JP6416595B2 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 67
- 239000004065 semiconductor Substances 0.000 title claims description 65
- 125000006850 spacer group Chemical group 0.000 claims description 71
- 238000000034 method Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 33
- 238000005530 etching Methods 0.000 claims description 28
- 150000002736 metal compounds Chemical class 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 238000007517 polishing process Methods 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 103
- 229920005591 polysilicon Polymers 0.000 description 103
- 229910052581 Si3N4 Inorganic materials 0.000 description 19
- 239000010410 layer Substances 0.000 description 19
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- 229910021332 silicide Inorganic materials 0.000 description 13
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 11
- 238000005498 polishing Methods 0.000 description 11
- 238000001312 dry etching Methods 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 8
- 239000012212 insulator Substances 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 239000002784 hot electron Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000005689 Fowler Nordheim tunneling Effects 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32139—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer using masks
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- H01L23/00—Details of semiconductor or other solid state devices
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
- H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6653—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using the removal of at least part of spacer, e.g. disposable spacer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Geometry (AREA)
- Semiconductor Memories (AREA)
- Electrodes Of Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Non-Volatile Memory (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
Description
11 ゲート絶縁膜
12 ポリシリコン膜
13 窒化シリコン膜
15 スペーサ
17 ソース
18 ソース配線
21 ポリシリコン膜
22 絶縁膜
24a、24b ドレイン
30 フローティングゲート
31 コントロールゲート
40、41、42 シリサイド層
100 半導体メモリ
Claims (8)
- 半導体基板の上にゲート絶縁膜を介して第1のゲート部材を形成する工程と、
前記第1のゲート部材の上にスペーサを形成する工程と、
前記スペーサの表面を平坦化する工程と、
前記スペーサをマスクとして前記第1のゲート部材を部分的にエッチングして第1のゲートを形成する工程と、
前記第1のゲートおよび表面が平坦化された前記スペーサを覆うように第2のゲート部材を形成する工程と、
前記第2のゲート部材の表面に第1の絶縁膜を形成する工程と、
エッチングにより前記第1の絶縁膜を除去しつつ前記第2のゲート部材を後退させて第2のゲートを形成する工程と、
前記第2のゲートを覆うように第2の絶縁膜を形成する工程と、
エッチングにより前記第2の絶縁膜を後退させて前記第2のゲートの側面に接するサイドウォールを形成する工程と、
前記サイドウォールの形成後に前記第2のゲートの上面に金属化合物層を形成する工程と、
を含む半導体装置の製造方法。 - 前記スペーサの表面を平坦化する工程は、化学機械研磨処理を含む
請求項1に記載の製造方法。 - 前記スペーサの表面を平坦化する工程において、前記スペーサの表面は、前記半導体基板の主面に対して略平行となるように加工される
請求項1から請求項2のいずれか1項に記載の製造方法。 - 前記第1のゲート部材の上に開口部を有するマスクを形成する工程を更に含み、
前記スペーサを形成する工程は、前記開口部を埋めるようにスペーサ部材を形成する工程と、エッチングにより前記スペーサ部材を後退させる工程と、を含む
請求項1から請求項3のいずれか1項に記載の製造方法。 - 前記半導体基板の前記第1のゲートおよび前記第2のゲートを挟む位置にソースおよびドレインを形成する工程を更に含む
請求項1から請求項4のいずれか1項に記載の製造方法。 - 前記第1の絶縁膜は、前記第1のゲート、前記第2のゲート、前記ソースおよび前記ドレインを含む半導体素子とは別の半導体素子のゲート絶縁膜を構成する
請求項5に記載の製造方法。 - 前記半導体基板の前記第1のゲートおよび前記第2のゲートを挟む位置にソースおよびドレインを形成する工程と、
前記ソースに電気的に接続されたソース配線を形成する工程と、を更に含み、
前記第2のゲートの上面に金属化合物層を形成する工程において、前記ソース配線の上面および前記ドレインの上面に金属化合物層を形成する
請求項1に記載の製造方法。 - 前記スペーサは、前記開口部において離間して配置された一対のスペーサ片を含み、
前記半導体基板の前記第1のゲートおよび前記第2のゲートを挟む位置にソースおよびドレインを形成する工程と、
前記一対のスペーサ片の間の空間を埋めるように前記ソースに電気的に接続された配線材料を形成する工程と、
前記スペーサの表面を平坦化する前に、上面の高さが前記スペーサの高さよりも低くなるように前記配線材料をエッチングしてソース配線を形成する工程と、を更に含む
請求項4に記載の製造方法。
