JP5638413B2 - マスクパターンの形成方法 - Google Patents
マスクパターンの形成方法 Download PDFInfo
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- JP5638413B2 JP5638413B2 JP2011025465A JP2011025465A JP5638413B2 JP 5638413 B2 JP5638413 B2 JP 5638413B2 JP 2011025465 A JP2011025465 A JP 2011025465A JP 2011025465 A JP2011025465 A JP 2011025465A JP 5638413 B2 JP5638413 B2 JP 5638413B2
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- 238000000034 method Methods 0.000 title claims description 77
- 238000005530 etching Methods 0.000 claims description 79
- 239000000758 substrate Substances 0.000 claims description 42
- 230000008569 process Effects 0.000 claims description 38
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 10
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 10
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 8
- 229920005591 polysilicon Polymers 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000010408 film Substances 0.000 description 262
- 239000007789 gas Substances 0.000 description 99
- 238000012545 processing Methods 0.000 description 32
- 239000011295 pitch Substances 0.000 description 23
- 229910004298 SiO 2 Inorganic materials 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- 229910017121 AlSiO Inorganic materials 0.000 description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 5
- 125000003277 amino group Chemical group 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000004090 dissolution Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002052 molecular layer Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- BIVNKSDKIFWKFA-UHFFFAOYSA-N N-propan-2-yl-N-silylpropan-2-amine Chemical compound CC(C)N([SiH3])C(C)C BIVNKSDKIFWKFA-UHFFFAOYSA-N 0.000 description 1
- CGRVKSPUKAFTBN-UHFFFAOYSA-N N-silylbutan-1-amine Chemical compound CCCCN[SiH3] CGRVKSPUKAFTBN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 150000008442 polyphenolic compounds Chemical class 0.000 description 1
- 235000013824 polyphenols Nutrition 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02219—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and nitrogen
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
- H01L21/0276—Photolithographic processes using an anti-reflective coating
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0338—Process specially adapted to improve the resolution of the mask
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
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Description
11〜13 被エッチング膜
14 第1のレジスト膜
14a 第1の開口部
14d 第3の開口部
14g 第4の開口部
15 第1の膜
15a、17a 側壁部
16 第2のレジスト膜
16a 第2の開口部
17 第2の膜
Claims (11)
- 基板上の被エッチング膜の上に、第1のレジスト膜を成膜し、成膜した前記第1のレジスト膜に、所定のピッチで配列する第1の開口部を形成する第1の形成工程と、
前記第1の開口部の側壁を被覆するように、前記第1のレジスト膜上に第1の膜を成膜する第1の成膜工程と、
前記第1の膜に接するように、第2のレジスト膜を成膜し、成膜した前記第2のレジスト膜に、前記第1の開口部と交互に配列する第2の開口部を形成する第2の形成工程と、
前記第2の開口部の側壁を被覆するように、前記第2のレジスト膜上に第2の膜を成膜する第2の成膜工程と、
前記第2の膜が前記第2の開口部の側壁を被覆する第1の側壁部として残るように、前記第2の膜の一部を除去する第1の除去工程と、
前記第1の側壁部をマスクとして前記第1のレジスト膜の一部を除去することによって、前記第1のレジスト膜に、前記第2の開口部に対応した第3の開口部を形成するとともに、前記第1の膜が前記第1の開口部の側壁を被覆する第2の側壁部として残るように、前記第1の膜の一部を除去することによって、前記第1の開口部の側壁が前記第2の側壁部に被覆されてなる第4の開口部を形成する第2の除去工程と
を有するマスクパターンの形成方法。 - 前記第2の除去工程は、
前記第1の側壁部をマスクとして、前記第2の開口部内で前記第1の膜と前記第1のレジスト膜とをエッチングして除去するとともに、前記第2のレジスト膜を除去する第1のエッチング工程と、
前記第2のレジスト膜を除去した後、前記第1の側壁部をマスクとして、前記第1の膜が前記第2の側壁部として残るように、前記第1の膜の一部をエッチングして除去する第2のエッチング工程と、
前記第1の側壁部をエッチングして除去する第3のエッチング工程と
を有する、請求項1に記載のマスクパターンの形成方法。 - 前記第2の膜の材料は、前記第1の膜の材料と異なる、請求項2に記載のマスクパターンの形成方法。
- 前記第1のエッチング工程及び前記第2のエッチング工程において、前記第2の膜のエッチングレートは、前記第1の膜のエッチングレートよりも小さい、請求項3に記載のマスクパターンの形成方法。
- 前記第1の膜の光学定数は、前記第1のレジスト膜の光学定数と略等しい、請求項1から請求項4のいずれかに記載のマスクパターンの形成方法。
- 前記第1の膜は、酸化シリコン、酸化アルミニウム、シリコン添加酸化アルミニウム、酸化チタン、窒化シリコン、アモルファスカーボン、ポリシリコンのいずれか1種以上の膜よりなる、請求項1から請求項5のいずれかに記載のマスクパターンの形成方法。
- 前記第2の膜は、酸化シリコン、酸化アルミニウム、シリコン添加酸化アルミニウム、酸化チタン、窒化シリコン、アモルファスカーボン、ポリシリコンのいずれか1種以上の膜よりなる、請求項1から請求項6のいずれかに記載のマスクパターンの形成方法。
- 前記第1の膜の膜厚と前記第2の膜の膜厚とは、前記第3の開口部の第1の開口寸法と、前記第4の開口部の第2の開口寸法とが等しくなるように決定されたものである、請求項1から請求項7のいずれかに記載のマスクパターンの形成方法。
- 一の基板に形成された前記第3の開口部の前記第1の開口寸法と、前記一の基板に形成された前記第4の開口部の前記第2の開口寸法とを測定し、測定された前記第1の開口寸法と前記第2の開口寸法とに基づいて、他の基板に形成される前記第1の膜の膜厚又は前記第2の膜の膜厚を変更する、請求項1から請求項8のいずれかに記載のマスクパターンの形成方法。
- 前記第3の開口部と前記第4の開口部とよりなるパターンを用いて前記被エッチング膜をエッチングする被エッチング膜エッチング工程を有し、
前記被エッチング膜エッチング工程において、前記第1のレジスト膜及び前記第1の膜のエッチングレートは、用いるエッチャントガスに対する前記被エッチング膜のエッチングレートよりも小さい、
請求項1から請求項9のいずれかに記載のマスクパターンの形成方法。 - 前記第1の形成工程において、成膜した前記第1のレジスト膜にアライメントマークを形成し、
前記第1の成膜工程において、前記アライメントマークを被覆するように前記第1のレジスト膜上に前記第1の膜を成膜する、
請求項1から請求項10のいずれかに記載のマスクパターンの形成方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011025465A JP5638413B2 (ja) | 2011-02-08 | 2011-02-08 | マスクパターンの形成方法 |
US13/355,724 US8551691B2 (en) | 2011-02-08 | 2012-01-23 | Method of forming mask pattern |
KR1020120007578A KR101322112B1 (ko) | 2011-02-08 | 2012-01-26 | 마스크 패턴의 형성 방법 |
TW101103100A TWI471907B (zh) | 2011-02-08 | 2012-01-31 | The formation of mask pattern |
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US9362133B2 (en) * | 2012-12-14 | 2016-06-07 | Lam Research Corporation | Method for forming a mask by etching conformal film on patterned ashable hardmask |
US10163652B2 (en) * | 2014-03-13 | 2018-12-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mechanisms for forming patterns using multiple lithography processes |
US9997405B2 (en) | 2014-09-30 | 2018-06-12 | Lam Research Corporation | Feature fill with nucleation inhibition |
US20160314964A1 (en) | 2015-04-21 | 2016-10-27 | Lam Research Corporation | Gap fill using carbon-based films |
CN106483778B (zh) | 2015-08-31 | 2018-03-30 | 上海微电子装备(集团)股份有限公司 | 基于相对位置测量的对准系统、双工件台系统及测量系统 |
US10651080B2 (en) | 2016-04-26 | 2020-05-12 | Lam Research Corporation | Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing |
JP6272949B2 (ja) * | 2016-06-06 | 2018-01-31 | 東京エレクトロン株式会社 | パターン形成方法 |
US10049869B2 (en) * | 2016-09-30 | 2018-08-14 | Lam Research Corporation | Composite dielectric interface layers for interconnect structures |
US9859153B1 (en) | 2016-11-14 | 2018-01-02 | Lam Research Corporation | Deposition of aluminum oxide etch stop layers |
CN109148269B (zh) * | 2017-06-27 | 2021-05-04 | 联华电子股份有限公司 | 半导体装置的形成方法 |
US10991583B2 (en) * | 2018-09-28 | 2021-04-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Self aligned litho etch process patterning method |
JP7427155B2 (ja) * | 2019-08-23 | 2024-02-05 | 東京エレクトロン株式会社 | 別の金属及び誘電体に対してチューニング可能な選択性を有するチタン含有材料層の非プラズマエッチング |
CN110610983A (zh) * | 2019-09-06 | 2019-12-24 | 电子科技大学 | 抗辐照器件及制备方法 |
US11854806B2 (en) | 2020-05-22 | 2023-12-26 | Tokyo Electron Limited | Method for pattern reduction using a staircase spacer |
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JPH03270227A (ja) * | 1990-03-20 | 1991-12-02 | Mitsubishi Electric Corp | 微細パターンの形成方法 |
US5077234A (en) * | 1990-06-29 | 1991-12-31 | Digital Equipment Corporation | Planarization process utilizing three resist layers |
JPH06105686B2 (ja) * | 1992-09-18 | 1994-12-21 | 日本アイ・ビー・エム株式会社 | 半導体装置の製造方法 |
FR2711275B1 (fr) * | 1993-10-15 | 1996-10-31 | Intel Corp | Procédé automatiquement aligné de contact en fabrication de semi-conducteurs et dispositifs produits. |
JP2002009056A (ja) | 2000-06-22 | 2002-01-11 | Mitsubishi Electric Corp | 微細パターン形成方法およびその方法により製造した装置 |
JP2005129761A (ja) | 2003-10-24 | 2005-05-19 | Toshiba Corp | ホールパターン形成方法及び半導体装置の製造方法 |
KR100640657B1 (ko) | 2005-07-25 | 2006-11-01 | 삼성전자주식회사 | 반도체 소자의 미세 패턴 형성 방법 |
KR100822581B1 (ko) | 2006-09-08 | 2008-04-16 | 주식회사 하이닉스반도체 | 플래시 메모리 소자의 제조방법 |
KR100942078B1 (ko) * | 2007-12-27 | 2010-02-12 | 주식회사 하이닉스반도체 | 반도체 소자의 미세 패턴 형성 방법 |
JP4550126B2 (ja) * | 2008-04-25 | 2010-09-22 | 東京エレクトロン株式会社 | エッチングマスク形成方法、エッチング方法、および半導体デバイスの製造方法 |
KR101096213B1 (ko) * | 2008-12-22 | 2011-12-22 | 주식회사 하이닉스반도체 | 반도체 소자의 커패시터 제조 방법 |
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- 2012-01-26 KR KR1020120007578A patent/KR101322112B1/ko active IP Right Grant
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TWI471907B (zh) | 2015-02-01 |
KR20120090801A (ko) | 2012-08-17 |
JP2012164895A (ja) | 2012-08-30 |
TW201243907A (en) | 2012-11-01 |
US8551691B2 (en) | 2013-10-08 |
KR101322112B1 (ko) | 2013-10-28 |
US20120202301A1 (en) | 2012-08-09 |
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