JP6021613B2 - 撮像素子、撮像装置、および、撮像システム - Google Patents

撮像素子、撮像装置、および、撮像システム Download PDF

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Publication number
JP6021613B2
JP6021613B2 JP2012261605A JP2012261605A JP6021613B2 JP 6021613 B2 JP6021613 B2 JP 6021613B2 JP 2012261605 A JP2012261605 A JP 2012261605A JP 2012261605 A JP2012261605 A JP 2012261605A JP 6021613 B2 JP6021613 B2 JP 6021613B2
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pixel
pixels
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JP2014107835A5 (enExample
JP2014107835A (ja
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昌彦 奥沢
昌彦 奥沢
武志 小川
武志 小川
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Canon Inc
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Canon Inc
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Priority to JP2012261605A priority Critical patent/JP6021613B2/ja
Priority to US14/087,752 priority patent/US9224776B2/en
Priority to CN201310628779.7A priority patent/CN103856700B/zh
Publication of JP2014107835A publication Critical patent/JP2014107835A/ja
Priority to US14/948,810 priority patent/US9450006B2/en
Publication of JP2014107835A5 publication Critical patent/JP2014107835A5/ja
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/813Electronic components shared by multiple pixels, e.g. one amplifier shared by two pixels
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/67Focus control based on electronic image sensor signals
    • H04N23/672Focus control based on electronic image sensor signals based on the phase difference signals
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/10Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
    • H04N25/11Arrangement of colour filter arrays [CFA]; Filter mosaics
    • H04N25/13Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
    • H04N25/134Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on three different wavelength filter elements
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/703SSIS architectures incorporating pixels for producing signals other than image signals
    • H04N25/704Pixels specially adapted for focusing, e.g. phase difference pixel sets
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8023Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/80Camera processing pipelines; Components thereof
    • H04N23/84Camera processing pipelines; Components thereof for processing colour signals
    • H04N23/843Demosaicing, e.g. interpolating colour pixel values
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Automatic Focus Adjustment (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Focusing (AREA)
JP2012261605A 2012-11-29 2012-11-29 撮像素子、撮像装置、および、撮像システム Active JP6021613B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012261605A JP6021613B2 (ja) 2012-11-29 2012-11-29 撮像素子、撮像装置、および、撮像システム
US14/087,752 US9224776B2 (en) 2012-11-29 2013-11-22 Image pickup element, image pickup apparatus, and image pickup system
CN201310628779.7A CN103856700B (zh) 2012-11-29 2013-11-29 摄像元件、摄像设备和摄像系统
US14/948,810 US9450006B2 (en) 2012-11-29 2015-11-23 Image pickup element, image pickup apparatus, and image pickup system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012261605A JP6021613B2 (ja) 2012-11-29 2012-11-29 撮像素子、撮像装置、および、撮像システム

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JP2014107835A JP2014107835A (ja) 2014-06-09
JP2014107835A5 JP2014107835A5 (enExample) 2016-01-21
JP6021613B2 true JP6021613B2 (ja) 2016-11-09

