JP5419694B2 - 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 - Google Patents
歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 Download PDFInfo
- Publication number
- JP5419694B2 JP5419694B2 JP2009530503A JP2009530503A JP5419694B2 JP 5419694 B2 JP5419694 B2 JP 5419694B2 JP 2009530503 A JP2009530503 A JP 2009530503A JP 2009530503 A JP2009530503 A JP 2009530503A JP 5419694 B2 JP5419694 B2 JP 5419694B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- containing layer
- strained
- process gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000015572 biosynthetic process Effects 0.000 title claims description 8
- 229910052732 germanium Inorganic materials 0.000 title description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title description 3
- 238000000034 method Methods 0.000 claims description 132
- 239000000758 substrate Substances 0.000 claims description 99
- 238000012545 processing Methods 0.000 claims description 91
- 230000008569 process Effects 0.000 claims description 83
- 239000007789 gas Substances 0.000 claims description 69
- 230000005855 radiation Effects 0.000 claims description 48
- 230000003647 oxidation Effects 0.000 claims description 29
- 238000007254 oxidation reaction Methods 0.000 claims description 29
- 229910052760 oxygen Inorganic materials 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 18
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 230000001590 oxidative effect Effects 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 229910004542 HfN Inorganic materials 0.000 claims description 3
- 229910015345 MOn Inorganic materials 0.000 claims description 3
- 229910004166 TaN Inorganic materials 0.000 claims description 3
- 229910004200 TaSiN Inorganic materials 0.000 claims description 3
- 229910008482 TiSiN Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- 229910004129 HfSiO Inorganic materials 0.000 claims description 2
- 229910004541 SiN Inorganic materials 0.000 claims description 2
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 2
- 229910006501 ZrSiO Inorganic materials 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 26
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 11
- 150000003254 radicals Chemical class 0.000 description 10
- 239000011261 inert gas Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000007872 degassing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052914 metal silicate Inorganic materials 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910000078 germane Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28202—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a nitrogen-containing ambient, e.g. nitride deposition, growth, oxynitridation, NH3 nitridation, N2O oxidation, thermal nitridation, RTN, plasma nitridation, RPN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32105—Oxidation of silicon-containing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3211—Nitridation of silicon-containing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/518—Insulating materials associated therewith the insulating material containing nitrogen, e.g. nitride, oxynitride, nitrogen-doped material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/495—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a simple metal, e.g. W, Mo
