JP5957914B2 - 液体噴射ヘッドおよび液体噴射装置 - Google Patents
液体噴射ヘッドおよび液体噴射装置 Download PDFInfo
- Publication number
- JP5957914B2 JP5957914B2 JP2012019569A JP2012019569A JP5957914B2 JP 5957914 B2 JP5957914 B2 JP 5957914B2 JP 2012019569 A JP2012019569 A JP 2012019569A JP 2012019569 A JP2012019569 A JP 2012019569A JP 5957914 B2 JP5957914 B2 JP 5957914B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric layer
- film
- piezoelectric element
- pressure generation
- liquid ejecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims description 38
- 239000000758 substrate Substances 0.000 claims description 51
- 239000010408 film Substances 0.000 description 110
- 238000005530 etching Methods 0.000 description 27
- 239000012212 insulator Substances 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- 230000001681 protective effect Effects 0.000 description 11
- 230000007547 defect Effects 0.000 description 10
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000004891 communication Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005452 bending Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- -1 and for example Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14258—Multi layer thin film type piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012019569A JP5957914B2 (ja) | 2012-02-01 | 2012-02-01 | 液体噴射ヘッドおよび液体噴射装置 |
| US13/755,342 US8727510B2 (en) | 2012-02-01 | 2013-01-31 | Liquid ejection head and liquid ejection apparatus |
| CN201310042767.6A CN103240994B (zh) | 2012-02-01 | 2013-01-31 | 液体喷射头以及液体喷射装置 |
| EP13153508.0A EP2623323B1 (en) | 2012-02-01 | 2013-01-31 | Liquid ejection head and liquid ejection apparatus |
| US14/244,250 US20140210916A1 (en) | 2012-02-01 | 2014-04-03 | Liquid ejection head and liquid ejection apparatus |
| US14/565,942 US9144977B2 (en) | 2012-02-01 | 2014-12-10 | Liquid ejection head and liquid ejection apparatus |
| US14/839,070 US20150367643A1 (en) | 2012-02-01 | 2015-08-28 | Liquid ejection head and liquid ejection apparatus |
| US14/941,929 US9498952B2 (en) | 2012-02-01 | 2015-11-16 | Liquid ejection head and liquid ejection apparatus |
| US15/296,404 US10059101B2 (en) | 2012-02-01 | 2016-10-18 | Liquid ejection head and liquid ejection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012019569A JP5957914B2 (ja) | 2012-02-01 | 2012-02-01 | 液体噴射ヘッドおよび液体噴射装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015012237A Division JP5958568B2 (ja) | 2015-01-26 | 2015-01-26 | 液体噴射ヘッドおよび液体噴射装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013158909A JP2013158909A (ja) | 2013-08-19 |
| JP2013158909A5 JP2013158909A5 (enExample) | 2015-03-12 |
| JP5957914B2 true JP5957914B2 (ja) | 2016-07-27 |
Family
ID=47683592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012019569A Active JP5957914B2 (ja) | 2012-02-01 | 2012-02-01 | 液体噴射ヘッドおよび液体噴射装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (6) | US8727510B2 (enExample) |
| EP (1) | EP2623323B1 (enExample) |
| JP (1) | JP5957914B2 (enExample) |
| CN (1) | CN103240994B (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8778028B2 (en) | 2005-02-25 | 2014-07-15 | Shoulder Innovations, Inc. | Methods and devices for less invasive glenoid replacement |
| US20230080207A1 (en) | 2005-02-25 | 2023-03-16 | Shoulder Innovations, Inc. | Methods and devices for less invasive glenoid replacement |
