JP2010232377A - 半導体素子 - Google Patents
半導体素子 Download PDFInfo
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- JP2010232377A JP2010232377A JP2009077541A JP2009077541A JP2010232377A JP 2010232377 A JP2010232377 A JP 2010232377A JP 2009077541 A JP2009077541 A JP 2009077541A JP 2009077541 A JP2009077541 A JP 2009077541A JP 2010232377 A JP2010232377 A JP 2010232377A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 239000000203 mixture Substances 0.000 claims abstract description 74
- 239000000758 substrate Substances 0.000 claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 7
- 230000005669 field effect Effects 0.000 claims description 5
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 88
- 229910002601 GaN Inorganic materials 0.000 description 44
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 43
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 12
- 230000000694 effects Effects 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 5
- 238000010030 laminating Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Abstract
【解決手段】本半導体素子は、基板10に形成された第1のAlXGa1−XN層14a及び第1のAlXGa1−XN層14aよりAl組成Xの大きい第2のAlXGa1−XN層14bが交互に積層して形成された超格子バッファ層14を有する。そして、第1のAlXGa1−XN層14a及び第2のAlXGa1−XN層14bのAl組成Xは共に0.3より大きく、かつ第1のAlXGa1−XN層14a及び第2のAlXGa1−XN層14bのAl組成Xの差は0より大きく0.6より小さい。この構成によれば、バッファ層を介したリーク電流を低減することができる。
【選択図】図1
Description
(各層の厚み)
AlN層12:100nm
L−AlGaN層14a:25nm
H−AlGaN層14b:25nm
超格子バッファ層14:500nm(L−AlGaN層14a及びH−AlGaN層14bをそれぞれ10層ずつ含む)
GaN層16:500nm
AlGaN層18:30nm
(サンプルAのAl組成)
L−AlGaN層14a:0.5
H−AlGaN層14b:0.65
(サンプルBのAl組成)
L−AlGaN層14a:0.1
H−AlGaN層14b:0.75
12 バッファ層
14 超格子バッファ層
14a L−AlGaN層
14b H−AlGaN層
16 GaN層
18 AlGaN層
100 半導体素子
Claims (6)
- 基板に形成された第1のAlXGa1−XN層及び前記第1のAlXGa1−XN層よりAl組成の大きい第2のAlXGa1−XN層が交互に積層して形成された超格子バッファ層を有し、
前記第1のAlXGa1−XN層及び前記第2のAlXGa1−XN層のAl組成Xは共に0.3より大きく、
かつ前記第1のAlXGa1−XN層及び前記第2のAlXGa1−XN層のAl組成Xの差は0より大きく0.6より小さいことを特徴とする半導体素子。 - 前記第1のAlXGa1−XN層及び前記第2のAlXGa1−XN層の厚みは、実質的に同じであることを特徴とする請求項1記載の半導体素子。
- 前記超格子バッファ層において交互に積層された前記第1のAlXGa1−XN層及び前記第2のAlXGa1−XN層の層数は、それぞれ10以下であることを特徴とする請求項1または2記載の半導体素子。
- 前記超格子バッファ層は、MOCVD法により形成されていることを特徴とする請求項1から3いずれか1項記載の半導体素子。
- 前記超格子バッファ層に設けられたGaN系半導体層に電界効果型トランジスタが設けられてなることを特徴とする請求項1から4いずれか1項記載の半導体素子。
- 前記基板は、シリコン基板、炭化シリコン基板、あるいはサファイア基板の何れかであることを特徴とする請求項1記載の半導体素子。
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JP2009077541A JP5634681B2 (ja) | 2009-03-26 | 2009-03-26 | 半導体素子 |
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