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Formation Of Insulating Films (AREA)
- Electrodes Of Semiconductors (AREA)
Description
Claims (18)
- 半導体デバイスの作製方法であって、
当該方法は:
真空処理装置のプロセスチャンバ内に基板を供する手順であって、前記プロセスチャンバは真空を誘起するように圧力制御され、前記基板は該基板上に設けられた歪みGe含有層と、該歪みGe含有層上に設けられたSi含有層を有する基板提供手順;
前記基板を700℃未満の温度に維持する基板温度維持手順;
ノズルを介して前記プロセスチャンバへプロセスガスを導入するプロセスガス導入手順;
前記プロセスガスを紫外放射線に曝露して、前記プロセスガスを分解することによって、酸化を起こすラジカルを生成する手順であって、前記紫外放射線は、前記真空の外部に設けられたUV源によって、前記ノズルと前記基板との間の領域へ照射される、プロセスガス曝露手順;
下地である前記歪みGe含有層の酸化と歪み緩和を抑制しながら、前記酸化を起こすラジカルに前記Si含有層を曝露してSi含有誘電層を生成する曝露手順;
を有し、
前記紫外放射線への曝露中において前記真空処理装置内に実質的にイオンが生成されない、
方法。 - 前記Si含有層は、Si層、若しくはSiN層、又は上記2種類以上の層の混合物を有する、請求項1に記載の方法。
- 前記Si含有層の一部のみが、前記UV放射線に曝露され、かつ、
前記プロセスガスは、酸素含有ガス、窒素含有ガス、又は酸素と窒素を含有するガスを含む、
請求項1に記載の方法。 - 前記プロセスガスが、O2、H2O、N2、NH3、NO、NO2、若しくはN2O、又は上記2種類以上の混合物を有する、請求項3に記載の方法。
- 前記Si含有層の一部が、前記UV源と前記プロセスチャンバとの間に配置された前記紫外放射線に対して透明な窓を介して、前記紫外放射線に曝露される、請求項3に記載の方法。
- 前記紫外放射線が波長172nmで発生する、請求項3に記載の方法。
- 前記Si含有誘電層は、SiO2、SiN、若しくはSiON層、又は上記2種類以上の層の混合物を有する、請求項1に記載の方法。
- 前記Si含有層が低密度SiOx層を有し、かつ
前記の生成されたSi含有誘電層が、SiO2層、SiON層、又は上記層の混合物を有する、
請求項1に記載の方法。 - 前記Si含有層が0.3nmから2nmの厚さを有し、かつ
前記生成されたSi含有誘電層が0.3nmから2nmの厚さを有する、
請求項7に記載の方法。 - 前記Si含有層が0.5nmから1nmの厚さを有し、かつ
前記生成されたSi含有誘電層が0.5nmから1nmの厚さを有する、
請求項7に記載の方法。 - 前記曝露手順が:
前記Si含有層を、紫外放射線と、O2又はH2Oを有する第1プロセスガスに曝露する手順;及び
続いて、紫外放射線と、N2又はNH3を有する第2プロセスガスに曝露する手順;
を有する、
請求項1に記載の方法。 - 前記Si含有層の曝露手順が:
前記Si含有層を、前記紫外放射線と、N2又はNH3を有する第1プロセスガスに曝露する手順;及び
続いて、前記紫外放射線と、O2又はH2Oを有する第2プロセスガスに曝露する手順;
を有する、
請求項1に記載の方法。 - 前記基板提供手順が:
前記基板上に歪みGe含有層を堆積するGe含有層堆積手順;及び
前記歪みGe含有層上にSi含有層を形成するSi含有層形成手順;
を有し、
前記Ge含有層堆積手順及び/又は前記Si含有層形成手順は、前記真空処理装置内で行われる、
請求項1に記載の方法。 - さらに前記生成されたSi含有誘電層上にゲート電極層を形成する手順を有する方法であって、
前記ゲート電極層は、多結晶Si、金属、又は、W、WN、WSix、Al、Mo、Ta、TaN、TaSiN、HfN、HfSi、HfSiN、Ti、TiN、TiSiN、Mo、MoN、Re、Pt、若しくはRuを含む金属含有材料を有する、
請求項1に記載の方法。 - Ta2O5、TiO2、ZrO2、Al2O3、Y2O3、HfSiOx、HfO2、ZrSiOx、TaSiOx、SrOx、SrSiOx、LaOx、LaSiOx、YOx、若しくはYSiOx、又は上記の2種類以上の混合物を有するhigh-k誘電層を前記生成されたSi含有誘電層上に形成する手順;及び
W、WN、WSix、Al、Mo、Ta、TaN、TaSiN、HfN、HfSi、HfSiN、Ti、TiN、TiSiN、Mo、MoN、Re、Pt、若しくはRuを含むゲート電極層を前記high-k誘電層上に形成する手順;
をさらに有する、請求項1に記載の方法。 - 前記曝露手順が前記Si含有層の一部だけを酸化する手順を有する、請求項1に記載の方法。
- MOSFETの作製方法であって、
当該方法は:
内部で真空を誘起するように圧力制御される、真空処理装置のプロセスチャンバ内に基板を供する手順;
該基板上に歪みGe含有チャネル領域を堆積する手順;
該歪みGe含有チャネル領域上にSi層を形成する手順;
ノズルを介して前記プロセスチャンバへプロセスガスを導入するプロセスガス導入手順;
前記プロセスガスを紫外放射線に曝露して、前記プロセスガスを分解することによって、酸化を起こすラジカルを生成する手順であって、前記紫外放射線は、前記真空の外部に設けられたUV源によって、前記ノズルと前記基板との間の領域へ照射される、プロセスガス曝露手順;
下地である前記歪みGe含有層の酸化と歪み緩和を抑制しながら、前記酸素ラジカルに前記Si層を曝露してSiO2ゲート誘電層を生成する手順;
を有し、
前記紫外放射線への曝露中において前記真空処理装置内に実質的にイオンが生成されない、
方法。 - 前記紫外放射線への曝露中において、前記紫外放射線は、前記ノズルと前記基板との間に設けられたプロセスチャンバ窓を介して照射される、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/529,353 | 2006-09-29 | ||
US11/529,353 US8168548B2 (en) | 2006-09-29 | 2006-09-29 | UV-assisted dielectric formation for devices with strained germanium-containing layers |
PCT/US2007/076937 WO2008042528A2 (en) | 2006-09-29 | 2007-08-28 | Uv-assisted dielectric formation for devices with strained germanium-containing layers |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013116793A Division JP2013232653A (ja) | 2006-09-29 | 2013-06-03 | 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010505274A JP2010505274A (ja) | 2010-02-18 |
JP2010505274A5 JP2010505274A5 (ja) | 2010-09-30 |
JP5419694B2 true JP5419694B2 (ja) | 2014-02-19 |
Family
ID=39260244
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009530503A Expired - Fee Related JP5419694B2 (ja) | 2006-09-29 | 2007-08-28 | 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 |
JP2013116793A Pending JP2013232653A (ja) | 2006-09-29 | 2013-06-03 | 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013116793A Pending JP2013232653A (ja) | 2006-09-29 | 2013-06-03 | 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8168548B2 (ja) |
JP (2) | JP5419694B2 (ja) |
KR (1) | KR101307658B1 (ja) |
CN (1) | CN101523558B (ja) |
TW (1) | TWI357110B (ja) |
WO (1) | WO2008042528A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013232653A (ja) * | 2006-09-29 | 2013-11-14 | Tokyo Electron Ltd | 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7910468B1 (en) * | 2007-06-04 | 2011-03-22 | Arizona Board of Regents, A Body of the State of Arizona Acting for and on Behalf of Arizona State University | Methods and compositions for preparing Ge/Si semiconductor substrates |
CN102468303B (zh) * | 2010-11-10 | 2015-05-13 | 中国科学院微电子研究所 | 半导体存储单元、器件及其制备方法 |
KR101872786B1 (ko) * | 2012-06-22 | 2018-06-29 | 엘지전자 주식회사 | 태양 전지의 불순물층 형성 방법 및 태양 전지의 제조 방법 |
US9966280B2 (en) * | 2012-10-05 | 2018-05-08 | Tokyo Electron Limited | Process gas generation for cleaning of substrates |
US10249509B2 (en) | 2012-11-09 | 2019-04-02 | Tokyo Electron Limited | Substrate cleaning method and system using atmospheric pressure atomic oxygen |
US9607829B2 (en) * | 2014-02-11 | 2017-03-28 | Tokyo Electron Limited | Method of surface functionalization for high-K deposition |
US20150340228A1 (en) * | 2014-05-14 | 2015-11-26 | Tokyo Electron Limited | Germanium-containing semiconductor device and method of forming |
US9384964B1 (en) | 2014-08-01 | 2016-07-05 | Samsung Electronics Co., Ltd. | Method of manufacturing semiconductor device |
US9484449B2 (en) * | 2014-08-25 | 2016-11-01 | GlobalFoundries, Inc. | Integrated circuits with diffusion barrier layers and processes for preparing integrated circuits including diffusion barrier layers |
US10143993B2 (en) | 2015-08-18 | 2018-12-04 | Lam Research Corporation | Radical generator and method for generating ammonia radicals |
US10121655B2 (en) | 2015-11-20 | 2018-11-06 | Applied Materials, Inc. | Lateral plasma/radical source |
