JP5367562B2 - 太陽電池の製造方法および構造 - Google Patents
太陽電池の製造方法および構造 Download PDFInfo
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- JP5367562B2 JP5367562B2 JP2009500632A JP2009500632A JP5367562B2 JP 5367562 B2 JP5367562 B2 JP 5367562B2 JP 2009500632 A JP2009500632 A JP 2009500632A JP 2009500632 A JP2009500632 A JP 2009500632A JP 5367562 B2 JP5367562 B2 JP 5367562B2
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
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- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
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Description
本特許出願は、下記の米国仮特許出願、つまり2006年3月17日の仮特許出願第60/783,586号、2006年8月15日の仮特許出願第60/822,473号、2006年8月23日の仮特許出願第60/823,354および2006年8月23日の仮特許出願60/823,356号に基づく優先権を主張するものであり、これらの米国仮特許出願の全ては、全ての目的において参照されて、本特許出願に包含される。
(1)半導体基板を形成する。半導体基板は、表面部、劈開部および前記表面部と前記劈開部の間にあって、除去される第1の材料層を有する。
(2)光学透明性基板に半導体基板を配置する。
(3)光学透明性基板の第1の表面部に半導体基板の表面部を結合する。
(4)劈開部の一部で、制御された劈開動作を開始する。
(5)半導体基板から第1の材料層を除去するため、半導体基板を劈開する。一方、劈開表面部の形成を促すために、前記表面部は、前記第1の表面部に結合されたままとなっている。
(6)半導体材料の生成層を形成するために、(例えば、シラン種を用いて)劈開表面部の上を覆って、第2の半導体材料層を形成する。半導体材料の生成層は、1または複数の光電子部を有する。
(7)第2の半導体材料層の上を覆って、カバーガラス材料を取り付ける。
(8)必要に応じて、その他のステップを実行する。
(1)シリコン、ゲルマニウム、シリコン−ゲルマニウム合金、ヒ化ガリウム、あらゆるIII/V族化合物およびその他の材料などの半導体基板を形成する(ステップ2701)。
(2)第1のシリコン材料層を定めるために(ステップ2705)、劈開平面(複数の粒子、蒸着物質、またはこれらの任意の組み合わせなどを含んでいる)を形成する(ステップ2703)。
(3)第1の材料層をシリコン支持部材の上を覆う脱着可能な材料に転写する(ステップ2707)。
(4)前記脱着可能な材料の上を覆う全材料層を形成するために、前記第1の材料層の上を覆う第2の材料層を形成する(ステップ2709)。
(5)全材料層の第1の部分(例えば、第1の端面)に、第1の光電子セル表面を形成する(ステップ2711)。
(6)前記第1の光電子セル表面の上を覆う表面部を形成する。
(7)キャリア部材を第1の光電子セル表面の表面部に取り付ける(ステップ2713)。
(7)全材料層の第2の部分を露出するため、脱着可能な材料を含むシリコン支持部材を除去する(ステップ2715)。
(8)全材料層の第2の部分で、第2の光電子セル表面を形成する(ステップ2717)。
(9)他のプロセスを実行する(ステップ2719)。
(10)ソーラーモジュールを形成する(ステップ2721)。
(11)停止。
(1)表面部、底部、および材料の所定の層を有する半導体基板を形成する(ステップ3901)。前記半導体基板は、シリコン、ゲルマニウム、シリコン−ゲルマニウム合金、ヒ化ガリウム、あらゆるIII/V材料などであってもよい。
(2)第1のシリコン材料層を定めるために(ステップ3905)、劈開平面を形成する(複数の粒子、蒸着物質、またはこれらのあらゆる組み合わせなどを含む(ステップ3903)。
(3)第1の材料層をシリコン支持部材の上を覆う脱着可能な材料に転写する(ステップ3907)。
(4)前記脱着可能な材料の上を覆う全材料層を形成するために、前記第1の材料層の上を覆う第2の材料層を形成する(ステップ3909)。
(5)前記全材料層を除去する(ステップ3911)。
(6)前記全材料層の一部に光電子セル表面を形成する(ステップ3913)。
(7)光電子セルを含む前記全材料層をキャリア部材に付着する(ステップ3915)。(8)他のプロセスを実行する(ステップ3917)。
(9)ソーラーモジュールを形成する(ステップ3919)。
(10)終了。
(1)シリコン、ゲルマニウム、シリコン−ゲルマニウム合金、ヒ化ガリウム、あらゆるIII/V材料などの半導体基板を形成する(ステップ5101)。
(2)第1のシリコン材料層を定めるために(ステップ5105)、劈開平面を形成する(ステップ5103)。
(3)第1の材料層をキャリア部材基板に転写する(ステップ5107)。
(4)全材料厚さを形成するために、第1の半導体材料層の上を覆う第2の材料層を形成する(ステップ5109)。
(5)前記全材料層の一面に第1の光電子セル表面を少なくとも1つ形成する(ステップ5111)。
(6)望ましいように、他のプロセスを実行する(ステップ5113)。
(7)終了(ステップ5115)。
Claims (37)
- 表面部、劈開部および、前記表面部と前記劈開部との間にあって、除去される第1の材料層を有する半導体基板を形成する工程と、
前記半導体基板の前記表面部を、第1の表面部および第2の表面部を有する光学透明性基板の前記第1の表面部に結合する工程と、
