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US3902085A - Electromechanical translation apparatus - Google Patents

Electromechanical translation apparatus Download PDF

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US3902085A
US3902085A US52650074A US3902085A US 3902085 A US3902085 A US 3902085A US 52650074 A US52650074 A US 52650074A US 3902085 A US3902085 A US 3902085A
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shaft
sections
section
end
members
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Richard A Bizzigotti
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Burleigh Instruments Inc
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Burleigh Instruments Inc
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023Inchworm motors

Abstract

An inchworm translating device is disclosed which provides translation with a high degree of uniformity of motion. The device includes a piezoelectric driver having three driver sections in end-to-end relationship around the shaft. This driver is referenced to a housing and provides forces for moving the shaft with respect to the housing. The sections of the driver are interconnected by bridging members which assemble the driver sections in integral relationship and yet allow movement of the driver sections into and out of engagement with the shaft without imparting undesired motion to the shaft.

Description

Unite Bizzigotti [451 Aug. 26, 1975 [541 ELECTROMECHANICAL TRANSLATION 3,218,534 10/1965 Casey 318/135 3,389,274 6/1968 Robertson 310/86 APPARATUS [75] Inventor: Richard A. Bizzigotti, Walworth,

[73] Assignee: Burleigh Instruments, Inc., East Rochester, NY.

[22] Filed: Nov. 25, 1974 [21] Appl. No.: 526,500

[521 US. Cl. 310/83; 310/8; 310/86; 310/91; 310/96; 310/25; 310/26; 318/135 [51] Int. Cl. ..H01L 41/08 [58] Field of Search 310/8, 8.1, 8.3, 8.5, 8.6, 310/96, 9.1, 9.4, 26, 25; 318/116, 118, 135

[56] References Cited UNlTED STATES PATENTS 3,138,749 6/1964 Stibitz 310/26 3,217,218 11/1965 Steele ..3l8/118 Primary Examiner-Mark O. Budd Attorney, Agent, or FirmMartin Lukacher, Esq.

[ 57 1 ABSTRACT An inchworm translating device is disclosed which provides translation with a high degree of uniformity of motion. The device includes a piezoelectric driver having three driver sections in end-to-end relationship around the shaft. This driver is referenced to a housing and provides forces for moving the shaft with respect to the housing. The sections of the driver are interconnected by bridging members which assemble the driver sections in integral relationship and yet allow movement of the driver sections into and out of engagement with the shaft without imparting undesired motion to the shaft.

10 Claims, 3 Drawing Figures ELECTROMECHANICAL TRANSLATION APPARATUS The present invention relates to electromechanical translation apparatus and particularly to electromechanical translators which are capable of motion in incremental steps and which are known as inchworms.

The present invention is especially suitable for use in linear actuators and positioners where precision and uniform travel is required, either continuously or in steps.

Reference is hereby made to US. Patent Application Ser. No. 474,831, filed May 30, 1974 in the name of William G. May Jr., which has the same assignee as the present application.

The referenced application discloses an electromechanical translator of the type in which the present invention may be embodied. More particularly the translator described in the referenced application includes a housing and a shaft which is mounted in the housing for movement with respect to the housing. There is also mounted in the housing and referenced to the housing, a piezoelectric driver. The driver has a plurality of sections which are disposed in end-to-end relationship along the shaft and may be in the form of cylindrical tubes around the shaft. Thus, there may be three sections in the driver, a central section and two end sections on opposite sides of the central section. The side surfaces of the end section which face the shaft are disposed in juxtaposition with the shaft. The central section has its side surface which faces the shaft laterally spaced therefrom. In order to provide precise translatory motion of the shaft, voltage is applied to the end sections so as to bring them into engagement with the shaft; in other words, to clamp them on the shaft. A voltage, preferably in the form of a staircase voltage waveform is applied to the central section causing it to expand or contract in incremental steps, each step corresponding to a different step of the staircase waveform. The force due to the expansion or contraction of the central section is then transferred to the shaft by way of the end section which is clamped thereto. This force may also be transferred by the shaft to a load which can be accurately positioned or moved over the relatively long distance over which the shaft may be driven. The sequence in which the end sections are clamped to the shaft together with the sequence of contraction or expansion of the central section determines the direction of travel of the shaft.

It has been found that in accordance with this invention that the non-uniformity of motion of the shaft, and especially transient motions which may occur as the end sections are clamped and released from the shaft can be substantially eliminated. Particularly, such nonuniformities are reduced by interconnecting the adjacent sections by means of members which assemble the sections together in end-to-end relationship as a unitary structure, while at the same time leaving gaps or spaces between the opposed ends of the adjacent sections. The members connect the motion section, which is disposed between the clamping sections, to the clamping sections at their centers in the axial direction. The end sections change both in length and diameter with changes in the voltage applied thereto. When the end sections are clamped to or released from the shaft, any motion is bi-directional with respect to the axial center of the end sections. This bi-directiona] motion results in no shaft motion since the connection of the end sections is to their axial centers. Also any wear upon the chain is uniformly distributed. Thus, when a section is clamped to or released from the shaft, any motion occurring upon such clamping or release is not transferred to the shaft by way of any other section of the driver. Rather, such motion is lost in the gaps between the driver sections. Accordingly, discontinuities in motion of the shaft are prevented and more uniform motion produced by the translator.

