JP6852252B2 - 電子部品及びその製造方法 - Google Patents
電子部品及びその製造方法 Download PDFInfo
- Publication number
- JP6852252B2 JP6852252B2 JP2016173875A JP2016173875A JP6852252B2 JP 6852252 B2 JP6852252 B2 JP 6852252B2 JP 2016173875 A JP2016173875 A JP 2016173875A JP 2016173875 A JP2016173875 A JP 2016173875A JP 6852252 B2 JP6852252 B2 JP 6852252B2
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- Japan
- Prior art keywords
- metal layer
- layer
- electronic component
- via hole
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 314
- 239000002184 metal Substances 0.000 claims description 314
- 239000010949 copper Substances 0.000 claims description 89
- 239000010408 film Substances 0.000 claims description 74
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 72
- 239000010936 titanium Substances 0.000 claims description 72
- 238000005530 etching Methods 0.000 claims description 49
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 45
- 229910052802 copper Inorganic materials 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 38
- 239000000126 substance Substances 0.000 claims description 37
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 36
- 239000010931 gold Substances 0.000 claims description 36
- 229910052719 titanium Inorganic materials 0.000 claims description 36
- 239000011651 chromium Substances 0.000 claims description 32
- 229910052759 nickel Inorganic materials 0.000 claims description 24
- 230000000149 penetrating effect Effects 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 19
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 18
- 229910052737 gold Inorganic materials 0.000 claims description 18
- 239000011810 insulating material Substances 0.000 claims description 18
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 16
- 229910052804 chromium Inorganic materials 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 16
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 16
- 229910052721 tungsten Inorganic materials 0.000 claims description 16
- 239000010937 tungsten Substances 0.000 claims description 16
- 239000003990 capacitor Substances 0.000 claims description 14
- 238000011049 filling Methods 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 10
