JP6198343B2 - ノンシアン系電解金めっき液 - Google Patents
ノンシアン系電解金めっき液 Download PDFInfo
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- JP6198343B2 JP6198343B2 JP2014503887A JP2014503887A JP6198343B2 JP 6198343 B2 JP6198343 B2 JP 6198343B2 JP 2014503887 A JP2014503887 A JP 2014503887A JP 2014503887 A JP2014503887 A JP 2014503887A JP 6198343 B2 JP6198343 B2 JP 6198343B2
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- gold
- plating solution
- gold plating
- hardness
- cyanide
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/48—Electroplating: Baths therefor from solutions of gold
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- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/62—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of gold
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- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/48—After-treatment of electroplated surfaces
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Electroplating And Plating Baths Therefor (AREA)
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Description
Ir:イリジウム化合物 ヘキサブロモイリジウム酸ナトリウム
電導塩:亜硫酸ナトリウム 50g/L
液温:60 ℃
電流密度:0.8A/dm2
Ir:イリジウム化合物 ヘキサブロモイリジウム酸ナトリウム
結晶調整剤:ギ酸タリウム
電導塩:亜硫酸ナトリウム 50g/L
液温:60 ℃
電流密度:0.8A/dm2
Ru:塩化ルテニウム
電導塩:亜硫酸ナトリウム 50g/L
液温:55 ℃
電流密度:0.8A/dm2
Ru:塩化ルテニウム
結晶調整剤:ギ酸タリウム
電導塩:亜硫酸ナトリウム 50g/L
液温:55 ℃
電流密度:0.8A/dm2
Rh:硫酸ロジウム
結晶調整剤:ギ酸タリウム
電導塩:亜硫酸ナトリウム 50g/L
液温:60 ℃
電流密度:0.8A/dm2
Ir:イリジウム化合物 ヘキサブロモイリジウム酸ナトリウム
(イリジウム濃度10mg/L)
結晶調整剤:ギ酸タリウム(タリウム濃度15mg/L)
電導塩:亜硫酸ナトリウム 50g/L
液温:55 ℃
電流密度:0.8A/dm2
Claims (6)
- 亜硫酸金アルカリ塩又は亜硫酸金アンモニウムからなる金源と、亜硫酸塩及び硫酸塩からなる伝導塩と、を含有するノンシアン系電解金めっき液において、
イリジウム、ルテニウム、ロジウムのいずれか1種以上の塩を金属濃度として1〜3000mg/L含有することを特徴とするノンシアン系電解金めっき液。 - 結晶調整剤をさらに含む請求項1記載のノンシアン系電解金めっき液。
- 結晶調整剤は、タリウムである、請求項2記載のノンシアン系電解金めっき液。
- 金源は金濃度として5〜20g/Lであり、結晶調整剤が1〜50mg/Lであり、電導塩が50〜300g/Lである請求項2または請求項3に記載のノンシアン系電解金めっき液。
- 請求項1〜請求項4いずれかに記載のノンシアン系電解金めっき液を用いてパターンニングされたウエハ上に電解金めっきをする金バンプまたは金配線の形成方法。
- 請求項5に記載の金バンプまたは金配線の形成方法を用いて製造された電子部品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2012221769 | 2012-10-04 | ||
JP2012221769 | 2012-10-04 | ||
PCT/JP2013/075305 WO2014054429A1 (ja) | 2012-10-04 | 2013-09-19 | ノンシアン系電解金めっき液 |
Publications (2)
Publication Number | Publication Date |
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JPWO2014054429A1 JPWO2014054429A1 (ja) | 2016-08-25 |
JP6198343B2 true JP6198343B2 (ja) | 2017-09-20 |
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Application Number | Title | Priority Date | Filing Date |
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JP2014503887A Active JP6198343B2 (ja) | 2012-10-04 | 2013-09-19 | ノンシアン系電解金めっき液 |
Country Status (6)
Country | Link |
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US (1) | US20150137356A1 (ja) |
JP (1) | JP6198343B2 (ja) |
KR (2) | KR20170001748A (ja) |
CN (1) | CN104540983B (ja) |
TW (1) | TWI525224B (ja) |
WO (1) | WO2014054429A1 (ja) |
Families Citing this family (11)