TWI753297B (zh) * | 2018-09-03 | 2022-01-21 | 美商應用材料股份有限公司 | 形成含矽層的方法 |
TW202129061A (zh) * | 2019-10-02 | 2021-08-01 | 美商應用材料股份有限公司 | 環繞式閘極輸入/輸出工程 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06244448A (ja) * | 1993-02-18 | 1994-09-02 | Sanyo Electric Co Ltd | 半導体光センサ及び酸化膜形成方法 |
JPH07268612A (ja) * | 1994-03-29 | 1995-10-17 | Sumitomo Electric Ind Ltd | 酸化物薄膜の作製方法 |
GB9408894D0 (en) | 1994-05-05 | 1994-06-22 | Secr Defence | Electronic circuit |
JPH0855848A (ja) * | 1994-08-11 | 1996-02-27 | Semiconductor Energy Lab Co Ltd | 酸化珪素膜の加熱処理方法 |
JP3484480B2 (ja) * | 1995-11-06 | 2004-01-06 | 富士通株式会社 | 半導体装置の製造方法 |
JPH11111713A (ja) * | 1997-10-01 | 1999-04-23 | Japan Storage Battery Co Ltd | 絶縁膜改質方法及び半導体装置の製造方法 |
US6124620A (en) * | 1998-05-14 | 2000-09-26 | Advanced Micro Devices, Inc. | Incorporating barrier atoms into a gate dielectric using gas cluster ion beam implantation |
JP2000077658A (ja) * | 1998-08-28 | 2000-03-14 | Toshiba Corp | 半導体装置の製造方法 |
JP2000243854A (ja) * | 1999-02-22 | 2000-09-08 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2001015504A (ja) * | 1999-06-30 | 2001-01-19 | Toshiba Corp | 半導体装置の製造方法 |
JP2003152177A (ja) * | 2001-11-19 | 2003-05-23 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
US6706643B2 (en) | 2002-01-08 | 2004-03-16 | Mattson Technology, Inc. | UV-enhanced oxy-nitridation of semiconductor substrates |
US20040164373A1 (en) * | 2003-02-25 | 2004-08-26 | Koester Steven John | Shallow trench isolation structure for strained Si on SiGe |
EP1602125B1 (en) * | 2003-03-07 | 2019-06-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Shallow trench isolation process |
US6974779B2 (en) * | 2003-09-16 | 2005-12-13 | Tokyo Electron Limited | Interfacial oxidation process for high-k gate dielectric process integration |
US7166528B2 (en) | 2003-10-10 | 2007-01-23 | Applied Materials, Inc. | Methods of selective deposition of heavily doped epitaxial SiGe |
WO2005059988A1 (ja) * | 2003-12-18 | 2005-06-30 | Tokyo Electron Limited | 成膜方法 |
US7244958B2 (en) * | 2004-06-24 | 2007-07-17 | International Business Machines Corporation | Integration of strained Ge into advanced CMOS technology |
JP4116990B2 (ja) * | 2004-09-28 | 2008-07-09 | 富士通株式会社 | 電界効果型トランジスタおよびその製造方法 |
JP4604637B2 (ja) * | 2004-10-07 | 2011-01-05 | ソニー株式会社 | 半導体装置および半導体装置の製造方法 |
US7498270B2 (en) * | 2005-09-30 | 2009-03-03 | Tokyo Electron Limited | Method of forming a silicon oxynitride film with tensile stress |
US8168548B2 (en) * | 2006-09-29 | 2012-05-01 | Tokyo Electron Limited | UV-assisted dielectric formation for devices with strained germanium-containing layers |
-
2006
- 2006-09-29 US US11/529,353 patent/US8168548B2/en not_active Expired - Fee Related
-
2007
- 2007-08-28 KR KR1020097008624A patent/KR101307658B1/ko not_active IP Right Cessation
- 2007-08-28 WO PCT/US2007/076937 patent/WO2008042528A2/en active Application Filing
- 2007-08-28 JP JP2009530503A patent/JP5419694B2/ja not_active Expired - Fee Related