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US (2) US9224776B2 (enExample)
JP (1) JP6021613B2 (enExample)
CN (1) CN103856700B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014106476A (ja) 2012-11-29 2014-06-09 Canon Inc 焦点検出装置、撮像装置、撮像システム、焦点検出方法、プログラム、および、記憶媒体
JP6021613B2 (ja) * 2012-11-29 2016-11-09 キヤノン株式会社 撮像素子、撮像装置、および、撮像システム
JP6164849B2 (ja) * 2013-01-18 2017-07-19 キヤノン株式会社 信号処理装置、撮像装置、および、撮像システム
JP6355362B2 (ja) * 2014-02-28 2018-07-11 キヤノン株式会社 光電変換装置および撮像システム
US9794468B2 (en) * 2014-12-02 2017-10-17 Canon Kabushiki Kaisha Image sensor, image capturing apparatus, focus detection apparatus, image processing apparatus, and control method of image capturing apparatus using pupil division in different directions
CN115132768A (zh) * 2014-12-18 2022-09-30 索尼公司 固体摄像器件和电子装置
JP6531986B2 (ja) * 2015-01-09 2019-06-19 パナソニックIpマネジメント株式会社 撮像装置、撮像システム、復元装置、撮像方法およびコンピュータプログラム
US9998691B2 (en) * 2015-03-11 2018-06-12 Canon Kabushiki Kaisha Pixel, a solid-state imaging device, and an imaging apparatus having barrier region between photoelectric conversion portions in parallel
JP6676393B2 (ja) * 2015-03-11 2020-04-08 キヤノン株式会社 固体撮像素子およびそれを備える撮像装置
US9749556B2 (en) * 2015-03-24 2017-08-29 Semiconductor Components Industries, Llc Imaging systems having image sensor pixel arrays with phase detection capabilities
KR20170056909A (ko) 2015-11-16 2017-05-24 삼성전자주식회사 이미지 센서 및 이를 포함하는 전자 장치
JP2017162985A (ja) * 2016-03-09 2017-09-14 キヤノン株式会社 撮像装置
WO2017175579A1 (ja) 2016-04-07 2017-10-12 富士フイルム株式会社 合焦制御装置、レンズ装置、撮像装置、合焦制御方法、合焦制御プログラム
JP7005125B2 (ja) * 2016-04-22 2022-01-21 キヤノン株式会社 撮像素子、撮像システム、および撮像素子の製造方法
JP6759088B2 (ja) * 2016-12-20 2020-09-23 キヤノン株式会社 撮像装置とその制御方法及びプログラム
US20180301484A1 (en) * 2017-04-17 2018-10-18 Semiconductor Components Industries, Llc Image sensors with high dynamic range and autofocusing hexagonal pixels
JP7067907B2 (ja) * 2017-12-01 2022-05-16 キヤノン株式会社 固体撮像装置及び信号処理装置
TWI833775B (zh) * 2018-07-10 2024-03-01 日商索尼半導體解決方案公司 固態攝像裝置及電子裝置
CN114175622B (zh) * 2019-09-17 2024-11-19 索尼半导体解决方案公司 摄像元件和摄像装置
KR20210128803A (ko) * 2020-04-17 2021-10-27 삼성전자주식회사 다중 포토다이오드 센서에 의해 획득된 서브 이미지들의 차이에 기반하여 이미지의 결함을 검출하는 전자 장치 및 이의 동작 방법
US12068340B2 (en) 2020-10-05 2024-08-20 Samsung Electronics Co., Ltd. Image sensor comprising an inter-pixel overflow (IPO) barrier and electronic system including the same
JP2023104684A (ja) * 2022-01-18 2023-07-28 キヤノン株式会社 撮像素子及び撮像装置