- 229910002113 barium titanate Inorganic materials 0.000 claims description 8
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920001187 thermosetting polymer Polymers 0.000 claims description 3
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 47
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000001723 curing Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- WOIHABYNKOEWFG-UHFFFAOYSA-N [Sr].[Ba] Chemical compound [Sr].[Ba] WOIHABYNKOEWFG-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
- H01G4/306—Stacked capacitors made by thin film techniques
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
- H01C1/146—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors the resistive element surrounding the terminal
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
- H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/18—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material comprising a plurality of layers stacked between terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/01—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate comprising only passive thin-film or thick-film elements formed on a common insulating substrate
- H01L27/016—Thin-film circuits
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76805—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics the opening being a via or contact hole penetrating the underlying conductor
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73267—Layer and HDI connectors
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- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
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Description
本願によれば、以下の各項目もまた開示される。
[項目1]
誘電体層と、上記誘電体層を挟んで配置された第1金属層及び第2金属層と、を含む本体部と、
上記本体部内に配置され、上記本体部を貫通し、且つ上記第1及び第2金属層とそれぞれ選択的に連結された第1ビア及び第2ビアを含むビア部と、を含み、
上記第1及び第2金属層は互いに異なる金属物質を含む、電子部品。
[項目2]
上記本体部は、
上記第1金属層と上記第2ビアとの間に配置された第1絶縁膜と、
上記第2金属層と上記第1ビアとの間に配置された第2絶縁膜と、をさらに含む、項目1に記載の電子部品。
[項目3]
上記第1ビアは、上記第2絶縁膜により上記第2金属層と電気的に絶縁され、
上記第2ビアは、上記第1絶縁膜により上記第1金属層と電気的に絶縁される、項目2に記載の電子部品。
[項目4]
上記第1絶縁膜は、上記第1金属層と同一層に配置され、上記第2ビアを囲み、
上記第2絶縁膜は、上記第2金属層と同一層に配置され、上記第1ビアを囲む、項目2または3に記載の電子部品。
[項目5]
上記第1絶縁膜の上記第1金属層と接する面の角部、及び上記第2絶縁膜の上記第2金属層と接する面の角部はラウンド状を有する、項目2〜4のいずれか一項に記載の電子部品。
[項目6]
上記第1及び第2金属層はそれぞれ、
アルミニウム(Al)及び銅(Cu)、クロム(Cr)及び銅(Cu)、クロム(Cr)及び金(Au)、銅(Cu)及びアルミニウム(Al)、銅(Cu)及びクロム(Cr)、銅(Cu)及びニッケル(Ni)、銅(Cu)及びチタン(Ti)、銅(Cu)及びタングステン(W)、金(Au)及びクロム(Cr)、金(Au)及びチタン(Ti)、ニッケル(Ni)及び銅(Cu)、ニッケル(Ni)及びチタン(Ti)、チタン(Ti)及び銅(Cu)、チタン(Ti)及び金(Au)、チタン(Ti)及びニッケル(Ni)、チタン(Ti)及びタングステン(W)、タングステン(W)及び銅(Cu)、タングステン(W)及びチタン(Ti)、またはチタン(Ti)及びニッケル(Ni)を含む、項目1〜5のいずれか一項に記載の電子部品。
[項目7]
上記誘電体層は、
チタン酸バリウム(BT)系セラミック粉末及びチタン酸バリウムストロンチウム(BST)系セラミック粉末の少なくとも一つを含む、項目1〜6のいずれか一項に記載の電子部品。
[項目8]
上記本体部上に配置され、上記第1及び第2ビアとそれぞれ連結された第1外部電極及び第2外部電極を含む電極部をさらに含む、項目1〜7のいずれか一項に記載の電子部品。
[項目9]
上記本体部は、
上記本体部の最外側に配置された絶縁層をさらに含み、
上記第1及び第2外部電極は上記絶縁層上に互いに離隔して配置される、項目8に記載の電子部品。
[項目10]
上記本体部の一側に配置され、上記本体部を支持する基板を含む支持部をさらに含む、項目1〜9のいずれか一項に記載の電子部品。
[項目11]
上記電子部品は薄膜キャパシターであり、
上記第1及び第2金属層はそれぞれ第1内部電極及び第2内部電極である、項目1〜10のいずれか一項に記載の電子部品。
[項目12]
上記本体部を貫通する第1及び第2ビアは互いに異なるサイズを有する、項目1〜11のいずれか一項に記載の電子部品。
[項目13]
上記第1ビアは、上記第1及び第2金属層と上記誘電体層とを貫通し、且つ上記第1金属層と電気的に連結された複数のビアを含み、
上記第2ビアは上記第1及び第2金属層と上記誘電体層とを貫通し、且つ上記第2金属層と電気的に連結された複数のビアを含む、項目1〜12のいずれか一項に記載の電子部品。
[項目14]
基板上に、第1金属層、誘電体層、及び第2金属層を順に形成する段階と、
上記第1金属層、上記誘電体層、及び上記第2金属層を貫通する第2ビアホールを形成する段階と、
上記第2ビアホールの内壁のうち、上記第1金属層の一部のみを第1エッチング液で選択的にエッチングして第1溝部を形成する段階と、
上記第1金属層、上記誘電体層、及び上記第2金属層を貫通する第1ビアホールを形成する段階と、
上記第1ビアホールの内壁のうち、上記第2金属層の一部のみを第2エッチング液で選択的にエッチングして第2溝部を形成する段階と、
上記第1溝部及び上記第2溝部にそれぞれ絶縁物質を満たして第1絶縁膜及び第2絶縁膜を形成する段階と、
上記第1ビアホール及び上記第2ビアホールを導電性物質で満たして第1ビア及び第2ビアを形成する段階と、を含む、電子部品の製造方法。
[項目15]
上記第1金属層、上記誘電体層、及び上記第2金属層のうち最外側に形成された層上に絶縁層を形成する段階をさらに含み、
上記第1ビアホール及び上記第2ビアホールを形成する前に、上記絶縁層に上記第1ビアホール及び上記第2ビアホールを形成するためのパターニングを行う、項目14に記載の電子部品の製造方法。
[項目16]
上記絶縁層上に、上記第1ビア及び上記第2ビアとそれぞれ連結される第1外部電極及び第2外部電極を形成する段階をさらに含む、項目15に記載の電子部品の製造方法。
[項目17]
上記第1及び第2金属層はそれぞれ、
アルミニウム(Al)及び銅(Cu)、クロム(Cr)及び銅(Cu)、クロム(Cr)及び金(Au)、銅(Cu)及びアルミニウム(Al)、銅(Cu)及びクロム(Cr)、銅(Cu)及びニッケル(Ni)、銅(Cu)及びチタン(Ti)、銅(Cu)及びタングステン(W)、金(Au)及びクロム(Cr)、金(Au)及びチタン(Ti)、ニッケル(Ni)及び銅(Cu)、ニッケル(Ni)及びチタン(Ti)、チタン(Ti)及び銅(Cu)、チタン(Ti)及び金(Au)、チタン(Ti)及びニッケル(Ni)、チタン(Ti)及びタングステン(W)、タングステン(W)及び銅(Cu)、タングステン(W)及びチタン(Ti)、またはチタン(Ti)及びニッケル(Ni)を含む、項目14〜16のいずれか一項に記載の電子部品の製造方法。
[項目18]
基板上に、互いに異なる物質を含む第1金属層及び第2金属層をその間に配置される誘電体層とともに順に形成する段階と、
上記第1金属層、第2金属層、及び誘電体層を貫通する第1ビアホールを形成する段階と、
上記第1金属層と上記第1ビアホールとの間に第1絶縁膜を形成する段階と、
