu | Dipping process for a long-term anti-smudge coating |
US20070190342A1 (en) | 2006-02-14 | 2007-08-16 | Yu-Sheng Teng | Protective film |
JP2007240707A (ja) | 2006-03-07 | 2007-09-20 | Konica Minolta Opto Inc | 防眩性反射防止フィルムの製造方法、防眩性反射防止フィルム及び画像表示装置 |
JP5252811B2 (ja) | 2006-05-16 | 2013-07-31 | 日東電工株式会社 | 防眩性ハードコートフィルム、偏光板および画像表示装置 |
JP2008001869A (ja) | 2006-06-26 | 2008-01-10 | Catalysts & Chem Ind Co Ltd | 透明被膜形成用塗料および被膜付基材 |
US7692855B2 (en) | 2006-06-28 | 2010-04-06 | Essilor International Compagnie Generale D'optique | Optical article having a temperature-resistant anti-reflection coating with optimized thickness ratio of low index and high index layers |
US7553514B2 (en) * | 2006-08-28 | 2009-06-30 | 3M Innovative Properties Company | Antireflective article |
US7294731B1 (en) | 2006-08-28 | 2007-11-13 | 3M Innovative Properties Company | Perfluoropolyether silanes and use thereof |
FR2907915B1 (fr) | 2006-10-31 | 2009-01-23 | Essilor Int | Article d'optique comportant un revetement anti-salissure |
EP2078977A4 (en) | 2006-10-31 | 2014-05-21 | Nikon Essilor Co Ltd | LASER LENS AND METHOD FOR THE PRODUCTION THEREOF |
MX2009007819A (es) | 2007-02-01 | 2009-10-26 | Willard & Kelsey Solar Group L | Sistema y metodo para el recubrimiento con un semiconductor de una hoja de vidro y producto resultante. |
US8318245B2 (en) | 2007-02-23 | 2012-11-27 | Essilor International (Compagnie Generale D'optique) | Method for producing an optical article coated with an antireflection or a reflective coating having improved adhesion and abrasion resistance properties |
FR2913116B1 (fr) | 2007-02-23 | 2009-08-28 | Essilor Int | Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees |
JP5248516B2 (ja) * | 2007-09-28 | 2013-07-31 | 株式会社ニコン・エシロール | 光学部品、及び光学部品の製造方法 |
US20090087646A1 (en) | 2007-10-01 | 2009-04-02 | Cf Supplies International Ltd. | Coated substrate, composition for treating a substrate and process of treatment |
US20090098309A1 (en) | 2007-10-15 | 2009-04-16 | Advantech Global, Ltd | In-Situ Etching Of Shadow Masks Of A Continuous In-Line Shadow Mask Vapor Deposition System |
US7508567B1 (en) * | 2008-01-08 | 2009-03-24 | Hewlett-Packard Development Company, L.P. | Metal etalon with enhancing stack |
US20090197048A1 (en) * | 2008-02-05 | 2009-08-06 | Jaymin Amin | Damage resistant glass article for use as a cover plate in electronic devices |
US9353436B2 (en) | 2008-03-05 | 2016-05-31 | Applied Materials, Inc. | Coating apparatus with rotation module |
JP2009299129A (ja) * | 2008-06-13 | 2009-12-24 | Toshiba Corp | 真空蒸着装置及びこの装置の電子ビーム照射方法 |
FR2939240B1 (fr) * | 2008-12-03 | 2011-02-18 | Saint Gobain | Element en couches et dispositif photovoltaique comprenant un tel element |
US8173202B2 (en) | 2009-01-06 | 2012-05-08 | Innovation & Infinity Global Corp. | Multi-layer coating structure with anti-reflection, anti-static and anti-smudge functions and method for manufacturing the same |
FR2940966B1 (fr) | 2009-01-09 | 2011-03-04 | Saint Gobain | Substrat hydrophobe comprenant un primage du type oxycarbure de silicium active par plasma |
