JP6256148B2 - 炭化珪素半導体装置およびその製造方法 - Google Patents
炭化珪素半導体装置およびその製造方法 Download PDFInfo
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- JP6256148B2 JP6256148B2 JP2014066042A JP2014066042A JP6256148B2 JP 6256148 B2 JP6256148 B2 JP 6256148B2 JP 2014066042 A JP2014066042 A JP 2014066042A JP 2014066042 A JP2014066042 A JP 2014066042A JP 6256148 B2 JP6256148 B2 JP 6256148B2
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 290
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- 239000012535 impurity Substances 0.000 claims description 712
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- 229910052710 silicon Inorganic materials 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 238000005468 ion implantation Methods 0.000 claims description 11
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- 210000000746 body region Anatomy 0.000 description 104
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 23
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- 235000012239 silicon dioxide Nutrition 0.000 description 5
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- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
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- -1 aluminum ions Chemical class 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
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- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
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- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000943 NiAl Inorganic materials 0.000 description 1
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
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- 239000011737 fluorine Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
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- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
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- 230000008018 melting Effects 0.000 description 1
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- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Description
以下、図面に基づいて本発明の実施の形態について説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付しその説明は繰返さない。また、本明細書中の結晶学的記載においては、個別方位を[]、集合方位を<>、個別面を()、集合面を{}でそれぞれ示している。また、負の指数については、結晶学上、”−”(バー)を数字の上に付けることになっているが、本明細書中では、数字の前に負の符号を付けている。
[本発明の実施形態の詳細]
(実施の形態1)
まず、本発明の実施の形態1に係る炭化珪素半導体装置としてのプレナー型MOSFETの構成について説明する。
次に、本発明の実施の形態2に係る炭化珪素半導体装置としてのプレナー型MOSFETの構成について説明する。実施の形態2に係るプレナー型MOSFETは、中間不純物領域17が第2不純物領域の一部を構成する点において実施の形態1に係るプレナー型MOSFETと異なっており、他の構成は、実施の形態1に係るプレナー型MOSFETと同様である。そのため、同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
次に、本発明の実施の形態3に係る炭化珪素半導体装置としてのトレンチ型MOSFETの構成について説明する。
次に、本発明の実施の形態4に係る炭化珪素半導体装置としてのトレンチ型MOSFETの構成について説明する。実施の形態4に係るトレンチ型MOSFETは、中間不純物領域17が第2不純物領域の一部を構成する点において実施の形態3に係るトレンチ型MOSFETと異なっており、他の構成は、実施の形態3に係るトレンチ型MOSFETと同様である。そのため、同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
5 炭化珪素エピタキシャル層
10 炭化珪素基板
10a 第1の主面(主面)
10b 第2の主面
11 炭化珪素単結晶基板
12 第1不純物領域(ドリフト領域)
13 第2不純物領域(ボディ領域)
13a ボディ領域部
14 第3不純物領域(ソース領域)
15 ゲート酸化膜
16 ソース電極
16 電極
16a 合金層
16b 金属層
17 中間不純物領域
18 第4不純物領域(コンタクト領域)
19 表面保護電極
20 ドレイン電極
21 層間絶縁膜
23 裏面保護電極
27 ゲート電極
80 開口部
90 マスク層
BT 底部
CH チャネル領域
SW 側部
TQ 凹部
TR トレンチ
X 方向
Claims (18)
- 主面を有する炭化珪素基板を備え、
前記炭化珪素基板は、第1導電型を有する第1不純物領域と、前記第1不純物領域と接し、かつ前記第1導電型とは異なる第2導電型を有する第2不純物領域と、前記第1導電型を有し、前記第2不純物領域によって前記第1不純物領域から隔てられた第3不純物領域と、前記第2導電型を有し、前記主面と前記第2不純物領域とを繋ぐ第4不純物領域と、前記第3不純物領域および前記第4不純物領域に挟まれ、前記第3不純物領域が含む第1導電型不純物の濃度よりも低く、かつ前記第4不純物領域が含む第2導電型不純物の濃度よりも低い不純物濃度を有する中間不純物領域を含み、さらに、
