JP6577959B2 - 圧電アクチュエータのための一体型前負荷機構 - Google Patents

圧電アクチュエータのための一体型前負荷機構 Download PDF

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Publication number
JP6577959B2
JP6577959B2 JP2016562550A JP2016562550A JP6577959B2 JP 6577959 B2 JP6577959 B2 JP 6577959B2 JP 2016562550 A JP2016562550 A JP 2016562550A JP 2016562550 A JP2016562550 A JP 2016562550A JP 6577959 B2 JP6577959 B2 JP 6577959B2
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Japan
Prior art keywords
actuator
contact surface
piezoelectric
frame
support element
Prior art date
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Expired - Fee Related
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JP2016562550A
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English (en)
Japanese (ja)
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JP2017514439A (ja
JP2017514439A5 (cg-RX-API-DMAC7.html
Inventor
ホンチ リ，
ホンチ リ，
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Newport Corp USA
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Newport Corp USA
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Publication of JP2017514439A5 publication Critical patent/JP2017514439A5/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006—Elastic elements, e.g. springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • B24C1/045—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass for cutting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02—Wire-cutting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2016562550A 2014-04-15 2015-04-08 圧電アクチュエータのための一体型前負荷機構 Expired - Fee Related JP6577959B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/253,087 US9425711B2 (en) 2014-04-15 2014-04-15 Integral preload mechanism for piezoelectric actuator
US14/253,087 2014-04-15
PCT/US2015/025006 WO2015160601A1 (en) 2014-04-15 2015-04-08 Integral preload mechanism for piezoelectric actuator

Publications (3)

Publication Number Publication Date
JP2017514439A JP2017514439A (ja) 2017-06-01
JP2017514439A5 JP2017514439A5 (cg-RX-API-DMAC7.html) 2018-04-19
JP6577959B2 true JP6577959B2 (ja) 2019-09-18

Family

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Family Applications (1)

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JP2016562550A Expired - Fee Related JP6577959B2 (ja) 2014-04-15 2015-04-08 圧電アクチュエータのための一体型前負荷機構

Country Status (6)

Country Link
US (2) US9425711B2 (cg-RX-API-DMAC7.html)
EP (1) EP3132533B1 (cg-RX-API-DMAC7.html)
JP (1) JP6577959B2 (cg-RX-API-DMAC7.html)
KR (1) KR102409300B1 (cg-RX-API-DMAC7.html)
CN (1) CN106471727B (cg-RX-API-DMAC7.html)
WO (1) WO2015160601A1 (cg-RX-API-DMAC7.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9425711B2 (en) 2014-04-15 2016-08-23 Newport Corporation Integral preload mechanism for piezoelectric actuator
US9964728B2 (en) * 2014-12-24 2018-05-08 Newport Corporation System and method for mounting and aligning optical components using single-rail mounting
KR20170109594A (ko) * 2015-01-29 2017-09-29 뉴포트 코포레이션 일체형 피코모터 장착부
JP7173540B2 (ja) * 2018-11-07 2022-11-16 有限会社メカノトランスフォーマ 圧電慣性回転機構およびそれに用いる駆動部
EP3959808B1 (en) 2019-04-24 2023-07-12 Micro-Controle - Spectra Physics Piezoelectric inertia actuator and method of manufacture
CN110492787B (zh) * 2019-08-08 2021-07-13 西安交通大学 一种均布应力压电简支梁振动能量收集器及能量收集方法
JP7526283B2 (ja) * 2020-04-16 2024-07-31 ミニスイス・ソシエテ・アノニム 駆動ユニット
DE102021102793A1 (de) * 2021-02-05 2022-08-11 Physik Instrumente (PI) GmbH & Co KG Vorspann-Vorrichtung und Antriebsvorrichtung mit einer Vorspann-Vorrichtung
CN113300632B (zh) * 2021-05-13 2022-07-29 杭州电子科技大学 用于光学镜头调焦的悬臂梁式超声波电机及其驱动方法

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Also Published As

Publication number Publication date
EP3132533A4 (en) 2017-12-13
KR102409300B1 (ko) 2022-06-14
US10389276B2 (en) 2019-08-20
US20160322919A1 (en) 2016-11-03
WO2015160601A1 (en) 2015-10-22
CN106471727B (zh) 2019-12-06
CN106471727A (zh) 2017-03-01
KR20160145126A (ko) 2016-12-19
JP2017514439A (ja) 2017-06-01
US20150295517A1 (en) 2015-10-15
US9425711B2 (en) 2016-08-23
EP3132533B1 (en) 2019-03-13
EP3132533A1 (en) 2017-02-22

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