JP2015119085A - デバイスウェーハの加工方法 - Google Patents
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- 238000000034 method Methods 0.000 title description 11
- 239000000853 adhesive Substances 0.000 claims abstract description 55
- 230000001070 adhesive effect Effects 0.000 claims abstract description 51
- 238000003672 processing method Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 description 60
- 230000001678 irradiating effect Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 238000002679 ablation Methods 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000004088 foaming agent Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000003094 microcapsule Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
Description
図2に示すように、レーザー光線63を放射するレーザー放射手段61と、デバイスウェーハ10の表面101を撮影する撮像手段62とを備えるレーザー照射装置60を使用し、撮像手段62によって分割予定ライン13を撮像して検出し、デバイスウェーハ10とレーザー放射手段61とをX軸方向に相対移動させながら、検出した位置に、デバイスウェーハ12に対して吸収性を有する波長のレーザー光線をデバイスウェーハ10の表面101に向けて照射することにより、分割予定ライン13に沿ってアブレーション加工を行い、溝55を形成する。
溝形成ステップを実施した後、図4に示すように、円板状のプレート20の表面201に接着剤塗布手段30で接着剤31を滴下し、例えばスピンコートにより塗布する。プレート20は、例えばガラスなど、容易に変形せず、紫外線を透過する材料で形成されている。接着剤31には、紫外線を照射することにより接着力が低下し、容易に剥離できるものを使用する。例えば、紫外線の照射により膨張あるいは発泡するマイクロカプセルや発泡剤などが混入された接着剤31を使用する。接着剤塗布手段30は、液状あるいはゲル状の接着剤31をプレート20に滴下する構成でもよいし、シート状に形成された接着剤31をプレート20の表面201に貼着する構成でもよい。
次に、図6に示すように、デバイスウェーハ10を保持する保持テーブル41と、保持テーブル41に保持されたデバイスウェーハ10を研削する研削手段42とを備える研削装置40を使用し、デバイスウェーハ10に貼着されたプレート20側を下にして、裏面102を露出させて保持テーブル41の保持面411に載置し、プレート20を介してデバイスウェーハ10を保持テーブル41で保持する。
研削ステップを実施した後、図7に示すように、デバイスウェーハ10を分割して形成された複数のチップ15の裏面102側に、ダイボンド用フィルム(DAF:Die Attach Film)や補強フィルム(DBF:Die Backside Film)などのフィルム90を貼着する。
フィルム貼着ステップを実施した後、図8に示す切削装置50を使用し、フィルム90を分割する。切削装置50は、Y軸方向の回転軸519を中心として回転可能な切削ブレード52を有する切削手段51を有しており、回転軸519を中心として切削手段51に装着された切削ブレード52を回転させながら、デバイスウェーハ10の裏面102側から、回転する切削ブレード52を分割予定ライン13に沿ってフィルム90に切り込ませてフィルム90をダイシングする。これにより、フィルム90が分割され、分割されたフィルムが裏面に貼着されたチップが複数形成される。
ダイシングステップを実施した後、図9に示すように、紫外線を放射する発光ダイオードなどの光源72をマスク71の中に備えた紫外線照射装置などの外的刺激付与装置70を使用して、接着剤31に外的刺激を付与し、接着剤31の接着力を低下させる。
12 デバイス、13 分割予定ライン、15,15a〜15c チップ、
20 プレート、201 表面、30 接着剤塗布手段、31 接着剤、
40 研削装置、41 保持テーブル、411 保持面、419,429 回転軸、
42 研削手段、421 軸部、422 マウント、423 研削ホイール、
43 研削砥石、
50 切削装置、51 切削手段、519 回転軸52 切削ブレード、55 溝、
60 レーザー照射装置、61 レーザー放射手段、62 撮像手段、
63 レーザー光線、
70 外的刺激付与装置、71 マスク、72 光源、73 紫外線、
80 ピックアップ装置、81 コレット、90,95 フィルム。
Claims (3)
- 表面の交差する複数の分割予定ラインによって区画された各領域にそれぞれデバイスが形成されたデバイスウェーハを加工するデバイスウェーハの加工方法であって、
デバイスウェーハの表面から該分割予定ラインに沿ってデバイスウェーハの仕上げ厚みに至る深さの溝を形成する溝形成ステップと、
該溝形成ステップを実施した後、デバイスウェーハの表面に、接着剤を介してプレートを貼着するプレート貼着ステップと、
該プレートを介してデバイスウェーハを保持テーブルで保持してデバイスウェーハの裏面を露出させ、研削手段でデバイスウェーハの裏面を研削し該仕上げ厚みまで薄化することで該溝をデバイスウェーハの裏面に露出させ、デバイスウェーハを個々のチップに分割する研削ステップと、
該研削ステップを実施した後、デバイスウェーハの裏面にフィルムを貼着するフィルム貼着ステップと、
該フィルム貼着ステップを実施した後、該フィルムをデバイスウェーハの裏面側から該分割予定ラインに沿ってダイシングして裏面にフィルムが貼着されたチップを複数形成するダイシングステップと、
該ダイシングステップを実施した後、該プレートから個々のチップをピックアップするピックアップステップと、
を備えた、デバイスウェーハの加工方法。 - 前記接着剤は、外的刺激が付与されることで接着力が低下する接着剤であり、
前記ピックアップステップでは、該接着剤に該外的刺激を付与した後、チップをピックアップする、
請求項1記載のデバイスウェーハの加工方法。 - 前記ピックアップステップでは、前記接着剤のうち第一のチップに対応した領域に対して前記外的刺激を付与して該第一のチップをピックアップした後、該接着剤のうち次にピックアップする第二のチップに対応した領域に対して該外的刺激を付与して該第二のチップをピックアップする、
請求項2記載のデバイスウェーハの加工方法。
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JP2013262437A JP2015119085A (ja) | 2013-12-19 | 2013-12-19 | デバイスウェーハの加工方法 |
TW103138178A TW201528362A (zh) | 2013-12-19 | 2014-11-04 | 裝置晶圓之加工方法 |
US14/566,915 US9362174B2 (en) | 2013-12-19 | 2014-12-11 | Device wafer processing method |
CN201410768052.3A CN104733385B (zh) | 2013-12-19 | 2014-12-12 | 器件晶片的加工方法 |
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JP2018133370A (ja) * | 2017-02-13 | 2018-08-23 | 株式会社ディスコ | ウエーハの加工方法 |
JP2018133371A (ja) * | 2017-02-13 | 2018-08-23 | 株式会社ディスコ | ウエーハの加工方法 |
JP2019096760A (ja) * | 2017-11-24 | 2019-06-20 | 株式会社ディスコ | ウェーハの加工方法 |
JP2020188261A (ja) * | 2017-06-12 | 2020-11-19 | ユニカルタ・インコーポレイテッド | 基板上に個別部品を並列に組み立てる方法 |
US11201077B2 (en) | 2017-06-12 | 2021-12-14 | Kulicke & Soffa Netherlands B.V. | Parallel assembly of discrete components onto a substrate |
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JP2015119085A (ja) | 2013-12-19 | 2015-06-25 | 株式会社ディスコ | デバイスウェーハの加工方法 |
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US11615979B2 (en) * | 2019-12-18 | 2023-03-28 | Disco Corporation | Method of processing wafer |
CN113539956A (zh) * | 2021-06-11 | 2021-10-22 | 深圳米飞泰克科技有限公司 | 一种晶片的加工方法 |
TWI783530B (zh) * | 2021-06-18 | 2022-11-11 | 李志雄 | 暫時接著積層體及應用彼之晶圓薄化製備方法 |
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US11804397B2 (en) | 2017-06-12 | 2023-10-31 | Kulicke & Soffa Netherlands B.V. | Parallel assembly of discrete components onto a substrate |
JP2019096760A (ja) * | 2017-11-24 | 2019-06-20 | 株式会社ディスコ | ウェーハの加工方法 |
JP7132710B2 (ja) | 2017-11-24 | 2022-09-07 | 株式会社ディスコ | ウェーハの加工方法 |
Also Published As
Publication number | Publication date |
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TW201528362A (zh) | 2015-07-16 |
US9362174B2 (en) | 2016-06-07 |
US20150179521A1 (en) | 2015-06-25 |
CN104733385A (zh) | 2015-06-24 |
CN104733385B (zh) | 2020-06-19 |
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