JP6201313B2 - 液体噴射ヘッド及び液体噴射装置 - Google Patents
液体噴射ヘッド及び液体噴射装置 Download PDFInfo
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- JP6201313B2 JP6201313B2 JP2012284504A JP2012284504A JP6201313B2 JP 6201313 B2 JP6201313 B2 JP 6201313B2 JP 2012284504 A JP2012284504 A JP 2012284504A JP 2012284504 A JP2012284504 A JP 2012284504A JP 6201313 B2 JP6201313 B2 JP 6201313B2
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- 238000004891 communication Methods 0.000 claims description 87
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- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 48
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- 239000000395 magnesium oxide Substances 0.000 description 2
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
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- LBSANEJBGMCTBH-UHFFFAOYSA-N manganate Chemical compound [O-][Mn]([O-])(=O)=O LBSANEJBGMCTBH-UHFFFAOYSA-N 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
かかる態様では、流路形成基板とノズルプレートとに膜の密度が7g/cm 2 以上である酸化タンタル膜を設けることで、流路形成基板及びノズルプレートが液体によって侵食されるのを抑制することができる。また、流路形成基板とノズルプレートとの接合面に酸化タンタル膜を設けたため、接着界面から侵入した液体によって基板が侵食されるのを抑制することができる。したがって、接合強度が低下するのを抑制して、液体の漏出、吐出不良及び積層された基板の剥離を抑制することができる。
かかる態様では、液体の漏出、吐出不良及び基板の剥離などの破壊を抑制した液体噴射装置を実現できる。
(実施形態1)
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの分解斜視図であり、図2はインクジェット式記録ヘッドの第2の方向の断面図であり、図3は、図2の要部を拡大した断面図である。
以上、本発明の基本的な構成について説明したが、本発明の基本的な構成は上述したものに限定されるものではない。
Claims (6)
- 液体を吐出するノズル開口が設けられたノズルプレートと、前記ノズル開口に連通する圧力発生室が設けられた流路形成基板と、を少なくとも具備し、
前記ノズルプレートの前記液体が吐出される面、前記ノズル開口の内周面、および前記ノズルプレートの接合面は、原子層堆積によって形成された酸化タンタル膜が連続して設けられ、
前記圧力発生室の内壁表面および前記流路形成基板の接合面は、原子層堆積によって形成された酸化タンタル膜が連続して設けられ、
前記流路形成基板と前記ノズルプレートとは、接合され、
前記酸化タンタル膜の密度は、7g/cm2以上であることを特徴とする液体噴射ヘッド。 - 前記酸化タンタル膜は、0.3Å以上、50nm以下の厚さで形成されていることを特徴とする請求項1記載の液体噴射ヘッド。
- 前記流路形成基板と前記ノズルプレートとの間には、前記圧力発生室と前記ノズル開口とを連通するノズル連通路が設けられた連通板を具備することを特徴とする請求項1又は2記載の液体噴射ヘッド。
- 前記連通板が、シリコン基板で形成されており、前記酸化タンタル膜が、前記連通板の接合面を含む全面に設けられていることを特徴とする請求項3記載の液体噴射ヘッド。
- 請求項1〜4の何れか一項に記載の液体噴射ヘッドを具備することを特徴とする液体噴射装置。
- 前記流路形成基板または前記ノズルプレートは、シリコン基板で形成されていることを特徴とする請求項1記載の液体噴射ヘッド。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012284504A JP6201313B2 (ja) | 2012-12-27 | 2012-12-27 | 液体噴射ヘッド及び液体噴射装置 |
US14/141,159 US8936355B2 (en) | 2012-12-27 | 2013-12-26 | Liquid ejecting head and liquid ejecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012284504A JP6201313B2 (ja) | 2012-12-27 | 2012-12-27 | 液体噴射ヘッド及び液体噴射装置 |
Publications (2)
Publication Number | Publication Date |
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JP2014124882A JP2014124882A (ja) | 2014-07-07 |
JP6201313B2 true JP6201313B2 (ja) | 2017-09-27 |
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JP2012284504A Active JP6201313B2 (ja) | 2012-12-27 | 2012-12-27 | 液体噴射ヘッド及び液体噴射装置 |
Country Status (2)
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US (1) | US8936355B2 (ja) |
