JP6417764B2 - 電子部品、電子部品の製造方法、電子機器、および移動体 - Google Patents

電子部品、電子部品の製造方法、電子機器、および移動体 Download PDF

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Publication number
JP6417764B2
JP6417764B2 JP2014150484A JP2014150484A JP6417764B2 JP 6417764 B2 JP6417764 B2 JP 6417764B2 JP 2014150484 A JP2014150484 A JP 2014150484A JP 2014150484 A JP2014150484 A JP 2014150484A JP 6417764 B2 JP6417764 B2 JP 6417764B2
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Japan
Prior art keywords
region
connection
lead
view
bonding member
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Expired - Fee Related
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JP2014150484A
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English (en)
Japanese (ja)
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JP2016025297A (ja
JP2016025297A5 (https=
Inventor
近藤　学
学 近藤
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2014150484A priority Critical patent/JP6417764B2/ja
Priority to CN201510430409.1A priority patent/CN105306001B/zh
Priority to US14/804,552 priority patent/US9773713B2/en
Publication of JP2016025297A publication Critical patent/JP2016025297A/ja
Publication of JP2016025297A5 publication Critical patent/JP2016025297A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69—Insulating materials thereof
    • H10W70/692—Ceramics or glasses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2014150484A 2014-07-24 2014-07-24 電子部品、電子部品の製造方法、電子機器、および移動体 Expired - Fee Related JP6417764B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014150484A JP6417764B2 (ja) 2014-07-24 2014-07-24 電子部品、電子部品の製造方法、電子機器、および移動体
CN201510430409.1A CN105306001B (zh) 2014-07-24 2015-07-21 电子部件、电子部件的制造方法、电子设备以及移动体
US14/804,552 US9773713B2 (en) 2014-07-24 2015-07-21 Electronic component, method for manufacturing electronic component, electronic apparatus, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014150484A JP6417764B2 (ja) 2014-07-24 2014-07-24 電子部品、電子部品の製造方法、電子機器、および移動体

Publications (3)

Publication Number Publication Date
JP2016025297A JP2016025297A (ja) 2016-02-08
JP2016025297A5 JP2016025297A5 (https=) 2017-07-13
JP6417764B2 true JP6417764B2 (ja) 2018-11-07

Family

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Family Applications (1)

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JP2014150484A Expired - Fee Related JP6417764B2 (ja) 2014-07-24 2014-07-24 電子部品、電子部品の製造方法、電子機器、および移動体

Country Status (3)

Country Link
US (1) US9773713B2 (https=)
JP (1) JP6417764B2 (https=)
CN (1) CN105306001B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2555659B (en) * 2016-11-07 2020-01-15 Cirrus Logic Int Semiconductor Ltd Package for MEMS device and process
US10861803B1 (en) * 2017-03-17 2020-12-08 Scientific Components Corporation Low cost millimeter wave integrated LTCC package and method of manufacturing
IT201700103511A1 (it) * 2017-09-15 2019-03-15 St Microelectronics Srl Dispositivo microelettronico dotato di connessioni protette e relativo processo di fabbricazione
JP6907893B2 (ja) * 2017-11-08 2021-07-21 株式会社豊田自動織機 半導体装置
US20190291204A1 (en) * 2018-03-20 2019-09-26 Texas Instruments Incorporated Ribbon wire bond
US11365115B2 (en) * 2019-09-03 2022-06-21 Taiwan Semiconductor Manufacturing Company, Ltd. Piezoelectric anti-stiction structure for microelectromechanical systems

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921047A (ja) * 1982-07-27 1984-02-02 Fuji Xerox Co Ltd リ−ドレスチツプキヤリア
JPS6390160A (ja) * 1986-10-03 1988-04-21 Hitachi Ltd リ−ドフレ−ムの形状
US5025348A (en) * 1987-11-20 1991-06-18 Casio Computer Co., Ltd. Bonding structure of an electronic device and a method for manufacturing the same
JPH0555438A (ja) * 1991-08-26 1993-03-05 Rohm Co Ltd 電子部品のリード端子構造
JPH06181276A (ja) * 1992-12-15 1994-06-28 Shinko Electric Ind Co Ltd 半導体装置用リード
JPH07297533A (ja) 1994-04-25 1995-11-10 Oki Electric Ind Co Ltd 半導体装置の固定方法及びその半導体装置並びに接着剤の塗布方法
JPH09219485A (ja) 1996-02-13 1997-08-19 Ibiden Co Ltd 電子部品搭載用基板の製造方法
JPH1040605A (ja) * 1996-07-25 1998-02-13 Matsushita Electric Ind Co Ltd 記録再生装置
JPH1140605A (ja) * 1997-07-22 1999-02-12 Toshiba Corp テープキャリアパッケージ
JP4497345B2 (ja) * 2003-02-12 2010-07-07 株式会社村田製作所 振動子の支持構造及び該支持構造の製造方法
JP5197263B2 (ja) * 2007-10-01 2013-05-15 スリーエム イノベイティブ プロパティズ カンパニー 端子取付け構造及び端子取付け方法
JP2010199678A (ja) 2009-02-23 2010-09-09 Seiko Instruments Inc 電子部品、電子装置、及び電子部品製造方法
JP6127651B2 (ja) * 2013-03-29 2017-05-17 セイコーエプソン株式会社 電子デバイス、電子機器、移動体および電子デバイスの製造方法

Also Published As

Publication number Publication date
US20160029487A1 (en) 2016-01-28
US9773713B2 (en) 2017-09-26
CN105306001B (zh) 2020-05-22
JP2016025297A (ja) 2016-02-08
CN105306001A (zh) 2016-02-03

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