JP5848765B2 - イオン源の少なくとも一つの表面をクリーニングする方法及び装置 - Google Patents

イオン源の少なくとも一つの表面をクリーニングする方法及び装置 Download PDF

Info

Publication number
JP5848765B2
JP5848765B2 JP2013522289A JP2013522289A JP5848765B2 JP 5848765 B2 JP5848765 B2 JP 5848765B2 JP 2013522289 A JP2013522289 A JP 2013522289A JP 2013522289 A JP2013522289 A JP 2013522289A JP 5848765 B2 JP5848765 B2 JP 5848765B2
Authority
JP
Japan
Prior art keywords
ion source
light
sample material
laser device
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013522289A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013532835A5 (enExample
JP2013532835A (ja
Inventor
アリソン，ジヨン
Original Assignee
クラトス・アナリテイカル・リミテツド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by クラトス・アナリテイカル・リミテツド filed Critical クラトス・アナリテイカル・リミテツド
Publication of JP2013532835A publication Critical patent/JP2013532835A/ja
Publication of JP2013532835A5 publication Critical patent/JP2013532835A5/ja
Application granted granted Critical
Publication of JP5848765B2 publication Critical patent/JP5848765B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/164—Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI]

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2013522289A 2010-08-02 2011-07-28 イオン源の少なくとも一つの表面をクリーニングする方法及び装置 Active JP5848765B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1013015.1 2010-08-02
GB1013015.1A GB2486628B (en) 2010-08-02 2010-08-02 Methods and apparatuses for cleaning at least one surface of an ion source
PCT/GB2011/001139 WO2012017190A1 (en) 2010-08-02 2011-07-28 Methods and apparatuses for cleaning at least one surface of an ion source

Publications (3)

Publication Number Publication Date
JP2013532835A JP2013532835A (ja) 2013-08-19
JP2013532835A5 JP2013532835A5 (enExample) 2014-08-14
JP5848765B2 true JP5848765B2 (ja) 2016-01-27

Family

ID=42799504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013522289A Active JP5848765B2 (ja) 2010-08-02 2011-07-28 イオン源の少なくとも一つの表面をクリーニングする方法及び装置

Country Status (6)

Country Link
US (1) US9468953B2 (enExample)
EP (1) EP2601671B1 (enExample)
JP (1) JP5848765B2 (enExample)
CN (1) CN103053006B (enExample)
GB (1) GB2486628B (enExample)
WO (1) WO2012017190A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140002639A1 (en) * 2011-03-25 2014-01-02 Joseph M. Cheben Autonomous Detection of Chemical Plumes
JP6316041B2 (ja) * 2014-03-18 2018-04-25 株式会社東芝 スパッタ中性粒子質量分析装置
GB2530768B (en) * 2014-10-01 2019-07-17 Kratos Analytical Ltd Method and apparatuses relating to cleaning an ion source
DE102016101908B4 (de) 2016-02-03 2017-11-02 Dengler Tubetec Gmbh Vorrichtung und Verfahren zum Biegen von Rohren
CN105728398A (zh) * 2016-04-15 2016-07-06 淮安信息职业技术学院 一种自动飞行光伏阵列表面清洁机器人
EP3567625A1 (en) * 2018-05-09 2019-11-13 Helmholtz Zentrum München - Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) Device and method for mass spectroscopic analysis of particles
GB201809901D0 (en) 2018-06-15 2018-08-01 Ascend Diagnostics Ltd Improvements in and relating to mass spectrometers
CN112397371A (zh) * 2020-11-24 2021-02-23 中国地质科学院岩溶地质研究所 一种Sercon质谱离子源加热器
CN112605069B (zh) * 2020-12-15 2021-11-02 暨南大学 一种用于清洁质谱仪离子源极片的自动清洗装置
CN112676270B (zh) * 2020-12-24 2022-02-08 暨南大学 一种质谱仪器极片清洗装置及清洗质谱仪器极片的方法
CN117225818A (zh) * 2023-09-19 2023-12-15 安图实验仪器(郑州)有限公司 质谱仪离子源的清洁方法
CN222129718U (zh) * 2024-04-10 2024-12-10 江门市富卓家居用品有限公司 一种折叠置物篮及置物架

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01204426A (ja) 1988-02-10 1989-08-17 Nec Corp 固体表面清浄化方法およびその装置
GB2236186B (en) * 1989-08-22 1994-01-05 Finnigan Mat Gmbh Process and device for laser desorption of analyte molecular ions, especially of biomolecules
JPH07318552A (ja) * 1994-05-27 1995-12-08 Hitachi Ltd ガスクロマトグラフ質量分析計およびガスクロマトグラフ
US5654545A (en) * 1995-09-19 1997-08-05 Bruker-Franzen Analytik Gmbh Mass resolution in time-of-flight mass spectrometers with reflectors
FR2752386B1 (fr) * 1996-08-14 1998-09-11 Commissariat Energie Atomique Procede de nettoyage ou de decontamination d'un objet au moyen d'un faisceau laser ultraviolet et dispositif pour sa mise en oeuvre
JP3596397B2 (ja) 1999-12-28 2004-12-02 ウシオ電機株式会社 乾式洗浄装置
US6500268B1 (en) * 2000-08-18 2002-12-31 Silicon Genesis Corporation Dry cleaning method
GB0021902D0 (en) * 2000-09-06 2000-10-25 Kratos Analytical Ltd Ion optics system for TOF mass spectrometer
US7274015B2 (en) * 2001-08-08 2007-09-25 Sionex Corporation Capacitive discharge plasma ion source
US7405397B2 (en) 2002-03-28 2008-07-29 Mds Sciex Inc. Laser desorption ion source with ion guide coupling for ion mass spectroscopy
JP4161608B2 (ja) * 2002-04-15 2008-10-08 株式会社日立製作所 危険物探知装置
GB2398923B (en) 2003-01-15 2005-11-30 Bruker Daltonik Gmbh Method and device for cleaning desorption ion sources
JP3795023B2 (ja) * 2003-03-04 2006-07-12 三菱重工業株式会社 飛行時間型質量分析装置
US6762405B1 (en) 2003-05-30 2004-07-13 Photonics Industries International, Inc. Matrix assisted laser ionization system
US6953928B2 (en) 2003-10-31 2005-10-11 Applera Corporation Ion source and methods for MALDI mass spectrometry
US6958480B1 (en) 2004-06-25 2005-10-25 The Regents Of The University Of California Sample desorption/ionization from mesoporous silica
JP2008506268A (ja) 2004-07-09 2008-02-28 アクリオン・テクノロジーズ・インコーポレーテッド 減圧下照射による処理方法及び装置
DE102005054605B4 (de) 2005-11-16 2010-09-30 Bruker Daltonik Gmbh Automatische Reinigung von Ionenquellen
US20070284541A1 (en) 2006-06-08 2007-12-13 Vane Ronald A Oxidative cleaning method and apparatus for electron microscopes using UV excitation in a oxygen radical source
DE102008008634B4 (de) 2008-02-12 2011-07-07 Bruker Daltonik GmbH, 28359 Automatische Reinigung von MALDI-Ionenquellen
DE102008001812B4 (de) * 2008-05-15 2013-05-29 Carl Zeiss Microscopy Gmbh Positioniereinrichtung für ein Teilchenstrahlgerät

Also Published As

Publication number Publication date
CN103053006B (zh) 2016-09-07
US9468953B2 (en) 2016-10-18
EP2601671B1 (en) 2018-09-05
GB2486628A (en) 2012-06-27
EP2601671A1 (en) 2013-06-12
WO2012017190A1 (en) 2012-02-09
CN103053006A (zh) 2013-04-17
GB201013015D0 (en) 2010-09-15
GB2486628B (en) 2016-05-25
JP2013532835A (ja) 2013-08-19
US20130118523A1 (en) 2013-05-16

Similar Documents

Publication Publication Date Title
JP5848765B2 (ja) イオン源の少なくとも一つの表面をクリーニングする方法及び装置
US7989762B2 (en) Automatic cleaning of MALDI ion sources
US20050194544A1 (en) Ion source and methods for maldi mass spectrometry
US20040256549A1 (en) Ion optics system for TOF mass spectrometer
WO1993018537A1 (en) Laser desorption ionization mass monitor (ldim)
GB2029634A (en) Ionising organic substances for mass spectroscopy
US9627177B2 (en) Mass spectrometer and mass image analyzing system
US6444980B1 (en) Apparatus for production and extraction of charged particles
WO2000070647A9 (en) Optical bench for laser desorption/ionization mass spectrometry
JPH10246712A (ja) 分析機器内の絶縁試料上を、ほぼ均一な表面電位にするための装置
JP3676298B2 (ja) 化学物質の検出装置および化学物質の検出方法
JP5517234B2 (ja) イオン質量分析計と結合するイオンガイドを有するレーザ脱離イオン源
JP2014038752A (ja) 質量分析装置
CN107107127B (zh) 关于清洁离子源的方法和装置
WO2004109742A2 (en) Rod assembly in ion source
JP2013105737A (ja) 顕微レーザー質量分析装置
KR101104484B1 (ko) 펨토초 전자빔 발생장치
JP3541573B2 (ja) レーザー脱離イオン化質量分析装置
RU2002125410A (ru) Способ анализа физических и/или химических свойств поверхностного слоя твердого тела (варианты)
Moritz et al. Laser‐induced electron impact ionization in a reflectron time‐of‐flight mass spectrometer
Song et al. Determination of the isotope ratio for metal samples using a laser ablation/ionization time-of-flight mass spectrometry
KR20100051318A (ko) Ｍａｌｄｉ 질량분석용 시료 플레이트 및 그 제조 방법
JP2004212215A (ja) レーザーアブレーション高分子分析装置
JP3055160B2 (ja) 中性粒子質量分析装置
CN118824837A (zh) 用于样品材料谱系分析的装置和方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140627

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140627

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150223

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150317

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20150612

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150917

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20151104

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20151127

R150 Certificate of patent or registration of utility model

Ref document number: 5848765

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250