Accordingly, it is an object of the present invention to provide improved electromechanical translation apparatus.

It is a further object of the present invention to provide an improved electromechanical translator of the inchworm type in which discontinuities in motion produced by the device are substantially eliminated.

It is a still further object of the present invention to provide an improved inchworm type electromechanical translator having greater uniformity in the motion of its output shaft than in translators of the same type heretofore provided.

The foregoing and other objects and advantages of the present invention will become more apparent from a reading of the following description in connection with the accompanying drawings in which FIG. 1 is a longitudinal sectional view of an electromechanical translation device embodying the invention;

FIG. 2 is a sectional view of the device shown in FIG. 1, the section being taken along the line 22 in FIG. 1; and

FIG. 3 is anenlarged perspective view of one of th elements used'in the device shown in FIGS. 1 and 2.

Referring more particularly to the drawings, there is shown an electromechanical translator device having as its principal parts a cylindrical housing 10, a shaft 12, and a piezoelectric driver 14. The driver is referenced to the housing by being attached thereto via an assembly which includes a cylindrical tube 40 which is part of the housing 10 as well as a pair of sector-shaped members 46 (the latter members being shown in FIG. 2 as 46a and 46b.

The shaft 12 has, attached to the front end thereof, a spindle 18 which forms part of the shaft assembly. The shaft itself is a cylindrical rod preferably made of material having the same thermal coefficient of expansion as the piezoelectric material in the driver 14. A ceramic material which provides the requisite mechanical and thermal stability is also suitable for use in the shaft 12. The spindle 18 is preferably of metal and has a flange 20 which is attached to the forward end of the shaft 12 as by means of an adhesive, such as an epoxy adhesive.

A metal having a low thermal coefficient of expansion is preferably used for the spindle 18. The metal sold under the trade name Invar being suitable. A groove or key way 22 extends along the length of the spindle 18. A screw 24 may be inserted into the tip of the spindle and may be used for the attachment of the spindle and therefore of the shaft to a load. This load.

may, for example, be various types of hardware such as optical mirrors and other precision mechanisms which require precision location, translation or other adjustments.

A ring 26 which may be a snap ring is located at the front of the flange 20. Another ring 28 is located at the rear end of the shaft 12. This ring may be provided as an end flange on a boss 30 which is attached to the rear end of the shaft 12. These rings'26 and 28 are of conductive material and provide parts of end limit switches for stopping the motion of the shaft, which is travelling in the forward (to the left) or rearward (to the right) direction.

The housing has a forward section 32 of cylindrical shape. A threaded reduced diameter portion 34 at the front of the housing section 32 provides for attachment, as by a nut 35, of the housing to a stand or other support for the translator device.

A threaded hole 37 extends radially through the front of the housing section 32. A screw 36 in this hole 37 extends into the key way groove 22 and constrains the shaft assembly to longitudinal motion. The front ends of the housing section 32 and the driver 14 thus support the shaft 12 in the housing.

The rear end 38 of the housing 10 is a cylindrical cup which screws into the central cylinder 40. The forward section 32 of the housing also screws into the central cylinder 40 so as to provide a unitary housing assembly.

The cylinder 40 has a radial opening 42 through which cable leads 44 extend to make contact with the driver 14 and the limit switches.

The piezoelectric driver is referenced to and held in the housing by means of a sector-shape member 46 which may be provided by' two abutting sector-shape members 46a and 46b (FIG. 2). These members are disposed in the forward end in the cylinder 40 and are in abutment with an internal shoulder 48 of the cylinder 40. The two parts 46a and 46b of the sector-shape member 46 occupy approximately 120 each of the interperiphery of the cylinder 40; The outer periphery of the sector-shape members are secured, as by means of an epoxy adhesive, to the cylinder 40. The inner periphery of the sector 46 is secured to the driver 14, preferably at the center (viz., at the midpoint of the length) of the driver 14. An opening 50 is provided above the sector-shape members and along the upper portion of the cylinder 40 through which the leads extend from the driver and the end limit switches into the cable 44.

The piezoelectric driver 14 is a cylindrical member in' the form of a cylindrical tube around the shaft 12. The driver is made up of a plurality of sections 54, 56 and 58, each of which is a cylindrical tube. The front section 54 and the rear section 56 have a tight sliding fit with the shaft 12. The center section 58 has the same outer diameter as the other sections 54 and 56. The inner diameter of the central section 58 is, however, larger than the inner diameter of the forward and rear sections 54 and 56. In other words, each of the sections have side surfaces which in the case of the illustrated sections are cylindrical surfaces which are laterally spaced from each other. These lateral surfaces are separated by a thickness which defines the radial dimensions of the end surfaces of the cylinder. The side surfaces of the forward and rear sections 54 and 56 which face the shaft 12 are closely spaced thereto while the side surface of the central section 53, which faces the shaft 12, is laterally spaced therefrom. The space is shown in the drawing as a cylindrical clearance 60. This clearance is sufficiently large so that when the center section 58 is extended by piezoelectric action, the clearance exists between the side surface of the central section which faces the shaft and the peripheral surface of the shaft. All of the sections may be made of ceramic type piezoelectric material which may suitably be the lead zirconate-titanate material which is commonly known as PZT. H

The end surfaces of the section are longitudinally spaced from each other in the direction of the axis of the shaft 12 so as to provide spaces or gaps 55 and 57 therebetween. These gaps are bridged by members 99 in the case of the front gape 55 and other members 101 in the case of the rear gap 57. These members 99 and 101 assemble the sections as a unitary structure. For ease of assembly, three sets of members 99a, 99b and 99c are used to connect and assemble the forward and central section 54 and 58, and three similarly disposed sets of members 101 interconnect and assemble the center and rear sections 58 and 56. The connection of the members 99 is to the longitudinal center of the clamping section 54 and the connection of the members 101 is to the longitudinal center of the clamping section 56.

Each of these members 99 and 101 is similar. The members are sector shaped, each sector encompassing approximately 60. The sectors are arranged 120 apart around the gaps 55 and 57 which they bridge. The sector shaped members 99 and 101 are U shaped in longitudinal cross section and have a central portion 105 extending between legs 103. The end legs 10.3 extend to the longitudinal center of the sections 54 and 56 and are there attached to the sections 54 and 56. The central portion is spaced laterally away from the outer side surfaces of the drive sections which they connect. The legs extend radially inward to the driver section and are connected thereto as by epoxy adhesive. The sector shaped members 99 and 101 are desirably made of material having the same thermal coefficient of expansion as the material of the driver section 54, 56 and 58, and are desirably of ceramic material, aluminum oxide being suitable.

Electrodes are provided on the outer as well as on the inner side surfaces of the driver sections. Silver which is fused to the sections may suitably provide the electrodes. Electrodes 62, 64 and 66 are provided on the inner side surfaces of the sections 56, 58 and 54, respectively. These electrodes may be brought around an end surface of their respective section to the outer side surface thereof where paths 67, 69 and 71 of the electrode material are formed. These paths provide facility connection of the lead as by soldering. The outer side surfaces of the sections 56, 58 and 54 have electrodes 70, 72 and 7 formed thereon. These electrodes are separated from the paths 67, 69 and 71 and have individual ones of the leads connected thereto. Preferably the legs 103 of the sector-shaped members 99 and 101 which assemble the driver sections 54, 56 and 58 are connected after the electrodes are applied to the driver sections.

The limit switches, which include the rings 26 and 28, are provided by rings of insulating material and 92 to which pairs of conductive pads 94 and 96 are attached. When contact is made between a ring and its associated pads, a switch closure results which indicates that the shaft has moved to its maximum limit, either in the forward direction or in the switch closures between the ring 28 and the pads 96 or in the reverse direction when the closure is made between the pads 94 and the ring 26.

The operation of the device shown in FIGS. 1 to 3 is obtained by applying voltages alternately to the electrodes of the forward and rear sections 54 and 56 and then applying voltages to the central section 58 so as to contract or expand that section. The direction of travel of the shaft depends upon the sequence in which the voltages are applied to the forward and rear sections together with the sequence of the application of voltages for obtaining expansion or contraction of the center section 54. These sequences and the electronic circuit apparatus for generating them are described in detail in the above-referenced application which is found in the name of William G. May, Jr. When the shaft is travelling, either in the forward or reverse direction, the forward and rear sections are alternately clamped and released from the shaft. Each clamping and release is followed by a contraction or expansion of the center section 58. When an end (forward or rear) section is released, some longitudinal contraction thereof occurs. Similarly, when an end section is clamped to the shaft 12 some longitudinal expansion thereof occurs. Such contraction or expansion results in forces which are prevented from being transferred into discontinuities of motion of the shaft 12 by the arrangement of bridging members 99 and 101 which assemble the drivers in end-to-end but spaced relationship. The sections 54 and 56 which are clamped to and released from the shaft are attached to the central section at their longitudinal centers (viz, midpoints). By virtue of the bidirectional nature of the motion of the sections 54 and 56 about their midpoints, the motion is not transferred to the members 99 and 101. The arrangement thus precludes any direct transfer of motion from one end section to the other via the central section 58. Discontinuity in motion of the shaft which could arise upon the release of the forward or end sections 54 and 56 are thus avoided and more uniformity of motion obtained. It will be appreciated of course that the increments of such discontinuities may be extremely small, say less than 21 micron. Inasmuch as the translator devices provided by this invention can afford high resolution of motion within the range of such discontinuities, it is advantageous to the operation of the device that such discontinuities be eliminated.

From the foregoing description it will be apparent that there has been provided improved electromechanical translation apparatus. While an improved inchworm translator device has been described herein for purposes of illustrating the invention, it will be appreciated that variations and modifications thereof within the scope of the invention will undoubtedly suggest themselves to those skilled in the art.

Accordingly, the foregoing description should be taken merely as illustrative and not in any limiting sense.

What is claimed is:

l. Electromechanical translational apparatus which comprises a housing,

a shaft axially movable with respect to said housing,

a piezoelectric driver attached to said housing, said driver having a plurality of sections, each having side surfaces and end surfaces,

said sections being disposed adjacent to each other in end-to-end relationship axially of said shaft with the end surfaces of said adjacent ones of said sections opposed to and spaced from each other,

At least one of said sections having one of its side surfaces facing and in juxtaposition with said shaft,

another of said sections having one of its side surfaces facing and laterally spaced from said shaft,

members disposed in bridging relationship with the opposed ends of the adjacent sections and the space therebetween, said members being connected to the side surfaces of said sections opposite to the side surfaces thereof which face said shaft so as to join said adjacent sections together with the center of said one section being connected to said members, and

means for applying voltage to said one section to bring said one section into engagement with said shaft and for also applying voltage to said other section to change the length thereof whereby to apply force to said shaft to translate said shaft with respect to said housing.

2. The invention as set forth in claim 1 wherein said piezoelectric driver has three of said sections which are disposed successively in a direction axially of said shaft, with the end surfaces of adjacent ones of said sections opposed to and spaced from each so as to define first and second gaps therebetween, a plurality of said members being provided and being disposed in bridging relationship with said first gap and over said second gap respectively, said members bridging said first gap being connected to the ones of said side surfaces facing away from said shaft of those of said sections which define said first gap at the longitudinal centers thereof, and said members bridging said second gap being connected to the ones of said side surfaces of those of said sections which define said second gaps so as to assemble said driver into a unitary structure.

3. The invention as set forth in claim 2 wherein the one of said three sections which defines both of said gaps is located central between the others of said three sections, said central section having the side surfaces thereof which faces said shaft laterally spaced therefrom, the others of said sections having the side surfaces thereof which face said shaft in juxtaposition with the surface of said shaft so as to engage said shaft when voltage is applied to said other sections and to transfer forces to said shaft for translating said shaft when voltage is applied to said central section to change the length thereof.

4. The invention as set forth in claim 1 wherein said shaft is cylindrical and said sections are cylindrical tubes around said shaft, said member being at least a sector of a cylinder and being disposed around said shaft and also around said sections in bridging relationship with the space therebetween.

5. The invention as set forth in claim 4 wherein said member is generally U shaped in a diametrical cross section taken through the axis of said shaft, and having legs extending radially inwardly to the outer side surfaces of different ones of said sections and being connected thereto, the central portion of said member being laterally spaced in a direction away from said sec tions and being disposed over said gap.

6. The invention as set forth in claim 5 wherein a plurality of said members are provided each being sector shaped and spaced from each other around the said sections and in bridging relationship with the space therebetween.

7. The invention as set forth in claim 6 wherein said members are constructed of ceramic material having the same coefiicient of expansion as the material of said sections.

from each other around said gaps.

10. The invention as set forth in claim 8 wherein said members are U shaped in longitudinal cross section and having end legs and a central portion, said legs being connected to the outer side surfaces of the sections on opposite sides of the gap and said central portions being laterally spaced from said side surfaces of said sections and bridging the gap therebetween.

Claims (10)

1. Electromechanical translational apparatus which comprises a housing, a shaft axially movable with respect to said housing, a piezoelectric driver attached to said housing, said driver having a plurality of sections, each having side surfaces and end surfaces, said sections being disposed adjacent to each other in end-toend relationship axially of said shaft with the end surfaces of said adjacent ones of said sections opposed to and spaced from each other, At least one of said sections having one of its side surfaces facing and in juxtaposition with said shaft, another of said sections having one of its side surfaces facing and laterally spaced from said shaft, members disposed in bridging relationship with the opposed ends of the adjacent sections and the space therebetween, said members being connected to the side surfaces of said sections opposite to the side surfaces thereof which face said shaft so as to join said adjacent sections together with the center of said one section being connected to said members, and means for applying voltage to said one section to bring said one section into engagement with said shaft and for also applying voltage to said other section to change the length thereof whereby to apply force to said shaft to translate said shaft with respect to said housing.
2. The invention as set forth in claim 1 wherein said piezoelectric driver has three of said sections which are disposed successively in a direction axially of said shaft, with the end surfaces of adjacent ones of said sections opposed to and spaced from each so as to define first and second gaps therebetween, a plurality of said members being provided and being disposed in bridging relationship with said first gap and over said second gap respectively, said members bridging said first gap being connected to the ones of said side surfaces facing away from said shaft of those of said sections which define said first gap at the longitudinal centers thereof, and said members bridging said second gap being connected to the ones of said side surfaces of those of said sections which define said second gaps so as to assemble said Driver into a unitary structure.
3. The invention as set forth in claim 2 wherein the one of said three sections which defines both of said gaps is located central between the others of said three sections, said central section having the side surfaces thereof which faces said shaft laterally spaced therefrom, the others of said sections having the side surfaces thereof which face said shaft in juxtaposition with the surface of said shaft so as to engage said shaft when voltage is applied to said other sections and to transfer forces to said shaft for translating said shaft when voltage is applied to said central section to change the length thereof.
4. The invention as set forth in claim 1 wherein said shaft is cylindrical and said sections are cylindrical tubes around said shaft, said member being at least a sector of a cylinder and being disposed around said shaft and also around said sections in bridging relationship with the space therebetween.
5. The invention as set forth in claim 4 wherein said member is generally ''''U'''' shaped in a diametrical cross section taken through the axis of said shaft, and having legs extending radially inwardly to the outer side surfaces of different ones of said sections and being connected thereto, the central portion of said member being laterally spaced in a direction away from said sections and being disposed over said gap.
6. The invention as set forth in claim 5 wherein a plurality of said members are provided each being sector shaped and spaced from each other around the said sections and in bridging relationship with the space therebetween.
7. The invention as set forth in claim 6 wherein said members are constructed of ceramic material having the same coefficient of expansion as the material of said sections.
8. The invention as set forth in claim 3 wherein said shaft is cylindrical and said sections are cylindrical tubes around said shaft, said members being at least cylindrical tubular sections, which are disposed around said sections and in bridging relationship with said gaps therebetween.
9. The invention as set forth in claim 8 wherein a plurality of said members are provided for each of said gaps, said members being sector-shaped and spaced from each other around said gaps.
10. The invention as set forth in claim 8 wherein said members are ''''U'''' shaped in longitudinal cross section and having end legs and a central portion, said legs being connected to the outer side surfaces of the sections on opposite sides of the gap and said central portions being laterally spaced from said side surfaces of said sections and bridging the gap therebetween.
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Cited By (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4221995A (en) * 1978-07-24 1980-09-09 The United States Of America As Represented By The United States Department Of Energy Linear motor drive system for continuous-path closed-loop position control of an object
US4408832A (en) * 1981-12-07 1983-10-11 United Technologies Corporation Mirror adjusting fixture
US4454441A (en) * 1982-02-12 1984-06-12 West Electric Company, Ltd. Piezoelectric driving apparatus
EP0112454A2 (en) * 1982-10-22 1984-07-04 Hitachi, Ltd. Rotary actuator
US4570096A (en) * 1983-10-27 1986-02-11 Nec Corporation Electromechanical translation device comprising an electrostrictive driver of a stacked ceramic capacitor type
DE3531099A1 (en) * 1984-08-31 1986-05-07 Tokyo Juki Industrial Co Ltd A piezoelectric motor
US4590380A (en) * 1984-01-18 1986-05-20 Nippon Seiko Kabushiki Kaisha Means for locating an ultra-precision positioning of a table
US4602702A (en) * 1983-12-28 1986-07-29 Jidosha Kiki Co., Ltd. Brake apparatus
US4622483A (en) * 1983-03-24 1986-11-11 Staufenberg Jr Charles W Piezoelectric electromechanical translation apparatus and method
US4623044A (en) * 1983-12-22 1986-11-18 Jidosha Kiki Co., Ltd. Brake apparatus
US4636679A (en) * 1986-01-15 1987-01-13 The United States Of America As Represented By The Secretary Of The Air Force Piezoelectrically driven fast response high-torque clutch unit
US4757223A (en) * 1986-01-21 1988-07-12 Dainippon Screen Mfg. Co., Ltd. Linear actuator
DE3819005A1 (en) * 1987-06-05 1989-01-05 Videoton Elekt Vallalat Method and arrangement for determining the diameter of light bundles
US4874979A (en) * 1988-10-03 1989-10-17 Burleigh Instruments, Inc. Electromechanical translation apparatus
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
US5017820A (en) * 1990-04-23 1991-05-21 Rockwell International Corporation Piezoelectric rotary union system
US5027027A (en) * 1988-08-02 1991-06-25 Quick Technologies Ltd. Electromechanical translation apparatus
DE4117538C1 (en) * 1991-05-29 1992-07-09 Ant Nachrichtentechnik Gmbh, 7150 Backnang, De
US5136201A (en) * 1990-04-27 1992-08-04 Rockwell International Corporation Piezoelectric robotic articulation
US5319257A (en) * 1992-07-13 1994-06-07 Martin Marietta Energy Systems, Inc. Unitaxial constant velocity microactuator
US5351789A (en) * 1991-02-28 1994-10-04 Nec Corporation Positioning mechanism
US5410206A (en) * 1993-04-06 1995-04-25 New Focus, Inc. Piezoelectric actuator for optical alignment screws
US5564840A (en) * 1996-01-02 1996-10-15 The Torrington Company Preload adjustment apparatus and method
US5780957A (en) * 1996-11-12 1998-07-14 Meritor Light Vehicle Systems, Inc. Moving linear piezoelectric motor for vehicle applications
US5984501A (en) * 1996-03-25 1999-11-16 Seiko Seiki Kabushiki Kaisha Super-precision positioning system
US6188161B1 (en) * 1997-06-02 2001-02-13 Minolta Co., Ltd. Driving apparatus using transducer
US6300692B1 (en) 2000-03-29 2001-10-09 Ford Global Technologies, Inc. Linear actuator with expansion device
US6429573B2 (en) 2000-06-23 2002-08-06 The Penn State Research Foundation Smart material motor with mechanical diodes
US6437226B2 (en) 2000-03-07 2002-08-20 Viking Technologies, Inc. Method and system for automatically tuning a stringed instrument
US6465931B2 (en) 2000-03-29 2002-10-15 Qortek, Inc. Device and method for driving symmetric load systems
US6548938B2 (en) 2000-04-18 2003-04-15 Viking Technologies, L.C. Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator
US20030161492A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Frequency response equalization system for hearing aid microphones
US20030163021A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Method and system for external assessment of hearing aids that include implanted actuators
US20030161481A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Method and system for external assessment of hearing aids that include implanted actuators
US20030161482A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Method and system for external assessment of hearing aids that include implanted actuators
US20030229262A1 (en) * 2001-11-20 2003-12-11 Easter James Roy Apparatus and method for ossicular fixation of implantable hearing aid actuator
US20040045148A1 (en) * 2002-06-21 2004-03-11 Jeff Moler Uni-body piezoelectric motor
US6712754B2 (en) 2002-02-26 2004-03-30 Otologics Llc Method and system for positioning implanted hearing aid actuators
US6717332B2 (en) 2000-04-18 2004-04-06 Viking Technologies, L.C. Apparatus having a support structure and actuator
US6759790B1 (en) 2001-01-29 2004-07-06 Viking Technologies, L.C. Apparatus for moving folded-back arms having a pair of opposing surfaces in response to an electrical activation
US20050035687A1 (en) * 2003-03-04 2005-02-17 Qin Xu Electromechanical translation apparatus
US6870305B2 (en) 2002-02-06 2005-03-22 Viking Technologies, L.C. Apparatus for moving a pair of opposing surfaces in response to an electrical activation
US20050131272A1 (en) * 2003-12-11 2005-06-16 Bernd Waldmann Electrophysiological measurement method and system for positioning an implantable, hearing instrument transducer
US20060049718A1 (en) * 2002-09-27 2006-03-09 Amir Khajepour Micro-positioning device
US20060197167A1 (en) * 2005-03-03 2006-09-07 Pratt & Whitney Canada Corp. Electromagnetic actuator
US20060247488A1 (en) * 2005-04-27 2006-11-02 Bernd Waldmann Implantable hearing aid actuator positioning
US20070035856A1 (en) * 2003-01-28 2007-02-15 John Galpin Multi-axis positioner
US7278963B2 (en) 2003-01-27 2007-10-09 Otologics, Llc Implantable hearing aid transducer with advanceable actuator to facilitate coupling with the auditory system
DE102005052132B4 (en) * 2005-10-28 2008-02-14 Universität Hamburg Piezoelectric mover
US20080051623A1 (en) * 2003-01-27 2008-02-28 Schneider Robert E Simplified implantable hearing aid transducer apparatus
US20080074000A1 (en) * 2006-03-08 2008-03-27 Dynamic Structures And Materials, Llc Spring biasing locking mechanism for step and repeat motors
US7368856B2 (en) 2003-04-04 2008-05-06 Parker-Hannifin Corporation Apparatus and process for optimizing work from a smart material actuator product
US20090001852A1 (en) * 2007-05-17 2009-01-01 Nikon Corporation Piezoelectric actuator, piezoelectric actuator device, lens barrel, optical device and manufacturing method thereof
US20090167113A1 (en) * 2004-02-20 2009-07-02 Michael John Dixon Positioner device
US20100290138A1 (en) * 2007-01-18 2010-11-18 Newport Corporation Optical adjustment mounts with piezoelectric inertia driver
US8482868B2 (en) 2010-07-15 2013-07-09 Newport Corporation Optical adjustable mounts with absolute position feedback
US20150287508A1 (en) * 2012-12-21 2015-10-08 Olympus Winter & Ibe Gmbh Electromagnetic actuator for a surgical instrument and method for setting a stroke distance
EP2995775A1 (en) 2014-09-15 2016-03-16 Siemens Aktiengesellschaft Handheld device for driving a guide vane into a vane groove
US9312790B2 (en) 2013-09-13 2016-04-12 Physik Instrumente (Pi) Gmbh & Co. Kg Compact versatile stick-slip piezoelectric motor
US9425711B2 (en) 2014-04-15 2016-08-23 Newport Corporation Integral preload mechanism for piezoelectric actuator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3138749A (en) * 1962-03-05 1964-06-23 George R Stibitz Incremental feed mechanisms
US3217218A (en) * 1962-07-23 1965-11-09 Floyd G Steele Alternating energy control system
US3218534A (en) * 1965-11-16 Electromagnetic linear positioning apparatus
US3389274A (en) * 1965-12-06 1968-06-18 Perkin Elmer Corp Peristaltic actuator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218534A (en) * 1965-11-16 Electromagnetic linear positioning apparatus
US3138749A (en) * 1962-03-05 1964-06-23 George R Stibitz Incremental feed mechanisms
US3217218A (en) * 1962-07-23 1965-11-09 Floyd G Steele Alternating energy control system
US3389274A (en) * 1965-12-06 1968-06-18 Perkin Elmer Corp Peristaltic actuator

Cited By (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4221995A (en) * 1978-07-24 1980-09-09 The United States Of America As Represented By The United States Department Of Energy Linear motor drive system for continuous-path closed-loop position control of an object
US4408832A (en) * 1981-12-07 1983-10-11 United Technologies Corporation Mirror adjusting fixture
US4454441A (en) * 1982-02-12 1984-06-12 West Electric Company, Ltd. Piezoelectric driving apparatus
EP0112454A3 (en) * 1982-10-22 1986-12-10 Hitachi, Ltd. Rotary actuator
EP0112454A2 (en) * 1982-10-22 1984-07-04 Hitachi, Ltd. Rotary actuator
US4468583A (en) * 1982-10-22 1984-08-28 Hitachi, Ltd. Piezoelectric rotary actuator
US4622483A (en) * 1983-03-24 1986-11-11 Staufenberg Jr Charles W Piezoelectric electromechanical translation apparatus and method
US4570096A (en) * 1983-10-27 1986-02-11 Nec Corporation Electromechanical translation device comprising an electrostrictive driver of a stacked ceramic capacitor type
US4623044A (en) * 1983-12-22 1986-11-18 Jidosha Kiki Co., Ltd. Brake apparatus
US4602702A (en) * 1983-12-28 1986-07-29 Jidosha Kiki Co., Ltd. Brake apparatus
US4607166A (en) * 1984-01-18 1986-08-19 Nippon Seiko Kabushiki Kaisha Means for locating an ultra-precision positioning of a table
US4590380A (en) * 1984-01-18 1986-05-20 Nippon Seiko Kabushiki Kaisha Means for locating an ultra-precision positioning of a table
DE3531099A1 (en) * 1984-08-31 1986-05-07 Tokyo Juki Industrial Co Ltd A piezoelectric motor
US4777398A (en) * 1984-08-31 1988-10-11 Tokyo Juki Industrial Co., Ltd. Piezoelectric motor
US4636679A (en) * 1986-01-15 1987-01-13 The United States Of America As Represented By The Secretary Of The Air Force Piezoelectrically driven fast response high-torque clutch unit
US4757223A (en) * 1986-01-21 1988-07-12 Dainippon Screen Mfg. Co., Ltd. Linear actuator
DE3819005A1 (en) * 1987-06-05 1989-01-05 Videoton Elekt Vallalat Method and arrangement for determining the diameter of light bundles
US5027027A (en) * 1988-08-02 1991-06-25 Quick Technologies Ltd. Electromechanical translation apparatus
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
US4874979A (en) * 1988-10-03 1989-10-17 Burleigh Instruments, Inc. Electromechanical translation apparatus
EP0362613A2 (en) * 1988-10-03 1990-04-11 Burleigh Instruments, Inc. Electromechanical translation apparatus
EP0362613A3 (en) * 1988-10-03 1990-08-08 Burleigh Instruments, Inc. Electromechanical translation apparatus
US5017820A (en) * 1990-04-23 1991-05-21 Rockwell International Corporation Piezoelectric rotary union system
US5136201A (en) * 1990-04-27 1992-08-04 Rockwell International Corporation Piezoelectric robotic articulation
US5351789A (en) * 1991-02-28 1994-10-04 Nec Corporation Positioning mechanism
DE4117538C1 (en) * 1991-05-29 1992-07-09 Ant Nachrichtentechnik Gmbh, 7150 Backnang, De
US5319257A (en) * 1992-07-13 1994-06-07 Martin Marietta Energy Systems, Inc. Unitaxial constant velocity microactuator
US5410206A (en) * 1993-04-06 1995-04-25 New Focus, Inc. Piezoelectric actuator for optical alignment screws
US5564840A (en) * 1996-01-02 1996-10-15 The Torrington Company Preload adjustment apparatus and method
US5984501A (en) * 1996-03-25 1999-11-16 Seiko Seiki Kabushiki Kaisha Super-precision positioning system
US5780957A (en) * 1996-11-12 1998-07-14 Meritor Light Vehicle Systems, Inc. Moving linear piezoelectric motor for vehicle applications
US6188161B1 (en) * 1997-06-02 2001-02-13 Minolta Co., Ltd. Driving apparatus using transducer
US6437226B2 (en) 2000-03-07 2002-08-20 Viking Technologies, Inc. Method and system for automatically tuning a stringed instrument
US6300692B1 (en) 2000-03-29 2001-10-09 Ford Global Technologies, Inc. Linear actuator with expansion device
US6465931B2 (en) 2000-03-29 2002-10-15 Qortek, Inc. Device and method for driving symmetric load systems
US6717332B2 (en) 2000-04-18 2004-04-06 Viking Technologies, L.C. Apparatus having a support structure and actuator
US6548938B2 (en) 2000-04-18 2003-04-15 Viking Technologies, L.C. Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator
US6737788B2 (en) 2000-04-18 2004-05-18 Viking Technologies, L.C. Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator
US6429573B2 (en) 2000-06-23 2002-08-06 The Penn State Research Foundation Smart material motor with mechanical diodes
US6759790B1 (en) 2001-01-29 2004-07-06 Viking Technologies, L.C. Apparatus for moving folded-back arms having a pair of opposing surfaces in response to an electrical activation
US20030229262A1 (en) * 2001-11-20 2003-12-11 Easter James Roy Apparatus and method for ossicular fixation of implantable hearing aid actuator
US6879087B2 (en) 2002-02-06 2005-04-12 Viking Technologies, L.C. Apparatus for moving a pair of opposing surfaces in response to an electrical activation
US6870305B2 (en) 2002-02-06 2005-03-22 Viking Technologies, L.C. Apparatus for moving a pair of opposing surfaces in response to an electrical activation
US6975061B2 (en) 2002-02-06 2005-12-13 Viking Technologies, L.C. Apparatus for moving a pair of opposing surfaces in response to an electrical activation
US20060269076A1 (en) * 2002-02-26 2006-11-30 Miller Douglas A Method and system for external assessment of hearing aids that include implanted actuators
US6712754B2 (en) 2002-02-26 2004-03-30 Otologics Llc Method and system for positioning implanted hearing aid actuators
US20030161482A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Method and system for external assessment of hearing aids that include implanted actuators
US7197152B2 (en) 2002-02-26 2007-03-27 Otologics Llc Frequency response equalization system for hearing aid microphones
US20030161481A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Method and system for external assessment of hearing aids that include implanted actuators
US6879693B2 (en) 2002-02-26 2005-04-12 Otologics, Llc. Method and system for external assessment of hearing aids that include implanted actuators
US20030163021A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Method and system for external assessment of hearing aids that include implanted actuators
US20030161492A1 (en) * 2002-02-26 2003-08-28 Miller Douglas Alan Frequency response equalization system for hearing aid microphones
US7447319B2 (en) 2002-02-26 2008-11-04 Otologics, Llc Method and system for external assessment of hearing aids that include implanted actuators
US6924586B2 (en) 2002-06-21 2005-08-02 Viking Technologies, L.C. Uni-body piezoelectric motor
US20040045148A1 (en) * 2002-06-21 2004-03-11 Jeff Moler Uni-body piezoelectric motor
US20060049718A1 (en) * 2002-09-27 2006-03-09 Amir Khajepour Micro-positioning device
US7218035B2 (en) 2002-09-27 2007-05-15 University Of Waterloo Micro-positioning device
US7905824B2 (en) 2003-01-27 2011-03-15 Otologics, Llc Implantable hearing aid transducer with advanceable actuator to faciliate coupling with the auditory system
US8366601B2 (en) 2003-01-27 2013-02-05 Cochlear Limited Simplified implantable hearing aid transducer apparatus
US20080051623A1 (en) * 2003-01-27 2008-02-28 Schneider Robert E Simplified implantable hearing aid transducer apparatus
US7278963B2 (en) 2003-01-27 2007-10-09 Otologics, Llc Implantable hearing aid transducer with advanceable actuator to facilitate coupling with the auditory system
US20080249351A1 (en) * 2003-01-27 2008-10-09 Robert Edwin Schneider Implantable hearing aid transducer with advanceable actuator to faciliate coupling with the auditory system
US20070035856A1 (en) * 2003-01-28 2007-02-15 John Galpin Multi-axis positioner
US20050035687A1 (en) * 2003-03-04 2005-02-17 Qin Xu Electromechanical translation apparatus
US7045932B2 (en) 2003-03-04 2006-05-16 Exfo Burleigh Prod Group Inc Electromechanical translation apparatus
US20070055092A1 (en) * 2003-03-20 2007-03-08 Easter James R Apparatus and method for ossicular fixation of implantable hearing aid actuator
US7368856B2 (en) 2003-04-04 2008-05-06 Parker-Hannifin Corporation Apparatus and process for optimizing work from a smart material actuator product
US7564171B2 (en) 2003-04-04 2009-07-21 Parker-Hannifin Corporation Apparatus and process for optimizing work from a smart material actuator product
US7137946B2 (en) 2003-12-11 2006-11-21 Otologics Llc Electrophysiological measurement method and system for positioning an implantable, hearing instrument transducer
US20050131272A1 (en) * 2003-12-11 2005-06-16 Bernd Waldmann Electrophysiological measurement method and system for positioning an implantable, hearing instrument transducer
US7652409B2 (en) 2004-02-20 2010-01-26 Thorlabs, Inc. Positioner device
US20090167113A1 (en) * 2004-02-20 2009-07-02 Michael John Dixon Positioner device
US20060197167A1 (en) * 2005-03-03 2006-09-07 Pratt & Whitney Canada Corp. Electromagnetic actuator
US7227440B2 (en) 2005-03-03 2007-06-05 Pratt & Whitney Canada Corp. Electromagnetic actuator
US7582052B2 (en) 2005-04-27 2009-09-01 Otologics, Llc Implantable hearing aid actuator positioning
US20060247488A1 (en) * 2005-04-27 2006-11-02 Bernd Waldmann Implantable hearing aid actuator positioning
US20080231143A1 (en) * 2005-10-28 2008-09-25 Universitat Hamburg Piezoelectric movement device
DE102005052132B4 (en) * 2005-10-28 2008-02-14 Universität Hamburg Piezoelectric mover
US20080074000A1 (en) * 2006-03-08 2008-03-27 Dynamic Structures And Materials, Llc Spring biasing locking mechanism for step and repeat motors
US7471030B2 (en) 2006-03-08 2008-12-30 Dynamic Structures And Materials, Llc Spring biasing locking mechanism for step and repeat motors
US20100290138A1 (en) * 2007-01-18 2010-11-18 Newport Corporation Optical adjustment mounts with piezoelectric inertia driver
US8520327B2 (en) 2007-01-18 2013-08-27 Newport Corporation Optical adjustment mounts with piezoelectric inertia driver
US8283837B2 (en) * 2007-05-17 2012-10-09 Nikon Corporation Piezoelectric actuator, piezoelectric actuator device, lens barrel, optical device and manufacturing method thereof
US20090001852A1 (en) * 2007-05-17 2009-01-01 Nikon Corporation Piezoelectric actuator, piezoelectric actuator device, lens barrel, optical device and manufacturing method thereof
US8482868B2 (en) 2010-07-15 2013-07-09 Newport Corporation Optical adjustable mounts with absolute position feedback
US8755133B2 (en) 2010-07-15 2014-06-17 Newport Corporation Optical adjustable mounts with absolute position feedback
US20150287508A1 (en) * 2012-12-21 2015-10-08 Olympus Winter & Ibe Gmbh Electromagnetic actuator for a surgical instrument and method for setting a stroke distance
US9312790B2 (en) 2013-09-13 2016-04-12 Physik Instrumente (Pi) Gmbh & Co. Kg Compact versatile stick-slip piezoelectric motor
US9425711B2 (en) 2014-04-15 2016-08-23 Newport Corporation Integral preload mechanism for piezoelectric actuator
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