JP6653577B2 - プラスマエンハンスト原子層エッチングの方法 - Google Patents
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- 238000005530 etching Methods 0.000 title claims description 156
- 238000000034 method Methods 0.000 title claims description 56
- 239000007789 gas Substances 0.000 claims description 200
- 238000006243 chemical reaction Methods 0.000 claims description 81
- 239000012159 carrier gas Substances 0.000 claims description 51
- 239000012495 reaction gas Substances 0.000 claims description 41
- 239000011261 inert gas Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 35
- 230000008569 process Effects 0.000 claims description 29
- 238000010926 purge Methods 0.000 claims description 22
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 16
- 238000011144 upstream manufacturing Methods 0.000 claims description 12
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 239000000376 reactant Substances 0.000 claims description 6
- 230000005281 excited state Effects 0.000 claims description 5
- 229910052736 halogen Inorganic materials 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000007795 chemical reaction product Substances 0.000 claims description 4
- 238000001312 dry etching Methods 0.000 claims description 4
- 229910052756 noble gas Inorganic materials 0.000 claims description 4
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 150000002835 noble gases Chemical class 0.000 claims 1
- 239000010408 film Substances 0.000 description 25
- 238000000231 atomic layer deposition Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000003085 diluting agent Substances 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/3105—After-treatment
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
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- H01L21/3105—After-treatment
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
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- H01L21/67011—Apparatus for manufacture or treatment
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- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
Description
シリコン酸化膜は、約2のアスペクト比及び約50nmの開口幅を有するパターニングされた表面を有する300mm基板上にPEALDによって形成された。実施例1−12及び比較例1−3では、PEALEは、図1に示されたPEALE装置を用いて以下の表2に示される条件でシリコン酸化膜上にエッチングガスとしてC2F6又はC4F8を用いて行われた。PEALEの各サイクルにおいて使用されたシーケンスは、図2及び以下の表3に示される。Arガスは、エッチングガスラインのマスフローコントローラ22を通じて流れ、反応ガスとしても機能するキャリアガスとしてのみ供給された。窒素ガス、酸素ガス及び水素ガスは、反応ガスラインのマスフローコントローラ25、27及び28をそれぞれ通じて流れる反応ガスとして供給され、窒素ガスは、キャリアガスとして供給された。
エッチングガスの供給時間が変更された点以外は、上記の実施例5に基づいてALE処理を行った。図4は、本発明の実施形態に係る、サイクル当たりのエッチング速度(EPC)(nm/cycle)と、サイクル当たりのエッチングガス供給時間(秒)との関係を示すグラフである。図4に示されるように、供給時間が0.2秒に到達した後に、EPCは変化せず、自己制限吸着反応処理が行われた。
エッチングガスの供給時のパージ時間が変更された点以外は、上記の実施例5に基づいてALE処理を行った。図5は、本発明の実施形態に係る、サイクル当たりのエッチング速度(EPC)(nm/cycle)と、サイクル当たりのパージガス時間(秒)との関係を示すグラフである。図5に示されるように、パージガスが0.5秒に到達した後に、EPCは変化せず、エッチングガスの吸着が行われたことを示している。
Claims (18)
- 反応空間内の電極間に配置された基板上の層を、少なくとも1つのエッチングサイクルを含む原子層エッチング(ALE)処理によってエッチングする方法であって、前記エッチングサイクルは、
少なくともエッチングガスのためのキャリアガスとして不活性ガス流を前記反応空間に連続的に提供する工程と、
前記反応空間の上流の連続的な前記不活性ガス流にエッチングガスのパルスを提供し、前記反応空間内の前記基板の表面に前記エッチングガスを非励起状態で化学吸着する工程と、
前記反応空間内に不活性ガスの反応種を生成し、かつ前記エッチングガスが化学吸着された前記基板の表面を前記反応種と接触させるために、前記電極間にRFパワー放電のパルスを提供し、前記基板上の層をエッチングする工程と、
を備える方法。 - 前記エッチングガスは、ハロゲン含有ガス及び/又は炭化水素ガスである請求項1に記載の方法。
- 前記キャリアガスは、前記反応空間内の前記基板の表面に前記エッチングガスを非励起状態で化学吸着する工程において前記エッチングガスを前記基板の表面に化学吸着させるとともに、前記基板上の層をエッチングする工程において前記エッチングガスが化学吸着された層をプラズマ反応によってエッチングする反応ガスとしても機能する請求項1に記載の方法。
- 前記キャリアガス以外の、前記反応空間内の前記基板の表面に前記エッチングガスを非励起状態で化学吸着する工程において前記エッチングガスを前記基板の表面に化学吸着させるとともに、前記基板上の層をエッチングする工程において前記エッチングガスが化学吸着された層をプラズマ反応によってエッチングする反応ガスを前記反応空間に提供する工程を更に備える請求項1に記載の方法。
- 前記反応ガスは、ALE処理時に連続的に前記反応空間内に連続的に流れる、前記エッチングガスを前記基板の表面に化学吸着させるとともに、前記エッチングガスが化学吸着された層をプラズマ反応によってエッチングする不活性ガスを含む請求項4に記載の方法。
- 前記キャリアガスは、マスフローコントローラを通じて流れ、その後、前記反応空間の上流に配置されるガスマニホールドを通じて流れ、前記エッチングガスは、マスフローコントローラを通じて流れ、前記キャリアガス用のマスフローコントローラの下流かつ前記ガスマニホールドの上流で前記キャリアガス流と合流され、各反応ガスは、マスフローコントローラを通じて流れ、その後、前記ガスマニホールドにおいて前記キャリアガスと共に前記エッチングガスと合流される、請求項4に記載の方法。
- 前記不活性ガスは、希ガス及び窒素ガスからなる群から選択される請求項1に記載の方法。
- 前記反応ガスは、酸化ガス及び還元ガスからなる群から選択される少なくとも1つのガスを含む請求項4に記載の方法。
- 前記ALE処理は、0℃から200℃の温度で行われる請求項1に記載の方法。
- 前記エッチングガスのパルス及び前記RFパワー放電のパルスは、重複しない請求項1に記載の方法。
- 前記反応空間から余剰なエッチングガスを除去するために、前記エッチングガスのパルスと前記RFパワー放電のパルスとの間にパージ期間が取られ、前記反応空間から余剰な反応生成物を除去するために、前記RFパワー放電のパルスの後にパージ期間が取られる、請求項10に記載の方法。
- 前記ALE処理を通じて、前記エッチングガスとしてハロゲン含有ガス以外のガスが流れない請求項1に記載の方法。
- 前記基板の層は、凹部パターンを有する請求項1に記載の方法。
- 前記不活性ガスは、希ガスであり、前記基板の層は、前記反応空間に前記不活性ガスを供給することにより異方性エッチングされる請求項1に記載の方法。
- 前記ALE処理時に、(i)前記不活性ガスの流量が3000sccm以上である、(ii)RFパワーが250W以上である、(iii)圧力が300Pa以上である、の条件の少なくとも1つを採用する請求項14に記載の方法。
- 前記エッチングサイクルは、複数回繰り返される請求項1に記載の方法。
- 前記反応空間は、膜形成又はドライエッチング用の反応チャンバ内に形成される請求項1に記載の方法。
- 前記基板の層は、シリコン含有誘電層であり、エッチング速度は、0.01nm/min以上である請求項1に記載の方法。
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/598,532 | 2015-01-16 | ||
US14/598,532 US9396956B1 (en) | 2015-01-16 | 2015-01-16 | Method of plasma-enhanced atomic layer etching |
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JP2016134623A JP2016134623A (ja) | 2016-07-25 |
JP6653577B2 true JP6653577B2 (ja) | 2020-02-26 |
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US (1) | US9396956B1 (ja) |
JP (1) | JP6653577B2 (ja) |
KR (1) | KR102605757B1 (ja) |
CN (1) | CN105810580B (ja) |
TW (1) | TWI689012B (ja) |
Cited By (1)
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