前記表面部を前記第1の表面部に結合したままで、前記半導体基板を劈開して、前記第1の材料層を前記半導体基板から除去して、劈開表面部を形成する工程と、さらに、
前記劈開表面部の上をアモルファスシリコンで形成された第2の半導体材料層で覆う工程と、
前記光学透明性基板の前記第2の表面部に、光線を前記光学透明性基板に対して斜めに入射させる光学素子を結合する工程と、からなる
ことを特徴とする光電子セルの製造方法。 - さらに、アモルファスシリコン層の結晶化を含む
ことを特徴とする請求項1に記載の光電子セルの製造方法。 - 第1の表面および第2の表面からなる光学透明性基板と、
前記光学透明性基板の第1の表面の上を覆う第1の表面部および第2の表面部を有する第1の材料層と、
前記材料層の第1の表面部と光学透明性材料の第1の表面との間に担持される光結合材料と、
半導体材料の生成層を形成するために、前記第2の表面部の上を覆うアモルファスシリコンからなる第2の半導体材料層と、
前記光学透明性基板の前記第2の表面部を覆って、光線を前記光学透明性基板に対して斜めに入射させる光学素子と、を備える
ことを特徴とする光電子セル装置。 - 前記光結合材料は、酸化スズ、インジウム−スズ酸化物、酸化亜鉛または二酸化チタンを含んでなる
ことを特徴とする請求項3に記載の光電子セル装置。 - 前記第1の半導体材料層は、単結晶シリコン材料を含んでなる
ことを特徴とする請求項3に記載の光電子セル装置。 - 前記光学透明性材料は、ガラス基板、石英基板またはプラスチック基板を含んでなる
ことを特徴とする請求項3に記載の光電子セル装置。 - さらに、前記第2の半導体材料層の上を覆う裏面カバーを含んでなる
ことを特徴とする請求項3に記載の光電子セル装置。 - 劈開部と、表面部と、前記劈開部と前記表面部との間で定められる第1のシリコン材料層と、を備えるドナー基板を形成する工程と、
前記劈開部の周辺の内側で前記ドナー基板の一部を分離するため、および前記第1のシリコン材料層の上を覆う劈開表面部の形成を促すように処理基板の処理基板表面に前記表面部を結合するために、前記第1のシリコン材料層を前記処理基板の処理基板表面に転写する工程と、
反応室にシラン種を含むガスを供給する工程と、
グロー放電CVD法、プラズマCVD法、光CVD法または熱CVD法を含む1または複数のプロセスから選ばれるプロセスを用いて、前記反応室内部にある前記処理基板の前記処理基板表面部にシリコン蒸着状態を促すように、前記シラン種を用いる工程と、
前記第1のシリコン材料の上を覆う前記シラン種を用いて、アモルファスシリコンからなる第2の材料層を形成する工程と、
前記ドナー基板を、第1の表面部および第2の表面部を有する光学透明性基板の前記第1の表面部に結合する工程と、
前記光学透明性基板の前記第2の表面部に、光線を前記光学透明性基板に対して斜めに入射させる光学素子を結合する工程と、を有する
ことを特徴とする光電子セル装置の製造方法。 - 前記第2の材料層を形成する温度は、約650℃以下の範囲にある温度に維持される
ことを特徴とする請求項8に記載の光電子セル装置の製造方法。 - さらに、前記第2の材料層の厚さをより増加するために、供給、使用、形成、および処理プロセスを繰り返す工程を有する
ことを特徴とする請求項8に記載の光電子セル装置の製造方法。 - さらに、洗浄プロセスに前記劈開表面部を曝す工程を有する
ことを特徴とする請求項8に記載の光電子セル装置の製造方法。 - 前記洗浄プロセスは、プラズマへの曝露を含む
ことを特徴とする請求項11に記載の光電子セル装置の製造方法。 - 前記洗浄プロセスは、湿式洗浄プロセスへの曝露を含む
ことを特徴とする請求項11に記載の光電子セル装置の製造方法。 - 劈開部と、表面部と、前記劈開部と前記表面部との間で定められる第1のシリコンあるいはゲルマニウム材料層を有するドナー基板を形成する工程と、
前記第1のシリコンあるいはゲルマニウム材料層の上を覆う劈開表面部の形成を促すように、前記劈開部の周辺の内側で前記ドナー基板の一部を分離するため、および処理基板の処理基板表面部に前記表面部を結合するために、前記第1のシリコンあるいはゲルマニウム材料層を前記処理基板の処理基板表面部に転写する工程と、
反応室にシランおよび/またはゲルマン種を含むガスを供給する工程と、
少なくともグロー放電CVD、プラズマCVD、光CVDまたは熱CVDから選択されるプロセスおよびシランおよび/またはゲルマン種を用いて、前記第1のシリコンまたはゲルマニウム材料層の上を覆う材料を結晶化するための材料の固相エピタキシャル再成長速度と等しいか、より速いか、またはより遅い蒸着速度で前記第1のシリコンまたはゲルマニウム材料層を厚くするために、前記劈開表面の上を覆って材料を蒸着してアモルファスシリコン層を形成する工程と、
前記ドナー基板を、第1の表面部および第2の表面部を有する光学透明性基板の前記第1の表面部に結合する工程と、
前記光学透明性基板の前記第2の表面部に、光線を前記光学透明性基板に対して斜めに入射させる光学素子を結合する工程と、からなる
ことを特徴とする光電子セル装置の製造方法。 - 前記材料の蒸着は、約650℃以下の温度で生じる
ことを特徴とする請求項14に記載の光電子セル装置の製造方法。 - さらに、前記材料の蒸着前に、グラフォエピタキシーによってシード層を形成する工程を有する
ことを特徴とする請求項14に記載の光電子セル装置の製造方法。 - 前記シラン種は、トリシラン、ジシラン、ジクロロシラン、トリクロロシランまたはモノシランを含む
ことを特徴とする請求項14に記載の光電子セル装置の製造方法。 - 前記ゲルマン種は、ゲルマン(GeH4)またはジゲルマン(Ge2H6)を含む
ことを特徴とする請求項14に記載の光電子セル装置の製造方法。 - PおよびN接合部を形成するために、前記シランおよび/またはゲルマン種の蒸着は、1または複数のドーパントガスを含む
ことを特徴とする請求項14に記載の光電子セル装置の製造方法。 - さらに、前記処理基板表面部および前記処理基板の裏面部に第1の光電子部を形成し、
そして、前記処理基板表面部には第1の光電子材料を、前記処理基板の裏面には第2の光電子材料をそれぞれ形成するために、前記処理基板の裏面部に、第2のシリコン材料を同時蒸着する工程を含む
