GB2486628B - Methods and apparatuses for cleaning at least one surface of an ion source - Google Patents

Methods and apparatuses for cleaning at least one surface of an ion source

Info

Publication number
GB2486628B
GB2486628B GB1013015.1A GB201013015A GB2486628B GB 2486628 B GB2486628 B GB 2486628B GB 201013015 A GB201013015 A GB 201013015A GB 2486628 B GB2486628 B GB 2486628B
Authority
GB
United Kingdom
Prior art keywords
apparatuses
cleaning
methods
ion source
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1013015.1A
Other languages
English (en)
Other versions
GB2486628A (en
GB201013015D0 (en
Inventor
Allison John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kratos Analytical Ltd
Original Assignee
Kratos Analytical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kratos Analytical Ltd filed Critical Kratos Analytical Ltd
Priority to GB1013015.1A priority Critical patent/GB2486628B/en
Publication of GB201013015D0 publication Critical patent/GB201013015D0/en
Priority to US13/811,715 priority patent/US9468953B2/en
Priority to EP11749475.7A priority patent/EP2601671B1/en
Priority to JP2013522289A priority patent/JP5848765B2/ja
Priority to CN201180037797.7A priority patent/CN103053006B/zh
Priority to PCT/GB2011/001139 priority patent/WO2012017190A1/en
Publication of GB2486628A publication Critical patent/GB2486628A/en
Application granted granted Critical
Publication of GB2486628B publication Critical patent/GB2486628B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/164—Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI]

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
GB1013015.1A 2010-08-02 2010-08-02 Methods and apparatuses for cleaning at least one surface of an ion source Active GB2486628B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB1013015.1A GB2486628B (en) 2010-08-02 2010-08-02 Methods and apparatuses for cleaning at least one surface of an ion source
CN201180037797.7A CN103053006B (zh) 2010-08-02 2011-07-28 用于清洁离子源的至少一个表面的方法和设备
EP11749475.7A EP2601671B1 (en) 2010-08-02 2011-07-28 Methods and apparatuses for cleaning at least one surface of an ion source
JP2013522289A JP5848765B2 (ja) 2010-08-02 2011-07-28 イオン源の少なくとも一つの表面をクリーニングする方法及び装置
US13/811,715 US9468953B2 (en) 2010-08-02 2011-07-28 Methods and apparatuses for cleaning at least one surface of an ion source
PCT/GB2011/001139 WO2012017190A1 (en) 2010-08-02 2011-07-28 Methods and apparatuses for cleaning at least one surface of an ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1013015.1A GB2486628B (en) 2010-08-02 2010-08-02 Methods and apparatuses for cleaning at least one surface of an ion source

Publications (3)

Publication Number Publication Date
GB201013015D0 GB201013015D0 (en) 2010-09-15
GB2486628A GB2486628A (en) 2012-06-27
GB2486628B true GB2486628B (en) 2016-05-25

Family

ID=42799504

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1013015.1A Active GB2486628B (en) 2010-08-02 2010-08-02 Methods and apparatuses for cleaning at least one surface of an ion source

Country Status (6)

Country Link
US (1) US9468953B2 (enExample)
EP (1) EP2601671B1 (enExample)
JP (1) JP5848765B2 (enExample)
CN (1) CN103053006B (enExample)
GB (1) GB2486628B (enExample)
WO (1) WO2012017190A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019239145A1 (en) 2018-06-15 2019-12-19 Ascend Diagnostics Limited Ion sources with improved cleaning by ablating light

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140002639A1 (en) * 2011-03-25 2014-01-02 Joseph M. Cheben Autonomous Detection of Chemical Plumes
JP6316041B2 (ja) * 2014-03-18 2018-04-25 株式会社東芝 スパッタ中性粒子質量分析装置
GB2530768B (en) * 2014-10-01 2019-07-17 Kratos Analytical Ltd Method and apparatuses relating to cleaning an ion source
DE102016101908B4 (de) 2016-02-03 2017-11-02 Dengler Tubetec Gmbh Vorrichtung und Verfahren zum Biegen von Rohren
CN105728398A (zh) * 2016-04-15 2016-07-06 淮安信息职业技术学院 一种自动飞行光伏阵列表面清洁机器人
EP3567625A1 (en) * 2018-05-09 2019-11-13 Helmholtz Zentrum München - Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) Device and method for mass spectroscopic analysis of particles
CN112397371A (zh) * 2020-11-24 2021-02-23 中国地质科学院岩溶地质研究所 一种Sercon质谱离子源加热器
CN112605069B (zh) * 2020-12-15 2021-11-02 暨南大学 一种用于清洁质谱仪离子源极片的自动清洗装置
CN112676270B (zh) * 2020-12-24 2022-02-08 暨南大学 一种质谱仪器极片清洗装置及清洗质谱仪器极片的方法
CN117225818A (zh) * 2023-09-19 2023-12-15 安图实验仪器(郑州)有限公司 质谱仪离子源的清洁方法
CN222129718U (zh) * 2024-04-10 2024-12-10 江门市富卓家居用品有限公司 一种折叠置物篮及置物架

Citations (4)

* Cited by examiner, † Cited by third party
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US5118937A (en) * 1989-08-22 1992-06-02 Finnigan Mat Gmbh Process and device for the laser desorption of an analyte molecular ions, especially of biomolecules
JPH07318552A (ja) * 1994-05-27 1995-12-08 Hitachi Ltd ガスクロマトグラフ質量分析計およびガスクロマトグラフ
US6500268B1 (en) * 2000-08-18 2002-12-31 Silicon Genesis Corporation Dry cleaning method
GB2457362A (en) * 2008-02-12 2009-08-19 Bruker Daltonik Gmbh Automatic cleaning of MALDI ion sources

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JPH01204426A (ja) 1988-02-10 1989-08-17 Nec Corp 固体表面清浄化方法およびその装置
US5654545A (en) * 1995-09-19 1997-08-05 Bruker-Franzen Analytik Gmbh Mass resolution in time-of-flight mass spectrometers with reflectors
FR2752386B1 (fr) * 1996-08-14 1998-09-11 Commissariat Energie Atomique Procede de nettoyage ou de decontamination d'un objet au moyen d'un faisceau laser ultraviolet et dispositif pour sa mise en oeuvre
JP3596397B2 (ja) 1999-12-28 2004-12-02 ウシオ電機株式会社 乾式洗浄装置
GB0021902D0 (en) * 2000-09-06 2000-10-25 Kratos Analytical Ltd Ion optics system for TOF mass spectrometer
US7274015B2 (en) * 2001-08-08 2007-09-25 Sionex Corporation Capacitive discharge plasma ion source
US7405397B2 (en) 2002-03-28 2008-07-29 Mds Sciex Inc. Laser desorption ion source with ion guide coupling for ion mass spectroscopy
JP4161608B2 (ja) * 2002-04-15 2008-10-08 株式会社日立製作所 危険物探知装置
GB2398923B (en) 2003-01-15 2005-11-30 Bruker Daltonik Gmbh Method and device for cleaning desorption ion sources
JP3795023B2 (ja) * 2003-03-04 2006-07-12 三菱重工業株式会社 飛行時間型質量分析装置
US6762405B1 (en) 2003-05-30 2004-07-13 Photonics Industries International, Inc. Matrix assisted laser ionization system
US6953928B2 (en) 2003-10-31 2005-10-11 Applera Corporation Ion source and methods for MALDI mass spectrometry
US6958480B1 (en) 2004-06-25 2005-10-25 The Regents Of The University Of California Sample desorption/ionization from mesoporous silica
JP2008506268A (ja) 2004-07-09 2008-02-28 アクリオン・テクノロジーズ・インコーポレーテッド 減圧下照射による処理方法及び装置
DE102005054605B4 (de) 2005-11-16 2010-09-30 Bruker Daltonik Gmbh Automatische Reinigung von Ionenquellen
US20070284541A1 (en) 2006-06-08 2007-12-13 Vane Ronald A Oxidative cleaning method and apparatus for electron microscopes using UV excitation in a oxygen radical source
DE102008001812B4 (de) * 2008-05-15 2013-05-29 Carl Zeiss Microscopy Gmbh Positioniereinrichtung für ein Teilchenstrahlgerät

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118937A (en) * 1989-08-22 1992-06-02 Finnigan Mat Gmbh Process and device for the laser desorption of an analyte molecular ions, especially of biomolecules
JPH07318552A (ja) * 1994-05-27 1995-12-08 Hitachi Ltd ガスクロマトグラフ質量分析計およびガスクロマトグラフ
US6500268B1 (en) * 2000-08-18 2002-12-31 Silicon Genesis Corporation Dry cleaning method
GB2457362A (en) * 2008-02-12 2009-08-19 Bruker Daltonik Gmbh Automatic cleaning of MALDI ion sources

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019239145A1 (en) 2018-06-15 2019-12-19 Ascend Diagnostics Limited Ion sources with improved cleaning by ablating light
EP3848954A2 (en) 2018-06-15 2021-07-14 Ascend Diagnostics Limited Ion sources with improved cleaning by ablating light

Also Published As

Publication number Publication date
CN103053006B (zh) 2016-09-07
JP5848765B2 (ja) 2016-01-27
US9468953B2 (en) 2016-10-18
EP2601671B1 (en) 2018-09-05
GB2486628A (en) 2012-06-27
EP2601671A1 (en) 2013-06-12
WO2012017190A1 (en) 2012-02-09
CN103053006A (zh) 2013-04-17
GB201013015D0 (en) 2010-09-15
JP2013532835A (ja) 2013-08-19
US20130118523A1 (en) 2013-05-16

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