JP (1) | JP6201313B2 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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SG11201703753UA (en) * | 2014-11-19 | 2017-06-29 | Memjet Technology Ltd | Inkjet nozzle device having improved lifetime |
JP6492756B2 (ja) * | 2015-02-25 | 2019-04-03 | ブラザー工業株式会社 | 液体吐出装置 |
US9828672B2 (en) | 2015-03-26 | 2017-11-28 | Lam Research Corporation | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma |
JP2016198908A (ja) * | 2015-04-08 | 2016-12-01 | キヤノン株式会社 | 液体吐出ヘッド |
JP6672647B2 (ja) * | 2015-09-08 | 2020-03-25 | セイコーエプソン株式会社 | Memsデバイス、液体噴射ヘッド、及び液体噴射装置 |
EP3248784B1 (en) | 2016-05-26 | 2020-02-19 | Canon Kabushiki Kaisha | Liquid ejection head, method for manufacturing the same, and printing method |
KR20200086750A (ko) | 2017-12-07 | 2020-07-17 | 램 리써치 코포레이션 | 챔버 내 산화 내성 보호 층 컨디셔닝 |
US10760158B2 (en) * | 2017-12-15 | 2020-09-01 | Lam Research Corporation | Ex situ coating of chamber components for semiconductor processing |
EP3733415B1 (en) * | 2017-12-26 | 2023-01-25 | Konica Minolta, Inc. | Inkjet head manufacturing method, inkjet recording device manufacturing method, inkjet head, and inkjet recording device |
JP2019162798A (ja) | 2018-03-20 | 2019-09-26 | ブラザー工業株式会社 | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
JP7087521B2 (ja) | 2018-03-22 | 2022-06-21 | ブラザー工業株式会社 | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
CN110722880B (zh) * | 2018-07-17 | 2021-01-12 | 精工爱普生株式会社 | 头单元以及液体喷出装置 |
JP7334335B2 (ja) * | 2020-03-30 | 2023-08-28 | 富士フイルム株式会社 | 液体吐出構造体、液体吐出ヘッド及び液体吐出装置 |
JP7552708B2 (ja) | 2020-09-30 | 2024-09-18 | コニカミノルタ株式会社 | インクジェットヘッドおよびその製造方法、ならびに画像形成装置 |
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US6942318B2 (en) * | 2002-05-31 | 2005-09-13 | Hewlett-Packard Development Company, L.P. | Chamber having a protective layer |
JP3726909B2 (ja) * | 2002-07-10 | 2005-12-14 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
JP4851284B2 (ja) * | 2006-09-22 | 2012-01-11 | 富士フイルム株式会社 | ノズルプレートの製造方法 |
JP2009018449A (ja) * | 2007-07-10 | 2009-01-29 | Seiko Epson Corp | 噴射ヘッドの製造方法 |
JP2009083140A (ja) | 2007-09-27 | 2009-04-23 | Fujifilm Corp | 液体吐出ヘッド及びその製造方法 |
JP5115330B2 (ja) * | 2008-05-22 | 2013-01-09 | セイコーエプソン株式会社 | 液体噴射ヘッドおよびそれを備えた液体噴射装置 |
JP4848028B2 (ja) * | 2009-01-21 | 2011-12-28 | 東芝テック株式会社 | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
JP2011088369A (ja) | 2009-10-23 | 2011-05-06 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置並びに圧電素子 |
JP2011156845A (ja) * | 2010-02-04 | 2011-08-18 | Seiko Epson Corp | 液体噴射ヘッド、及び、液体噴射ヘッドの製造方法 |
JP2011206920A (ja) * | 2010-03-26 | 2011-10-20 | Seiko Epson Corp | 液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
JP5914969B2 (ja) | 2011-01-13 | 2016-05-11 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP2012218188A (ja) * | 2011-04-04 | 2012-11-12 | Seiko Epson Corp | 液体噴射ヘッドの製造方法 |
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