ことを特徴とする請求項14に記載の光電子セル装置の製造方法。 - 処理基板表面部を有する処理基板と、
前記処理基板表面部の上を覆う界面材料と、
前記界面材料の上を覆う層転写フィルムと、
1または複数の欠陥を有する単結晶シリコンまたは単結晶ゲルマニウム材料からなる第1の蒸着層と、
前記第1の蒸着層を覆うアモルファスシリコンからなる第2の蒸着層と、を備えるとともに、
前記処理基板は光学透明性基板であって、
前記光学透明性基板の前記界面材料で覆われた表面の反対側の表面を覆って、光線を前記光学透明性基板に対して斜めに入射させる光学素子を備える
ことを特徴とする光電子装置。 - 前記単結晶シリコンまたは単結晶ゲルマニウムの蒸着層は、前記層転写フィルムの上を覆うP型材料および前記P型材料の上を覆うN型材料を有する
ことを特徴とする請求項21に記載の光電子装置。 - 前記P型材料は、P+型材料を含む
ことを特徴とする請求項22に記載の光電子装置。 - 前記単結晶シリコンまたは単結晶ゲルマニウムの蒸着層は、前記層転写フィルムの上を覆うN型材料および前記N型材料の上を覆うP型材料を有する
ことを特徴とする請求項21に記載の光電子装置。 - 表面部、底部および前記表面部と前記底部との間に所定の層を有する支持部材を形成する工程と、
前記支持部材の表面部の上を覆う脱着可能な材料を形成する工程と、
前記支持部材の上を覆う前記脱着可能な材料の上を覆う第1の転写材料層を形成するために、第1の半導体材料層を前記脱着可能な材料の上を覆う第1のドナー基板から転写する工程と、
前記脱着可能な材料の上を覆う全材料層を形成するために、前記第1の転写材料層の上を覆うアモルファスシリコンからなる第2の半導体材料層を形成する工程と、
前記脱着可能な材料から前記全材料層を分離するために、前記脱着可能な材料から前記全材料層を切り離す工程と、
前記全材料層の1または複数の部分に1または複数の光電子装置を形成する工程と、からなるとともに、
前記支持部材は、光学透明性基板であって、
前記光学透明性基板の前記底部に、光線を前記光学透明性基板に対して斜めに入射させる光学素子を結合する工程をさらに有する
ことを特徴とする1または複数のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記支持部材は、第1のドナー基板が有する第2の熱膨張係数と実質的に一致する第1の熱膨張係数を有する
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記表面部は、表面粗さと上面を覆う酸化物層を有する
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記表面粗さは、少なくとも多孔性材料によって実現される
ことを特徴とする請求項27に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記シリコン支持部材は、前記支持部材の底部から前記支持部材層を通って、前記表面部の一部に向かって広がる開口部を有するとともに、前記開口部は流体駆動源に結合され、
前記流体駆動源は、前記底部と前記表面部の一部との間で、前記開口部の内部に圧力勾配を誘発できる
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記圧力勾配は、流体によって提供され、前記脱着可能な材料からの前記全材料層の除去を容易にする
ことを特徴とする請求項29に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記流体は、前記脱着可能な材料に対するエッチング液である
ことを特徴とする請求項30に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 劈開工程は、前記脱着可能な材料の一部から全層の一部を除去する開始プロセスと、前記脱着可能な材料から前記全層を分離し続ける伝播プロセスと、を有する
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記第2の層を形成する工程は、エピタキシャルシリコン材料を蒸着する工程を含む
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - シリコン支持部材は再利用できる
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記脱着可能な材料は、表面粗さおよび上面を覆う誘電材料を備える
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - さらに、1または複数の光電子材料を全材料層の1または複数の部分に形成する工程を含んでなる
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。 - 前記全層は、200ミクロン以下の寸法である
ことを特徴とする請求項25に記載のソーラーモジュールに用いられる太陽電池の製造方法。
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US60/823,356 | 2006-08-23 | ||
PCT/US2007/064213 WO2007109568A2 (en) | 2006-03-17 | 2007-03-16 | Method and structure for fabricating solar cells |
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Families Citing this family (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7863157B2 (en) * | 2006-03-17 | 2011-01-04 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a layer transfer process |
