JP6740084B2 - 気相成長装置、環状ホルダ、及び、気相成長方法 - Google Patents
気相成長装置、環状ホルダ、及び、気相成長方法 Download PDFInfo
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- JP6740084B2 JP6740084B2 JP2016208600A JP2016208600A JP6740084B2 JP 6740084 B2 JP6740084 B2 JP 6740084B2 JP 2016208600 A JP2016208600 A JP 2016208600A JP 2016208600 A JP2016208600 A JP 2016208600A JP 6740084 B2 JP6740084 B2 JP 6740084B2
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Description
本実施形態の気相成長装置は、反応室と、反応室内に設けられ基板を載置する環状ホルダであって、環状の外周部と、上面が外周部の上面よりも下方に位置する基板載置面を有する環状の内周部とを有し、基板載置面が周方向に凸領域と凹領域を繰り返す6回回転対称の曲面である環状ホルダと、環状ホルダの下方に設けられたヒータと、を備える。
本実施形態の気相成長装置及び環状ホルダは、内周部に、外周部の内側に突出した複数の島状の凸部を有すること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については、記述を省略する。
14 環状ホルダ
24 インヒータ(ヒータ)
50 外周部
52 内周部
52a 基板載置面
52b 溝
52c 凸部
64 環状ホルダ
H 凸領域
L 凹領域
W ウェハ(基板)
Claims (5)
- 反応室と、
前記反応室内に設けられ基板を載置する環状ホルダであって、環状の外周部と、前記外周部の上面よりも下方に位置する基板載置面を有する環状の内周部とを有し、前記基板載置面が周方向に凸領域と凹領域を繰り返す6回回転対称の曲面である環状ホルダと、
前記環状ホルダの下方に設けられたヒータと、
を備える気相成長装置。 - 前記内周部が、前記基板載置面と前記外周部との間に環状の溝を有する請求項1記載の気相成長装置。
- 前記内周部が、前記外周部の内側に突出した複数の凸部を有する請求項1又は請求項2記載の気相成長装置。
- 環状の外周部と、上面が前記外周部の上面よりも下方に位置する基板載置面を有する環状の内周部とを有し、前記基板載置面が周方向に凸領域と凹領域を繰り返す6回回転対称の曲面である環状ホルダ。
- 環状の外周部と、上面が前記外周部の上面よりも下方に設けられた基板載置面を有する環状の内周部とを有し、前記基板載置面が周方向に凸領域と凹領域を繰り返す6回回転対称の曲面である環状ホルダに、表面が{111}面のシリコン基板の<1−10>方向が、対向する前記凸領域を結ぶ方向又は対向する前記凹領域を結ぶ方向に一致するよう前記シリコン基板を載置し、
前記環状ホルダの下方に設けられたヒータを用いて前記シリコン基板を加熱し、
前記シリコン基板に膜を形成する気相成長方法。
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US15/789,654 US10204819B2 (en) | 2016-10-25 | 2017-10-20 | Vapor phase growth apparatus and ring-shaped holder having a curved mounting surface with convex and concave regions |
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