- 2007-08-28 CN CN2007800364311A patent/CN101523558B/zh not_active Expired - Fee Related
- 2007-09-17 TW TW096134674A patent/TWI357110B/zh not_active IP Right Cessation
-
2013
- 2013-06-03 JP JP2013116793A patent/JP2013232653A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013232653A (ja) * | 2006-09-29 | 2013-11-14 | Tokyo Electron Ltd | 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 |
Also Published As
Publication number | Publication date |
---|---|
CN101523558A (zh) | 2009-09-02 |
KR101307658B1 (ko) | 2013-09-12 |
KR20090077802A (ko) | 2009-07-15 |
JP2010505274A (ja) | 2010-02-18 |
JP2013232653A (ja) | 2013-11-14 |
US20080078987A1 (en) | 2008-04-03 |
WO2008042528A3 (en) | 2008-07-10 |
TWI357110B (en) | 2012-01-21 |
WO2008042528A2 (en) | 2008-04-10 |
US8168548B2 (en) | 2012-05-01 |
TW200816315A (en) | 2008-04-01 |
CN101523558B (zh) | 2012-01-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5419694B2 (ja) | 歪みゲルマニウム含有層を有するデバイスのためのuv支援による誘電層形成 | |
JP5006938B2 (ja) | 表面処理装置およびその基板処理方法 | |
JP5219815B2 (ja) | 引張応力を有するシリコン酸窒化膜を形成する方法 | |
KR101390977B1 (ko) | 게이트 산화물 누설 전류가 감소된 대체 금속 게이트 트랜지스터 | |
US20080014759A1 (en) | Method for fabricating a gate dielectric layer utilized in a gate structure | |
JP2007516599A (ja) | ゲルマニウム上の堆積前の表面調製 | |
WO2008016769A1 (en) | Method for fabricating an integrated gate dielectric layer for field effect transistors | |
JP2010505274A5 (ja) | ||
WO2019246574A1 (en) | Method for forming a nanowire device | |
JP2008131050A (ja) | 半導体素子への金属含有膜の集積方法 | |
US8580034B2 (en) | Low-temperature dielectric formation for devices with strained germanium-containing channels | |
JP4503095B2 (ja) | 半導体素子の製造方法 | |
TW202247469A (zh) | 以偶極膜工程化的mosfet閘極 | |
US20240038859A1 (en) | Metal cap for contact resistance reduction | |
JP2006128547A (ja) | 半導体装置及びその製造方法 | |
JP2007123662A (ja) | 半導体装置の製造方法および半導体装置 | |
KR100928023B1 (ko) | 반도체 소자 및 그 제조방법 | |
US7160818B2 (en) | Semiconductor device and method for fabricating same | |
US20150179743A1 (en) | Graphene as a Ge Surface Passivation Layer to Control Metal-Semiconductor Junction Resistivity | |
US11189479B2 (en) | Diffusion barrier layer | |
US7358198B2 (en) | Semiconductor device and method for fabricating same | |
JPWO2004093179A1 (ja) | 高誘電体膜の形成方法 | |
JP2024520404A (ja) | アモルファスシリコンベース取り除きおよびシールeot | |
JP2006066713A (ja) | 半導体装置の製造方法 | |
JP2005328072A (ja) | 半導体装置およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100813 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100813 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121011 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121106 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130104 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130305 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130919 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131119 |
|
LAPS | Cancellation because of no payment of annual fees |