JP6316813B2 - バリアフィルム構築及びその作製方法 - Google Patents

バリアフィルム構築及びその作製方法 Download PDF

Info

Publication number
JP6316813B2
JP6316813B2 JP2015526568A JP2015526568A JP6316813B2 JP 6316813 B2 JP6316813 B2 JP 6316813B2 JP 2015526568 A JP2015526568 A JP 2015526568A JP 2015526568 A JP2015526568 A JP 2015526568A JP 6316813 B2 JP6316813 B2 JP 6316813B2
Authority
JP
Japan
Prior art keywords
layer
base polymer
oxide
barrier film
adhesion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015526568A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015530289A5 (enExample
JP2015530289A (ja
Inventor
シー．スパグノーラ ジョセフ
シー．スパグノーラ ジョセフ
エー．ロエリグ マーク
エー．ロエリグ マーク
ピー．クラン トーマス
ピー．クラン トーマス
ケー．ナクティガル アラン
ケー．ナクティガル アラン
エス．ライオンズ クリストファー
エス．ライオンズ クリストファー
ディー．ジョリー ガイ
ディー．ジョリー ガイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2015530289A publication Critical patent/JP2015530289A/ja
Publication of JP2015530289A5 publication Critical patent/JP2015530289A5/ja
Application granted granted Critical
Publication of JP6316813B2 publication Critical patent/JP6316813B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/042—Coating with two or more layers, where at least one layer of a composition contains a polymer binder
    • C08J7/0423—Coating with two or more layers, where at least one layer of a composition contains a polymer binder with at least one layer of inorganic material and at least one layer of a composition containing a polymer binder
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/048—Forming gas barrier coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/54—Screens on or from which an image or pattern is formed, picked-up, converted, or stored; Luminescent coatings on vessels
    • H01J1/62—Luminescent screens; Selection of materials for luminescent coatings on vessels
    • H01J1/70—Luminescent screens; Selection of materials for luminescent coatings on vessels with protective, conductive, or reflective layers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2367/00—Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
    • C08J2367/02—Polyesters derived from dicarboxylic acids and dihydroxy compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2433/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • C08J2433/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
    • C08J2433/06—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing only carbon, hydrogen, and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C08J2433/08—Homopolymers or copolymers of acrylic acid esters
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2433/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • C08J2433/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
    • C08J2433/06—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing only carbon, hydrogen, and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C08J2433/10—Homopolymers or copolymers of methacrylic acid esters
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2433/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • C08J2433/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
    • C08J2433/06—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing only carbon, hydrogen, and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C08J2433/10—Homopolymers or copolymers of methacrylic acid esters
    • C08J2433/12—Homopolymers or copolymers of methyl methacrylate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2433/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • C08J2433/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
    • C08J2433/14—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing halogen, nitrogen, sulfur, or oxygen atoms in addition to the carboxy oxygen
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31855—Of addition polymer from unsaturated monomers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Electroluminescent Light Sources (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Thin Film Transistor (AREA)
JP2015526568A 2012-08-08 2013-07-30 バリアフィルム構築及びその作製方法 Active JP6316813B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261680963P 2012-08-08 2012-08-08
US61/680,963 2012-08-08
US201361779455P 2013-03-13 2013-03-13
US61/779,455 2013-03-13
PCT/US2013/052633 WO2014025570A1 (en) 2012-08-08 2013-07-30 Barrier film constructions and methods of making same

Publications (3)

Publication Number Publication Date
JP2015530289A JP2015530289A (ja) 2015-10-15
JP2015530289A5 JP2015530289A5 (enExample) 2016-08-04
JP6316813B2 true JP6316813B2 (ja) 2018-04-25

Family

ID=50068489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015526568A Active JP6316813B2 (ja) 2012-08-08 2013-07-30 バリアフィルム構築及びその作製方法

Country Status (9)

