JP6291446B2 - 導電性炭化珪素質焼結体の製造方法 - Google Patents

導電性炭化珪素質焼結体の製造方法 Download PDF

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JP6291446B2
JP6291446B2 JP2015064930A JP2015064930A JP6291446B2 JP 6291446 B2 JP6291446 B2 JP 6291446B2 JP 2015064930 A JP2015064930 A JP 2015064930A JP 2015064930 A JP2015064930 A JP 2015064930A JP 6291446 B2 JP6291446 B2 JP 6291446B2
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silicon carbide
phase
sintered body
conductive
type silicon
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JP2016183081A (ja
JP2016183081A5 (cg-RX-API-DMAC7.html
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知幸 山田
知幸 山田
晋 清木
晋 清木
浩次郎 徳田
浩次郎 徳田
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TYK Corp
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TYK Corp
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JP2015064930A 2015-03-26 2015-03-26 導電性炭化珪素質焼結体の製造方法 Active JP6291446B2 (ja)

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JP2016183081A JP2016183081A (ja) 2016-10-20
JP2016183081A5 JP2016183081A5 (cg-RX-API-DMAC7.html) 2017-02-09
JP6291446B2 true JP6291446B2 (ja) 2018-03-14

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JP6778644B2 (ja) * 2017-03-29 2020-11-04 東京窯業株式会社 導電性炭化珪素質焼結体の製造方法及び導電性炭化珪素質焼結体
JP7213607B2 (ja) * 2018-03-28 2023-01-27 東京窯業株式会社 導電性炭化珪素質焼結体の製造方法及び導電性炭化珪素質焼結体

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JP3476153B2 (ja) * 1993-08-12 2003-12-10 東海高熱工業株式会社 導電性炭化珪素質セラミック材
JPH0789764A (ja) * 1993-09-21 1995-04-04 Tokai Konetsu Kogyo Co Ltd 炭化珪素発熱体
JPH0812462A (ja) * 1994-06-22 1996-01-16 Denki Kagaku Kogyo Kk 導電性セラミックとその製造方法及び用途
JPH0826827A (ja) * 1994-07-15 1996-01-30 Denki Kagaku Kogyo Kk 導電性反応焼結炭化珪素焼結体とその製造方法及び用途
JP3681780B2 (ja) * 1995-02-08 2005-08-10 東京窯業株式会社 多孔質導電性炭化珪素焼結体とその製造方法及び用途
JP3691536B2 (ja) * 1995-02-08 2005-09-07 東京窯業株式会社 多孔質導電性炭化珪素焼結体の製造方法
DE69923567T2 (de) * 1998-08-07 2006-02-16 Bridgestone Corp. Verfahren zur herstellung eines siliciumcarbidsinterkörpers

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