JP2016183081A5 - - Google Patents
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- Publication number
- JP2016183081A5 JP2016183081A5 JP2015064930A JP2015064930A JP2016183081A5 JP 2016183081 A5 JP2016183081 A5 JP 2016183081A5 JP 2015064930 A JP2015064930 A JP 2015064930A JP 2015064930 A JP2015064930 A JP 2015064930A JP 2016183081 A5 JP2016183081 A5 JP 2016183081A5
- Authority
- JP
- Japan
- Prior art keywords
- phase
- silicon carbide
- sintered body
- conductive
- high resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 16
- 229910010271 silicon carbide Inorganic materials 0.000 claims 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 13
- 229910052757 nitrogen Inorganic materials 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000010304 firing Methods 0.000 claims 3
- 238000006243 chemical reaction Methods 0.000 claims 2
- 239000002019 doping agent Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015064930A JP6291446B2 (ja) | 2015-03-26 | 2015-03-26 | 導電性炭化珪素質焼結体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015064930A JP6291446B2 (ja) | 2015-03-26 | 2015-03-26 | 導電性炭化珪素質焼結体の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016183081A JP2016183081A (ja) | 2016-10-20 |
| JP2016183081A5 true JP2016183081A5 (cg-RX-API-DMAC7.html) | 2017-02-09 |
| JP6291446B2 JP6291446B2 (ja) | 2018-03-14 |
Family
ID=57242417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015064930A Active JP6291446B2 (ja) | 2015-03-26 | 2015-03-26 | 導電性炭化珪素質焼結体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6291446B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6778644B2 (ja) * | 2017-03-29 | 2020-11-04 | 東京窯業株式会社 | 導電性炭化珪素質焼結体の製造方法及び導電性炭化珪素質焼結体 |
| JP7213607B2 (ja) * | 2018-03-28 | 2023-01-27 | 東京窯業株式会社 | 導電性炭化珪素質焼結体の製造方法及び導電性炭化珪素質焼結体 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3476153B2 (ja) * | 1993-08-12 | 2003-12-10 | 東海高熱工業株式会社 | 導電性炭化珪素質セラミック材 |
| JPH0789764A (ja) * | 1993-09-21 | 1995-04-04 | Tokai Konetsu Kogyo Co Ltd | 炭化珪素発熱体 |
| JPH0812462A (ja) * | 1994-06-22 | 1996-01-16 | Denki Kagaku Kogyo Kk | 導電性セラミックとその製造方法及び用途 |
| JPH0826827A (ja) * | 1994-07-15 | 1996-01-30 | Denki Kagaku Kogyo Kk | 導電性反応焼結炭化珪素焼結体とその製造方法及び用途 |
| JP3681780B2 (ja) * | 1995-02-08 | 2005-08-10 | 東京窯業株式会社 | 多孔質導電性炭化珪素焼結体とその製造方法及び用途 |
| JP3691536B2 (ja) * | 1995-02-08 | 2005-09-07 | 東京窯業株式会社 | 多孔質導電性炭化珪素焼結体の製造方法 |
| DE69923567T2 (de) * | 1998-08-07 | 2006-02-16 | Bridgestone Corp. | Verfahren zur herstellung eines siliciumcarbidsinterkörpers |
-
2015
- 2015-03-26 JP JP2015064930A patent/JP6291446B2/ja active Active
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