JP6431729B2 - 半導体装置の作製方法および半導体装置 - Google Patents
半導体装置の作製方法および半導体装置 Download PDFInfo
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- JP6431729B2 JP6431729B2 JP2014184826A JP2014184826A JP6431729B2 JP 6431729 B2 JP6431729 B2 JP 6431729B2 JP 2014184826 A JP2014184826 A JP 2014184826A JP 2014184826 A JP2014184826 A JP 2014184826A JP 6431729 B2 JP6431729 B2 JP 6431729B2
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Classifications
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/24—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using capacitors
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- G—PHYSICS
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- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0466—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
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- G—PHYSICS
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- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3404—Convergence or correction of memory cell threshold voltages; Repair or recovery of overerased or overprogrammed cells
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Description
本実施の形態では、半導体層と電荷捕獲層とゲート電極とを有する半導体装置の構成および動作原理、および、それを応用した回路について説明する。図1(A)は、半導体層101と電荷捕獲層102とゲート電極103を有する半導体装置である。電荷捕獲層102はゲート絶縁層を兼ねることができる。
本実施の形態では、実施の形態1で示したトランジスタ等に適用できる半導体装置について図面を用いて説明する。なお、以下では、主として、しきい値補正用のゲート電極が基板と半導体層の間に存在するトランジスタについて説明するが、しきい値補正用のゲート電極と基板の間に半導体層が存在するトランジスタであってもよい。
本実施の形態では、実施の形態2で説明した図13に示すトランジスタ450の作製方法について、図16および図17を用いて説明する。
本実施の形態では、実施の形態1で説明したトランジスタ等に適用できるプレナー構造のトランジスタについて説明する。
上記で説明した半導体装置は、表示機器、パーソナルコンピュータ、記録媒体を備えた画像再生装置(代表的にはDVD:Digital Versatile Disc等の記録媒体を再生し、その画像を表示しうるディスプレイを有する装置)に用いることができる。その他に、半導体装置を用いることができる電子機器として、携帯電話、携帯型を含むゲーム機、携帯データ端末、電子書籍、ビデオカメラ、デジタルスチルカメラ等のカメラ、ゴーグル型ディスプレイ(ヘッドマウントディスプレイ)、ナビゲーションシステム、音響再生装置(カーオーディオ、デジタルオーディオプレイヤー等)、複写機、ファクシミリ、プリンタ、プリンタ複合機、現金自動預け入れ払い機(ATM)、自動販売機などが挙げられる。これら電子機器の具体例を図19に示す。
102 電荷捕獲層
102a 第1の絶縁層
102b 第2の絶縁層
102c 第3の絶縁層
102d 導電層
102e 絶縁体
103 ゲート電極
104 ゲート絶縁層
105 ゲート電極
106 電子捕獲準位
107 電子
108 曲線
109 曲線
110 トランジスタ
111 容量素子
120 画素
121 トランジスタ
122 トランジスタ
123 発光素子
124 電源線
130 表示装置
131 ドライバ領域
132 表示領域
133 FPC
140 マイクロプロセッサ
141 論理ユニット
142 レジスタ
143 一次キャッシュメモリ
144 二次キャッシュメモリ
145 I/O回路
150 記憶素子
151a スイッチ
151b スイッチ
151c スイッチ
152a インバータ
152b インバータ
152c インバータ
153 トランジスタ
154 容量素子
155 記憶素子
156a スイッチ
156b スイッチ
156c スイッチ
157a インバータ
157b インバータ
157c インバータ
158 トランジスタ
159 容量素子
160 記憶素子
161a トランジスタ
161b トランジスタ
162a インバータ
162b インバータ
163a トランジスタ
163b トランジスタ
164a 容量素子
164b 容量素子
165 記憶素子
166a トランジスタ
166b トランジスタ
167a インバータ
167b インバータ
168a トランジスタ
168b トランジスタ
169a 容量素子
169b 容量素子
170 記憶素子
171 トランジスタ
172 トランジスタ
173 容量素子
175 記憶素子
176 トランジスタ
177 トランジスタ
178 容量素子
180 記憶素子
181 トランジスタ
182 トランジスタ
183 トランジスタ
184 容量素子
185 記憶素子
186 トランジスタ
187 トランジスタ
188 トランジスタ
189 容量素子
190 半導体チップ
191 パッド
191a パッド
191b パッド
191c パッド
192 デバイス領域
