JP5566829B2 - 液体自動供給機構およびこれを備える塗布装置 - Google Patents
液体自動供給機構およびこれを備える塗布装置 Download PDFInfo
- Publication number
- JP5566829B2 JP5566829B2 JP2010207775A JP2010207775A JP5566829B2 JP 5566829 B2 JP5566829 B2 JP 5566829B2 JP 2010207775 A JP2010207775 A JP 2010207775A JP 2010207775 A JP2010207775 A JP 2010207775A JP 5566829 B2 JP5566829 B2 JP 5566829B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- supply
- liquid material
- receiving
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Coating Apparatus (AREA)
- Mathematical Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Liquid Crystal (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010207775A JP5566829B2 (ja) | 2010-09-16 | 2010-09-16 | 液体自動供給機構およびこれを備える塗布装置 |
KR1020137006402A KR101795612B1 (ko) | 2010-09-16 | 2011-09-14 | 액체 자동 공급 기구 및 이것을 구비하는 도포 장치 |
CN201180042922.3A CN103118802B (zh) | 2010-09-16 | 2011-09-14 | 液体自动供给机构和具备其的涂布装置 |
PCT/JP2011/070920 WO2012036179A1 (ja) | 2010-09-16 | 2011-09-14 | 液体自動供給機構およびこれを備える塗布装置 |
TW100133333A TWI573628B (zh) | 2010-09-16 | 2011-09-16 | A liquid automatic supply mechanism and a coating device provided with the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010207775A JP5566829B2 (ja) | 2010-09-16 | 2010-09-16 | 液体自動供給機構およびこれを備える塗布装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012061424A JP2012061424A (ja) | 2012-03-29 |
JP2012061424A5 JP2012061424A5 (enrdf_load_stackoverflow) | 2013-11-14 |
JP5566829B2 true JP5566829B2 (ja) | 2014-08-06 |
Family
ID=45831636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010207775A Active JP5566829B2 (ja) | 2010-09-16 | 2010-09-16 | 液体自動供給機構およびこれを備える塗布装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5566829B2 (enrdf_load_stackoverflow) |
KR (1) | KR101795612B1 (enrdf_load_stackoverflow) |
CN (1) | CN103118802B (enrdf_load_stackoverflow) |
TW (1) | TWI573628B (enrdf_load_stackoverflow) |
WO (1) | WO2012036179A1 (enrdf_load_stackoverflow) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6218219B2 (ja) * | 2013-07-12 | 2017-10-25 | 東レエンジニアリング株式会社 | エアベントシステム |
JP2015182039A (ja) * | 2014-03-25 | 2015-10-22 | 株式会社Screenホールディングス | 塗布装置および脱泡方法 |
PL2954958T3 (pl) * | 2014-06-11 | 2018-07-31 | Umicore Ag & Co. Kg | Urządzenie do powlekania podłoża |
JP6244421B1 (ja) * | 2016-07-27 | 2017-12-06 | 株式会社キャタラー | 排ガス浄化用触媒の製造方法及び製造装置 |
JP6993276B2 (ja) * | 2018-03-27 | 2022-01-13 | 株式会社Ihi回転機械エンジニアリング | 液材供給装置 |
JP7277127B2 (ja) * | 2018-04-11 | 2023-05-18 | キヤノン株式会社 | 吐出材充填方法、吐出材吐出装置、およびインプリント装置 |
CN111036442B (zh) * | 2019-10-08 | 2023-04-11 | 吉林大学 | 一种用于动物试验脱毛过程的棉签处理器 |
CN111290178B (zh) * | 2020-02-25 | 2022-08-05 | 深圳市华星光电半导体显示技术有限公司 | 液晶滴注装置 |
CN113198643B (zh) * | 2021-04-25 | 2022-04-22 | 浙江中聚材料有限公司 | 一种太阳能背板涂布装置 |
CN116273729B (zh) * | 2023-01-28 | 2023-10-20 | 中山市美速光电技术有限公司 | 一种用于超微间距光纤阵列的点胶装置 |
JP2024126892A (ja) * | 2023-03-08 | 2024-09-20 | 東レエンジニアリング株式会社 | ベントタンク |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3259309B2 (ja) * | 1992-01-23 | 2002-02-25 | カシオ計算機株式会社 | 液状樹脂の脱泡方法およびその装置 |
US6431670B1 (en) * | 2000-02-14 | 2002-08-13 | Hewlett-Packard Company | Ink level sensing method and apparatus |
JP2001267399A (ja) * | 2000-03-14 | 2001-09-28 | Canon Inc | 基板有無検知方法及び基板保管装置 |
