CN105306001B - 电子部件、电子部件的制造方法、电子设备以及移动体 - Google Patents

电子部件、电子部件的制造方法、电子设备以及移动体 Download PDF

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Publication number
CN105306001B
CN105306001B CN201510430409.1A CN201510430409A CN105306001B CN 105306001 B CN105306001 B CN 105306001B CN 201510430409 A CN201510430409 A CN 201510430409A CN 105306001 B CN105306001 B CN 105306001B
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CN
China
Prior art keywords
region
connection
electronic component
bonding member
connection pad
Prior art date
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Expired - Fee Related
Application number
CN201510430409.1A
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English (en)
Chinese (zh)
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CN105306001A (zh
Inventor
近藤学
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Publication of CN105306001A publication Critical patent/CN105306001A/zh
Application granted granted Critical
Publication of CN105306001B publication Critical patent/CN105306001B/zh
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69—Insulating materials thereof
    • H10W70/692—Ceramics or glasses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201510430409.1A 2014-07-24 2015-07-21 电子部件、电子部件的制造方法、电子设备以及移动体 Expired - Fee Related CN105306001B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-150484 2014-07-24
JP2014150484A JP6417764B2 (ja) 2014-07-24 2014-07-24 電子部品、電子部品の製造方法、電子機器、および移動体

Publications (2)

Publication Number Publication Date
CN105306001A CN105306001A (zh) 2016-02-03
CN105306001B true CN105306001B (zh) 2020-05-22

Family

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Family Applications (1)

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CN201510430409.1A Expired - Fee Related CN105306001B (zh) 2014-07-24 2015-07-21 电子部件、电子部件的制造方法、电子设备以及移动体

Country Status (3)

Country Link
US (1) US9773713B2 (https=)
JP (1) JP6417764B2 (https=)
CN (1) CN105306001B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2555659B (en) * 2016-11-07 2020-01-15 Cirrus Logic Int Semiconductor Ltd Package for MEMS device and process
US10861803B1 (en) * 2017-03-17 2020-12-08 Scientific Components Corporation Low cost millimeter wave integrated LTCC package and method of manufacturing
IT201700103511A1 (it) * 2017-09-15 2019-03-15 St Microelectronics Srl Dispositivo microelettronico dotato di connessioni protette e relativo processo di fabbricazione
JP6907893B2 (ja) * 2017-11-08 2021-07-21 株式会社豊田自動織機 半導体装置
US20190291204A1 (en) * 2018-03-20 2019-09-26 Texas Instruments Incorporated Ribbon wire bond
US11365115B2 (en) * 2019-09-03 2022-06-21 Taiwan Semiconductor Manufacturing Company, Ltd. Piezoelectric anti-stiction structure for microelectromechanical systems

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921047A (ja) * 1982-07-27 1984-02-02 Fuji Xerox Co Ltd リ−ドレスチツプキヤリア
JPS6390160A (ja) * 1986-10-03 1988-04-21 Hitachi Ltd リ−ドフレ−ムの形状
US5025348A (en) * 1987-11-20 1991-06-18 Casio Computer Co., Ltd. Bonding structure of an electronic device and a method for manufacturing the same
US5270492A (en) * 1991-08-26 1993-12-14 Rohm Co., Ltd. Structure of lead terminal of electronic device
JPH06181276A (ja) * 1992-12-15 1994-06-28 Shinko Electric Ind Co Ltd 半導体装置用リード
JPH1040605A (ja) * 1996-07-25 1998-02-13 Matsushita Electric Ind Co Ltd 記録再生装置
CN104079261A (zh) * 2013-03-29 2014-10-01 精工爱普生株式会社 电子器件、电子设备、移动体及电子器件的制造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297533A (ja) 1994-04-25 1995-11-10 Oki Electric Ind Co Ltd 半導体装置の固定方法及びその半導体装置並びに接着剤の塗布方法
JPH09219485A (ja) 1996-02-13 1997-08-19 Ibiden Co Ltd 電子部品搭載用基板の製造方法
JPH1140605A (ja) * 1997-07-22 1999-02-12 Toshiba Corp テープキャリアパッケージ
JP4497345B2 (ja) * 2003-02-12 2010-07-07 株式会社村田製作所 振動子の支持構造及び該支持構造の製造方法
JP5197263B2 (ja) * 2007-10-01 2013-05-15 スリーエム イノベイティブ プロパティズ カンパニー 端子取付け構造及び端子取付け方法
JP2010199678A (ja) 2009-02-23 2010-09-09 Seiko Instruments Inc 電子部品、電子装置、及び電子部品製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921047A (ja) * 1982-07-27 1984-02-02 Fuji Xerox Co Ltd リ−ドレスチツプキヤリア
US4697204A (en) * 1982-07-27 1987-09-29 Fuji Xerox Co., Ltd. Leadless chip carrier and process for fabrication of same
JPS6390160A (ja) * 1986-10-03 1988-04-21 Hitachi Ltd リ−ドフレ−ムの形状
US5025348A (en) * 1987-11-20 1991-06-18 Casio Computer Co., Ltd. Bonding structure of an electronic device and a method for manufacturing the same
US5270492A (en) * 1991-08-26 1993-12-14 Rohm Co., Ltd. Structure of lead terminal of electronic device
JPH06181276A (ja) * 1992-12-15 1994-06-28 Shinko Electric Ind Co Ltd 半導体装置用リード
JPH1040605A (ja) * 1996-07-25 1998-02-13 Matsushita Electric Ind Co Ltd 記録再生装置
CN104079261A (zh) * 2013-03-29 2014-10-01 精工爱普生株式会社 电子器件、电子设备、移动体及电子器件的制造方法

Also Published As

Publication number Publication date
US20160029487A1 (en) 2016-01-28
US9773713B2 (en) 2017-09-26
JP2016025297A (ja) 2016-02-08
JP6417764B2 (ja) 2018-11-07
CN105306001A (zh) 2016-02-03

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