193 リードフレーム
194 ボンディングワイヤ
195 リード
195a リード
195b リード
195c リード
400 基板
401 ゲート電極
402 下地絶縁層
402a 第1の絶縁層
402b 第2の絶縁層
402c 第3の絶縁層
403c 酸化物半導体層
404 多層半導体層
404a 酸化物半導体層
404b 酸化物半導体層
404c 酸化物半導体層
406a ソース電極
406b ドレイン電極
407 絶縁層
408 ゲート絶縁層
408a 第1の絶縁層
408b 第2の絶縁層
409 導電層
410 ゲート電極
412 酸化物絶縁層
450 トランジスタ
460 トランジスタ
470 トランジスタ
501 筐体
502 筐体
503 表示部
504 表示部
505 マイクロフォン
506 スピーカー
507 操作キー
508 スタイラス
511 筐体
512 筐体
513 表示部
514 表示部
515 接続部
516 操作キー
521 筐体
522 表示部
523 キーボード
524 ポインティングデバイス
531 筐体
532 冷蔵室用扉
533 冷凍室用扉
541 筐体
542 筐体
543 表示部
544 操作キー
545 レンズ
546 接続部
551 車体
552 車輪
553 ダッシュボード
554 ライト
BL ビット線
BL_a ビット線
BL_b ビット線
IN 信号
OUT 信号
Pm データ線
Qn 選択線
Rm しきい値補正用配線
Rn しきい値補正用配線
RWL 読み出しワード線
SIG1 信号
SIG2 信号
SIG3 信号
SIG4 信号
SIG5 信号
SL ソース線
Sn しきい値補正用配線
TC しきい値補正用配線
WE バックアップ制御線
WL ワード線
WWL 書き込みワード線
Claims (6)
- 第1のトランジスタと第2のトランジスタと、を有し、
前記第1のトランジスタは、
第1の半導体と、前記第1の半導体に電気的に接続する第1の電極と、第1のゲート電極と、前記第1のゲート電極と前記第1の半導体との間に設けられる第1の電荷捕獲層と、を有し、
前記第2のトランジスタは、
第2の半導体と、前記第2の半導体に電気的に接続する第2の電極と、第2のゲート電極と、前記第2のゲート電極と前記第2の半導体との間に設けられる第2の電荷捕獲層と、を有し、
前記第1の電荷捕獲層および前記第2の電荷捕獲層は、それぞれ第1の絶縁層と、第2の絶縁層とを有し、
前記第1のトランジスタにおいて前記第1の絶縁層は、前記第2の絶縁層と前記第1の半導体との間に位置し、
前記第2のトランジスタにおいて前記第1の絶縁層は、前記第2の絶縁層と前記第2の半導体との間に位置し、
前記第1の絶縁層のバンドギャップは、前記第2の絶縁層のバンドギャップよりも大きく、
前記第1の絶縁層の電子親和力は、前記第2の絶縁層の電子親和力よりも小さく、
150℃以上300℃以下で、前記第1のゲート電極と前記第1の電極の間の第1の電位差と、前記第2のゲート電極と前記第2の電極の間の第2の電位差が異なる状態を保持する工程を有し、
前記工程により、前記第1のトランジスタと前記第2のトランジスタのしきい値を互いに異なるものとすることを特徴とする半導体装置の作製方法。 - 請求項1において、
前記第1の半導体および前記第2の半導体は、酸化物半導体を含むことを特徴とする半導体装置の作製方法。 - 請求項1または請求項2において、
前記第2の絶縁層は、酸化ハフニウム、酸化アルミニウム、アルミニウムシリケートのいずれか一を含むことを特徴とする半導体装置の作製方法。 - 請求項1乃至請求項3のいずれか一において、
前記第1のトランジスタは、第3のゲート電極を有し、
前記第3のゲート電極と前記第1の電荷捕獲層との間に、前記第1の半導体が位置し、
前記第2のトランジスタは、第4のゲート電極を有し、
前記第4のゲート電極と前記第2の電荷捕獲層との間に、前記第2の半導体が位置することを特徴とする半導体装置の作製方法。 - 第1のトランジスタと第2のトランジスタと、を有し、
前記第1のトランジスタは、
第1の半導体と、前記第1の半導体に電気的に接続する第1の電極と、第1のゲート電極と、前記第1のゲート電極と前記第1の半導体との間に設けられる第1の電荷捕獲層と、を有し、
前記第2のトランジスタは、
第2の半導体と、前記第2の半導体に電気的に接続する第2の電極と、第2のゲート電極と、前記第2のゲート電極と前記第2の半導体との間に設けられる第2の電荷捕獲層と、を有し、
前記第1の電荷捕獲層および前記第2の電荷捕獲層は、それぞれ第1の絶縁層と、第2の絶縁層とを有し、
前記第1のトランジスタにおいて前記第1の絶縁層は、前記第2の絶縁層と前記第1の半導体との間に位置し、
前記第2のトランジスタにおいて前記第1の絶縁層は、前記第2の絶縁層と前記第2の半導体との間に位置し、
前記第1の絶縁層のバンドギャップは、前記第2の絶縁層のバンドギャップよりも大きく、
前記第1の絶縁層の電子親和力は、前記第2の絶縁層の電子親和力よりも小さく、
前記第1のトランジスタと前記第2のトランジスタのしきい値を互いに異なるものとすることができることを特徴とする半導体装置。 - 請求項5において、
前記第1のトランジスタは、第3のゲート電極を有し、
前記第3のゲート電極と前記第1の電荷捕獲層との間に、前記第1の半導体が位置し、
前記第2のトランジスタは、第4のゲート電極を有し、
前記第4のゲート電極と前記第2の電荷捕獲層との間に、前記第2の半導体が位置することを特徴とする半導体装置。
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US9443592B2 (en) | 2013-07-18 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9443990B2 (en) | 2013-08-26 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device for adjusting threshold thereof |
US9449853B2 (en) * | 2013-09-04 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising electron trap layer |
US9269822B2 (en) | 2013-09-12 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
JP6537341B2 (ja) * | 2014-05-07 | 2019-07-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6615490B2 (ja) | 2014-05-29 | 2019-12-04 | 株式会社半導体エネルギー研究所 | 半導体装置及び電子機器 |
TWI699897B (zh) | 2014-11-21 | 2020-07-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
US10553690B2 (en) | 2015-08-04 | 2020-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9847406B2 (en) * | 2015-08-27 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, storage device, resistor circuit, display device, and electronic device |
JP6607013B2 (ja) * | 2015-12-08 | 2019-11-20 | 株式会社リコー | 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム |
KR102508897B1 (ko) * | 2015-12-17 | 2023-03-10 | 삼성전자주식회사 | 수직형 메모리 소자 및 그 형성 방법 |
US9917207B2 (en) * | 2015-12-25 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6851814B2 (ja) * | 2015-12-29 | 2021-03-31 | 株式会社半導体エネルギー研究所 | トランジスタ |
CN111316423A (zh) * | 2017-11-24 | 2020-06-19 | 株式会社半导体能源研究所 | 半导体装置及动态逻辑电路 |
Family Cites Families (119)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2008101A (en) | 1934-02-08 | 1935-07-16 | George W Haury | Valve washer |
JPS60198861A (ja) | 1984-03-23 | 1985-10-08 | Fujitsu Ltd | 薄膜トランジスタ |
JPH0244256B2 (ja) | 1987-01-28 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn2o5deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH0244260B2 (ja) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn5o8deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPS63210023A (ja) | 1987-02-24 | 1988-08-31 | Natl Inst For Res In Inorg Mater | InGaZn↓4O↓7で示される六方晶系の層状構造を有する化合物およびその製造法 |
JPH0244258B2 (ja) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn3o6deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH0244262B2 (ja) | 1987-02-27 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn6o9deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH0244263B2 (ja) | 1987-04-22 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn7o10deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
JPH05251705A (ja) | 1992-03-04 | 1993-09-28 | Fuji Xerox Co Ltd | 薄膜トランジスタ |
JP3479375B2 (ja) | 1995-03-27 | 2003-12-15 | 科学技術振興事業団 | 亜酸化銅等の金属酸化物半導体による薄膜トランジスタとpn接合を形成した金属酸化物半導体装置およびそれらの製造方法 |
KR100394896B1 (ko) | 1995-08-03 | 2003-11-28 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 투명스위칭소자를포함하는반도체장치 |
JP3625598B2 (ja) | 1995-12-30 | 2005-03-02 | 三星電子株式会社 | 液晶表示装置の製造方法 |
JP4170454B2 (ja) | 1998-07-24 | 2008-10-22 | Hoya株式会社 | 透明導電性酸化物薄膜を有する物品及びその製造方法 |
JP2000150861A (ja) | 1998-11-16 | 2000-05-30 | Tdk Corp | 酸化物薄膜 |
JP3276930B2 (ja) | 1998-11-17 | 2002-04-22 | 科学技術振興事業団 | トランジスタ及び半導体装置 |
TW460731B (en) | 1999-09-03 | 2001-10-21 | Ind Tech Res Inst | Electrode structure and production method of wide viewing angle LCD |
US6876145B1 (en) * | 1999-09-30 | 2005-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Organic electroluminescent display device |