US8153513B2 (en) | 2006-07-25 | 2012-04-10 | Silicon Genesis Corporation | Method and system for continuous large-area scanning implantation process |
JP2008112847A (ja) | 2006-10-30 | 2008-05-15 | Shin Etsu Chem Co Ltd | 単結晶シリコン太陽電池の製造方法及び単結晶シリコン太陽電池 |
RU2472247C2 (ru) * | 2007-11-02 | 2013-01-10 | Президент Энд Феллоуз Оф Гарвард Колледж | Изготовление самостоятельных твердотельных слоев термической обработкой подложек с полимером |
US7902051B2 (en) * | 2008-01-07 | 2011-03-08 | International Business Machines Corporation | Method for fabrication of single crystal diodes for resistive memories |
US8129613B2 (en) * | 2008-02-05 | 2012-03-06 | Twin Creeks Technologies, Inc. | Photovoltaic cell comprising a thin lamina having low base resistivity and method of making |
US8563352B2 (en) * | 2008-02-05 | 2013-10-22 | Gtat Corporation | Creation and translation of low-relief texture for a photovoltaic cell |
US8178419B2 (en) | 2008-02-05 | 2012-05-15 | Twin Creeks Technologies, Inc. | Method to texture a lamina surface within a photovoltaic cell |
US8481845B2 (en) * | 2008-02-05 | 2013-07-09 | Gtat Corporation | Method to form a photovoltaic cell comprising a thin lamina |
WO2009120631A2 (en) * | 2008-03-25 | 2009-10-01 | Applied Materials, Inc. | Surface cleaning and texturing process for crystalline solar cells |
US20090242031A1 (en) * | 2008-03-27 | 2009-10-01 | Twin Creeks Technologies, Inc. | Photovoltaic Assembly Including a Conductive Layer Between a Semiconductor Lamina and a Receiver Element |
US20090242010A1 (en) * | 2008-03-27 | 2009-10-01 | Twin Creeks Technologies, Inc. | Method to Form a Photovoltaic Cell Comprising a Thin Lamina Bonded to a Discrete Receiver Element |
KR101428719B1 (ko) * | 2008-05-22 | 2014-08-12 | 삼성전자 주식회사 | 발광 소자 및 발광 장치의 제조 방법, 상기 방법을이용하여 제조한 발광 소자 및 발광 장치 |
US20090293954A1 (en) * | 2008-05-30 | 2009-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric Conversion Device And Method For Manufacturing The Same |
CN102099923B (zh) | 2008-06-11 | 2016-04-27 | 因特瓦克公司 | 使用注入的太阳能电池制作 |
US7981778B2 (en) * | 2009-07-22 | 2011-07-19 | Applied Materials, Inc. | Directional solid phase crystallization of thin amorphous silicon for solar cell applications |
US20100031995A1 (en) * | 2008-08-10 | 2010-02-11 | Twin Creeks Technologies, Inc. | Photovoltaic module comprising thin laminae configured to mitigate efficiency loss due to shunt formation |
US20100032010A1 (en) * | 2008-08-10 | 2010-02-11 | Twin Creeks Technologies, Inc. | Method to mitigate shunt formation in a photovoltaic cell comprising a thin lamina |
US8338209B2 (en) * | 2008-08-10 | 2012-12-25 | Twin Creeks Technologies, Inc. | Photovoltaic cell comprising a thin lamina having a rear junction and method of making |
US8030206B2 (en) * | 2008-08-27 | 2011-10-04 | The Boeing Company | Coplanar solar cell metal contact annealing in plasma enhanced chemical vapor deposition |
US8088675B2 (en) * | 2008-09-19 | 2012-01-03 | Applied Materials, Inc. | Methods of making an emitter having a desired dopant profile |
US8367798B2 (en) * | 2008-09-29 | 2013-02-05 | The Regents Of The University Of California | Active materials for photoelectric devices and devices that use the materials |
US20120104460A1 (en) | 2010-11-03 | 2012-05-03 | Alta Devices, Inc. | Optoelectronic devices including heterojunction |
KR20110086098A (ko) | 2008-10-23 | 2011-07-27 | 알타 디바이씨즈, 인크. | 광전지 장치 |
US7967936B2 (en) * | 2008-12-15 | 2011-06-28 | Twin Creeks Technologies, Inc. | Methods of transferring a lamina to a receiver element |
US7927975B2 (en) | 2009-02-04 | 2011-04-19 | Micron Technology, Inc. | Semiconductor material manufacture |
TWI379430B (en) * | 2009-04-16 | 2012-12-11 | Atomic Energy Council | A method of fabricating a thin interface for internal light reflection and impurities isolation |
US20100276071A1 (en) * | 2009-04-29 | 2010-11-04 | Solarmer Energy, Inc. | Tandem solar cell |
US8288646B2 (en) * | 2009-05-06 | 2012-10-16 | UltraSolar Technology, Inc. | Pyroelectric solar technology apparatus and method |
US20100310775A1 (en) * | 2009-06-09 | 2010-12-09 | International Business Machines Corporation | Spalling for a Semiconductor Substrate |
US8802477B2 (en) * | 2009-06-09 | 2014-08-12 | International Business Machines Corporation | Heterojunction III-V photovoltaic cell fabrication |
US8703521B2 (en) * | 2009-06-09 | 2014-04-22 | International Business Machines Corporation | Multijunction photovoltaic cell fabrication |
US20110048517A1 (en) * | 2009-06-09 | 2011-03-03 | International Business Machines Corporation | Multijunction Photovoltaic Cell Fabrication |
US8633097B2 (en) * | 2009-06-09 | 2014-01-21 | International Business Machines Corporation | Single-junction photovoltaic cell |
US8749053B2 (en) | 2009-06-23 | 2014-06-10 | Intevac, Inc. | Plasma grid implant system for use in solar cell fabrications |
US8440496B2 (en) * | 2009-07-08 | 2013-05-14 | Solarmer Energy, Inc. | Solar cell with conductive material embedded substrate |
US8372945B2 (en) | 2009-07-24 | 2013-02-12 | Solarmer Energy, Inc. | Conjugated polymers with carbonyl substituted thieno[3,4-B]thiophene units for polymer solar cell active layer materials |
US9691921B2 (en) | 2009-10-14 | 2017-06-27 | Alta Devices, Inc. | Textured metallic back reflector |
US20150380576A1 (en) | 2010-10-13 | 2015-12-31 | Alta Devices, Inc. | Optoelectronic device with dielectric layer and method of manufacture |
