JP5568205B2 - インタポーザ、インタポーザパッケージ、及びそれらを使用したデバイス組立体 - Google Patents

インタポーザ、インタポーザパッケージ、及びそれらを使用したデバイス組立体 Download PDF

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Publication number
JP5568205B2
JP5568205B2 JP2004070540A JP2004070540A JP5568205B2 JP 5568205 B2 JP5568205 B2 JP 5568205B2 JP 2004070540 A JP2004070540 A JP 2004070540A JP 2004070540 A JP2004070540 A JP 2004070540A JP 5568205 B2 JP5568205 B2 JP 5568205B2
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JP
Japan
Prior art keywords
input
interposer
output
substrate
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004070540A
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English (en)
Japanese (ja)
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JP2004282072A5 (enExample
JP2004282072A (ja
Inventor
ウィリアム・イー・バーディック，ジュニア
ジェームズ・ダブリュ・ローズ
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General Electric Co
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General Electric Co
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Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2004282072A publication Critical patent/JP2004282072A/ja
Publication of JP2004282072A5 publication Critical patent/JP2004282072A5/ja
Application granted granted Critical
Publication of JP5568205B2 publication Critical patent/JP5568205B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63—Vias, e.g. via plugs
    • H10W70/635—Through-vias
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/10—Arrangements for heating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H10W70/654—Top-view layouts
    • H10W70/655—Fan-out layouts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H10W70/654—Top-view layouts
    • H10W70/656—Fan-in layouts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/951—Materials of bond pads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Wire Bonding (AREA)
  • Combinations Of Printed Boards (AREA)
JP2004070540A 2003-03-14 2004-03-12 インタポーザ、インタポーザパッケージ、及びそれらを使用したデバイス組立体 Expired - Lifetime JP5568205B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/388,997 2003-03-14
US10/388,997 US6819001B2 (en) 2003-03-14 2003-03-14 Interposer, interposer package and device assembly employing the same

Publications (3)

Publication Number Publication Date
JP2004282072A JP2004282072A (ja) 2004-10-07
JP2004282072A5 JP2004282072A5 (enExample) 2007-04-19
JP5568205B2 true JP5568205B2 (ja) 2014-08-06

Family

ID=32962177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004070540A Expired - Lifetime JP5568205B2 (ja) 2003-03-14 2004-03-12 インタポーザ、インタポーザパッケージ、及びそれらを使用したデバイス組立体

Country Status (6)

Country Link
US (1) US6819001B2 (enExample)
JP (1) JP5568205B2 (enExample)
CN (1) CN100454532C (enExample)
DE (1) DE102004012595A1 (enExample)
IL (1) IL160581A0 (enExample)
NL (1) NL1025639C2 (enExample)