Country Link
US (2) US20150213990A1 (enExample)
EP (1) EP2882587A4 (enExample)
JP (1) JP6316813B2 (enExample)
KR (1) KR102126719B1 (enExample)
CN (1) CN104684727B (enExample)
BR (1) BR112015002840A2 (enExample)
SG (1) SG11201500934RA (enExample)
TW (1) TWI598224B (enExample)
WO (1) WO2014025570A1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10199603B2 (en) 2013-07-24 2019-02-05 3M Innovative Properties Company Adhesive barrier film construction
JP6330902B2 (ja) * 2014-04-04 2018-05-30 凸版印刷株式会社 波長変換シート及びバックライトユニット
JP6729568B2 (ja) * 2015-05-25 2020-07-22 コニカミノルタ株式会社 ガスバリアーフィルム、波長変換部材及びバックライトユニット
PT3313948T (pt) * 2015-06-25 2021-11-24 Univ Do Minho Método para ligar duas camadas com adesivo líquido e o seu conjunto ligado
KR20180025901A (ko) * 2015-06-29 2018-03-09 쓰리엠 이노베이티브 프로퍼티즈 캄파니 초박형 배리어 라미네이트 및 장치
JP6438370B2 (ja) * 2015-08-03 2018-12-12 Ｊｘ金属株式会社 プリント配線板の製造方法、表面処理銅箔、積層体、プリント配線板、半導体パッケージ及び電子機器
WO2017031298A1 (en) 2015-08-19 2017-02-23 3M Innovative Properties Company Composite article and methods of making the same
EP3337848B1 (en) 2015-08-19 2019-05-29 3M Innovative Properties Company Composite article including a multilayer barrier assembly and methods of making the same
ES2862385T3 (es) 2015-08-19 2021-10-07 3M Innovative Properties Co Artículo compuesto que incluye una unidad de barrera multicapa y métodos para fabricar el mismo
US20180304585A1 (en) * 2015-09-30 2018-10-25 Naota NUGIYAMA Multilayer barrier coatings
CN105572970A (zh) * 2016-01-16 2016-05-11 汕头万顺包装材料股份有限公司 增亮阻隔膜及具有该增亮阻隔膜的量子点膜、背光模组
CN108698369B (zh) 2016-03-04 2021-03-09 3M创新有限公司 磁性多层片材
CN109075262A (zh) 2016-03-25 2018-12-21 3M创新有限公司 多层阻挡膜
KR102075074B1 (ko) * 2017-02-10 2020-02-07 (주)엘지하우시스 자가 세정 유리용 적층체, 자가 세정 유리 및 자가 세정 유리를 제조하는 방법
EP3602648B1 (en) * 2017-03-30 2024-07-10 3M Innovative Properties Company Transfer articles
KR101989870B1 (ko) * 2017-08-02 2019-06-17 도레이첨단소재 주식회사 디스플레이용 플라스틱 필름
CN115551955B (zh) 2020-05-14 2024-02-02 3M创新有限公司 氟化偶联剂和使用其制备的氟化(共)聚合物层
WO2021229340A1 (en) 2020-05-14 2021-11-18 3M Innovative Properties Company Fluorinated photoinitiators and fluorinated (co)polymer layers made using the same
WO2021260596A1 (en) 2020-06-25 2021-12-30 3M Innovative Properties Company Low dielectric constant curable ink compositions
WO2021260601A1 (en) 2020-06-25 2021-12-30 3M Innovative Properties Company Curable high refractive index ink compositions and articles prepared from the ink compositions
EP4205192A1 (en) 2020-08-28 2023-07-05 3M Innovative Properties Company Articles including nanostructured surfaces and enclosed voids, methods of making same, and optical elements
US20240189861A1 (en) * 2021-05-06 2024-06-13 Basf Coatings Gmbh Multilayer barrier film, its manufacture and use in photovoltaic applications
WO2023121646A1 (en) * 2021-12-20 2023-06-29 Applied Materials, Inc. Improved adhesion layer in flexible coverlens