Priority Applications (4)
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JP2014231861A JP6416595B2 (ja) | 2014-11-14 | 2014-11-14 | 半導体装置および半導体装置の製造方法 |
CN201510755850.7A CN105609505B (zh) | 2014-11-14 | 2015-11-09 | 半导体装置以及半导体装置的制造方法 |
US14/937,367 US9653304B2 (en) | 2014-11-14 | 2015-11-10 | Semiconductor device and method of manufacturing semiconductor device |
US15/486,338 US20170221912A1 (en) | 2014-11-14 | 2017-04-13 | Semiconductor device and method of manufacturing semiconductor device |
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US9917165B2 (en) * | 2015-05-15 | 2018-03-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Memory cell structure for improving erase speed |
CN107305892B (zh) * | 2016-04-20 | 2020-10-02 | 硅存储技术公司 | 使用两个多晶硅沉积步骤来形成三栅极非易失性闪存单元对的方法 |
JP7118616B2 (ja) | 2017-10-12 | 2022-08-16 | ラピスセミコンダクタ株式会社 | 半導体装置及び半導体装置の製造方法 |
US10991704B2 (en) * | 2018-12-27 | 2021-04-27 | Globalfoundries Singapore Pte. Ltd. | Memory device and a method for forming the memory device |
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JP3333816B2 (ja) * | 1998-03-31 | 2002-10-15 | ティーディーケイ株式会社 | 複合型薄膜磁気ヘッドおよびその製造方法 |
US6352895B1 (en) * | 2000-03-15 | 2002-03-05 | International Business Machines Corporation | Method of forming merged self-aligned source and ONO capacitor for split gate non-volatile memory |
US6563167B2 (en) * | 2001-01-05 | 2003-05-13 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with floating gates having multiple sharp edges |
US6593187B1 (en) * | 2001-08-27 | 2003-07-15 | Taiwan Semiconductor Manufacturing Company | Method to fabricate a square poly spacer in flash |
US6541324B1 (en) * | 2001-11-02 | 2003-04-01 | Silicon Storage Technology, Inc. | Method of forming a semiconductor array of floating gate memory cells having strap regions and a peripheral logic device region |
CN1224093C (zh) * | 2002-02-10 | 2005-10-19 | 台湾积体电路制造股份有限公司 | 分离栅极式快速存储器的制造方法及结构 |
JP3481934B1 (ja) * | 2002-06-21 | 2003-12-22 | 沖電気工業株式会社 | 半導体記憶装置の製造方法 |
KR100487547B1 (ko) * | 2002-09-12 | 2005-05-03 | 삼성전자주식회사 | 비휘발성 메모리 장치의 제조 방법 |
JP4390452B2 (ja) * | 2002-12-27 | 2009-12-24 | Necエレクトロニクス株式会社 | 不揮発性メモリの製造方法 |
JP2004221503A (ja) * | 2003-01-17 | 2004-08-05 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
TW594944B (en) * | 2003-06-05 | 2004-06-21 | Taiwan Semiconductor Mfg | Method of forming an embedded flash memory device |
JP4748705B2 (ja) * | 2004-07-06 | 2011-08-17 | 三洋電機株式会社 | 半導体装置の製造方法 |
JP2006179736A (ja) | 2004-12-24 | 2006-07-06 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
KR100640533B1 (ko) * | 2005-10-04 | 2006-11-01 | 동부일렉트로닉스 주식회사 | 스플리트 게이트형 비휘발성 기억 장치 및 그 제조방법 |
JP4794337B2 (ja) * | 2006-03-24 | 2011-10-19 | ルネサスエレクトロニクス株式会社 | スプリットゲート型不揮発性半導体記憶装置の製造方法 |
JP2008251825A (ja) * | 2007-03-30 | 2008-10-16 | Nec Electronics Corp | 半導体記憶装置の製造方法 |
KR100965030B1 (ko) * | 2007-10-10 | 2010-06-21 | 주식회사 하이닉스반도체 | 반도체 소자 및 반도체 소자의 콘택 플러그 형성 방법 |
KR101024336B1 (ko) * | 2009-02-13 | 2011-03-23 | 매그나칩 반도체 유한회사 | 비휘발성 메모리 셀 및 그의 제조방법 |
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2014
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US20170221912A1 (en) | 2017-08-03 |
US20160141407A1 (en) | 2016-05-19 |
CN105609505A (zh) | 2016-05-25 |
CN105609505B (zh) | 2021-08-10 |
JP2016096264A (ja) | 2016-05-26 |
US9653304B2 (en) | 2017-05-16 |
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