JP6522501B2 - 表面特徴の特徴決定 - Google Patents

表面特徴の特徴決定 Download PDF

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Publication number
JP6522501B2
JP6522501B2 JP2015527520A JP2015527520A JP6522501B2 JP 6522501 B2 JP6522501 B2 JP 6522501B2 JP 2015527520 A JP2015527520 A JP 2015527520A JP 2015527520 A JP2015527520 A JP 2015527520A JP 6522501 B2 JP6522501 B2 JP 6522501B2
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Japan
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photon
article
features
photons
detector array
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Expired - Fee Related
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JP2015527520A
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Japanese (ja)
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JP2015531068A (ja
JP2015531068A5 (enExample
Inventor
アーナー，ヨアキム
マクラウリン，キース
ウォン，サミュエル
ロット，ヘンリー
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Seagate Technology LLC
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Seagate Technology LLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2015527520A 2012-08-11 2013-08-12 表面特徴の特徴決定 Expired - Fee Related JP6522501B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261682200P 2012-08-11 2012-08-11
US61/682,200 2012-08-11
US13/931,266 US9212900B2 (en) 2012-08-11 2013-06-28 Surface features characterization
US13/931,266 2013-06-28
PCT/US2013/054584 WO2014028407A1 (en) 2012-08-11 2013-08-12 Surface features characterization

Publications (3)

Publication Number Publication Date
JP2015531068A JP2015531068A (ja) 2015-10-29
JP2015531068A5 JP2015531068A5 (enExample) 2018-12-27
JP6522501B2 true JP6522501B2 (ja) 2019-05-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015527520A Expired - Fee Related JP6522501B2 (ja) 2012-08-11 2013-08-12 表面特徴の特徴決定

Country Status (5)

Country Link
US (2) US9212900B2 (enExample)
JP (1) JP6522501B2 (enExample)
CN (1) CN104704320B (enExample)
SG (1) SG11201501049QA (enExample)
WO (1) WO2014028407A1 (enExample)

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CN104704320B (zh) 2017-06-30
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US20160077018A1 (en) 2016-03-17
JP2015531068A (ja) 2015-10-29
US20140043621A1 (en) 2014-02-13
US9766184B2 (en) 2017-09-19
CN104704320A (zh) 2015-06-10
WO2014028407A1 (en) 2014-02-20

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