JP6315547B2 - 基板処理装置 - Google Patents

基板処理装置 Download PDF

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Publication number
JP6315547B2
JP6315547B2 JP2013259848A JP2013259848A JP6315547B2 JP 6315547 B2 JP6315547 B2 JP 6315547B2 JP 2013259848 A JP2013259848 A JP 2013259848A JP 2013259848 A JP2013259848 A JP 2013259848A JP 6315547 B2 JP6315547 B2 JP 6315547B2
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Japan
Prior art keywords
substrate
unit
liquid
transport
roller
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JP2013259848A
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English (en)
Japanese (ja)
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JP2015118969A5 (enExample
JP2015118969A (ja
Inventor
手島　理恵
理恵 手島
磯　明典
明典 磯
竜平 高原
竜平 高原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2013259848A priority Critical patent/JP6315547B2/ja
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Publication of JP2015118969A5 publication Critical patent/JP2015118969A5/ja
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2013259848A 2013-12-17 2013-12-17 基板処理装置 Active JP6315547B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013259848A JP6315547B2 (ja) 2013-12-17 2013-12-17 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013259848A JP6315547B2 (ja) 2013-12-17 2013-12-17 基板処理装置

Publications (3)

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JP2015118969A JP2015118969A (ja) 2015-06-25
JP2015118969A5 JP2015118969A5 (enExample) 2017-01-19
JP6315547B2 true JP6315547B2 (ja) 2018-04-25

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ID=53531485

Family Applications (1)

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JP2013259848A Active JP6315547B2 (ja) 2013-12-17 2013-12-17 基板処理装置

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JP (1) JP6315547B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018108892A (ja) * 2016-12-28 2018-07-12 芝浦メカトロニクス株式会社 浮上搬送装置および基板処理装置
KR101805357B1 (ko) * 2017-05-02 2017-12-06 김문환 노즐을 구비한 세탁물 이송장치
KR102404501B1 (ko) * 2019-07-25 2022-06-07 시바우라 메카트로닉스 가부시끼가이샤 기판 반송 장치 및 기판 처리 장치
JP7056972B2 (ja) * 2020-06-04 2022-04-19 株式会社ケミトロン 基板処理装置
JP7312738B2 (ja) * 2020-12-11 2023-07-21 芝浦メカトロニクス株式会社 基板処理装置
CN114823443B (zh) * 2021-01-22 2025-02-25 芝浦机械电子装置株式会社 基板搬送装置以及基板处理装置
JP7324823B2 (ja) * 2021-01-22 2023-08-10 芝浦メカトロニクス株式会社 基板搬送装置及び基板処理装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09132309A (ja) * 1995-11-09 1997-05-20 Dainippon Screen Mfg Co Ltd 基板搬送装置
JPH09232268A (ja) * 1996-02-19 1997-09-05 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH10314635A (ja) * 1997-05-19 1998-12-02 Hitachi Ltd 塗布装置
JP3926593B2 (ja) * 2001-09-14 2007-06-06 大日本スクリーン製造株式会社 基板処理装置
JP4476101B2 (ja) * 2004-11-09 2010-06-09 東京エレクトロン株式会社 基板処理装置及び平流し型基板搬送装置
JP2006256768A (ja) * 2005-03-16 2006-09-28 Sharp Corp 基板搬送装置、基板処理装置及び平面表示装置
JP5502443B2 (ja) * 2009-12-05 2014-05-28 芝浦メカトロニクス株式会社 基板の搬送装置

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JP2015118969A (ja) 2015-06-25

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