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US7019346B2 (en) * 2003-12-23 2006-03-28 Intel Corporation Capacitor having an anodic metal oxide substrate
US20060091538A1 (en) * 2004-11-04 2006-05-04 Kabadi Ashok N Low profile and tight pad-pitch land-grid-array (LGA) socket
US7230334B2 (en) * 2004-11-12 2007-06-12 International Business Machines Corporation Semiconductor integrated circuit chip packages having integrated microchannel cooling modules
CN101102853B (zh) * 2005-01-11 2010-12-08 皇家飞利浦电子股份有限公司 用于(多个)微束形成器的重分布互连和医学超声系统
KR100652397B1 (ko) * 2005-01-17 2006-12-01 삼성전자주식회사 매개 인쇄회로기판을 사용하는 적층형 반도체 패키지
CN101193711B (zh) * 2005-06-07 2010-12-29 皇家飞利浦电子股份有限公司 用于超声传感器组件的多器件衬块
JP4507101B2 (ja) 2005-06-30 2010-07-21 エルピーダメモリ株式会社 半導体記憶装置及びその製造方法
JP2007139912A (ja) * 2005-11-15 2007-06-07 Sharp Corp 駆動素子実装表示装置
JP4744360B2 (ja) * 2006-05-22 2011-08-10 富士通株式会社 半導体装置
TWI326908B (en) * 2006-09-11 2010-07-01 Ind Tech Res Inst Packaging structure and fabricating method thereof
US20080068815A1 (en) * 2006-09-18 2008-03-20 Oliver Richard Astley Interface Assembly And Method for Integrating A Data Acquisition System on a Sensor Array
US7518226B2 (en) * 2007-02-06 2009-04-14 Stats Chippac Ltd. Integrated circuit packaging system with interposer
KR101387701B1 (ko) * 2007-08-01 2014-04-23 삼성전자주식회사 반도체 패키지 및 이의 제조방법
KR101623880B1 (ko) * 2008-09-24 2016-05-25 삼성전자주식회사 반도체 패키지
US7973272B2 (en) * 2009-03-09 2011-07-05 Bae Systems Information And Electronic Systems Integration, Inc. Interface techniques for coupling a microchannel plate to a readout circuit
US7923290B2 (en) * 2009-03-27 2011-04-12 Stats Chippac Ltd. Integrated circuit packaging system having dual sided connection and method of manufacture thereof
US7936060B2 (en) * 2009-04-29 2011-05-03 International Business Machines Corporation Reworkable electronic device assembly and method
US20110180317A1 (en) * 2009-09-11 2011-07-28 Eiji Takahashi Electronic component package, method for producing the same and interposer
US8008121B2 (en) * 2009-11-04 2011-08-30 Stats Chippac, Ltd. Semiconductor package and method of mounting semiconductor die to opposite sides of TSV substrate
US8405229B2 (en) * 2009-11-30 2013-03-26 Endicott Interconnect Technologies, Inc. Electronic package including high density interposer and circuitized substrate assembly utilizing same
US8363418B2 (en) 2011-04-18 2013-01-29 Morgan/Weiss Technologies Inc. Above motherboard interposer with peripheral circuits
US9013041B2 (en) * 2011-12-28 2015-04-21 Broadcom Corporation Semiconductor package with ultra-thin interposer without through-semiconductor vias
US9006908B2 (en) * 2012-08-01 2015-04-14 Marvell Israel (M.I.S.L) Ltd. Integrated circuit interposer and method of manufacturing the same
WO2014121300A2 (en) * 2013-02-04 2014-08-07 American Semiconductor, Inc. Photonic data transfer assembly
US20140264938A1 (en) * 2013-03-14 2014-09-18 Douglas R. Hackler, Sr. Flexible Interconnect
WO2015047350A1 (en) * 2013-09-27 2015-04-02 Intel Corporation Dual-sided die packages
JP2015082524A (ja) * 2013-10-21 2015-04-27 ソニー株式会社 配線基板、半導体装置
US9613857B2 (en) * 2014-10-30 2017-04-04 Taiwan Semiconductor Manufacturing Company, Ltd. Electrostatic discharge protection structure and method
US11309192B2 (en) * 2018-06-05 2022-04-19 Intel Corporation Integrated circuit package supports
DE102020206769B3 (de) * 2020-05-29 2021-06-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Mikroelektronische anordnung und verfahren zur herstellung derselben
US11804428B2 (en) * 2020-11-13 2023-10-31 Qualcomm Incorporated Mixed pad size and pad design
CN114698242A (zh) * 2022-03-29 2022-07-01 维沃移动通信有限公司 Fpc和电子设备

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Also Published As

Publication number Publication date
NL1025639C2 (nl) 2005-05-26
IL160581A0 (en) 2004-07-25
NL1025639A1 (nl) 2004-09-16
DE102004012595A1 (de) 2004-10-28
US20040178484A1 (en) 2004-09-16
CN1531081A (zh) 2004-09-22
US6819001B2 (en) 2004-11-16
CN100454532C (zh) 2009-01-21
JP2004282072A (ja) 2004-10-07

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