JP5475286B2 - 寄生電流経路を閉塞するために交互の高温層および低温層を用いる超格子の製造方法 - Google Patents
寄生電流経路を閉塞するために交互の高温層および低温層を用いる超格子の製造方法 Download PDFInfo
- Publication number
- JP5475286B2 JP5475286B2 JP2008531313A JP2008531313A JP5475286B2 JP 5475286 B2 JP5475286 B2 JP 5475286B2 JP 2008531313 A JP2008531313 A JP 2008531313A JP 2008531313 A JP2008531313 A JP 2008531313A JP 5475286 B2 JP5475286 B2 JP 5475286B2
- Authority
- JP
- Japan
- Prior art keywords
- growth
- temperature
- cycle
- low
- periods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 39
- 230000003071 parasitic effect Effects 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 6
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
- H01L21/02507—Alternating layers, e.g. superlattice
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
- C30B23/063—Heating of the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
12 基板
14 サイクル
16 第1期間
18 第2期間
20 曲線
22 曲線
24 III族窒化物転位層
26 III族窒化物バッファ層
28 III族窒化物能動層
Т1 高成長温度
Т2 低成長温度
ТX 最後の高成長温度
ТY 最後の低成長温度
Claims (16)
- 基板への寄生電流経路を閉塞するために、交互の高温層および低温層を用いた半導体素子を製造する方法であって、
基板を用意する工程と、
窒化アルミニウム(AlN)を備えるIII族窒化物本体を、前記基板の主面上に、最終厚さまで複数の成長期間を含む全成長期間にわたって成長させる工程において、成長温度を前記全成長期間にわたって変化させ、前記複数の成長期間の長さを変化させる工程とを含み、
前記複数の成長期間は、複数の高温成長の期間と、複数の低温成長の期間とを含み、
前記成長温度をサイクルで変化させ、各サイクルは、前記複数の高温成長の期間の1つと
、その後に続く前記複数の低温成長の期間の1つとを含む方法。 - 前記成長温度を、前記全成長期間にわたって、低温度から高温度へ変化させる、請求項1に記載の方法。
- 前記成長温度を、前記全成長期間にわたって、高温度から低温度へ変化させる、請求項1に記載の方法。
- 各サイクルの低温度を変化させる、請求項1に記載の方法。
- 各サイクルの高温度を変化させる、請求項1に記載の方法。
- 各サイクルの低温度および高温度を変化させる、請求項1に記載の方法。
- 各サイクルの高温度が同じである、請求項1に記載の方法。
- 各サイクルの低温度が同じである、請求項1に記載の方法。
- 各サイクルの低温度が同じであり、かつ各サイクルの高温度が同じである、請求項1に記載の方法。
- 前記複数の高温成長の期間の1つと、前記複数の低温成長の期間の1つとで、期間の長さを等しくさせる、請求項1に記載の方法。
- 前記複数の高温成長の期間の1つと、前記複数の低温成長の期間の1つとで、期間の長さを異ならせる、請求項1に記載の方法。
- 前記成長温度を、連続的に変化させる、請求項1に記載の方法。
- 前記成長温度を、不連続の段階で変化させる、請求項1に記載の方法。
- 高成長温度および低成長温度を、各成長サイクルごとに集束させる、請求項1に記載の方法。
- 低成長温度で開始し、その後に変化させる、請求項1に記載の方法。
- 前記III族窒化物本体の合金組成を、前記成長工程中に変化させる、請求項1に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US71710205P | 2005-09-14 | 2005-09-14 | |
US60/717,102 | 2005-09-14 | ||
US11/531,508 | 2006-09-13 | ||
US11/531,508 US9157169B2 (en) | 2005-09-14 | 2006-09-13 | Process for manufacture of super lattice using alternating high and low temperature layers to block parasitic current path |
PCT/US2006/035800 WO2007033312A2 (en) | 2005-09-14 | 2006-09-14 | Process for manufacture of super lattice using alternating high and low temperature layers to block parasitic current path |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009509341A JP2009509341A (ja) | 2009-03-05 |
JP5475286B2 true JP5475286B2 (ja) | 2014-04-16 |
Family
ID=37853783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008531313A Expired - Fee Related JP5475286B2 (ja) | 2005-09-14 | 2006-09-14 | 寄生電流経路を閉塞するために交互の高温層および低温層を用いる超格子の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US9157169B2 (ja) |
JP (1) | JP5475286B2 (ja) |
KR (1) | KR101073644B1 (ja) |
DE (1) | DE112006002430B4 (ja) |
WO (1) | WO2007033312A2 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9157169B2 (en) * | 2005-09-14 | 2015-10-13 | International Rectifier Corporation | Process for manufacture of super lattice using alternating high and low temperature layers to block parasitic current path |
JP5367434B2 (ja) * | 2009-03-31 | 2013-12-11 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
US8957454B2 (en) | 2011-03-03 | 2015-02-17 | International Rectifier Corporation | III-Nitride semiconductor structures with strain absorbing interlayer transition modules |
US8546849B2 (en) | 2011-05-04 | 2013-10-01 | International Rectifier Corporation | High voltage cascoded III-nitride rectifier package utilizing clips on package surface |
US9281388B2 (en) | 2011-07-15 | 2016-03-08 | Infineon Technologies Americas Corp. | Composite semiconductor device with a SOI substrate having an integrated diode |
US8796738B2 (en) | 2011-09-21 | 2014-08-05 | International Rectifier Corporation | Group III-V device structure having a selectively reduced impurity concentration |
JP2015053328A (ja) * | 2013-09-05 | 2015-03-19 | 富士通株式会社 | 半導体装置 |
