CN103053006B - 用于清洁离子源的至少一个表面的方法和设备 - Google Patents

用于清洁离子源的至少一个表面的方法和设备 Download PDF

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Publication number
CN103053006B
CN103053006B CN201180037797.7A CN201180037797A CN103053006B CN 103053006 B CN103053006 B CN 103053006B CN 201180037797 A CN201180037797 A CN 201180037797A CN 103053006 B CN103053006 B CN 103053006B
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China
Prior art keywords
ion source
light
onto
laser
sample material
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English (en)
Chinese (zh)
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CN103053006A (zh
Inventor
约翰·艾利森
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Kratos Analytical Ltd
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Kratos Analytical Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/164—Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI]

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN201180037797.7A 2010-08-02 2011-07-28 用于清洁离子源的至少一个表面的方法和设备 Active CN103053006B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1013015.1 2010-08-02
GB1013015.1A GB2486628B (en) 2010-08-02 2010-08-02 Methods and apparatuses for cleaning at least one surface of an ion source
PCT/GB2011/001139 WO2012017190A1 (en) 2010-08-02 2011-07-28 Methods and apparatuses for cleaning at least one surface of an ion source

Publications (2)

Publication Number Publication Date
CN103053006A CN103053006A (zh) 2013-04-17
CN103053006B true CN103053006B (zh) 2016-09-07

Family

ID=42799504

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180037797.7A Active CN103053006B (zh) 2010-08-02 2011-07-28 用于清洁离子源的至少一个表面的方法和设备

Country Status (6)

Country Link
US (1) US9468953B2 (enExample)
EP (1) EP2601671B1 (enExample)
JP (1) JP5848765B2 (enExample)
CN (1) CN103053006B (enExample)
GB (1) GB2486628B (enExample)
WO (1) WO2012017190A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140002639A1 (en) * 2011-03-25 2014-01-02 Joseph M. Cheben Autonomous Detection of Chemical Plumes
JP6316041B2 (ja) * 2014-03-18 2018-04-25 株式会社東芝 スパッタ中性粒子質量分析装置
GB2530768B (en) * 2014-10-01 2019-07-17 Kratos Analytical Ltd Method and apparatuses relating to cleaning an ion source
DE102016101908B4 (de) 2016-02-03 2017-11-02 Dengler Tubetec Gmbh Vorrichtung und Verfahren zum Biegen von Rohren
CN105728398A (zh) * 2016-04-15 2016-07-06 淮安信息职业技术学院 一种自动飞行光伏阵列表面清洁机器人
EP3567625A1 (en) * 2018-05-09 2019-11-13 Helmholtz Zentrum München - Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) Device and method for mass spectroscopic analysis of particles
GB201809901D0 (en) 2018-06-15 2018-08-01 Ascend Diagnostics Ltd Improvements in and relating to mass spectrometers
CN112397371A (zh) * 2020-11-24 2021-02-23 中国地质科学院岩溶地质研究所 一种Sercon质谱离子源加热器
CN112605069B (zh) * 2020-12-15 2021-11-02 暨南大学 一种用于清洁质谱仪离子源极片的自动清洗装置
CN112676270B (zh) * 2020-12-24 2022-02-08 暨南大学 一种质谱仪器极片清洗装置及清洗质谱仪器极片的方法
CN117225818A (zh) * 2023-09-19 2023-12-15 安图实验仪器(郑州)有限公司 质谱仪离子源的清洁方法
CN222129718U (zh) * 2024-04-10 2024-12-10 江门市富卓家居用品有限公司 一种折叠置物篮及置物架

Citations (6)

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US5118937A (en) * 1989-08-22 1992-06-02 Finnigan Mat Gmbh Process and device for the laser desorption of an analyte molecular ions, especially of biomolecules
CN1561532A (zh) * 2001-08-08 2005-01-05 西奥奈克斯有限公司 电容放电等离子体离子源
WO2007075856A2 (en) * 2005-12-22 2007-07-05 Mds Sciex, Inc. Laser desorption ion source with ion guide coupling for ion mass spectroscopy
US20070284541A1 (en) * 2006-06-08 2007-12-13 Vane Ronald A Oxidative cleaning method and apparatus for electron microscopes using UV excitation in a oxygen radical source
US20090200457A1 (en) * 2008-02-12 2009-08-13 Bruker Daltonik Gmbh Automatic cleaning of maldi ion sources
US20100044566A1 (en) * 2008-05-15 2010-02-25 Donitz Dietmar Positioning device for a particle beam apparatus