上記第1ビアホールを導電性物質で満たして上記第1金属層、第2金属層、及び誘電体層を貫通し、且つ上記第2金属層と電気的に連結され、上記第1絶縁膜によって上記第1金属層と絶縁される第1ビアを形成する段階と、を含む、電子部品の製造方法。
[項目19]
上記第1金属層と上記第1ビアホールとの間に第1絶縁膜を形成する段階は、
第1エッチング液を用いて、上記第1ビアホールの内壁のうち上記第1金属層の一部をエッチングして第1溝部を形成する段階と、
上記第1溝部を絶縁物質で満たして上記第1絶縁膜を形成する段階と、を含む、項目18に記載の電子部品の製造方法。
[項目20]
上記第1エッチング液は、上記第1金属層、第2金属層、及び上記誘電体層のうち上記第1金属層のみを選択的にエッチングする、項目19に記載の電子部品の製造方法。
[項目21]
上記第1エッチング液は、上記第2金属層及び上記誘電体層をエッチングする速度よりも10倍以上の速度で上記第1金属層をエッチングする、項目19に記載の電子部品の製造方法。
[項目22]
上記第1金属層、第2金属層、及び誘電体層を貫通する第2ビアホールを形成する段階と、
第2エッチング液を用いて、上記第2ビアホールの内壁のうち上記第2金属層の一部をエッチングして第2溝部を形成する段階と、
上記第2溝部を絶縁物質で満たして第2絶縁膜を形成する段階と、
上記第2ビアホールを導電性物質で満たして上記第1金属層、第2金属層、及び誘電体層を貫通し、且つ上記第1金属層と電気的に連結され、上記第2絶縁膜によって上記第2金属層と絶縁される第2ビアを形成する段階と、をさらに含む、項目19〜21のいずれか一項に記載の電子部品の製造方法。
100 支持部
200 本体部
210 第1金属層
215 第1絶縁膜
220 第2金属層
225 第2絶縁膜
230 誘電体層
240 絶縁層
250 ビア部
251 第1ビア
252 第2ビア
300 電極部
301 第1外部電極
302 第2外部電極
Claims (20)
- 誘電体層と、前記誘電体層を挟んで配置された第1金属層及び第2金属層と、を含む本体部と、
前記本体部内に配置され、前記本体部を貫通し、且つ前記第1及び第2金属層とそれぞれ選択的に連結された第1ビア及び第2ビアを含むビア部と、を含み、
前記第1及び第2金属層は互いに異なる金属物質を含み、
前記本体部は、
前記第1金属層と前記第2ビアとの間に配置された第1絶縁膜と、
前記第2金属層と前記第1ビアとの間に配置された第2絶縁膜と、
前記本体部の最外側に配置された絶縁層とをさらに含み、
前記第1絶縁膜および前記第2絶縁膜の材質は熱硬化性樹脂であり、
前記絶縁層は感光性絶縁物質を含むフォトレジスト層である、電子部品。 - 前記第1ビアは、前記第2絶縁膜により前記第2金属層と電気的に絶縁され、
前記第2ビアは、前記第1絶縁膜により前記第1金属層と電気的に絶縁される、請求項1に記載の電子部品。 - 前記第1絶縁膜は、前記第1金属層と同一層に配置され、前記第2ビアを囲み、
前記第2絶縁膜は、前記第2金属層と同一層に配置され、前記第1ビアを囲む、請求項1または2に記載の電子部品。 - 前記第1絶縁膜の前記第1金属層と接する面の角部、及び前記第2絶縁膜の前記第2金属層と接する面の角部はラウンド状を有する、請求項1〜3のいずれか一項に記載の電子部品。
- 前記第1及び第2金属層はそれぞれ、
アルミニウム(Al)及び銅(Cu)、クロム(Cr)及び銅(Cu)、クロム(Cr)及び金(Au)、銅(Cu)及びアルミニウム(Al)、銅(Cu)及びクロム(Cr)、銅(Cu)及びニッケル(Ni)、銅(Cu)及びチタン(Ti)、銅(Cu)及びタングステン(W)、金(Au)及びクロム(Cr)、金(Au)及びチタン(Ti)、ニッケル(Ni)及び銅(Cu)、ニッケル(Ni)及びチタン(Ti)、チタン(Ti)及び銅(Cu)、チタン(Ti)及び金(Au)、チタン(Ti)及びニッケル(Ni)、チタン(Ti)及びタングステン(W)、タングステン(W)及び銅(Cu)、タングステン(W)及びチタン(Ti)、またはチタン(Ti)及びニッケル(Ni)を含む、請求項1〜4のいずれか一項に記載の電子部品。 - 前記誘電体層は、
チタン酸バリウム(BT)系セラミック粉末及びチタン酸バリウムストロンチウム(BST)系セラミック粉末の少なくとも一つを含む、請求項1〜5のいずれか一項に記載の電子部品。 - 前記本体部上に配置され、前記第1及び第2ビアとそれぞれ連結された第1外部電極及び第2外部電極を含む電極部をさらに含む、請求項1〜6のいずれか一項に記載の電子部品。
- 前記第1及び第2外部電極は前記絶縁層上に互いに離隔して配置される、請求項7に記載の電子部品。
- 前記本体部の一側に配置され、前記本体部を支持する基板を含む支持部をさらに含む、請求項1〜8のいずれか一項に記載の電子部品。
- 前記電子部品は薄膜キャパシターであり、
前記第1及び第2金属層はそれぞれ第1内部電極及び第2内部電極である、請求項1〜9のいずれか一項に記載の電子部品。 - 前記本体部を貫通する第1及び第2ビアは互いに異なるサイズを有する、請求項1〜10のいずれか一項に記載の電子部品。