JP2015070064A (ja) * | 2013-09-27 | 2015-04-13 | 富士通株式会社 | 半導体装置及び半導体装置の製造方法 |
US9673286B2 (en) | 2013-12-02 | 2017-06-06 | Infineon Technologies Americas Corp. | Group III-V transistor with semiconductor field plate |
US9343562B2 (en) | 2013-12-06 | 2016-05-17 | Infineon Technologies Americas Corp. | Dual-gated group III-V merged transistor |
US10636899B2 (en) | 2016-11-15 | 2020-04-28 | Infineon Technologies Austria Ag | High electron mobility transistor with graded back-barrier region |
US10720520B2 (en) * | 2017-06-21 | 2020-07-21 | Infineon Technologies Austria Ag | Method of controlling wafer bow in a type III-V semiconductor device |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3301371B2 (ja) | 1997-05-27 | 2002-07-15 | 信越半導体株式会社 | 化合物半導体エピタキシャルウェーハの製造方法 |
JPH11298039A (ja) | 1998-03-20 | 1999-10-29 | Ind Technol Res Inst | GaN層および緩衝層の成長法およびその構造 |
JP2001160627A (ja) | 1999-11-30 | 2001-06-12 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体発光素子 |
US6596079B1 (en) | 2000-03-13 | 2003-07-22 | Advanced Technology Materials, Inc. | III-V nitride substrate boule and method of making and using the same |
US7473316B1 (en) | 2000-04-12 | 2009-01-06 | Aixtron Ag | Method of growing nitrogenous semiconductor crystal materials |
CN1322006A (zh) | 2000-04-30 | 2001-11-14 | 赵汝杰 | 一种非结晶与多晶结构的氮化镓系化合物半导体的成长方法 |
JP2002075871A (ja) | 2000-08-24 | 2002-03-15 | Matsushita Electric Ind Co Ltd | 半導体基板の製造方法 |
JP2002069645A (ja) | 2000-09-01 | 2002-03-08 | Sony Corp | 薄膜および薄膜製造方法 |
US6673149B1 (en) | 2000-09-06 | 2004-01-06 | Matsushita Electric Industrial Co., Ltd | Production of low defect, crack-free epitaxial films on a thermally and/or lattice mismatched substrate |
JP3453558B2 (ja) * | 2000-12-25 | 2003-10-06 | 松下電器産業株式会社 | 窒化物半導体素子 |
JP3956637B2 (ja) | 2001-04-12 | 2007-08-08 | ソニー株式会社 | 窒化物半導体の結晶成長方法及び半導体素子の形成方法 |
CN101834245B (zh) | 2001-06-15 | 2013-05-22 | 克里公司 | 在SiC衬底上形成的GaN基LED |
US6977953B2 (en) * | 2001-07-27 | 2005-12-20 | Sanyo Electric Co., Ltd. | Nitride-based semiconductor light-emitting device and method of fabricating the same |
US6488771B1 (en) | 2001-09-25 | 2002-12-03 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method for growing low-defect single crystal heteroepitaxial films |
JP2003110137A (ja) | 2001-09-28 | 2003-04-11 | Nagoya Kogyo Univ | 窒化物系化合物半導体発光素子の製造方法 |
JP3569807B2 (ja) | 2002-01-21 | 2004-09-29 | 松下電器産業株式会社 | 窒化物半導体素子の製造方法 |
GB2392170A (en) * | 2002-08-23 | 2004-02-25 | Sharp Kk | MBE growth of a semiconductor layer structure |
US7115896B2 (en) * | 2002-12-04 | 2006-10-03 | Emcore Corporation | Semiconductor structures for gallium nitride-based devices |
TWI230978B (en) * | 2003-01-17 | 2005-04-11 | Sanken Electric Co Ltd | Semiconductor device and the manufacturing method thereof |
US7192849B2 (en) | 2003-05-07 | 2007-03-20 | Sensor Electronic Technology, Inc. | Methods of growing nitride-based film using varying pulses |
JP4423011B2 (ja) * | 2003-06-23 | 2010-03-03 | 日本碍子株式会社 | 高比抵抗GaN層を含む窒化物膜の製造方法 |
JP4727169B2 (ja) * | 2003-08-04 | 2011-07-20 | 日本碍子株式会社 | エピタキシャル基板、当該エピタキシャル基板の製造方法、当該エピタキシャル基板の反り抑制方法、および当該エピタキシャル基板を用いた半導体積層構造 |
EP1668709B1 (en) | 2003-10-02 | 2019-05-01 | Toyoda Gosei Co., Ltd. | Methods for producing a nitride semiconductor product, a light-emitting device, a light-emitting diode, a laser device and a lamp using the nitride semiconductor product |
US9157169B2 (en) * | 2005-09-14 | 2015-10-13 | International Rectifier Corporation | Process for manufacture of super lattice using alternating high and low temperature layers to block parasitic current path |
-
2006
- 2006-09-13 US US11/531,508 patent/US9157169B2/en not_active Expired - Fee Related
- 2006-09-14 JP JP2008531313A patent/JP5475286B2/ja not_active Expired - Fee Related
- 2006-09-14 DE DE112006002430T patent/DE112006002430B4/de not_active Expired - Fee Related
- 2006-09-14 WO PCT/US2006/035800 patent/WO2007033312A2/en active Application Filing
- 2006-09-14 KR KR1020087006408A patent/KR101073644B1/ko active IP Right Grant