Family Cites Families (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4040139B2 (ja) * 1997-05-12 2008-01-30 キヤノン株式会社 カメラ
JP3774597B2 (ja) 1999-09-13 2006-05-17 キヤノン株式会社 撮像装置
JP2001250931A (ja) * 2000-03-07 2001-09-14 Canon Inc 固体撮像装置およびこれを用いた撮像システム
JP2001291858A (ja) * 2000-04-04 2001-10-19 Sony Corp 固体撮像素子及びその製造方法
JP3530159B2 (ja) * 2001-08-22 2004-05-24 松下電器産業株式会社 固体撮像装置およびその製造方法
JP4235787B2 (ja) * 2001-10-03 2009-03-11 ソニー株式会社 固体撮像素子の製造方法
JP2003218332A (ja) * 2002-01-22 2003-07-31 Sony Corp 固体撮像素子
US7301571B2 (en) * 2003-01-17 2007-11-27 Fujifilm Corporation Method and imaging apparatus for correcting defective pixel of solid-state image sensor, and method for creating pixel information
KR100561003B1 (ko) * 2003-09-30 2006-03-16 동부아남반도체 주식회사 이미지 센서 및 그 제조방법
US7332786B2 (en) * 2003-11-26 2008-02-19 Micron Technology, Inc. Anti-blooming storage pixel
KR100614653B1 (ko) * 2004-11-18 2006-08-22 삼성전자주식회사 백점 및 오버플로우의 문제없이 글로벌 노출이 가능한씨모스 이미지 센서 및 그 제조 방법
KR100598015B1 (ko) * 2005-02-07 2006-07-06 삼성전자주식회사 공유 구조 상보성 금속 산화막 반도체 액티브 픽셀 센서어레이의 레이 아웃
KR100642753B1 (ko) * 2005-02-11 2006-11-10 삼성전자주식회사 이미지 센서
KR100638260B1 (ko) * 2005-06-24 2006-10-25 한국과학기술원 씨모스 이미지 센서
US20070018073A1 (en) * 2005-07-22 2007-01-25 Taiwan Semiconductor Manufacturing Co., Ltd. CMOS image sensor device with beehive pattern color sensor cell array
JP4442590B2 (ja) * 2005-08-17 2010-03-31 ソニー株式会社 固体撮像素子およびその駆動装置、撮像装置、並びに、固体撮像素子の駆動方法
US7714917B2 (en) * 2005-08-30 2010-05-11 Aptina Imaging Corporation Method and apparatus providing a two-way shared storage gate on a four-way shared pixel
US7659564B2 (en) * 2006-02-14 2010-02-09 International Business Machines Corporation CMOS imager photodiode with enhanced capacitance
KR100703987B1 (ko) * 2006-05-17 2007-04-09 삼성전자주식회사 이미지 센서의 제조 방법 및 그에 의해 제조된 이미지 센서
JP4807253B2 (ja) * 2006-12-28 2011-11-02 株式会社デンソー 画像データ生成装置及び受光デバイス
JP5076528B2 (ja) * 2007-02-06 2012-11-21 株式会社ニコン 光電変換部の連結/分離構造、固体撮像素子及び撮像装置
US7755121B2 (en) * 2007-08-23 2010-07-13 Aptina Imaging Corp. Imagers, apparatuses and systems utilizing pixels with improved optical resolution and methods of operating the same
EP2665256B1 (en) * 2007-09-05 2015-11-18 Tohoku University Solid-state image sensor and drive method for the same
JP2009065162A (ja) * 2007-09-07 2009-03-26 Dongbu Hitek Co Ltd イメージセンサ及びその製造方法
JP5314914B2 (ja) * 2008-04-04 2013-10-16 キヤノン株式会社 光電変換装置、撮像システム、設計方法、及び光電変換装置の製造方法
JP2009295918A (ja) * 2008-06-09 2009-12-17 Panasonic Corp 固体撮像装置及びその製造方法
US8860861B2 (en) * 2008-08-11 2014-10-14 Honda Motor Co., Ltd. Pixel, pixel forming method, imaging device and imaging forming method
TWI433307B (zh) * 2008-10-22 2014-04-01 Sony Corp 固態影像感測器、其驅動方法、成像裝置及電子器件
JP5422985B2 (ja) * 2008-12-08 2014-02-19 ソニー株式会社 画素回路、固体撮像素子、およびカメラシステム
JP5558857B2 (ja) * 2009-03-09 2014-07-23 キヤノン株式会社 光電変換装置およびそれを用いた撮像システム
JP5257176B2 (ja) * 2009-03-18 2013-08-07 ソニー株式会社 固体撮像装置、固体撮像装置の駆動方法および電子機器
JP5278165B2 (ja) * 2009-05-26 2013-09-04 ソニー株式会社 焦点検出装置、撮像素子および電子カメラ
JP5552768B2 (ja) * 2009-07-27 2014-07-16 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
EP2315251A1 (fr) * 2009-10-22 2011-04-27 STMicroelectronics (Crolles 2) SAS Capteur d'image à grille de transfert verticale et son procédé de fabrication
JP2011095369A (ja) * 2009-10-28 2011-05-12 Sony Corp 立体画像表示装置及びその駆動方法
FR2954587B1 (fr) * 2009-11-10 2012-07-20 St Microelectronics Sa Procede de formation d'un capteur d'images eclaire par la face arriere
JP5478217B2 (ja) * 2009-11-25 2014-04-23 パナソニック株式会社 固体撮像装置
JP5564909B2 (ja) * 2009-11-30 2014-08-06 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
JP2011114324A (ja) * 2009-11-30 2011-06-09 Sony Corp 固体撮像装置及び電子機器
JP5509846B2 (ja) * 2009-12-28 2014-06-04 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
JP2011159756A (ja) * 2010-01-29 2011-08-18 Sony Corp 固体撮像装置とその製造方法、及び電子機器
JP5651976B2 (ja) * 2010-03-26 2015-01-14 ソニー株式会社 固体撮像素子およびその製造方法、並びに電子機器
JP5538976B2 (ja) * 2010-03-29 2014-07-02 ソニー株式会社 固体撮像素子、撮像装置
JP2011222708A (ja) * 2010-04-08 2011-11-04 Sony Corp 固体撮像装置、固体撮像装置の製造方法、および電子機器
JP5644177B2 (ja) * 2010-05-07 2014-12-24 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP2011253962A (ja) * 2010-06-02 2011-12-15 Sony Corp 固体撮像素子の製造方法、固体撮像素子、撮像装置
JP5744556B2 (ja) * 2011-02-10 2015-07-08 オリンパス株式会社 撮像素子および撮像装置
JP2012182377A (ja) * 2011-03-02 2012-09-20 Sony Corp 固体撮像装置
US8674282B2 (en) * 2011-03-25 2014-03-18 Aptina Imaging Corporation Pumped pinned photodiode pixel array
KR101251744B1 (ko) * 2011-04-13 2013-04-05 엘지이노텍 주식회사 Wdr 픽셀 어레이, 이를 포함하는 wdr 이미징 장치 및 그 구동방법
KR101241553B1 (ko) * 2011-04-13 2013-03-11 엘지이노텍 주식회사 Wdr 픽셀 어레이, 이를 포함하는 wdr 이미징 장치 및 그 구동방법
JP2013016675A (ja) * 2011-07-05 2013-01-24 Sony Corp 固体撮像装置、電子機器、及び、固体撮像装置の製造方法
JP5537523B2 (ja) * 2011-09-22 2014-07-02 株式会社東芝 固体撮像装置
JP5743837B2 (ja) * 2011-10-07 2015-07-01 キヤノン株式会社 光電変換装置、撮像装置および撮像システム
US20140306311A1 (en) * 2011-12-01 2014-10-16 Sharp Kabushiki Kaisha Solid-state imaging element
JP6172888B2 (ja) * 2012-01-18 2017-08-02 キヤノン株式会社 撮像装置および撮像システム
JP5943655B2 (ja) * 2012-03-12 2016-07-05 キヤノン株式会社 画像処理装置、焦点検出装置、および、画像処理プログラム
JP6021613B2 (ja) * 2012-11-29 2016-11-09 キヤノン株式会社 撮像素子、撮像装置、および、撮像システム
JP6164849B2 (ja) * 2013-01-18 2017-07-19 キヤノン株式会社 信号処理装置、撮像装置、および、撮像システム

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CN103856700A (zh) 2014-06-11
US9224776B2 (en) 2015-12-29
CN103856700B (zh) 2017-03-01
US20160079295A1 (en) 2016-03-17
US9450006B2 (en) 2016-09-20
JP2014107835A (ja) 2014-06-09
US20140146197A1 (en) 2014-05-29

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