- 前記第1ビアは、前記第1及び第2金属層と前記誘電体層とを貫通し、且つ前記第1金属層と電気的に連結された複数のビアを含み、
前記第2ビアは前記第1及び第2金属層と前記誘電体層とを貫通し、且つ前記第2金属層と電気的に連結された複数のビアを含む、請求項1〜11のいずれか一項に記載の電子部品。 - 基板上に、第1金属層、誘電体層、及び第2金属層を順に形成する段階と、
前記第1金属層、前記誘電体層、及び前記第2金属層のうち最外側に形成された層上に絶縁層を形成する段階と、
前記第1金属層、前記誘電体層、及び前記第2金属層を貫通する第2ビアホールを形成する段階と、
前記第2ビアホールの内壁のうち、前記第1金属層の一部のみを第1エッチング液で選択的にエッチングして第1溝部を形成する段階と、
前記第1金属層、前記誘電体層、及び前記第2金属層を貫通する第1ビアホールを形成する段階と、
前記第1ビアホールの内壁のうち、前記第2金属層の一部のみを第2エッチング液で選択的にエッチングして第2溝部を形成する段階と、
前記第1溝部及び前記第2溝部にそれぞれ絶縁物質を満たして第1絶縁膜及び第2絶縁膜を形成する段階であって、前記第1絶縁膜及び前記第2絶縁膜は、前記第1ビアホール、前記第2ビアホール、前記第1溝部、及び前記第2溝部に満たされた前記絶縁層の材料を除去し、前記第1ビアホール、前記第2ビアホール、前記第1溝部、及び前記第2溝部を前記絶縁物質でコーティングした後、前記第1ビアホール及び前記第2ビアホールに満たされた前記絶縁物質を除去してから、前記第1溝部及び前記第2溝部に満たされた前記絶縁物質を硬化することにより形成される、段階と、
前記第1ビアホール及び前記第2ビアホールを導電性物質で満たして第1ビア及び第2ビアを形成する段階と、を含む、電子部品の製造方法。 - 前記第1ビアホール及び前記第2ビアホールを形成する前に、前記絶縁層に前記第1ビアホール及び前記第2ビアホールを形成するためのパターニングを行う、請求項13に記載の電子部品の製造方法。
- 前記絶縁層上に、前記第1ビア及び前記第2ビアとそれぞれ連結される第1外部電極及び第2外部電極を形成する段階をさらに含む、請求項14に記載の電子部品の製造方法。
- 前記第1及び第2金属層はそれぞれ、
アルミニウム(Al)及び銅(Cu)、クロム(Cr)及び銅(Cu)、クロム(Cr)及び金(Au)、銅(Cu)及びアルミニウム(Al)、銅(Cu)及びクロム(Cr)、銅(Cu)及びニッケル(Ni)、銅(Cu)及びチタン(Ti)、銅(Cu)及びタングステン(W)、金(Au)及びクロム(Cr)、金(Au)及びチタン(Ti)、ニッケル(Ni)及び銅(Cu)、ニッケル(Ni)及びチタン(Ti)、チタン(Ti)及び銅(Cu)、チタン(Ti)及び金(Au)、チタン(Ti)及びニッケル(Ni)、チタン(Ti)及びタングステン(W)、タングステン(W)及び銅(Cu)、タングステン(W)及びチタン(Ti)、またはチタン(Ti)及びニッケル(Ni)を含む、請求項13〜15のいずれか一項に記載の電子部品の製造方法。 - 基板上に、互いに異なる物質を含む第1金属層及び第2金属層をその間に配置される誘電体層とともに順に形成する段階と、
前記第1金属層、前記誘電体層、及び前記第2金属層のうち最外側に形成された層上に絶縁層を形成する段階と、
前記第1金属層、第2金属層、及び誘電体層を貫通する第1ビアホールを形成する段階と、
前記第1金属層と前記第1ビアホールとの間に第1絶縁膜を形成する段階と、
前記第1ビアホールを導電性物質で満たして前記第1金属層、第2金属層、及び誘電体層を貫通し、且つ前記第2金属層と電気的に連結され、前記第1絶縁膜によって前記第1金属層と絶縁される第1ビアを形成する段階と、を含み、
前記第1金属層と前記第1ビアホールとの間に第1絶縁膜を形成する段階は、
第1エッチング液を用いて、前記第1ビアホールの内壁のうち前記第1金属層の一部をエッチングして第1溝部を形成する段階と、
前記第1溝部を絶縁物質で満たして前記第1絶縁膜を形成する段階であって、前記第1絶縁膜は、前記第1ビアホール及び前記第1溝部に満たされた前記絶縁層の材料を除去し、前記第1ビアホール及び前記第1溝部を前記絶縁物質でコーティングした後、前記第1ビアホールに満たされた前記絶縁物質を除去してから、前記第1溝部に満たされた前記絶縁物質を硬化することにより形成される、段階と、を含む、電子部品の製造方法。 - 前記第1エッチング液は、前記第1金属層、第2金属層、及び前記誘電体層のうち前記第1金属層のみを選択的にエッチングする、請求項17に記載の電子部品の製造方法。
- 前記第1エッチング液は、前記第2金属層及び前記誘電体層をエッチングする速度よりも10倍以上の速度で前記第1金属層をエッチングする、請求項17に記載の電子部品の製造方法。
- 前記第1金属層、第2金属層、及び誘電体層を貫通する第2ビアホールを形成する段階と、
第2エッチング液を用いて、前記第2ビアホールの内壁のうち前記第2金属層の一部をエッチングして第2溝部を形成する段階と、
