JP6280332B2 - 基板反転搬送装置 - Google Patents

基板反転搬送装置 Download PDF

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Publication number
JP6280332B2
JP6280332B2 JP2013186107A JP2013186107A JP6280332B2 JP 6280332 B2 JP6280332 B2 JP 6280332B2 JP 2013186107 A JP2013186107 A JP 2013186107A JP 2013186107 A JP2013186107 A JP 2013186107A JP 6280332 B2 JP6280332 B2 JP 6280332B2
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Prior art keywords
substrate
reversing
suction
reversing mechanism
traveling body
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Active
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JP2013186107A
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English (en)
Japanese (ja)
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JP2015051864A (ja
Inventor
勉 上野
勉 上野
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP2013186107A priority Critical patent/JP6280332B2/ja
Priority to TW103113732A priority patent/TWI633069B/zh
Priority to KR1020140052510A priority patent/KR102217699B1/ko
Priority to CN201410186681.5A priority patent/CN104418496B/zh
Publication of JP2015051864A publication Critical patent/JP2015051864A/ja
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Publication of JP6280332B2 publication Critical patent/JP6280332B2/ja
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  • Attitude Control For Articles On Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Robotics (AREA)
JP2013186107A 2013-09-09 2013-09-09 基板反転搬送装置 Active JP6280332B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013186107A JP6280332B2 (ja) 2013-09-09 2013-09-09 基板反転搬送装置
TW103113732A TWI633069B (zh) 2013-09-09 2014-04-15 Substrate turnover transport device
KR1020140052510A KR102217699B1 (ko) 2013-09-09 2014-04-30 기판 반전 반송 장치
CN201410186681.5A CN104418496B (zh) 2013-09-09 2014-05-05 基板反转搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013186107A JP6280332B2 (ja) 2013-09-09 2013-09-09 基板反転搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015200643A Division JP2016040203A (ja) 2015-10-09 2015-10-09 基板反転搬送装置

Publications (2)

Publication Number Publication Date
JP2015051864A JP2015051864A (ja) 2015-03-19
JP6280332B2 true JP6280332B2 (ja) 2018-02-14

Family

ID=52701194

Family Applications (1)

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JP2013186107A Active JP6280332B2 (ja) 2013-09-09 2013-09-09 基板反転搬送装置

Country Status (4)

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JP (1) JP6280332B2 (ko)
KR (1) KR102217699B1 (ko)
CN (1) CN104418496B (ko)
TW (1) TWI633069B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105600449B (zh) * 2016-03-21 2018-12-18 京东方科技集团股份有限公司 基板传送装置及其传送方法
CN106078404A (zh) * 2016-07-25 2016-11-09 长兴科艺玻璃工艺品有限公司 一种玻璃面板加工用磨边装置
CN106078405A (zh) * 2016-07-25 2016-11-09 长兴科艺玻璃工艺品有限公司 一种用于玻璃面板加工的固定翻转装置
CN106946022A (zh) * 2017-04-22 2017-07-14 河北亚峰专用汽车制造有限公司 一种罐体焊接平板自动翻转机
CN107539777B (zh) * 2017-10-11 2023-08-18 广东腾胜科技创新有限公司 一种用于镀膜机的封闭式上下片系统
CN107857092B (zh) * 2017-10-19 2023-10-20 江苏杰士德精密工业有限公司 软板自动翻转设备及其操作方法
CN108016876A (zh) * 2017-12-29 2018-05-11 重庆市中光电显示技术有限公司 Fpc供料车及fpc加工线
CN110217564A (zh) * 2019-07-06 2019-09-10 江门旭弘磁材有限公司 压制磁瓦检测机构及传输平台
CN110405962B (zh) * 2019-07-23 2021-11-19 上海理工大学 自动翻转式半导体解理装置及加工方法
JP7029187B2 (ja) 2020-01-29 2022-03-03 三星ダイヤモンド工業株式会社 基板反転装置および分断システム
CN114772249A (zh) * 2022-04-06 2022-07-22 深圳市可信华成通信科技有限公司 一种凸轮板材自动定位装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147344U (ko) * 1988-03-30 1989-10-12
JP2854738B2 (ja) * 1991-09-25 1999-02-03 不二越機械工業株式会社 ウエハの接着装置
CN2444251Y (zh) * 2000-09-29 2001-08-22 陈聪智 可供液晶显示基板持续传送的翻转装置
KR100748159B1 (ko) 2001-01-17 2007-08-09 미쓰보시 다이야몬도 고교 가부시키가이샤 절단장치, 절단시스템 및 절단방법
JP4644382B2 (ja) * 2001-04-24 2011-03-02 日立ビアメカニクス株式会社 露光システム
JP3747054B2 (ja) * 2001-12-04 2006-02-22 Ｔｏｗａ株式会社 ボンディング装置及びボンディング方法
CN1890074B (zh) 2003-12-04 2011-03-30 三星钻石工业股份有限公司 基板加工方法、基板加工装置、基板输送方法、基板输送机构
JP2008172160A (ja) * 2007-01-15 2008-07-24 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
TWI334749B (en) * 2008-01-04 2010-12-11 Foxconn Advanced Tech Inc Releasing and collecting system for printed circuit board and turn-over method using the same
JP5334443B2 (ja) * 2008-04-02 2013-11-06 日本メクトロン株式会社 板状ワーク反転装置
JP5349881B2 (ja) * 2008-09-24 2013-11-20 三星ダイヤモンド工業株式会社 スクライブ装置および基板分断システム
TWI366546B (en) * 2009-01-09 2012-06-21 Chimei Innolux Corp Transmission apparatus
CN101510523B (zh) * 2009-03-19 2010-08-25 友达光电股份有限公司 基板翻转平台与翻转基板的方法
CN102050280B (zh) * 2009-10-30 2012-11-14 孙月卫 盒体及导正盒体的位置导正载具和位置导正方法
JP5355451B2 (ja) * 2010-02-26 2013-11-27 東京エレクトロン株式会社 接合装置

Also Published As

Publication number Publication date
CN104418496B (zh) 2018-08-21
TWI633069B (zh) 2018-08-21
JP2015051864A (ja) 2015-03-19
CN104418496A (zh) 2015-03-18
KR20150029518A (ko) 2015-03-18
KR102217699B1 (ko) 2021-02-18
TW201509841A (zh) 2015-03-16

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