| JP6206666B2 (ja) * | 2013-11-01 | 2017-10-04 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| JP2015157388A (ja) * | 2014-02-24 | 2015-09-03 | セイコーエプソン株式会社 | 液体噴射ヘッド、及び、液体噴射装置 |
| JP2015166160A (ja) * | 2014-03-04 | 2015-09-24 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、液体噴射ヘッドの製造方法 |
| US10492926B1 (en) | 2014-09-04 | 2019-12-03 | Shoulder Innovations, Inc. | Alignment guide for humeral or femoral stem replacement prostheses |
| JP6402547B2 (ja) | 2014-09-08 | 2018-10-10 | セイコーエプソン株式会社 | 圧電素子、液体噴射ヘッド、及び、液体噴射装置 |
| US9375921B2 (en) | 2014-09-08 | 2016-06-28 | Seiko Epson Corporation | Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus |
| JP6375942B2 (ja) | 2014-12-26 | 2018-08-22 | ブラザー工業株式会社 | 液体吐出装置及び液体吐出装置の製造方法 |
| US9862592B2 (en) | 2015-03-13 | 2018-01-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | MEMS transducer and method for manufacturing the same |
| JP6582727B2 (ja) * | 2015-08-21 | 2019-10-02 | セイコーエプソン株式会社 | 接合構造体、圧電デバイス、液体噴射ヘッド、及び接合構造体の製造方法 |
| JP6569438B2 (ja) | 2015-09-30 | 2019-09-04 | ブラザー工業株式会社 | 液体吐出装置及び液体吐出装置の製造方法 |
| JP6879306B2 (ja) * | 2016-07-27 | 2021-06-02 | コニカミノルタ株式会社 | インクジェットヘッド |
| JP6961976B2 (ja) | 2017-03-29 | 2021-11-05 | ブラザー工業株式会社 | 液体噴射ヘッド |
| AU2018251815B2 (en) | 2017-04-14 | 2023-12-14 | Shoulder Innovations, Inc. | Total shoulder prosthesis having inset glenoid implant convertible from anatomic to reverse |
| US10611152B2 (en) * | 2017-09-19 | 2020-04-07 | Seiko Epson Corporation | Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device |
| JP7039915B2 (ja) * | 2017-09-29 | 2022-03-23 | ブラザー工業株式会社 | 液体吐出装置 |
| JP2019165151A (ja) * | 2018-03-20 | 2019-09-26 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッドおよび液体噴射装置 |
| WO2019213073A1 (en) | 2018-04-30 | 2019-11-07 | Shoulder Innovations, Llc | Inset/onlay glenoid, porous coated convertible glenoid, and humeral heads with textured undersides |
| AU2020237088B2 (en) | 2019-03-11 | 2025-09-04 | Shoulder Innovations, Inc. | Total reverse shoulder systems and methods |
| USD977643S1 (en) | 2019-03-12 | 2023-02-07 | Shoulder Innovations, Inc. | Humeral stem implant |
| KR102744914B1 (ko) * | 2020-02-26 | 2024-12-19 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전 디바이스 |
| JP7760899B2 (ja) * | 2021-11-30 | 2025-10-28 | セイコーエプソン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10264374A (ja) * | 1997-03-27 | 1998-10-06 | Seiko Epson Corp | インクジェット式記録ヘッド |
| EP0875380B1 (en) | 1997-04-30 | 2003-01-22 | Seiko Epson Corporation | Ink jet recording head |
| US6616270B1 (en) * | 1998-08-21 | 2003-09-09 | Seiko Epson Corporation | Ink jet recording head and ink jet recording apparatus comprising the same |
| JP3812658B2 (ja) * | 2002-03-15 | 2006-08-23 | セイコーエプソン株式会社 | インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置 |
| JP4305016B2 (ja) | 2002-03-18 | 2009-07-29 | セイコーエプソン株式会社 | 圧電アクチュエータユニット、及び、それを用いた液体噴射ヘッド |
| JP3931823B2 (ja) | 2002-03-18 | 2007-06-20 | セイコーエプソン株式会社 | 圧電アクチュエータ及びその製造方法、並びに、液体噴射ヘッド及びその製造方法 |
| JP4702316B2 (ja) * | 2002-03-18 | 2011-06-15 | セイコーエプソン株式会社 | 圧電アクチュエータユニット、圧電素子、及び、その製造方法 |
| JP3991894B2 (ja) | 2002-03-18 | 2007-10-17 | セイコーエプソン株式会社 | 圧電アクチュエータの製造方法、液体噴射ヘッドの製造方法、及び、アクチュエータ母部材 |
| JP2005008841A (ja) | 2003-06-16 | 2005-01-13 | Hisao Nakamoto | 特殊接着剤及び特殊接着剤の常温製法とその常温利用方法 |
| TWI255057B (en) * | 2004-02-27 | 2006-05-11 | Canon Kk | Dielectric element, piezoelectric element, ink jet head and ink jet recording apparatus and manufacturing method of same |
| CN100480049C (zh) * | 2005-06-16 | 2009-04-22 | 佳能株式会社 | 液体排放头和记录装置 |
| EP1837181A3 (en) * | 2006-03-20 | 2009-04-29 | Brother Kogyo Kabushiki Kaisha | Method for producing piezoelectric actuator, method for producing liquid droplet jetting apparatus, piezoelectric actuator, and liquid droplet jetting apparatus |
| JP5278654B2 (ja) | 2008-01-24 | 2013-09-04 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| JP5088487B2 (ja) * | 2008-02-15 | 2012-12-05 | セイコーエプソン株式会社 | 液体噴射ヘッド及びその製造方法 |
| JP5007823B2 (ja) | 2008-02-25 | 2012-08-22 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
| JP5262806B2 (ja) | 2008-02-29 | 2013-08-14 | ブラザー工業株式会社 | 液体移送装置及び液体移送装置の製造方法 |
| JP4788764B2 (ja) * | 2008-12-26 | 2011-10-05 | ブラザー工業株式会社 | 圧電アクチュエータ及び液体移送装置 |
| US8118410B2 (en) * | 2009-08-31 | 2012-02-21 | Hewlett-Packard Development Company, L.P. | Piezoelectric printhead and related methods |
| JP5376157B2 (ja) * | 2009-10-16 | 2013-12-25 | セイコーエプソン株式会社 | 液滴噴射ヘッド及び液滴噴射装置 |
| JP5392489B2 (ja) * | 2009-11-26 | 2014-01-22 | セイコーエプソン株式会社 | アクチュエーター、液体噴射ヘッド、および液体噴射装置 |
| JP5126208B2 (ja) * | 2009-11-30 | 2013-01-23 | ブラザー工業株式会社 | 圧電アクチュエータ、液体吐出ヘッド、圧電アクチュエータの製造方法、及び液体吐出ヘッドの製造方法 |
| JP5440192B2 (ja) * | 2010-01-13 | 2014-03-12 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| JP5552825B2 (ja) * | 2010-02-10 | 2014-07-16 | セイコーエプソン株式会社 | アクチュエータ、液滴噴射ヘッド及びその製造方法、並びに液滴噴射装置 |
| JP5413598B2 (ja) * | 2010-03-11 | 2014-02-12 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| JP5402760B2 (ja) * | 2010-03-23 | 2014-01-29 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射ヘッドユニット及び液体噴射装置 |
| JP5494953B2 (ja) * | 2010-03-26 | 2014-05-21 | セイコーエプソン株式会社 | 圧電アクチュエーターおよびその製造方法、液体噴射ヘッドおよび液体噴射装置 |
| JP2011241080A (ja) * | 2010-05-20 | 2011-12-01 | Toyota Industries Corp | フォークリフトの荷役用油圧回路装置 |
| JP2012016900A (ja) * | 2010-07-08 | 2012-01-26 | Seiko Epson Corp | 液滴吐出ヘッド及び液滴吐出装置 |
-
2012
- 2012-02-01 JP JP2012019569A patent/JP5957914B2/ja active Active
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2013
- 2013-01-31 US US13/755,342 patent/US8727510B2/en active Active
- 2013-01-31 CN CN201310042767.6A patent/CN103240994B/zh active Active
- 2013-01-31 EP EP13153508.0A patent/EP2623323B1/en active Active
-
2014
- 2014-04-03 US US14/244,250 patent/US20140210916A1/en not_active Abandoned
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-
2015
- 2015-08-28 US US14/839,070 patent/US20150367643A1/en not_active Abandoned
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Also Published As
| Publication number | Publication date |
|---|---|
| US20140210916A1 (en) | 2014-07-31 |
| JP2013158909A (ja) | 2013-08-19 |
| EP2623323B1 (en) | 2015-03-04 |
| EP2623323A1 (en) | 2013-08-07 |
| US9144977B2 (en) | 2015-09-29 |
| CN103240994B (zh) | 2015-09-30 |
| US20160075137A1 (en) | 2016-03-17 |
| US20150367643A1 (en) | 2015-12-24 |
| US9498952B2 (en) | 2016-11-22 |
| US10059101B2 (en) | 2018-08-28 |
| US20150085024A1 (en) | 2015-03-26 |
| US8727510B2 (en) | 2014-05-20 |
| US20130194353A1 (en) | 2013-08-01 |
| CN103240994A (zh) | 2013-08-14 |
| US20170036446A1 (en) | 2017-02-09 |
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