JP2001267339A (ja) * | 2000-03-15 | 2001-09-28 | Sanyu Rec Co Ltd | 電子部品の製造装置及び製造方法 |
JP4330295B2 (ja) * | 2001-09-10 | 2009-09-16 | 大日本印刷株式会社 | ペースト塗布方法 |
JP2005209778A (ja) * | 2004-01-21 | 2005-08-04 | Hitachi Maxell Ltd | レジスト塗布装置、フォトレジストの塗布方法及び光ディスクの製造方法 |
US7344230B2 (en) * | 2004-09-07 | 2008-03-18 | Fujifilm Dimatix, Inc. | Fluid drop ejection system capable of removing dissolved gas from fluid |
PL1656863T3 (pl) * | 2004-11-11 | 2011-07-29 | Nestec Sa | Samoczyszcząca głowica mieszająca do przygotowywania mieszaniny na bazie mleka oraz maszyny do przygotowywania napojów zawierające taką głowicę mieszającą |
JP4985191B2 (ja) * | 2006-08-15 | 2012-07-25 | 東京エレクトロン株式会社 | バッファタンク、中間貯留装置、液処理装置及び処理液の供給方法 |
JP4607919B2 (ja) * | 2007-05-23 | 2011-01-05 | 武蔵エンジニアリング株式会社 | ガントリー型作業装置 |
-
2010
- 2010-09-16 JP JP2010207775A patent/JP5566829B2/ja active Active
-
2011
- 2011-09-14 WO PCT/JP2011/070920 patent/WO2012036179A1/ja active Application Filing
- 2011-09-14 CN CN201180042922.3A patent/CN103118802B/zh active Active
- 2011-09-14 KR KR1020137006402A patent/KR101795612B1/ko active Active
- 2011-09-16 TW TW100133333A patent/TWI573628B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW201221229A (en) | 2012-06-01 |
CN103118802A (zh) | 2013-05-22 |
TWI573628B (zh) | 2017-03-11 |
WO2012036179A1 (ja) | 2012-03-22 |
JP2012061424A (ja) | 2012-03-29 |
KR101795612B1 (ko) | 2017-11-08 |
CN103118802B (zh) | 2017-04-26 |
KR20130143560A (ko) | 2013-12-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5566829B2 (ja) | 液体自動供給機構およびこれを備える塗布装置 | |
US10600647B2 (en) | Coating apparatus | |
JP6512894B2 (ja) | 処理液供給装置および処理液供給装置の制御方法 | |
JP4188080B2 (ja) | プリントヘッドのインク圧力制御を備えた閉鎖インク送出システムおよび方法 | |
TWI424885B (zh) | A liquid discharge device having a defoaming mechanism | |
JP2007196109A (ja) | 液状物質供給装置及び液状物質供給方法 | |
KR101544521B1 (ko) | 필터 어셈블리를 상태조절하기 위한 시스템 및 방법 | |
KR20100116666A (ko) | 액체 재료의 토출 장치, 및 그 도포 장치 및 도포 방법 | |
JP6827713B2 (ja) | 液体吐出装置、インプリント装置および部品の製造方法 | |
JP5947953B2 (ja) | 分注装置および分注システム | |
JP2012196600A (ja) | ペースト塗布ヘッド,ペースト塗布装置及びペースト塗布方法 | |
KR101261217B1 (ko) | 디스펜서용 레진 공급 장치 | |
CN201780435U (zh) | 液晶滴落装置 | |
KR101417491B1 (ko) | 크린 도포 시스템 및 클린 도포 건 | |
HK1181001A (en) | Automated liquid supply mechanism and coater provided with same | |
HK1181001B (en) | Automated liquid supply mechanism and coater provided with same | |
CN111290178B (zh) | 液晶滴注装置 | |
CN101850659B (zh) | 具有内压调整的连续供液装置 | |
JP2013202609A (ja) | 塗布液塗布装置 | |
JP2023064075A (ja) | 液供給ユニット、基板処理装置及びボトル交替方法 | |
KR101807595B1 (ko) | 선택적으로 액정 탱크의 액정을 모으거나 기포를 제거하는 장치 | |
JP2005043268A (ja) | 溶液吐出機および顕微鏡標本封入装置 | |
JP2016107576A (ja) | インク供給装置、インク供給方法及びインクジェット記録装置 | |
HK1124009B (en) | Liquid material discharge device with debubbling mechanism |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130828 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130828 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20130828 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131001 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140610 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140618 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5566829 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |