JP5553513B2 - 液晶表示装置及びその製造方法 - Google Patents
液晶表示装置及びその製造方法 Download PDFInfo
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- JP5553513B2 JP5553513B2 JP2009027309A JP2009027309A JP5553513B2 JP 5553513 B2 JP5553513 B2 JP 5553513B2 JP 2009027309 A JP2009027309 A JP 2009027309A JP 2009027309 A JP2009027309 A JP 2009027309A JP 5553513 B2 JP5553513 B2 JP 5553513B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134363—Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
Description
Claims (4)
- 画素電極を構成する櫛歯状の第1の電極と対向電極を構成する平面状の第2の電極とTFTを含む画素がマトリクス状に形成されて表示領域を形成し、前記表示領域の外側に端子電極を含む端子部が形成されたTFT基板と、カラーフィルタが形成された対向基板と、前記TFT基板と前記対向基板との間に液晶層を挟持した液晶表示パネルを有する液晶表示装置であって、
前記第1の電極は前記第2の電極の上方に絶縁膜を挟んで配置されており、
前記第1の電極および前記第2の電極はITOによって形成され、前記第1の電極はスルーホールに形成されたITOで形成された第3の電極を介して前記TFTと接続しており、前記端子電極はITOで形成され、
前記第1の電極を形成するITOの厚さは前記スルーホールに形成された前記第3の電極を構成するITOの厚さ、および、前記端子部に形成された前記端子電極のITOの厚さよりも小さく、
前記端子電極は前記表示領域に形成された映像信号線、走査線または前記第2の電極と接続していることを特徴とする液晶表示装置。 - 前記第1の電極のITOの厚さは、前記スルーホールに形成されたITOの厚さ及び前記端子電極を構成するITOの厚さの半分以下であることを特徴とする請求項1に記載の液晶表示装置。
- 画素電極を構成する櫛歯状の第1の電極と対向電極を構成する平面状の第2の電極とTFTを含む画素がマトリクス状に形成されて表示領域を形成し、
前記第1の電極は前記第2の電極の上方に絶縁膜を挟んで配置され、
前記第1の電極はITOで形成され、前記第1の電極は前記TFTとはスルーホールに形成されたITOによって接続し、
前記表示領域の外側にITOによって形成された端子電極を含む端子部が形成されたTFT基板と、
カラーフィルタが形成された対向基板と、
前記TFT基板と前記対向基板との間に液晶層を挟持した液晶表示パネルを有する液晶表示装置の製造方法であって、
前記第1の電極を形成するITOと、前記スルーホールに形成されたITOと、前記端子電極を形成するITOとを、同時に被着し、
前記同時に被着したITOの上にフォトレジストを塗布し、前記フォトレジストを露光することによってパターニングする際、前記第1の電極に対応するフォトレジストにはハーフ露光を行い、前記スルーホールおよび前記端子電極に対応するフォトレジストにはマスクして露光せず、
前記フォトレジストを現像し、前記フォトレジストを用いて前記ITOをエッチングし、
その後、前記フォトレジストをエッチバックすることによって、前記第1の電極に形成されたフォトレジストを前記第1の電極の上から除去し、前記スルーホールおよび前記端子電極に形成されたフォトレジストは残し、
前記第1の電極をエッチングすることによって前記第1の電極のITOのみを薄くし、
その後、前記スルーホールおよび前記端子電極に形成されたフォトレジストを除去することを特徴とする液晶表示装置の製造方法。 - 前記フォトレジストのエッチバックは酸素アッシャーによって行うことを特徴とする請求項3に記載の液晶表示装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2009027309A JP5553513B2 (ja) | 2009-02-09 | 2009-02-09 | 液晶表示装置及びその製造方法 |
US12/700,768 US20100201932A1 (en) | 2009-02-09 | 2010-02-05 | Liquid crystal display device |
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JP2009027309A JP5553513B2 (ja) | 2009-02-09 | 2009-02-09 | 液晶表示装置及びその製造方法 |
Publications (2)
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JP2010181785A JP2010181785A (ja) | 2010-08-19 |
JP5553513B2 true JP5553513B2 (ja) | 2014-07-16 |
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JP2009027309A Active JP5553513B2 (ja) | 2009-02-09 | 2009-02-09 | 液晶表示装置及びその製造方法 |
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US (1) | US20100201932A1 (ja) |
JP (1) | JP5553513B2 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011036981A1 (en) * | 2009-09-24 | 2011-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2012073341A (ja) | 2010-09-28 | 2012-04-12 | Hitachi Displays Ltd | 液晶表示装置 |
KR20120089505A (ko) | 2010-12-10 | 2012-08-13 | 삼성전자주식회사 | 표시 장치 및 그 제조 방법 |
JP5372900B2 (ja) | 2010-12-15 | 2013-12-18 | 株式会社ジャパンディスプレイ | 液晶表示装置 |
JP2013080185A (ja) | 2011-10-05 | 2013-05-02 | Japan Display East Co Ltd | 液晶表示装置 |
JP5899237B2 (ja) * | 2011-11-18 | 2016-04-06 | シャープ株式会社 | 半導体装置、表示装置、ならびに半導体装置の製造方法 |
US8883531B2 (en) * | 2012-08-28 | 2014-11-11 | Lg Display Co., Ltd. | Organic light emitting diode display device and method of manufacturing the same |
CN102937765B (zh) * | 2012-10-22 | 2015-02-04 | 京东方科技集团股份有限公司 | 像素单元、阵列基板、液晶显示面板、装置及驱动方法 |
JP6123413B2 (ja) * | 2013-03-27 | 2017-05-10 | 凸版印刷株式会社 | 薄膜トランジスタアレイおよび画像表示装置 |
CN103474396B (zh) * | 2013-09-24 | 2015-09-02 | 深圳市华星光电技术有限公司 | Tft-lcd阵列基板的制造方法 |
TWI526761B (zh) * | 2014-08-20 | 2016-03-21 | 友達光電股份有限公司 | 液晶顯示面板 |
WO2019064342A1 (ja) * | 2017-09-26 | 2019-04-04 | シャープ株式会社 | 表示デバイス、表示デバイスの製造方法、表示デバイスの製造装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH07301821A (ja) * | 1994-05-09 | 1995-11-14 | Matsushita Electric Ind Co Ltd | 空間光変調素子及びその製造方法 |
US5834327A (en) * | 1995-03-18 | 1998-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing display device |
JPH0992838A (ja) * | 1995-09-26 | 1997-04-04 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタおよびその製造方法 |
JP3332773B2 (ja) * | 1996-03-15 | 2002-10-07 | シャープ株式会社 | アクティブマトリクス基板およびアクティブマトリクス基板の製造方法 |
JP4036498B2 (ja) * | 1997-03-21 | 2008-01-23 | 松下電器産業株式会社 | アクティブマトリクス型液晶表示装置 |
JP3847419B2 (ja) * | 1997-07-02 | 2006-11-22 | 三菱電機株式会社 | 液晶表示装置 |
JP3920417B2 (ja) * | 1997-08-21 | 2007-05-30 | シチズン時計株式会社 | 液晶表示装置の製造方法 |
JP3687452B2 (ja) * | 1999-12-27 | 2005-08-24 | 株式会社日立製作所 | 液晶表示装置 |
JP3952672B2 (ja) * | 2000-08-03 | 2007-08-01 | 株式会社日立製作所 | 液晶表示装置 |
JP3831868B2 (ja) * | 2001-08-13 | 2006-10-11 | 大林精工株式会社 | アクティブマトリックス表示装置とその製造方法 |
JP2003228081A (ja) * | 2002-01-31 | 2003-08-15 | Nec Corp | 液晶表示装置及びその製造方法 |
EP2479604B1 (en) * | 2005-12-05 | 2015-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
JP2008268841A (ja) * | 2007-03-28 | 2008-11-06 | Epson Imaging Devices Corp | 液晶装置、液晶装置の製造方法および電子機器 |
JP4867807B2 (ja) * | 2007-06-18 | 2012-02-01 | エプソンイメージングデバイス株式会社 | 電気光学装置及び電子機器 |
-
2009
- 2009-02-09 JP JP2009027309A patent/JP5553513B2/ja active Active
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2010
- 2010-02-05 US US12/700,768 patent/US20100201932A1/en not_active Abandoned
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JP2010181785A (ja) | 2010-08-19 |
US20100201932A1 (en) | 2010-08-12 |
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