前記炭化珪素基板の前記主面において、前記第3不純物領域および前記第4不純物領域の双方に接する電極とを備え、
前記電極と接する前記第3不純物領域における前記第1導電型不純物の濃度は、5×1019cm-3以上であり、
前記電極と接する前記中間不純物領域における前記第1導電型不純物の濃度または前記第2導電型不純物の濃度は、1×10 18 cm -3 以上5×10 19 cm -3 未満である、炭化珪素半導体装置。 - 前記電極と接する前記第4不純物領域における前記第2導電型不純物の濃度は、5×1019cm-3以上である、請求項1に記載の炭化珪素半導体装置。
- 前記電極は、Ti、AlおよびNiの少なくともいずれかを含む、請求項1または請求項2に記載の炭化珪素半導体装置。
- 前記電極は、TiAlSiを含む、請求項3に記載の炭化珪素半導体装置。
- 前記第1導電型はn型であり、かつ前記第2導電型はp型である、請求項1〜請求項4のいずれか1項に記載の炭化珪素半導体装置。
- 前記中間不純物領域は、前記第2不純物領域の一部を構成する、請求項1〜請求項5のいずれか1項に記載の炭化珪素半導体装置。
- 前記炭化珪素基板の前記主面は、珪素面または珪素面から8°以下オフした面であり、
前記炭化珪素半導体装置は、プレナー型MOSFETを含む、請求項1〜請求項6のいずれか1項に記載の炭化珪素半導体装置。 - 前記炭化珪素基板の前記主面は、炭素面または炭素面から8°以下オフした面であり、
前記炭化珪素半導体装置は、トレンチ型MOSFETを含む、請求項1〜請求項6のいずれか1項に記載の炭化珪素半導体装置。 - 主面を有する炭化珪素基板を形成する工程を備え、
前記炭化珪素基板は、第1導電型を有する第1不純物領域と、前記第1不純物領域と接し、かつ前記第1導電型とは異なる第2導電型を有する第2不純物領域と、前記第1導電型を有し、前記第2不純物領域によって前記第1不純物領域から隔てられた第3不純物領域と、前記第2導電型を有し、前記主面と前記第2不純物領域とを繋ぐ第4不純物領域と、前記第3不純物領域および前記第4不純物領域に挟まれ、前記第3不純物領域が含む第1導電型不純物の濃度よりも低く、かつ前記第4不純物領域が含む第2導電型不純物の濃度よりも低い不純物濃度を有する中間不純物領域を含み、さらに、
前記炭化珪素基板の前記主面において、前記第3不純物領域および前記第4不純物領域の双方に接する電極を形成する工程と備え、
前記電極と接する前記第3不純物領域における前記第1導電型不純物の濃度は、5×1019cm-3以上であり、
前記炭化珪素基板を形成する工程は、
前記第1不純物領域を形成する工程と、
前記第1不純物領域に対して前記第2導電型不純物を導入することにより前記第2不純物領域を形成する工程と、
前記第2不純物領域に対して前記第1導電型不純物または前記第2導電型不純物を導入することにより前記中間不純物領域を形成する工程と、
前記中間不純物領域に対して前記第2導電型不純物を導入することにより前記第4不純物領域を形成する工程と、
前記中間不純物領域に対して前記第1導電型不純物を導入することにより前記第3不純物領域を形成する工程とを含む、炭化珪素半導体装置の製造方法。 - 主面を有する炭化珪素基板を形成する工程を備え、
前記炭化珪素基板は、第1導電型を有する第1不純物領域と、前記第1不純物領域と接し、かつ前記第1導電型とは異なる第2導電型を有する第2不純物領域と、前記第1導電型を有し、前記第2不純物領域によって前記第1不純物領域から隔てられた第3不純物領域と、前記第2導電型を有し、前記主面と前記第2不純物領域とを繋ぐ第4不純物領域と、前記第3不純物領域および前記第4不純物領域に挟まれ、前記第3不純物領域が含む第1導電型不純物の濃度よりも低く、かつ前記第4不純物領域が含む第2導電型不純物の濃度よりも低い不純物濃度を有する中間不純物領域を含み、さらに、
前記炭化珪素基板の前記主面において、前記第3不純物領域および前記第4不純物領域の双方に接する電極を形成する工程と備え、
前記電極と接する前記第3不純物領域における前記第1導電型不純物の濃度は、5×1019cm-3以上であり、
前記炭化珪素基板を形成する工程は、
前記第1不純物領域を形成する工程と、
前記第1不純物領域に対して前記第2導電型不純物を導入することにより前記第2不純物領域を形成する工程と、
前記第2不純物領域に対して前記第1導電型不純物を導入し、かつ前記第2導電型不純物を導入することにより、前記第3不純物領域が前記第4不純物領域から離間されるように前記第3不純物領域および前記第4不純物領域の各々を形成する工程とを含み、
前記中間不純物領域は、前記第2不純物領域の一部を構成する、炭化珪素半導体装置の製造方法。 - 主面を有する炭化珪素基板を形成する工程を備え、
前記炭化珪素基板は、第1導電型を有する第1不純物領域と、前記第1不純物領域と接し、かつ前記第1導電型とは異なる第2導電型を有する第2不純物領域と、前記第1導電型を有し、前記第2不純物領域によって前記第1不純物領域から隔てられた第3不純物領域と、前記第2導電型を有し、前記主面と前記第2不純物領域とを繋ぐ第4不純物領域と、前記第3不純物領域および前記第4不純物領域に挟まれ、前記第3不純物領域が含む第1導電型不純物の濃度よりも低く、かつ前記第4不純物領域が含む第2導電型不純物の濃度よりも低い不純物濃度を有する中間不純物領域を含み、さらに、
前記炭化珪素基板の前記主面において、前記第3不純物領域および前記第4不純物領域の双方に接する電極を形成する工程と備え、
前記電極と接する前記第3不純物領域における前記第1導電型不純物の濃度は、5×1019cm-3以上であり、
前記第3不純物領域および前記第4不純物領域の双方は、イオン注入により形成される、炭化珪素半導体装置の製造方法。 - 前記電極と接する前記第4不純物領域における前記第2導電型不純物の濃度は、5×1019cm-3以上である、請求項9〜請求項11のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記電極と接する前記中間不純物領域における前記第1導電型不純物の濃度または前記第2導電型不純物の濃度は、1×1018cm-3以上5×1019cm-3未満である、請求項9〜請求項12のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記電極は、Ti、AlおよびNiの少なくともいずれかを含む、請求項9〜請求項13のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記電極は、TiAlSiを含む、請求項14に記載の炭化珪素半導体装置の製造方法。
- 前記第1導電型はn型であり、かつ前記第2導電型はp型である、請求項9〜請求項15のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記主面は、珪素面または珪素面から8°以下オフした面であり、
前記炭化珪素半導体装置は、プレナー型MOSFETを含む、請求項9〜請求項16のいずれか1項に記載の炭化珪素半導体装置の製造方法。 - 前記炭化珪素基板の前記主面は、炭素面または炭素面から8°以下オフした面であり、
前記炭化珪素半導体装置は、トレンチ型MOSFETを含む、請求項9〜請求項16のいずれか1項に記載の炭化珪素半導体装置の製造方法。
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