JP5777948B2 - 発光ダイオード - Google Patents
発光ダイオード Download PDFInfo
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- JP5777948B2 JP5777948B2 JP2011138196A JP2011138196A JP5777948B2 JP 5777948 B2 JP5777948 B2 JP 5777948B2 JP 2011138196 A JP2011138196 A JP 2011138196A JP 2011138196 A JP2011138196 A JP 2011138196A JP 5777948 B2 JP5777948 B2 JP 5777948B2
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- 239000004065 semiconductor Substances 0.000 claims description 107
- 239000000758 substrate Substances 0.000 claims description 65
- 238000000034 method Methods 0.000 claims description 59
- 238000004519 manufacturing process Methods 0.000 description 34
- 239000002184 metal Substances 0.000 description 19
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000010408 film Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 16
- 238000005530 etching Methods 0.000 description 16
- 238000005286 illumination Methods 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 239000004020 conductor Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910005540 GaP Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910010199 LiAl Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002165 photosensitisation Effects 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B45/00—Circuit arrangements for operating light-emitting diodes [LED]
- H05B45/40—Details of LED load circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B45/00—Circuit arrangements for operating light-emitting diodes [LED]
- H05B45/40—Details of LED load circuits
- H05B45/42—Antiparallel configurations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/49105—Connecting at different heights
- H01L2224/49107—Connecting at different heights on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B45/00—Circuit arrangements for operating light-emitting diodes [LED]
- H05B45/30—Driver circuits
- H05B45/36—Circuits for reducing or suppressing harmonics, ripples or electromagnetic interferences [EMI]
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Devices (AREA)
- Led Device Packages (AREA)
Description
また、前記発光セルブロックは、N型半導体層、活性層及びP型半導体層が順次に積層された複数の発光セルと、前記複数の発光セルが付着された基板と、一方の発光セルのN型半導体層とこれと隣り合う他方の発光セルのP型半導体層とを接続する配線とを備えることが好ましい。
前記N型半導体層の上にN型パッドが形成され、前記P型半導体層の上にP型パッドが形成されることが好ましい。
このとき、前記発光セルに所定の整流電源を加えるための整流ブリッジ部をさらに備えることが好ましい。
そして、外部の交流電源と前記整流ブリッジ部とを接続するための電極をさらに備えることが好ましい。
前記発光セル及び前記整流ブリッジ部を外部の電源または外部素子と接続するための電極をさらに備えることが好ましい。
直列に接続された前記発光セルブロックが前記基板の上において逆並列に接続されていることが好ましい。
前記基板は、熱伝導性材質から形成されていることが好ましい。
前記熱伝導性材質からなる基板が電気伝導性を有する場合、基板上面に形成される絶縁膜と、前記絶縁膜と前記発光セルとの間に介装される電極パターンとをさらに備えることが好ましい。
前記複数の発光セルを設けるステップは、母基板の上に前記N型半導体層、活性層、及び前記P型半導体層を順次に形成するステップと、前記P型半導体層、活性層及びN型半導体層の一部を除去して個々の発光セルを電気的に絶縁するステップと、電気的に絶縁された前記P型半導体層の上にホスト基板(hostsubstrate)を貼り付けるステップと、前記母基板を除去するステップと、前記ホスト基板を切断して個々の発光セルを形成するステップとを含むことが好ましい。
前記発光素子を基板の上に付着させるステップをさらに含むことが好ましい。
Organic Chemical Vapor Deposition)、分子線成長法(MBE;Molecular Beam Epitaxy)、水素化物気相成長法(HVPE;Hydride Vapor Phase Epitaxy)などをはじめとする種
々の蒸着・成長方法により形成される。
する。N型半導体層220の下部にN型パッド210を形成した後、ホスト基板を個々の発光セル別に切断して垂直型の発光セル200を製造する。
図12を参照すると、この実施形態による発光素子300は、直列に接続されている複数の発光セル100、200と、発光セル100、200に所定の電流を加えるための整流ブリッジ部301と、整流ブリッジ部301に接続されている第1及び第2の電極310及び320と、整流ブリッジ部301に接続されてLEDアレイの抵抗を調節するための外部接続用の負電極350と、発光セル100、200に接続されている直流用の正電極360とを備える。
20、201 基板
30 バッファ層
40、220 N型半導体層
50、230 活性層
60、240 P型半導体層
70 透明電極
80、260 (金属)配線
90、95、210、250 (P型、N型)パッド
100、200 発光セル
301 整流ブリッジ部
310、320、330、340 (第1〜第4の)電極
350 外部接続用の負電極
360 直流用の正電極
410 電源部
420 制御部
Claims (5)
- 基板と、
前記基板上に配置され、基板上の下部半導体層、前記下部半導体層上の活性層、前記活性層上の上部半導体層をそれぞれ含む複数の発光セルと、
前記複数の発光セル上にそれぞれ配置された上部電極と、
前記基板と前記複数の発光セルの下部半導体層との間にそれぞれ配置され、前記発光セルの一側へのみ延長され上面が露出されている下部電極と、
前記複数の発光セルのうちの一つの発光セルの前記下部電極と前記一つの発光セルに隣接する別の発光セルの上部電極との間に形成された絶縁膜と、
前記絶縁膜上に配置され、前記複数の発光セルのうち一つの発光セルの下部電極の露出された上面と隣接する他の発光セルの上部電極とを連結する配線と、
を含む発光ダイオードであって、
前記複数の発光セルは、母基板が除去されていることを特徴とする発光ダイオード。 - 前記基板と前記下部電極との間に配置された絶縁層を含み、
前記基板は、導電性基板であることを特徴とする請求項1に記載の発光ダイオード。 - 前記複数の発光セルの側面には、前記絶縁膜が接していることを特徴とする請求項1に記載の発光ダイオード。
- 前記配線は、ステップカバレッジ工程によって接続されることを特徴とする請求項1に記載の発光ダイオード。
- 前記複数の発光セルは、二つ以上の発光セルのブロックを構成し、前記複数の発光セルの一つのブロックは交流電源の順方向の電圧印加時で光を出射し、前記複数の発光セルの別のブロックは交流電源の逆方向の電圧印加時で光を出射することを特徴とする請求項1に記載の発光ダイオード。
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2004-0049906 | 2004-06-30 | ||
KR20040049906 | 2004-06-30 | ||
KR10-2004-0087379 | 2004-10-29 | ||
KR1020040087379A KR100961483B1 (ko) | 2004-06-30 | 2004-10-29 | 다수의 셀이 결합된 발광 소자 및 이의 제조 방법 및 이를이용한 발광 장치 |
KR20040104569A KR20060065954A (ko) | 2004-12-11 | 2004-12-11 | 다수의 셀이 결합된 발광 소자 및 이의 제조 방법 |
KR10-2004-0104569 | 2004-12-11 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007519123A Division JP4841550B2 (ja) | 2004-06-30 | 2005-06-29 | 発光素子及びその製造方法並びにこれを用いた発光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011181973A JP2011181973A (ja) | 2011-09-15 |
JP5777948B2 true JP5777948B2 (ja) | 2015-09-09 |
Family
ID=35783103
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007519123A Expired - Fee Related JP4841550B2 (ja) | 2004-06-30 | 2005-06-29 | 発光素子及びその製造方法並びにこれを用いた発光装置 |
JP2009263499A Withdrawn JP2010034610A (ja) | 2004-06-30 | 2009-11-19 | 発光素子及びその製造方法並びにこれを用いた発光装置 |
JP2010114024A Withdrawn JP2010177712A (ja) | 2004-06-30 | 2010-05-18 | 発光素子及びその製造方法並びにこれを用いた発光装置 |
JP2011138196A Active JP5777948B2 (ja) | 2004-06-30 | 2011-06-22 | 発光ダイオード |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007519123A Expired - Fee Related JP4841550B2 (ja) | 2004-06-30 | 2005-06-29 | 発光素子及びその製造方法並びにこれを用いた発光装置 |
JP2009263499A Withdrawn JP2010034610A (ja) | 2004-06-30 | 2009-11-19 | 発光素子及びその製造方法並びにこれを用いた発光装置 |
JP2010114024A Withdrawn JP2010177712A (ja) | 2004-06-30 | 2010-05-18 | 発光素子及びその製造方法並びにこれを用いた発光装置 |
Country Status (4)
Country | Link |
---|---|
US (7) | US7804098B2 (ja) |
EP (3) | EP2144286A3 (ja) |
JP (4) | JP4841550B2 (ja) |
WO (1) | WO2006004337A1 (ja) |
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US7285801B2 (en) * | 2004-04-02 | 2007-10-23 | Lumination, Llc | LED with series-connected monolithically integrated mesas |
EP2144286A3 (en) * | 2004-06-30 | 2011-03-30 | Seoul Opto Device Co., Ltd. | Light emitting element with a plurality of light emitting diodes bonded, method of manufacturing the same, and light emitting device using the same |
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2005
- 2005-06-29 EP EP09013589A patent/EP2144286A3/en not_active Withdrawn
- 2005-06-29 EP EP05765903.9A patent/EP1787336B1/en active Active
- 2005-06-29 EP EP13199403.0A patent/EP2733744A1/en not_active Withdrawn
- 2005-06-29 US US11/571,499 patent/US7804098B2/en active Active
- 2005-06-29 JP JP2007519123A patent/JP4841550B2/ja not_active Expired - Fee Related
- 2005-06-29 WO PCT/KR2005/002033 patent/WO2006004337A1/en active Application Filing
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2009
- 2009-11-19 JP JP2009263499A patent/JP2010034610A/ja not_active Withdrawn
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2010
- 2010-01-11 US US12/685,145 patent/US7871839B2/en active Active
- 2010-05-18 JP JP2010114024A patent/JP2010177712A/ja not_active Withdrawn
- 2010-10-25 US US12/911,342 patent/US8168988B2/en active Active
- 2010-11-11 US US12/944,412 patent/US7964880B2/en active Active
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2011
- 2011-05-11 US US13/105,322 patent/US8198643B2/en active Active
- 2011-06-22 JP JP2011138196A patent/JP5777948B2/ja active Active
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2012
- 2012-05-15 US US13/472,236 patent/US8492775B2/en active Active
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2013
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Also Published As
Publication number | Publication date |
---|---|
US7964880B2 (en) | 2011-06-21 |
JP4841550B2 (ja) | 2011-12-21 |
US20110037397A1 (en) | 2011-02-17 |
JP2011181973A (ja) | 2011-09-15 |
EP2733744A1 (en) | 2014-05-21 |
US20120235583A1 (en) | 2012-09-20 |
EP1787336B1 (en) | 2016-01-20 |
US20110062465A1 (en) | 2011-03-17 |
US20110210350A1 (en) | 2011-09-01 |
US20080017871A1 (en) | 2008-01-24 |
WO2006004337A1 (en) | 2006-01-12 |
JP2010034610A (ja) | 2010-02-12 |
JP2010177712A (ja) | 2010-08-12 |
EP2144286A2 (en) | 2010-01-13 |
EP1787336A1 (en) | 2007-05-23 |
EP1787336A4 (en) | 2011-03-30 |
US20130277682A1 (en) | 2013-10-24 |
US8168988B2 (en) | 2012-05-01 |
US7871839B2 (en) | 2011-01-18 |
JP2008505478A (ja) | 2008-02-21 |
US7804098B2 (en) | 2010-09-28 |
US8198643B2 (en) | 2012-06-12 |
US8492775B2 (en) | 2013-07-23 |
US20100109031A1 (en) | 2010-05-06 |
EP2144286A3 (en) | 2011-03-30 |
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