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5131590B2 (enExample) 1972-02-03 1976-09-07
US4842893A (en) 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5125138A (en) 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same
US5018048A (en) 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US5032461A (en) 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US5097800A (en) 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
US4722515A (en) 1984-11-06 1988-02-02 Spectrum Control, Inc. Atomizing device for vaporization
EP0242460A1 (en) 1985-01-18 1987-10-28 SPECTRUM CONTROL, INC. (a Pennsylvania corporation) Monomer atomizer for vaporization
US4954371A (en) 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
JP2825736B2 (ja) 1993-07-30 1998-11-18 京セラ株式会社 誘電体磁器組成物および半導体素子収容用パッケージ
US5440446A (en) 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
ATE218398T1 (de) 1993-10-04 2002-06-15 3M Innovative Properties Co Verfahren zur herstellung einer acrylatbeschichtung
US6083628A (en) 1994-11-04 2000-07-04 Sigma Laboratories Of Arizona, Inc. Hybrid polymer film
DE69601316T2 (de) 1995-02-28 1999-08-26 Dow Corning Corp. Verfahren zur Herstellung organomodifizierter strahlungshärtbarer Silikonharze
EP0760283A4 (en) 1995-03-14 1998-12-16 Daicel Chem COMPOSITE BARRIER FILM AND PROCESS FOR PRODUCING THE SAME
US5877895A (en) 1995-03-20 1999-03-02 Catalina Coatings, Inc. Multicolor interference coating
US5763033A (en) * 1996-01-30 1998-06-09 Becton, Dickinson And Company Blood collection tube assembly
JP3767002B2 (ja) * 1996-03-08 2006-04-19 東洋紡績株式会社 ガスバリアフィルムおよびその製造方法
US6045864A (en) 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
US6268695B1 (en) * 1998-12-16 2001-07-31 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
US6878440B1 (en) 1999-07-02 2005-04-12 3M Innovative Properties Company Pressure sensitive adhesive sheet and production method thereof
US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
IL151410A0 (en) 2000-03-09 2003-04-10 Isovolta Osterreichishe Isolie Method for producing a photovoltaic thin film module
US6867539B1 (en) * 2000-07-12 2005-03-15 3M Innovative Properties Company Encapsulated organic electronic devices and method for making same
JP2002052639A (ja) * 2000-08-09 2002-02-19 Toyobo Co Ltd 積層体及び包装体
JP4631181B2 (ja) * 2001-02-16 2011-02-16 東洋紡績株式会社 無機蒸着フイルム積層体および包装体
US20040229051A1 (en) * 2003-05-15 2004-11-18 General Electric Company Multilayer coating package on flexible substrates for electro-optical devices
US7018713B2 (en) * 2003-04-02 2006-03-28 3M Innovative Properties Company Flexible high-temperature ultrabarrier
DE10362060B4 (de) 2003-10-21 2009-07-09 Altana Coatings & Sealants Gmbh Verpackungsmaterial mit einer Barriereschicht für Gase
JP4501558B2 (ja) * 2004-07-06 2010-07-14 凸版印刷株式会社 高ガスバリア性を有する透明積層体
JP2006228469A (ja) * 2005-02-15 2006-08-31 Fuji Photo Film Co Ltd 導電性膜形成用感光材料、導電性膜、透光性電磁波シールド膜、及びそれらの製造方法
JP4716773B2 (ja) * 2005-04-06 2011-07-06 富士フイルム株式会社 ガスバリアフィルムとそれを用いた有機デバイス
JP2006327098A (ja) * 2005-05-27 2006-12-07 Nitto Denko Corp 透明フィルムおよびその製造方法
KR20080022172A (ko) 2005-06-13 2008-03-10 쓰리엠 이노베이티브 프로퍼티즈 캄파니 플루오로중합체 함유 라미네이트
US20100219079A1 (en) 2006-05-07 2010-09-02 Synkera Technologies, Inc. Methods for making membranes based on anodic aluminum oxide structures
JP2008080704A (ja) * 2006-09-28 2008-04-10 Toppan Printing Co Ltd ガスバリア性積層体
US20100068542A1 (en) 2006-12-29 2010-03-18 3M Innovative Properties Company Method of making inorganic or inorganic/organic hybrid films
US7833574B2 (en) 2007-01-29 2010-11-16 Guardian Industries Corp. Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film
UA97140C2 (ru) 2007-04-04 2012-01-10 Тетра Лаваль Холдингс Энд Файненс С.А. Защитная пленка, многослойный упаковочный ламинат для упаковки напитка или другого пищевого продукта, способ изготовления защитной пленки и упаковочный контейнер для упаковки напитка или другого пищевого продукта
JP2008265096A (ja) 2007-04-18 2008-11-06 Toppan Printing Co Ltd ガスバリア性透明フィルム、およびそれを用いたガスバリア性透明包装体
US9481927B2 (en) 2008-06-30 2016-11-01 3M Innovative Properties Company Method of making inorganic or inorganic/organic hybrid barrier films
JP5131590B2 (ja) 2008-07-31 2013-01-30 株式会社ピーエス三菱 張り出し架設工法における柱頭部ｐｃ桁仮固定構造
EP2358529A4 (en) 2008-11-17 2013-08-28 3M Innovative Properties Co BARRIER WITH A GRADIENT COMPOSITION
WO2010067857A1 (ja) * 2008-12-12 2010-06-17 リンテック株式会社 積層体、その製造方法、電子デバイス部材および電子デバイス
JP5216724B2 (ja) * 2009-09-01 2013-06-19 富士フイルム株式会社 ガスバリアフィルムおよびデバイス
US20120227809A1 (en) * 2009-11-18 2012-09-13 Vivek Bharti Flexible assembly and method of making and using the same
JP5636725B2 (ja) * 2010-04-26 2014-12-10 大日本印刷株式会社 モールディング成形用離型フィルム及びその製造方法
CN103079816B (zh) * 2010-07-02 2018-01-02 3M创新有限公司 具有包封剂和光伏电池的阻挡组件
US9254506B2 (en) * 2010-07-02 2016-02-09 3M Innovative Properties Company Moisture resistant coating for barrier films
JP5974465B2 (ja) * 2010-12-01 2016-08-23 東洋紡株式会社 積層フィルム
US20130323519A1 (en) 2011-01-31 2013-12-05 3M Innovative Properties Company Coatings for barrier films and methods of making and using the same
US20130302627A1 (en) 2011-01-31 2013-11-14 3M Innovative Properties Company Vapor-deposited coating for barrier films and methods of making and using the same
EP2740328A4 (en) 2011-08-04 2015-05-06 3M Innovative Properties Co LOCKING DEVICE WITH EDGE PROTECTION
WO2014025384A1 (en) 2012-08-08 2014-02-13 3M Innovative Properties Company Urea (multi)-(meth)acrylate (multi)-silane compositions and articles including the same
TWI610806B (zh) 2012-08-08 2018-01-11 ３Ｍ新設資產公司 障壁膜，製造該障壁膜之方法，及包含該障壁膜之物件
EP2885130A4 (en) 2012-08-16 2016-06-29 3M Innovative Properties Co METHOD FOR PRODUCING BARRIER ARRANGEMENTS
KR20150043410A (ko) 2012-08-16 2015-04-22 쓰리엠 이노베이티브 프로퍼티즈 캄파니 배리어 조립체를 제조하는 방법