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JPH01204426A (ja) 1988-02-10 1989-08-17 Nec Corp 固体表面清浄化方法およびその装置
JPH07318552A (ja) * 1994-05-27 1995-12-08 Hitachi Ltd ガスクロマトグラフ質量分析計およびガスクロマトグラフ
US5654545A (en) * 1995-09-19 1997-08-05 Bruker-Franzen Analytik Gmbh Mass resolution in time-of-flight mass spectrometers with reflectors
FR2752386B1 (fr) * 1996-08-14 1998-09-11 Commissariat Energie Atomique Procede de nettoyage ou de decontamination d'un objet au moyen d'un faisceau laser ultraviolet et dispositif pour sa mise en oeuvre
JP3596397B2 (ja) 1999-12-28 2004-12-02 ウシオ電機株式会社 乾式洗浄装置
US6500268B1 (en) * 2000-08-18 2002-12-31 Silicon Genesis Corporation Dry cleaning method
GB0021902D0 (en) * 2000-09-06 2000-10-25 Kratos Analytical Ltd Ion optics system for TOF mass spectrometer
JP4161608B2 (ja) * 2002-04-15 2008-10-08 株式会社日立製作所 危険物探知装置
GB2398923B (en) 2003-01-15 2005-11-30 Bruker Daltonik Gmbh Method and device for cleaning desorption ion sources
JP3795023B2 (ja) * 2003-03-04 2006-07-12 三菱重工業株式会社 飛行時間型質量分析装置
US6762405B1 (en) 2003-05-30 2004-07-13 Photonics Industries International, Inc. Matrix assisted laser ionization system
US6953928B2 (en) 2003-10-31 2005-10-11 Applera Corporation Ion source and methods for MALDI mass spectrometry
US6958480B1 (en) 2004-06-25 2005-10-25 The Regents Of The University Of California Sample desorption/ionization from mesoporous silica
JP2008506268A (ja) 2004-07-09 2008-02-28 アクリオン・テクノロジーズ・インコーポレーテッド 減圧下照射による処理方法及び装置
DE102005054605B4 (de) 2005-11-16 2010-09-30 Bruker Daltonik Gmbh Automatische Reinigung von Ionenquellen

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118937A (en) * 1989-08-22 1992-06-02 Finnigan Mat Gmbh Process and device for the laser desorption of an analyte molecular ions, especially of biomolecules
CN1561532A (zh) * 2001-08-08 2005-01-05 西奥奈克斯有限公司 电容放电等离子体离子源
WO2007075856A2 (en) * 2005-12-22 2007-07-05 Mds Sciex, Inc. Laser desorption ion source with ion guide coupling for ion mass spectroscopy
US20070284541A1 (en) * 2006-06-08 2007-12-13 Vane Ronald A Oxidative cleaning method and apparatus for electron microscopes using UV excitation in a oxygen radical source
US20090200457A1 (en) * 2008-02-12 2009-08-13 Bruker Daltonik Gmbh Automatic cleaning of maldi ion sources
US20100044566A1 (en) * 2008-05-15 2010-02-25 Donitz Dietmar Positioning device for a particle beam apparatus

Also Published As

Publication number Publication date
JP5848765B2 (ja) 2016-01-27
US9468953B2 (en) 2016-10-18
EP2601671B1 (en) 2018-09-05
GB2486628A (en) 2012-06-27
EP2601671A1 (en) 2013-06-12
WO2012017190A1 (en) 2012-02-09
CN103053006A (zh) 2013-04-17
GB201013015D0 (en) 2010-09-15
GB2486628B (en) 2016-05-25
JP2013532835A (ja) 2013-08-19
US20130118523A1 (en) 2013-05-16

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