JP5959188B2 - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
- Publication number
- JP5959188B2 JP5959188B2 JP2011265872A JP2011265872A JP5959188B2 JP 5959188 B2 JP5959188 B2 JP 5959188B2 JP 2011265872 A JP2011265872 A JP 2011265872A JP 2011265872 A JP2011265872 A JP 2011265872A JP 5959188 B2 JP5959188 B2 JP 5959188B2
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- JP
- Japan
- Prior art keywords
- wafer
- resin layer
- grinding
- back surface
- chuck table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003672 processing method Methods 0.000 title claims description 9
- 229920005989 resin Polymers 0.000 claims description 72
- 239000011347 resin Substances 0.000 claims description 72
- 238000000227 grinding Methods 0.000 claims description 36
- 238000005520 cutting process Methods 0.000 claims description 22
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31058—After-treatment of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
10 バイト切削ユニット
11 半導体ウエーハ
15 デバイス
26 バイト工具
26a 切削刃
27 ビア電極
30 チャックテーブル
37 樹脂層
41 紫外線ランプ
43 ハードプレート
47 貼り合わせウエーハ
56 研削ホイール
Claims (2)
- 表面に複数のデバイスが形成されたウエーハの裏面を研削して薄化するウエーハの加工方法であって、
ウエーハの表面に樹脂層を形成する樹脂層形成ステップと、
該樹脂層形成ステップで形成した該樹脂層を硬化させる樹脂層硬化ステップと、
該樹脂層硬化ステップを実施した後、ウエーハの裏面側をチャックテーブルで保持してウエーハの表面に形成された該樹脂層を露出させ、該樹脂層を平坦化する樹脂層平坦化ステップと、
該樹脂層平坦化ステップを実施した後、ウエーハの該樹脂層側をハードプレート上に接着部材を介して貼り合わせる貼り合わせステップと、
該貼り合わせステップを実施した後、該ハードプレートを研削装置のチャックテーブルで保持して該ウエーハの裏面を研削手段で研削し、所定の厚みへと薄化する薄化ステップと、
を具備し、該樹脂層平坦化ステップでは、バイト切削手段で該樹脂層を切削して平坦化することを特徴とするウエーハの加工方法。 - 前記ウエーハは埋設された複数のビア電極を有しており、
前記研削ステップでは、該ウエーハの裏面を研削して該ビア電極を裏面に露出させる請求項1に記載のウエーハの加工方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011265872A JP5959188B2 (ja) | 2011-12-05 | 2011-12-05 | ウエーハの加工方法 |
US13/688,472 US20130143413A1 (en) | 2011-12-05 | 2012-11-29 | Wafer processing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011265872A JP5959188B2 (ja) | 2011-12-05 | 2011-12-05 | ウエーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013118324A JP2013118324A (ja) | 2013-06-13 |
JP5959188B2 true JP5959188B2 (ja) | 2016-08-02 |
Family
ID=48524317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011265872A Active JP5959188B2 (ja) | 2011-12-05 | 2011-12-05 | ウエーハの加工方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20130143413A1 (ja) |
JP (1) | JP5959188B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6052129B2 (ja) * | 2013-10-04 | 2016-12-27 | トヨタ自動車株式会社 | 質疑応答システム、質疑応答装置 |
JP6556040B2 (ja) * | 2015-12-07 | 2019-08-07 | 株式会社ディスコ | バイト切削装置 |
JP2018001290A (ja) * | 2016-06-28 | 2018-01-11 | 株式会社ディスコ | 加工装置 |
JP6850099B2 (ja) * | 2016-09-23 | 2021-03-31 | 株式会社岡本工作機械製作所 | 半導体装置の製造方法及び半導体製造装置 |
JP7115850B2 (ja) * | 2017-12-28 | 2022-08-09 | 株式会社ディスコ | 被加工物の加工方法および加工装置 |
JP7325913B2 (ja) * | 2019-11-22 | 2023-08-15 | 株式会社ディスコ | ウェーハ加工装置 |
WO2022158485A1 (ja) * | 2021-01-21 | 2022-07-28 | 三井化学東セロ株式会社 | ウエハの裏面研削方法及び電子デバイスの製造方法 |
CN114883187B (zh) * | 2022-07-12 | 2022-09-06 | 成都功成半导体有限公司 | 一种碳化硅晶圆背面制程加工工艺 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0697017A (ja) * | 1992-09-16 | 1994-04-08 | Fujitsu Ltd | 半導体装置の製造方法 |
US6579748B1 (en) * | 1999-05-18 | 2003-06-17 | Sanyu Rec Co., Ltd. | Fabrication method of an electronic component |
JP2002203827A (ja) * | 2000-12-28 | 2002-07-19 | Lintec Corp | 半導体ウエハの裏面研削方法 |
JP2003094295A (ja) * | 2001-09-27 | 2003-04-03 | Sony Corp | 半導体ウエーハ研削方法、半導体ウエーハおよび半導体ウエーハの表面保護材料 |
US7485962B2 (en) * | 2002-12-10 | 2009-02-03 | Fujitsu Limited | Semiconductor device, wiring substrate forming method, and substrate processing apparatus |
JP2005277103A (ja) * | 2004-03-24 | 2005-10-06 | Nec Electronics Corp | 半導体ウェハ、支持体および半導体ウェハ製造方法ならびにスペーサ製造方法および半導体素子製造方法 |
JP2009010178A (ja) * | 2007-06-28 | 2009-01-15 | Disco Abrasive Syst Ltd | ウェーハの加工方法 |
JP4538764B2 (ja) * | 2008-07-24 | 2010-09-08 | カシオ計算機株式会社 | 半導体装置およびその製造方法 |
JP5350745B2 (ja) * | 2008-10-21 | 2013-11-27 | 新光電気工業株式会社 | 配線基板 |
JP2011025338A (ja) * | 2009-07-23 | 2011-02-10 | Disco Abrasive Syst Ltd | 板状物固定方法 |
JP5599342B2 (ja) * | 2011-02-23 | 2014-10-01 | 三菱電機株式会社 | 半導体装置の製造方法 |
-
2011
- 2011-12-05 JP JP2011265872A patent/JP5959188B2/ja active Active
-
2012
- 2012-11-29 US US13/688,472 patent/US20130143413A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20130143413A1 (en) | 2013-06-06 |
JP2013118324A (ja) | 2013-06-13 |
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