Also Published As

Publication number Publication date
TW201410455A (zh) 2014-03-16
KR20150041062A (ko) 2015-04-15
CN104684727A (zh) 2015-06-03
US20150213990A1 (en) 2015-07-30
WO2014025570A1 (en) 2014-02-13
EP2882587A4 (en) 2016-04-13
EP2882587A1 (en) 2015-06-17
US20190180968A1 (en) 2019-06-13
KR102126719B1 (ko) 2020-06-25
CN104684727B (zh) 2017-05-17
TWI598224B (zh) 2017-09-11
BR112015002840A2 (pt) 2017-08-08
JP2015530289A (ja) 2015-10-15
US10947618B2 (en) 2021-03-16
SG11201500934RA (en) 2015-03-30

Similar Documents

Publication Publication Date Title
JP6316813B2 (ja) バリアフィルム構築及びその作製方法
JP5890592B2 (ja) バリアフィルム、バリアフィルムの製造方法、及びバリアフィルムを含む物品
KR101939412B1 (ko) 배리어 필름용 내습성 코팅
CN104769017B (zh) 包含氨基甲酸酯(多)(甲基)丙烯酸酯(多)-硅烷的(共)聚合物反应产物的制品
CN104540676B (zh) 用于阻挡膜的涂层及制备和使用其的方法
CN104798211B (zh) 具有封装阻隔膜的光伏器件
WO2014028677A1 (en) Methods of making barrier assemblies
TW201411176A (zh) 製造阻隔組件之方法
EP3337848A1 (en) Composite article including a multilayer barrier assembly and methods of making the same
JP6469605B2 (ja) ガスバリアフィルム
CN107921753B (zh) 包括多层阻挡组件的复合制品及其制备方法
JP2004001356A (ja) 透明水蒸気バリアフィルムシートおよびその製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160609

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160609

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170307

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20170330

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20170405

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170605

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170904

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180227

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180328

R150 Certificate of patent or registration of utility model

Ref document number: 6316813

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250