US9073782B2 (en) | 2009-01-12 | 2015-07-07 | Cleansun Energy Ltd. | Substrate having a self cleaning anti-reflecting coating and method for its preparation |
FR2943798B1 (fr) | 2009-03-27 | 2011-05-27 | Essilor Int | Article d'optique revetu d'un revetement antireflet ou reflechissant comprenant une couche electriquement conductrice a base d'oxyde d'etain et procede de fabrication |
WO2011059430A1 (en) | 2009-11-11 | 2011-05-19 | Essilor International | Surface treatment composition, process for producing the same, and surface-treated article |
US8566066B2 (en) | 2010-10-28 | 2013-10-22 | Parametric Technology Corporation | Enforcing parametric constraints in a direct modeling interface in computer-aided design |
US9045647B2 (en) | 2010-11-10 | 2015-06-02 | Dow Corning Corporation | Surface treatment composition, method of producing the surface treatment composition, and surface-treated article |
US20120162095A1 (en) | 2010-12-23 | 2012-06-28 | Apple Inc. | Internal optical coating for electronic device display |
TWI572481B (zh) | 2011-04-01 | 2017-03-01 | Asahi Glass Co Ltd | Glass plate with low reflective film |
US20120275026A1 (en) | 2011-04-29 | 2012-11-01 | Unipixel Displays, Inc. | Low reflectance fingerprint resistant surface for displays |
KR20120139919A (ko) | 2011-06-20 | 2012-12-28 | 바코스 주식회사 | 내지문과 반사방지를 위한 코팅방법 및 코팅장치 |
KR101860710B1 (ko) | 2011-07-27 | 2018-05-25 | 삼성전자주식회사 | 내지문성 코팅 조성물 및 이를 이용한 피막 |
CN104302589B (zh) * | 2011-11-30 | 2017-11-28 | 康宁股份有限公司 | 光学涂覆方法、设备和产品 |
CN104024175A (zh) | 2011-12-28 | 2014-09-03 | 旭硝子株式会社 | 带防污膜的基体及其制造方法 |
-
2012
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003014904A (ja) * | 2001-04-27 | 2003-01-15 | Hoya Corp | 撥水性薄膜を有する光学部材の製造方法 |
US20030180544A1 (en) * | 2002-03-25 | 2003-09-25 | Murphy Nestor P. | Anti-reflective hydrophobic coatings and methods |
JP2011202190A (ja) * | 2008-06-26 | 2011-10-13 | Canon Anelva Corp | スパッタリング装置及びスパッタリング方法 |
Also Published As
Publication number | Publication date |
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TWI661065B (zh) | 2019-06-01 |
TW201710529A (zh) | 2017-03-16 |
CN104302589B (zh) | 2017-11-28 |
US20140016201A1 (en) | 2014-01-16 |
TW201329259A (zh) | 2013-07-16 |
KR20180105248A (ko) | 2018-09-27 |
JP2017165649A (ja) | 2017-09-21 |
US20150015959A1 (en) | 2015-01-15 |
CN104302589A (zh) | 2015-01-21 |
EP2785661B1 (en) | 2020-05-06 |
EP3696293A1 (en) | 2020-08-19 |
KR101900132B1 (ko) | 2018-09-18 |
JP6157496B2 (ja) | 2017-07-05 |
WO2013082488A2 (en) | 2013-06-06 |
CN107777894A (zh) | 2018-03-09 |
TWI564409B (zh) | 2017-01-01 |
JP6960892B2 (ja) | 2021-11-05 |
WO2013082488A3 (en) | 2013-08-22 |
US20130135741A1 (en) | 2013-05-30 |
JP2015506895A (ja) | 2015-03-05 |
US8817376B2 (en) | 2014-08-26 |
CN107777894B (zh) | 2021-05-11 |
US9013795B2 (en) | 2015-04-21 |
EP2785661A2 (en) | 2014-10-08 |
KR20140098176A (ko) | 2014-08-07 |
JP6397532B2 (ja) | 2018-09-26 |
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