US9768329B1 (en) * | 2009-10-23 | 2017-09-19 | Alta Devices, Inc. | Multi-junction optoelectronic device |
US20170141256A1 (en) | 2009-10-23 | 2017-05-18 | Alta Devices, Inc. | Multi-junction optoelectronic device with group iv semiconductor as a bottom junction |
US11271128B2 (en) | 2009-10-23 | 2022-03-08 | Utica Leaseco, Llc | Multi-junction optoelectronic device |
US9502594B2 (en) | 2012-01-19 | 2016-11-22 | Alta Devices, Inc. | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from template layer and etching |
US8399889B2 (en) | 2009-11-09 | 2013-03-19 | Solarmer Energy, Inc. | Organic light emitting diode and organic solar cell stack |
FR2954002B1 (fr) * | 2009-12-16 | 2013-01-18 | Emcore Solar Power Inc | Procede pour la production de cellules solaires multijonction metamorphiques inversees |
US8349626B2 (en) * | 2010-03-23 | 2013-01-08 | Gtat Corporation | Creation of low-relief texture for a photovoltaic cell |
US20130068287A1 (en) * | 2010-05-10 | 2013-03-21 | University Of Toledo | Rapid Thermal Activation of Flexible Photovoltaic Cells and Modules |
MX2012013614A (es) | 2010-05-26 | 2013-03-20 | Univ Toledo | Estructuras fotovoltaicas que tienen una capa de interfaz de difraccion de luz y metodos para fabricar las mismas. |
US8598020B2 (en) | 2010-06-25 | 2013-12-03 | Applied Materials, Inc. | Plasma-enhanced chemical vapor deposition of crystalline germanium |
US9011599B2 (en) * | 2010-07-14 | 2015-04-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of temperature determination for deposition reactors |
US8358476B2 (en) * | 2010-11-23 | 2013-01-22 | Institute Of Nuclear Energy Research, Atomic Energy Council, Executive Yuan | Condensing lens for high concentration photovoltaic module and manufacturing method thereof |
US20120152352A1 (en) * | 2010-12-15 | 2012-06-21 | Egypt Nanotechnology Center | Photovoltaic devices with an interfacial germanium-containing layer and methods for forming the same |
US8268645B2 (en) | 2010-12-29 | 2012-09-18 | Twin Creeks Technologies, Inc. | Method and apparatus for forming a thin lamina |
US8435804B2 (en) | 2010-12-29 | 2013-05-07 | Gtat Corporation | Method and apparatus for forming a thin lamina |
US8129215B1 (en) | 2011-04-01 | 2012-03-06 | James P Campbell | Method for producing high temperature thin film silicon layer on glass |
US9818901B2 (en) | 2011-05-13 | 2017-11-14 | International Business Machines Corporation | Wafer bonded solar cells and fabrication methods |
US8927318B2 (en) * | 2011-06-14 | 2015-01-06 | International Business Machines Corporation | Spalling methods to form multi-junction photovoltaic structure |
US9099596B2 (en) * | 2011-07-29 | 2015-08-04 | International Business Machines Corporation | Heterojunction photovoltaic device and fabrication method |