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KR101643333B1 (ko) * | 2015-06-11 | 2016-07-27 | 엘비세미콘 주식회사 | 범프 구조체의 제조방법 |
CN110770371A (zh) | 2017-05-23 | 2020-02-07 | 萨克森爱德美塔尔有限责任公司 | 贵金属盐制剂、其生产方法及用于电镀的用途 |
EP3763851A4 (en) * | 2018-03-07 | 2021-12-15 | Sumitomo Electric Industries, Ltd. | CLADDING LAYER AND CLADDED ELEMENT |
JP6474536B1 (ja) * | 2018-03-15 | 2019-02-27 | 日本エレクトロプレイテイング・エンジニヤース株式会社 | 電解ロジウムめっき液 |
CN110894618A (zh) * | 2019-10-10 | 2020-03-20 | 深圳市金质金银珠宝检验研究中心有限公司 | 一种环境友好型表面改性电铸金溶液及其制备方法 |
CN110699720A (zh) * | 2019-10-30 | 2020-01-17 | 深圳市金百泰珠宝实业有限公司 | 黄金电铸液、黄金电铸液制备方法及电铸方法 |
CN111411376A (zh) * | 2020-03-09 | 2020-07-14 | 中国工程物理研究院激光聚变研究中心 | 无氰亚硫酸盐体系电镀金液及电镀方法 |
CN112730731B (zh) * | 2020-12-01 | 2021-12-07 | 成都四威高科技产业园有限公司 | 一种亚硫酸盐镀金液的维护方法 |
CN115029750A (zh) * | 2022-04-18 | 2022-09-09 | 福建中科光芯光电科技有限公司 | 一种半导体材料电镀金工艺方法 |
CN114717618B (zh) * | 2022-04-26 | 2023-01-31 | 深圳市联合蓝海黄金材料科技股份有限公司 | 无氰电镀金浴及其应用、半导体镀金件及其制备方法 |
JP7219847B1 (ja) | 2022-09-26 | 2023-02-08 | Eeja株式会社 | 金電気めっき液および金電気めっき方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5823478B2 (ja) * | 1979-06-28 | 1983-05-16 | 日本電鍍工業株式会社 | 硬質金合金被膜の製造方法 |
DE3021665A1 (de) * | 1980-06-10 | 1981-12-17 | Degussa Ag, 6000 Frankfurt | Stark saures goldlegierungsbad |
JP2006322037A (ja) * | 2005-05-18 | 2006-11-30 | Electroplating Eng Of Japan Co | 金めっき液 |
WO2006135079A1 (ja) * | 2005-06-16 | 2006-12-21 | N.E. Chemcat Corporation | 無電解金めっき液 |
JP4713290B2 (ja) * | 2005-09-30 | 2011-06-29 | エヌ・イーケムキャット株式会社 | 金バンプ又は金配線の形成方法 |
JP4713289B2 (ja) * | 2005-09-30 | 2011-06-29 | エヌ・イーケムキャット株式会社 | バンプ形成用非シアン系電解金めっき浴 |
JP4925792B2 (ja) | 2006-11-07 | 2012-05-09 | メタローテクノロジーズジャパン株式会社 | バンプ形成用非シアン系電解金めっき浴 |
JP4881129B2 (ja) * | 2006-11-07 | 2012-02-22 | メタローテクノロジーズジャパン株式会社 | 金バンプ又は金配線形成用非シアン系電解金めっき浴 |
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2013
- 2013-09-19 US US14/411,904 patent/US20150137356A1/en not_active Abandoned
- 2013-09-19 KR KR1020167036452A patent/KR20170001748A/ko not_active Application Discontinuation
- 2013-09-19 KR KR1020157000689A patent/KR20150020686A/ko active Application Filing
- 2013-09-19 CN CN201380041203.9A patent/CN104540983B/zh active Active
- 2013-09-19 WO PCT/JP2013/075305 patent/WO2014054429A1/ja active Application Filing
- 2013-09-19 JP JP2014503887A patent/JP6198343B2/ja active Active
- 2013-10-03 TW TW102135804A patent/TWI525224B/zh active
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Publication number | Publication date |
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US20150137356A1 (en) | 2015-05-21 |
WO2014054429A1 (ja) | 2014-04-10 |
KR20150020686A (ko) | 2015-02-26 |
CN104540983A (zh) | 2015-04-22 |
TW201425657A (zh) | 2014-07-01 |
JPWO2014054429A1 (ja) | 2016-08-25 |
KR20170001748A (ko) | 2017-01-04 |
TWI525224B (zh) | 2016-03-11 |
CN104540983B (zh) | 2019-05-21 |
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