JP6246946B2 - 磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法、及び洗浄装置 - Google Patents

磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法、及び洗浄装置 Download PDF

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Publication number
JP6246946B2
JP6246946B2 JP2016552150A JP2016552150A JP6246946B2 JP 6246946 B2 JP6246946 B2 JP 6246946B2 JP 2016552150 A JP2016552150 A JP 2016552150A JP 2016552150 A JP2016552150 A JP 2016552150A JP 6246946 B2 JP6246946 B2 JP 6246946B2
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Prior art keywords
water
glass substrate
liquid
cleaning
magnetic disk
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JP2016552150A
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Japanese (ja)
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JPWO2016052676A1 (ja
Inventor
スパウィティパッタナー シワット
スパウィティパッタナー シワット
スリーカム パンニー
スリーカム パンニー
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Hoya Corp
Hoya Glass Disk Thailand Ltd
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Hoya Corp
Hoya Glass Disk Thailand Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Surface Treatment Of Glass (AREA)
  • Magnetic Record Carriers (AREA)
JP2016552150A 2014-09-30 2015-09-30 磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法、及び洗浄装置 Active JP6246946B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2014202058 2014-09-30
JP2014202058 2014-09-30
JP2014202008 2014-09-30
JP2014202008 2014-09-30
PCT/JP2015/077870 WO2016052676A1 (ja) 2014-09-30 2015-09-30 磁気ディスク用ガラス基板の製造方法

Related Child Applications (1)

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JP2017219648A Division JP6637945B2 (ja) 2014-09-30 2017-11-15 磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法、および洗浄装置

Publications (2)

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JPWO2016052676A1 JPWO2016052676A1 (ja) 2017-06-29
JP6246946B2 true JP6246946B2 (ja) 2017-12-13

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JP2016552150A Active JP6246946B2 (ja) 2014-09-30 2015-09-30 磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法、及び洗浄装置
JP2017219648A Active JP6637945B2 (ja) 2014-09-30 2017-11-15 磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法、および洗浄装置

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JP2017219648A Active JP6637945B2 (ja) 2014-09-30 2017-11-15 磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法、および洗浄装置

Country Status (5)

Country Link
JP (2) JP6246946B2 (zh)
CN (2) CN109107971B (zh)
MY (1) MY180792A (zh)
SG (2) SG11201701761XA (zh)
WO (1) WO2016052676A1 (zh)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06170345A (ja) * 1992-07-17 1994-06-21 Daiko Technol:Kk 洗浄装置
JPH0722364A (ja) * 1993-07-05 1995-01-24 Hitachi Ltd ウェハ洗浄方法および装置
JP3725051B2 (ja) * 2001-07-27 2005-12-07 大日本スクリーン製造株式会社 基板処理装置
TW200303581A (en) * 2002-02-28 2003-09-01 Tech Ltd A Method and apparatus for cleaning and drying semiconductor wafer
JP4808985B2 (ja) * 2005-03-31 2011-11-02 Ｈｏｙａ株式会社 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法
JP4942305B2 (ja) * 2005-03-31 2012-05-30 Ｈｏｙａ株式会社 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法
JP5032758B2 (ja) * 2005-09-26 2012-09-26 Ｈｏｙａ株式会社 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法
JP4976341B2 (ja) * 2008-06-18 2012-07-18 東京エレクトロン株式会社 基板洗浄装置および基板洗浄方法、ならびに記憶媒体
JP2011187714A (ja) * 2010-03-09 2011-09-22 Dai Ichi Kogyo Seiyaku Co Ltd 切削物用洗浄剤組成物
JP5662423B2 (ja) * 2010-03-31 2015-01-28 Hoya株式会社 磁気記録媒体ガラス基板用ガラスブランクの製造方法、磁気記録媒体ガラス基板の製造方法および磁気記録媒体の製造方法
CN102754152B (zh) * 2011-01-07 2015-11-25 旭硝子株式会社 信息记录媒体用玻璃基板制造方法
CN202729846U (zh) * 2012-06-12 2013-02-13 北京京东方光电科技有限公司 一种微生物去除装置和基板清洗设备
CN103396903B (zh) * 2013-07-24 2015-07-01 惠晶显示科技（苏州）有限公司 用于tft基板清洗的免损伤清洗液

Also Published As

Publication number Publication date
MY180792A (en) 2020-12-09
JPWO2016052676A1 (ja) 2017-06-29
CN109107971B (zh) 2021-07-09
CN109107971A (zh) 2019-01-01
CN106688038A (zh) 2017-05-17
JP6637945B2 (ja) 2020-01-29
SG10201912461PA (en) 2020-02-27
SG11201701761XA (en) 2017-04-27
CN106688038B (zh) 2018-08-17
WO2016052676A1 (ja) 2016-04-07
JP2018067368A (ja) 2018-04-26

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