GB201115223D0 (en) * | 2011-09-02 | 2011-10-19 | Dow Corning | Method of fabricating solar modules |
CN106847736B (zh) | 2011-11-08 | 2020-08-11 | 因特瓦克公司 | 基板处理系统和方法 |
US11038080B2 (en) | 2012-01-19 | 2021-06-15 | Utica Leaseco, Llc | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from etching |
US9336989B2 (en) | 2012-02-13 | 2016-05-10 | Silicon Genesis Corporation | Method of cleaving a thin sapphire layer from a bulk material by implanting a plurality of particles and performing a controlled cleaving process |
CN103258716B (zh) | 2012-02-16 | 2016-03-09 | 财团法人工业技术研究院 | 制作具有织化表面的半导体层的方法、制作太阳能电池的方法 |
US8895347B2 (en) | 2012-02-16 | 2014-11-25 | Industrial Technology Research Institute | Method for fabricating semiconductor layer having textured surface and method for fabricating solar cell |
US9214577B2 (en) | 2012-02-28 | 2015-12-15 | International Business Machines Corporation | Reduced light degradation due to low power deposition of buffer layer |
US20130224899A1 (en) * | 2012-02-28 | 2013-08-29 | International Business Machines Corporation | Enhancing efficiency in solar cells by adjusting deposition power |
JP6214132B2 (ja) * | 2012-02-29 | 2017-10-18 | キヤノン株式会社 | 光電変換装置、撮像システムおよび光電変換装置の製造方法 |
US9257339B2 (en) | 2012-05-04 | 2016-02-09 | Silicon Genesis Corporation | Techniques for forming optoelectronic devices |
US8936961B2 (en) * | 2012-05-26 | 2015-01-20 | International Business Machines Corporation | Removal of stressor layer from a spalled layer and method of making a bifacial solar cell using the same |
US8569097B1 (en) | 2012-07-06 | 2013-10-29 | International Business Machines Corporation | Flexible III-V solar cell structure |
MY178951A (en) | 2012-12-19 | 2020-10-23 | Intevac Inc | Grid for plasma ion implant |
FR3000109B1 (fr) * | 2012-12-21 | 2015-01-16 | Commissariat Energie Atomique | Procede de fabrication d’une couche epaisse cristalline |
EP2946410A4 (en) | 2013-01-16 | 2016-08-03 | Qmat Inc | TECHNIQUES FOR FORMING OPTOELECTRONIC DEVICES |
US10049915B2 (en) | 2015-01-09 | 2018-08-14 | Silicon Genesis Corporation | Three dimensional integrated circuit |
US20180175008A1 (en) | 2015-01-09 | 2018-06-21 | Silicon Genesis Corporation | Three dimensional integrated circuit |
US10573627B2 (en) | 2015-01-09 | 2020-02-25 | Silicon Genesis Corporation | Three dimensional integrated circuit |
CN206516630U (zh) | 2015-01-09 | 2017-09-22 | 硅源公司 | 三维集成电路 |
US9859458B2 (en) | 2015-06-19 | 2018-01-02 | QMAT, Inc. | Bond and release layer transfer process |
SG11201804271QA (en) * | 2015-11-20 | 2018-06-28 | Sunedison Semiconductor Ltd | Manufacturing method of smoothing a semiconductor surface |
