CN104704320B - 表面特征表征 - Google Patents

表面特征表征 Download PDF

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Publication number
CN104704320B
CN104704320B CN201380053262.8A CN201380053262A CN104704320B CN 104704320 B CN104704320 B CN 104704320B CN 201380053262 A CN201380053262 A CN 201380053262A CN 104704320 B CN104704320 B CN 104704320B
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CN
China
Prior art keywords
photon
article
features
photons
emitters
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN201380053262.8A
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English (en)
Chinese (zh)
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CN104704320A (zh
Inventor
J·艾和
K·麦克劳林
S·王
H·洛特
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Seagate Technology LLC
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Seagate Technology LLC
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Publication of CN104704320A publication Critical patent/CN104704320A/zh
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201380053262.8A 2012-08-11 2013-08-12 表面特征表征 Expired - Fee Related CN104704320B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261682200P 2012-08-11 2012-08-11
US61/682,200 2012-08-11
US13/931,266 US9212900B2 (en) 2012-08-11 2013-06-28 Surface features characterization
US13/931,266 2013-06-28
PCT/US2013/054584 WO2014028407A1 (en) 2012-08-11 2013-08-12 Surface features characterization

Publications (2)

Publication Number Publication Date
CN104704320A CN104704320A (zh) 2015-06-10
CN104704320B true CN104704320B (zh) 2017-06-30

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Family Applications (1)

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CN201380053262.8A Expired - Fee Related CN104704320B (zh) 2012-08-11 2013-08-12 表面特征表征

Country Status (5)

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US (2) US9212900B2 (enExample)
JP (1) JP6522501B2 (enExample)
CN (1) CN104704320B (enExample)
SG (1) SG11201501049QA (enExample)
WO (1) WO2014028407A1 (enExample)

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US20160077018A1 (en) 2016-03-17
JP2015531068A (ja) 2015-10-29
US20140043621A1 (en) 2014-02-13
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