-
2015
- 2015-10-08 US US14/878,136 patent/US9911600B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2007033312A3 (en) | 2007-10-04 |
KR20080065586A (ko) | 2008-07-14 |
US9157169B2 (en) | 2015-10-13 |
WO2007033312A2 (en) | 2007-03-22 |
KR101073644B1 (ko) | 2011-10-14 |
DE112006002430B4 (de) | 2013-08-22 |
US20070056506A1 (en) | 2007-03-15 |
US20160027643A1 (en) | 2016-01-28 |
US9911600B2 (en) | 2018-03-06 |
JP2009509341A (ja) | 2009-03-05 |
DE112006002430T5 (de) | 2008-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5475286B2 (ja) | 寄生電流経路を閉塞するために交互の高温層および低温層を用いる超格子の製造方法 | |
JP5621006B2 (ja) | 金属及びシリコンの交互層を含むコンタクト構造体並びに関連デバイスの形成方法 | |
JP5731367B2 (ja) | 応力変調iii−v族半導体装置および関連方法 | |
KR101321654B1 (ko) | Ⅲ족 질화물 반도체 성장용 기판, ⅲ족 질화물 반도체 에피택셜 기판, ⅲ족 질화물 반도체 소자 및 ⅲ족 질화물 반도체 자립 기판, 및 이들의 제조 방법 | |
US8866190B2 (en) | Methods of combining silicon and III-nitride material on a single wafer | |
US9233844B2 (en) | Graded aluminum—gallium—nitride and superlattice buffer layer for III-V nitride layer on silicon substrate | |
JP2010232377A (ja) | 半導体素子 | |
JP6863423B2 (ja) | 電子デバイス用基板およびその製造方法 | |
US9117671B2 (en) | Fabrication of III-nitride semiconductor device and related structures | |
JP6141627B2 (ja) | シリコン基板上にGaN層を形成する方法およびGaN基板 | |
JP2006295126A (ja) | Iii族窒化物半導体素子およびエピタキシャル基板 | |
JP2012028725A (ja) | エンハンスメントモードの高電子移動度トランジスタ及びその製造方法 | |
WO2021005872A1 (ja) | 電子デバイス用基板およびその製造方法 | |
JP7068676B2 (ja) | Iiia-n族デバイスのための非エッチ気体冷却エピタキシャルスタック | |
JP7052503B2 (ja) | トランジスタの製造方法 | |
CN109103099A (zh) | 控制iii-v型半导体器件中的晶片弯曲度的方法 | |
JP5303948B2 (ja) | オーミック電極形成方法、および電界効果トランジスタの製造方法 | |
JP2008159621A (ja) | 半導体電子デバイス | |
JP2007036210A (ja) | Iii族窒化物半導体デバイスの製造 | |
JP6653750B2 (ja) | 半導体基体及び半導体装置 | |
JP5546133B2 (ja) | 半導体電子デバイス | |
TWI330404B (en) | Process for manufacture of super lattice using alternating high and low temperature layers to block parasitic current path | |
JP2010016105A (ja) | Si基板上のGaN系デバイスの熱処理方法 | |
TW511143B (en) | Method for forming GaN/AlN superlattice structure | |
JP2014146726A (ja) | ヘテロ接合電界効果型トランジスタおよびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20091204 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20101015 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110128 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110422 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110426 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110610 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110617 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110817 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110824 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110922 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111018 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20111031 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20111108 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120217 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120224 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120316 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120326 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120417 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20120515 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120918 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20120925 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20121122 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130308 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130313 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130329 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130404 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130731 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130805 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131022 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131122 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140206 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5475286 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |