JP6540430B2 - 基板処理方法及び基板処理装置 - Google Patents
基板処理方法及び基板処理装置 Download PDFInfo
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- JP6540430B2 JP6540430B2 JP2015190053A JP2015190053A JP6540430B2 JP 6540430 B2 JP6540430 B2 JP 6540430B2 JP 2015190053 A JP2015190053 A JP 2015190053A JP 2015190053 A JP2015190053 A JP 2015190053A JP 6540430 B2 JP6540430 B2 JP 6540430B2
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- 238000012545 processing Methods 0.000 title claims description 54
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- 238000005498 polishing Methods 0.000 claims description 134
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- 238000000034 method Methods 0.000 claims description 35
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- 230000007246 mechanism Effects 0.000 claims description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 10
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 280
- 238000012360 testing method Methods 0.000 description 29
- 238000011156 evaluation Methods 0.000 description 25
- 238000012546 transfer Methods 0.000 description 24
- 239000011248 coating agent Substances 0.000 description 15
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- 101150075071 TRS1 gene Proteins 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 101000662805 Homo sapiens Trafficking protein particle complex subunit 5 Proteins 0.000 description 2
- 102100037497 Trafficking protein particle complex subunit 5 Human genes 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
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- Environmental & Geological Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
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Description
当該パターン露光前の前記基板については研磨後の裏面に対して粗さ緩和用の処理が行われず、
前記粗面化処理工程は、
前記基板の裏面が下方を向いた姿勢で当該基板に対して研磨体を相対的に移動させ、前記基板の裏面において前記パターン露光時に研磨済みの領域となる研磨対象領域を研磨する工程と、
前記研磨対象領域の研磨の開始から当該研磨対象領域の研磨を終えるまでの間、前記研磨対象領域の下方に重ならないように当該基板の周縁部に沿って配置される基板保持部によって前記基板の周縁部を保持し続ける基板保持工程と、
を備え、
前記研磨対象領域を研磨する工程は、基板の裏面に各々基板の中心からの半径が異なる位置において共通の前記研磨体により、周方向に溝を形成する工程を含むことを特徴とする。
本発明の基板処理装置は、半導体ウエハである基板に対してレジスト膜を形成し、パターン露光後の基板を現像する基板処理装置において、
前記パターン露光前の基板の裏面を粗面化処理するために当該裏面を研磨する研磨体と、前記基板の裏面において前記パターン露光時に研磨済みの領域となる研磨対象領域が研磨され、且つ基板の裏面に各々基板の中心からの半径が異なる位置において共通の前記研磨体により周方向に溝が形成されるように前記基板に対して当該研磨体を相対的に移動させる移動機構と、
を含む研磨処理部と、
前記基板を、前記研磨処理部によって研磨後の裏面が粗面化された状態のままで、前記研磨処理部からパターン露光を行う露光部へ搬送する基板搬送機構と、
前記研磨対象領域の研磨の開始から当該研磨対象領域の研磨を終えるまでの間、前記基板の周縁部を保持し続けるために、前記研磨対象領域の下方に重ならないように当該基板の周縁部に沿って配置される基板保持部と、
を備えることを特徴とする。
以下、本発明に関連して行われた評価試験について説明する。
評価試験1
上記の粗面化処理モジュール4と同様に構成された試験装置を用いて、ウエハWの裏面の研磨を行った。ただし上記の処理とは異なり、ウエハWの回転中に研磨体43は移動させず、ウエハWの裏面周縁部が限定的に研磨されるようにした。そして、ウエハWの径方向に沿って研磨された領域にレーザー光を照射すると共にウエハから散乱した散乱光を受光して、レーザー光の強度に対する散乱光の強度の割合であるヘイズ(Haze)を測定した。ヘイズの値は粗さに対応し、この値が大きいほど凹凸が密に形成されていることになる。なお、この試験で用いた研磨体43の形状は、発明の実施の形態で説明したものと同様である。
上記の粗面化処理モジュール4と同様に構成された試験装置を用いて、複数のウエハWに研磨処理を行った。この評価試験2では、図8で説明したように研磨体43をウエハWの径に沿って移動させて、ウエハWの裏面全体を研磨した。ただし、研磨処理中のウエハWの回転数は、研磨体43の位置によって変動させずに一定とし、ウエハW毎に異なる回転数を設定して研磨処理を行った。回転数を15rpm、30rpm、300rpmに設定したウエハWを、夫々ウエハ61、ウエハ62、ウエハ63とする。
反り量が300μmであり、裏面に膜が形成されてないウエハ601〜604を用意した。ウエハ601については、レジストの塗布後に裏面を研磨せずに、露光機D4に搬入した。ウエハ602〜604については、レジストの塗布後、露光前に、評価試験2のウエハ61〜63と同様にウエハWの裏面を研磨した後、露光機D4に搬入した。研磨処理時のウエハ602、603、604の回転数については、評価試験2のウエハ61、62、63の回転数と同様に、夫々15rpm、30rpm、300rpmとした。そして、ウエハ601〜604について、露光機D4におけるオーバーレイを測定した。このオーバーレイは、各ウエハの表面において互いに直交するように設定されたX方向及びY方向に関してのずれ量として取得した。
1 塗布、現像装置
D4 露光機
31 ステージ
32 ピン
34 吸引口
36 昇降ピン
4 粗面化処理モジュール
43 研磨体
44 移動機構
46 純水供給ノズル
Claims (7)
- パターン露光前の半導体ウエハである基板の裏面を研磨して当該裏面を粗面化処理する粗面化処理工程を備え、
当該パターン露光前の前記基板については研磨後の裏面に対して粗さ緩和用の処理が行われず、
前記粗面化処理工程は、
前記基板の裏面が下方を向いた姿勢で当該基板に対して研磨体を相対的に移動させ、前記基板の裏面において前記パターン露光時に研磨済みの領域となる研磨対象領域を研磨する工程と、
前記研磨対象領域の研磨の開始から当該研磨対象領域の研磨を終えるまでの間、前記研磨対象領域の下方に重ならないように当該基板の周縁部に沿って配置される基板保持部によって前記基板の周縁部を保持し続ける基板保持工程と、
を備え、
前記研磨対象領域を研磨する工程は、基板の裏面に各々基板の中心からの半径が異なる位置において共通の前記研磨体により、周方向に溝を形成する工程を含むことを特徴とする基板処理方法。 - 前記基板保持工程は、前記基板の周縁部を下方から吸引して保持する工程を含む請求項1記載の基板処理方法。
- 前記基板の裏面の研磨は、パターン露光機の基板ステージ上に基板を載置して吸引したときに基板の裏面と基板ステージに設けられている複数の突起部の上面との間の摩擦を低減するために行われることを特徴とする請求項1または2記載の基板処理方法。
- 前記基板の裏面を研磨した後、純水により当該裏面を洗浄することを特徴とする請求項1ないし3のいずれか一項に記載の基板処理方法。
- 前記基板の裏面の研磨は、前記基板を回転させながら研磨体を基板裏面の中央部と周縁側の部位との間でスキャンさせる工程を含むことを特徴とする請求項1ないし4のいずれか一項に記載の基板処理方法。
- 半導体ウエハである基板に対してレジスト膜を形成し、パターン露光後の基板を現像する基板処理装置において、
前記パターン露光前の基板の裏面を粗面化処理するために当該裏面を研磨する研磨体と、前記基板の裏面において前記パターン露光時に研磨済みの領域となる研磨対象領域が研磨され、且つ基板の裏面に各々基板の中心からの半径が異なる位置において共通の前記研磨体により周方向に溝が形成されるように前記基板に対して当該研磨体を相対的に移動させる移動機構と、
を含む研磨処理部と、
前記基板を、前記研磨処理部によって研磨後の裏面が粗面化された状態のままで、前記研磨処理部からパターン露光を行う露光部へ搬送する基板搬送機構と、
前記研磨対象領域の研磨の開始から当該研磨対象領域の研磨を終えるまでの間、前記基板の周縁部を保持し続けるために、前記研磨対象領域の下方に重ならないように当該基板の周縁部に沿って配置される基板保持部と、
を備えることを特徴とする基板処理装置。 - 前記基板保持部は、前記基板の周縁部を下方から吸引して保持する吸引部を備えることを特徴とする請求項6記載の基板処理装置。
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