JP4089858B2 (ja) | 2000-09-01 | 2008-05-28 | 国立大学法人東北大学 | 半導体デバイス |
KR20020038482A (ko) | 2000-11-15 | 2002-05-23 | 모리시타 요이찌 | 박막 트랜지스터 어레이, 그 제조방법 및 그것을 이용한표시패널 |
JP3997731B2 (ja) | 2001-03-19 | 2007-10-24 | 富士ゼロックス株式会社 | 基材上に結晶性半導体薄膜を形成する方法 |
JP2002289859A (ja) | 2001-03-23 | 2002-10-04 | Minolta Co Ltd | 薄膜トランジスタ |
JP4090716B2 (ja) | 2001-09-10 | 2008-05-28 | 雅司 川崎 | 薄膜トランジスタおよびマトリクス表示装置 |
JP3925839B2 (ja) | 2001-09-10 | 2007-06-06 | シャープ株式会社 | 半導体記憶装置およびその試験方法 |
JP4164562B2 (ja) | 2002-09-11 | 2008-10-15 | 独立行政法人科学技術振興機構 | ホモロガス薄膜を活性層として用いる透明薄膜電界効果型トランジスタ |
EP1443130B1 (en) | 2001-11-05 | 2011-09-28 | Japan Science and Technology Agency | Natural superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film |
JP4083486B2 (ja) | 2002-02-21 | 2008-04-30 | 独立行政法人科学技術振興機構 | LnCuO(S,Se,Te)単結晶薄膜の製造方法 |
US7049190B2 (en) | 2002-03-15 | 2006-05-23 | Sanyo Electric Co., Ltd. | Method for forming ZnO film, method for forming ZnO semiconductor layer, method for fabricating semiconductor device, and semiconductor device |
JP3933591B2 (ja) | 2002-03-26 | 2007-06-20 | 淳二 城戸 | 有機エレクトロルミネッセント素子 |
US7339187B2 (en) | 2002-05-21 | 2008-03-04 | State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University | Transistor structures |
JP2004022625A (ja) | 2002-06-13 | 2004-01-22 | Murata Mfg Co Ltd | 半導体デバイス及び該半導体デバイスの製造方法 |
US7105868B2 (en) | 2002-06-24 | 2006-09-12 | Cermet, Inc. | High-electron mobility transistor with zinc oxide |
US7067843B2 (en) | 2002-10-11 | 2006-06-27 | E. I. Du Pont De Nemours And Company | Transparent oxide semiconductor thin film transistors |
JP4166105B2 (ja) | 2003-03-06 | 2008-10-15 | シャープ株式会社 | 半導体装置およびその製造方法 |
JP2004273732A (ja) | 2003-03-07 | 2004-09-30 | Sharp Corp | アクティブマトリクス基板およびその製造方法 |
JP4108633B2 (ja) | 2003-06-20 | 2008-06-25 | シャープ株式会社 | 薄膜トランジスタおよびその製造方法ならびに電子デバイス |
US7262463B2 (en) | 2003-07-25 | 2007-08-28 | Hewlett-Packard Development Company, L.P. | Transistor including a deposited channel region having a doped portion |
US7282782B2 (en) | 2004-03-12 | 2007-10-16 | Hewlett-Packard Development Company, L.P. | Combined binary oxide semiconductor device |
US7145174B2 (en) | 2004-03-12 | 2006-12-05 | Hewlett-Packard Development Company, Lp. | Semiconductor device |
US7297977B2 (en) | 2004-03-12 | 2007-11-20 | Hewlett-Packard Development Company, L.P. | Semiconductor device |
EP1737044B1 (en) | 2004-03-12 | 2014-12-10 | Japan Science and Technology Agency | Amorphous oxide and thin film transistor |
US7211825B2 (en) | 2004-06-14 | 2007-05-01 | Yi-Chi Shih | Indium oxide-based thin film transistors and circuits |
JP2006100760A (ja) | 2004-09-02 | 2006-04-13 | Casio Comput Co Ltd | 薄膜トランジスタおよびその製造方法 |
US7285501B2 (en) | 2004-09-17 | 2007-10-23 | Hewlett-Packard Development Company, L.P. | Method of forming a solution processed device |