前記第2溝部を絶縁物質で満たして第2絶縁膜を形成する段階と、
前記第2ビアホールを導電性物質で満たして前記第1金属層、第2金属層、及び誘電体層を貫通し、且つ前記第1金属層と電気的に連結され、前記第2絶縁膜によって前記第2金属層と絶縁される第2ビアを形成する段階と、をさらに含む、請求項17〜19のいずれか一項に記載の電子部品の製造方法。
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Publication number | Priority date | Publication date | Assignee | Title |
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US10537016B2 (en) * | 2016-04-20 | 2020-01-14 | Schweitzer Engineering Laboratories, Inc. | High-current PCB traces |
US10460877B2 (en) * | 2016-05-27 | 2019-10-29 | Tdk Corporation | Thin-film capacitor including groove portions |
KR101942729B1 (ko) * | 2016-11-24 | 2019-01-28 | 삼성전기 주식회사 | 박막 커패시터 |
US10892105B2 (en) * | 2017-01-31 | 2021-01-12 | International Business Machines Corporation | Multi-layer capacitor package |
KR20180131118A (ko) | 2017-05-31 | 2018-12-10 | 에스케이하이닉스 주식회사 | 강유전층을 구비하는 반도체 장치 및 그 제조 방법 |
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US11373809B2 (en) * | 2019-02-13 | 2022-06-28 | KYOCERA AVX Components Corporation | Multilayer ceramic capacitor including conductive vias |
KR20190116124A (ko) * | 2019-07-05 | 2019-10-14 | 삼성전기주식회사 | 적층 세라믹 커패시터 |
KR20190116123A (ko) * | 2019-07-04 | 2019-10-14 | 삼성전기주식회사 | 적층 세라믹 커패시터 |
KR20210075669A (ko) * | 2019-12-13 | 2021-06-23 | 삼성전기주식회사 | 적층형 커패시터 및 그 실장 기판 |
KR20210095503A (ko) * | 2020-01-23 | 2021-08-02 | 삼성전기주식회사 | 적층형 전자 부품 |
CN112312282B (zh) * | 2020-10-28 | 2022-04-22 | 业泓科技(成都)有限公司 | 薄膜喇叭组件、电子设备及薄膜喇叭组件的制备方法 |
CN115483197A (zh) * | 2021-05-31 | 2022-12-16 | 联华电子股份有限公司 | 电容器结构以及其制作方法 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07120602B2 (ja) * | 1989-10-16 | 1995-12-20 | 株式会社村田製作所 | 積層コンデンサの製造方法 |
JP3124624B2 (ja) | 1992-06-18 | 2001-01-15 | 進工業株式会社 | 積層コンデンサおよびその製造方法 |
DE4300808C1 (de) * | 1993-01-14 | 1994-03-17 | Siemens Ag | Verfahren zur Herstellung eines Vielschichtkondensators |
JPH09139529A (ja) * | 1995-11-14 | 1997-05-27 | Sony Corp | 積層型誘電体素子及びその製造方法 |
JP3148191B2 (ja) * | 1998-12-09 | 2001-03-19 | 日本電気株式会社 | 半導体積層コンデンサとその製造方法 |
JP2001126946A (ja) * | 1999-10-28 | 2001-05-11 | Murata Mfg Co Ltd | 積層セラミック電子部品及びその製造方法 |
JP2005117004A (ja) * | 2003-10-08 | 2005-04-28 | Ngk Spark Plug Co Ltd | 積層セラミックコンデンサ、積層コンデンサ、および積層コンデンサの製造方法 |
