JP2017514439A5 - - Google Patents

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Publication number
JP2017514439A5
JP2017514439A5 JP2016562550A JP2016562550A JP2017514439A5 JP 2017514439 A5 JP2017514439 A5 JP 2017514439A5 JP 2016562550 A JP2016562550 A JP 2016562550A JP 2016562550 A JP2016562550 A JP 2016562550A JP 2017514439 A5 JP2017514439 A5 JP 2017514439A5
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JP
Japan
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frame
section
actuator
contact surface
actuator frame
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JP2016562550A
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English (en)
Japanese (ja)
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JP6577959B2 (ja
JP2017514439A (ja
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Priority claimed from US14/253,087 external-priority patent/US9425711B2/en
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Publication of JP2017514439A5 publication Critical patent/JP2017514439A5/ja
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Publication of JP6577959B2 publication Critical patent/JP6577959B2/ja
Expired - Fee Related legal-status Critical Current
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JP2016562550A 2014-04-15 2015-04-08 圧電アクチュエータのための一体型前負荷機構 Expired - Fee Related JP6577959B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/253,087 US9425711B2 (en) 2014-04-15 2014-04-15 Integral preload mechanism for piezoelectric actuator
US14/253,087 2014-04-15
PCT/US2015/025006 WO2015160601A1 (en) 2014-04-15 2015-04-08 Integral preload mechanism for piezoelectric actuator

Publications (3)

Publication Number Publication Date
JP2017514439A JP2017514439A (ja) 2017-06-01
JP2017514439A5 true JP2017514439A5 (cg-RX-API-DMAC7.html) 2018-04-19
JP6577959B2 JP6577959B2 (ja) 2019-09-18

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ID=54265905

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JP2016562550A Expired - Fee Related JP6577959B2 (ja) 2014-04-15 2015-04-08 圧電アクチュエータのための一体型前負荷機構

Country Status (6)

Country Link
US (2) US9425711B2 (cg-RX-API-DMAC7.html)
EP (1) EP3132533B1 (cg-RX-API-DMAC7.html)
JP (1) JP6577959B2 (cg-RX-API-DMAC7.html)
KR (1) KR102409300B1 (cg-RX-API-DMAC7.html)
CN (1) CN106471727B (cg-RX-API-DMAC7.html)
WO (1) WO2015160601A1 (cg-RX-API-DMAC7.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
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US9425711B2 (en) 2014-04-15 2016-08-23 Newport Corporation Integral preload mechanism for piezoelectric actuator
US9964728B2 (en) * 2014-12-24 2018-05-08 Newport Corporation System and method for mounting and aligning optical components using single-rail mounting
KR20170109594A (ko) * 2015-01-29 2017-09-29 뉴포트 코포레이션 일체형 피코모터 장착부
JP7173540B2 (ja) * 2018-11-07 2022-11-16 有限会社メカノトランスフォーマ 圧電慣性回転機構およびそれに用いる駆動部
EP3959808B1 (en) 2019-04-24 2023-07-12 Micro-Controle - Spectra Physics Piezoelectric inertia actuator and method of manufacture
CN110492787B (zh) * 2019-08-08 2021-07-13 西安交通大学 一种均布应力压电简支梁振动能量收集器及能量收集方法
JP7526283B2 (ja) * 2020-04-16 2024-07-31 ミニスイス・ソシエテ・アノニム 駆動ユニット
DE102021102793A1 (de) * 2021-02-05 2022-08-11 Physik Instrumente (PI) GmbH & Co KG Vorspann-Vorrichtung und Antriebsvorrichtung mit einer Vorspann-Vorrichtung
CN113300632B (zh) * 2021-05-13 2022-07-29 杭州电子科技大学 用于光学镜头调焦的悬臂梁式超声波电机及其驱动方法

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