US7298084B2 (en) | 2004-11-02 | 2007-11-20 | 3M Innovative Properties Company | Methods and displays utilizing integrated zinc oxide row and column drivers in conjunction with organic light emitting diodes |
US7453065B2 (en) | 2004-11-10 | 2008-11-18 | Canon Kabushiki Kaisha | Sensor and image pickup device |
CN101057333B (zh) | 2004-11-10 | 2011-11-16 | 佳能株式会社 | 发光器件 |
US7829444B2 (en) | 2004-11-10 | 2010-11-09 | Canon Kabushiki Kaisha | Field effect transistor manufacturing method |
JP5126729B2 (ja) | 2004-11-10 | 2013-01-23 | キヤノン株式会社 | 画像表示装置 |
US7791072B2 (en) | 2004-11-10 | 2010-09-07 | Canon Kabushiki Kaisha | Display |
US7863611B2 (en) | 2004-11-10 | 2011-01-04 | Canon Kabushiki Kaisha | Integrated circuits utilizing amorphous oxides |
EP1812969B1 (en) | 2004-11-10 | 2015-05-06 | Canon Kabushiki Kaisha | Field effect transistor comprising an amorphous oxide |
US7868326B2 (en) | 2004-11-10 | 2011-01-11 | Canon Kabushiki Kaisha | Field effect transistor |
US7579224B2 (en) | 2005-01-21 | 2009-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
TWI562380B (en) | 2005-01-28 | 2016-12-11 | Semiconductor Energy Lab Co Ltd | Semiconductor device, electronic device, and method of manufacturing semiconductor device |
US7608531B2 (en) | 2005-01-28 | 2009-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic device, and method of manufacturing semiconductor device |
US7858451B2 (en) | 2005-02-03 | 2010-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, semiconductor device and manufacturing method thereof |
US7948171B2 (en) | 2005-02-18 | 2011-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US20060197092A1 (en) | 2005-03-03 | 2006-09-07 | Randy Hoffman | System and method for forming conductive material on a substrate |
US8681077B2 (en) | 2005-03-18 | 2014-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, and display device, driving method and electronic apparatus thereof |
WO2006105077A2 (en) | 2005-03-28 | 2006-10-05 | Massachusetts Institute Of Technology | Low voltage thin film transistor with high-k dielectric material |
US7645478B2 (en) | 2005-03-31 | 2010-01-12 | 3M Innovative Properties Company | Methods of making displays |
US8300031B2 (en) | 2005-04-20 | 2012-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising transistor having gate and drain connected through a current-voltage conversion element |
JP2006344849A (ja) | 2005-06-10 | 2006-12-21 | Casio Comput Co Ltd | 薄膜トランジスタ |
US7402506B2 (en) | 2005-06-16 | 2008-07-22 | Eastman Kodak Company | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
US7691666B2 (en) | 2005-06-16 | 2010-04-06 | Eastman Kodak Company | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
US7507618B2 (en) | 2005-06-27 | 2009-03-24 | 3M Innovative Properties Company | Method for making electronic devices using metal oxide nanoparticles |
KR100711890B1 (ko) | 2005-07-28 | 2007-04-25 | 삼성에스디아이 주식회사 | 유기 발광표시장치 및 그의 제조방법 |
JP2007059128A (ja) | 2005-08-23 | 2007-03-08 | Canon Inc | 有機el表示装置およびその製造方法 |
JP5116225B2 (ja) | 2005-09-06 | 2013-01-09 | キヤノン株式会社 | 酸化物半導体デバイスの製造方法 |
JP2007073705A (ja) | 2005-09-06 | 2007-03-22 | Canon Inc | 酸化物半導体チャネル薄膜トランジスタおよびその製造方法 |
JP4850457B2 (ja) | 2005-09-06 | 2012-01-11 | キヤノン株式会社 | 薄膜トランジスタ及び薄膜ダイオード |
JP4280736B2 (ja) | 2005-09-06 | 2009-06-17 | キヤノン株式会社 | 半導体素子 |
EP3614442A3 (en) | 2005-09-29 | 2020-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor layer and manufactoring method thereof |
JP5037808B2 (ja) | 2005-10-20 | 2012-10-03 | キヤノン株式会社 | アモルファス酸化物を用いた電界効果型トランジスタ、及び該トランジスタを用いた表示装置 |
KR101117948B1 (ko) | 2005-11-15 | 2012-02-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 디스플레이 장치 제조 방법 |
TWI292281B (en) | 2005-12-29 | 2008-01-01 | Ind Tech Res Inst | Pixel structure of active organic light emitting diode and method of fabricating the same |
US7867636B2 (en) | 2006-01-11 | 2011-01-11 | Murata Manufacturing Co., Ltd. | Transparent conductive film and method for manufacturing the same |
JP4977478B2 (ja) | 2006-01-21 | 2012-07-18 | 三星電子株式会社 | ZnOフィルム及びこれを用いたTFTの製造方法 |
US7576394B2 (en) | 2006-02-02 | 2009-08-18 | Kochi Industrial Promotion Center | Thin film transistor including low resistance conductive thin films and manufacturing method thereof |
US7977169B2 (en) | 2006-02-15 | 2011-07-12 | Kochi Industrial Promotion Center | Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof |
KR20070101595A (ko) | 2006-04-11 | 2007-10-17 | 삼성전자주식회사 | ZnO TFT |
US20070252928A1 (en) | 2006-04-28 | 2007-11-01 | Toppan Printing Co., Ltd. | Structure, transmission type liquid crystal display, reflection type display and manufacturing method thereof |
JP5028033B2 (ja) | 2006-06-13 | 2012-09-19 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
JP4609797B2 (ja) | 2006-08-09 | 2011-01-12 | Nec液晶テクノロジー株式会社 | 薄膜デバイス及びその製造方法 |
JP4999400B2 (ja) | 2006-08-09 | 2012-08-15 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
JP4332545B2 (ja) | 2006-09-15 | 2009-09-16 | キヤノン株式会社 | 電界効果型トランジスタ及びその製造方法 |
JP4274219B2 (ja) | 2006-09-27 | 2009-06-03 | セイコーエプソン株式会社 | 電子デバイス、有機エレクトロルミネッセンス装置、有機薄膜半導体装置 |
JP5164357B2 (ja) | 2006-09-27 | 2013-03-21 | キヤノン株式会社 | 半導体装置及び半導体装置の製造方法 |
US7622371B2 (en) | 2006-10-10 | 2009-11-24 | Hewlett-Packard Development Company, L.P. | Fused nanocrystal thin film semiconductor and method |
US7772021B2 (en) | 2006-11-29 | 2010-08-10 | Samsung Electronics Co., Ltd. | Flat panel displays comprising a thin-film transistor having a semiconductive oxide in its channel and methods of fabricating the same for use in flat panel displays |
JP2008140684A (ja) | 2006-12-04 | 2008-06-19 | Toppan Printing Co Ltd | カラーelディスプレイおよびその製造方法 |
KR101303578B1 (ko) | 2007-01-05 | 2013-09-09 | 삼성전자주식회사 | 박막 식각 방법 |
KR100851215B1 (ko) | 2007-03-14 | 2008-08-07 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 이를 이용한 유기 전계 발광표시장치 |
US7795613B2 (en) | 2007-04-17 | 2010-09-14 | Toppan Printing Co., Ltd. | Structure with transistor |
KR101325053B1 (ko) | 2007-04-18 | 2013-11-05 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
KR20080094300A (ko) | 2007-04-19 | 2008-10-23 | 삼성전자주식회사 | 박막 트랜지스터 및 그 제조 방법과 박막 트랜지스터를포함하는 평판 디스플레이 |
KR101334181B1 (ko) | 2007-04-20 | 2013-11-28 | 삼성전자주식회사 | 선택적으로 결정화된 채널층을 갖는 박막 트랜지스터 및 그제조 방법 |
US8274078B2 (en) | 2007-04-25 | 2012-09-25 | Canon Kabushiki Kaisha | Metal oxynitride semiconductor containing zinc |
KR101345376B1 (ko) | 2007-05-29 | 2013-12-24 | 삼성전자주식회사 | ZnO 계 박막 트랜지스터 및 그 제조방법 |
JP4521433B2 (ja) * | 2007-09-18 | 2010-08-11 | シャープ株式会社 | 半導体素子及びこの半導体素子を用いた装置 |
JP5215158B2 (ja) | 2007-12-17 | 2013-06-19 | 富士フイルム株式会社 | 無機結晶性配向膜及びその製造方法、半導体デバイス |
KR101529575B1 (ko) * | 2008-09-10 | 2015-06-29 | 삼성전자주식회사 | 트랜지스터, 이를 포함하는 인버터 및 이들의 제조방법 |
JP4623179B2 (ja) | 2008-09-18 | 2011-02-02 | ソニー株式会社 | 薄膜トランジスタおよびその製造方法 |
JP5451280B2 (ja) | 2008-10-09 | 2014-03-26 | キヤノン株式会社 | ウルツ鉱型結晶成長用基板およびその製造方法ならびに半導体装置 |
JP2011018137A (ja) * | 2009-07-07 | 2011-01-27 | Toshiba Corp | 低消費電力回路設計手法、及び半導体集積回路装置 |
JP5497417B2 (ja) | 2009-12-10 | 2014-05-21 | 富士フイルム株式会社 | 薄膜トランジスタおよびその製造方法、並びにその薄膜トランジスタを備えた装置 |
JP2011138934A (ja) | 2009-12-28 | 2011-07-14 | Sony Corp | 薄膜トランジスタ、表示装置および電子機器 |
JP2011238745A (ja) * | 2010-05-10 | 2011-11-24 | Panasonic Corp | 半導体装置及びその製造方法 |
JP2012004371A (ja) | 2010-06-17 | 2012-01-05 | Sony Corp | 薄膜トランジスタおよび表示装置 |
DE112011102644B4 (de) | 2010-08-06 | 2019-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Integrierte Halbleiterschaltung |
KR20130102581A (ko) | 2010-09-03 | 2013-09-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전계 효과 트랜지스터 및 반도체 장치의 제조 방법 |
TWI525818B (zh) * | 2010-11-30 | 2016-03-11 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置之製造方法 |
US9166055B2 (en) * | 2011-06-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US20150008428A1 (en) | 2013-07-08 | 2015-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9666697B2 (en) | 2013-07-08 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device including an electron trap layer |
US9443592B2 (en) | 2013-07-18 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9443990B2 (en) | 2013-08-26 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device for adjusting threshold thereof |
US9449853B2 (en) | 2013-09-04 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising electron trap layer |
US9269822B2 (en) | 2013-09-12 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
-
2014
- 2014-09-04 US US14/476,767 patent/US9893194B2/en not_active Expired - Fee Related
- 2014-09-11 JP JP2014184826A patent/JP6431729B2/ja not_active Expired - Fee Related
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