KR20070048330A (ko) * | 2005-11-04 | 2007-05-09 | 삼성전자주식회사 | 칩형 전기 소자 및 이를 포함하는 표시 장치 |
US7564674B2 (en) * | 2005-12-12 | 2009-07-21 | Greatbatch Ltd. | Feedthrough filter capacitor assemblies having low cost terminal pins |
DE102006007331A1 (de) * | 2006-02-16 | 2007-08-23 | Infineon Technologies Ag | Mehrlagen-Kapazitäts-Anordnung und Verfahren zum Herstellen derselben |
JP2008118078A (ja) * | 2006-11-08 | 2008-05-22 | Murata Mfg Co Ltd | 3端子コンデンサ |
TW200924965A (en) * | 2007-09-11 | 2009-06-16 | Ajinomoto Kk | Film for metal film transfer and adhesive film with metal film |
JP2010087499A (ja) | 2008-09-30 | 2010-04-15 | Ibiden Co Ltd | コンデンサ装置の製造方法 |
JP5455352B2 (ja) | 2008-10-28 | 2014-03-26 | 太陽誘電株式会社 | 薄膜mimキャパシタ及びその製造方法 |
JP4752901B2 (ja) * | 2008-11-27 | 2011-08-17 | 株式会社村田製作所 | 電子部品及び電子部品内蔵基板 |
JP5407775B2 (ja) * | 2009-03-31 | 2014-02-05 | Tdk株式会社 | 薄膜コンデンサの製造方法及び薄膜コンデンサ |
JPWO2010125778A1 (ja) * | 2009-04-28 | 2012-10-25 | 三洋電機株式会社 | コンデンサ用電極体、コンデンサ用電極体の製造方法、コンデンサ、およびコンデンサの製造方法 |
JP5482062B2 (ja) | 2009-09-29 | 2014-04-23 | Tdk株式会社 | 薄膜コンデンサ及び薄膜コンデンサの製造方法 |
JP5665020B2 (ja) * | 2009-12-22 | 2015-02-04 | 国立大学法人九州工業大学 | 配線用電子部品の製造方法 |
JP5429019B2 (ja) * | 2010-04-16 | 2014-02-26 | 富士通株式会社 | キャパシタ及びその製造方法 |
JP2011228462A (ja) * | 2010-04-19 | 2011-11-10 | Taiyo Yuden Co Ltd | 薄膜キャパシタ |
JP5777302B2 (ja) * | 2010-07-21 | 2015-09-09 | 株式会社村田製作所 | セラミック電子部品の製造方法、セラミック電子部品及び配線基板 |
DE102011056515B4 (de) * | 2011-12-16 | 2023-12-07 | Tdk Electronics Ag | Elektrisches Bauelement und Verfahren zur Herstellung eines elektrischen Bauelements |
US8644936B2 (en) * | 2012-01-09 | 2014-02-04 | Medtronic, Inc. | Feedthrough assembly including electrical ground through feedthrough substrate |
KR20140011765A (ko) | 2012-07-19 | 2014-01-29 | 삼성전기주식회사 | 초박막 커패시터 및 그 제조방법 |
CN104955642A (zh) * | 2012-11-02 | 2015-09-30 | 佳能株式会社 | 压电材料、压电元件和电子设备 |
TW201434789A (zh) * | 2013-01-29 | 2014-09-16 | Canon Kk | 壓電材料、壓電元件及電子裝備 |
JP6129643B2 (ja) * | 2013-05-22 | 2017-05-17 | 日立オートモティブシステムズ株式会社 | 制御装置、コネクタ、及びコネクタ用積層コンデンサ |
KR101532149B1 (ko) | 2013-12-03 | 2015-06-26 | 삼성전기주식회사 | 적층 세라믹 커패시터, 그 제조방법 및 적층 세라믹 커패시터의 실장 기판 |
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