US10062636B2 (en) * | 2016-06-27 | 2018-08-28 | Newport Fab, Llc | Integration of thermally conductive but electrically isolating layers with semiconductor devices |
US20180019169A1 (en) * | 2016-07-12 | 2018-01-18 | QMAT, Inc. | Backing substrate stabilizing donor substrate for implant or reclamation |
FR3054930B1 (fr) * | 2016-08-02 | 2018-07-13 | Soitec | Utilisation d'un champ electrique pour detacher une couche piezo-electrique a partir d'un substrat donneur |
US10186630B2 (en) | 2016-08-02 | 2019-01-22 | QMAT, Inc. | Seed wafer for GaN thickening using gas- or liquid-phase epitaxy |
EP3539153A2 (en) | 2016-11-11 | 2019-09-18 | Qmat, Inc. | Micro-light emitting diode (led) fabrication by layer transfer |
WO2018098430A1 (en) * | 2016-11-28 | 2018-05-31 | Ares Materials Inc. | Temporary bonding layer for flexible electronics fabrication |
KR102257824B1 (ko) * | 2016-12-05 | 2021-05-28 | 엘지전자 주식회사 | 태양 전지 제조 방법 |
JP2020507114A (ja) * | 2017-02-02 | 2020-03-05 | アレス マテリアルズ インコーポレイテッド | フレキシブルカラーフィルタおよび製造方法 |
JP2022160317A (ja) * | 2021-04-06 | 2022-10-19 | 東京エレクトロン株式会社 | シリコン膜の成膜方法及び成膜装置 |
US11410984B1 (en) | 2021-10-08 | 2022-08-09 | Silicon Genesis Corporation | Three dimensional integrated circuit with lateral connection layer |
Family Cites Families (110)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2981877A (en) | 1959-07-30 | 1961-04-25 | Fairchild Semiconductor | Semiconductor device-and-lead structure |
US4367411A (en) | 1979-06-04 | 1983-01-04 | Varian Associates, Inc. | Unitary electromagnet for double deflection scanning of charged particle beam |
US4363828A (en) | 1979-12-12 | 1982-12-14 | International Business Machines Corp. | Method for depositing silicon films and related materials by a glow discharge in a disiland or higher order silane gas |
EP0194495B1 (en) * | 1980-04-10 | 1998-07-15 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material |
JPS5989407A (ja) | 1982-11-15 | 1984-05-23 | Mitsui Toatsu Chem Inc | アモルフアスシリコン膜の形成方法 |
US5196710A (en) | 1984-08-20 | 1993-03-23 | Kalfaian Meguer V | Method and apparatus of implanting electrons in a solid for electrical generation |
US4637895A (en) | 1985-04-01 | 1987-01-20 | Energy Conversion Devices, Inc. | Gas mixtures for the vapor deposition of semiconductor material |
US4980562A (en) | 1986-04-09 | 1990-12-25 | Varian Associates, Inc. | Method and apparatus for high efficiency scanning in an ion implanter |
US4799392A (en) | 1987-08-06 | 1989-01-24 | Motorola Inc. | Method for determining silicon (mass 28) beam purity prior to implantation of gallium arsenide |
JPH02225399A (ja) | 1988-11-11 | 1990-09-07 | Fujitsu Ltd | エピタキシャル成長方法および成長装置 |
US4981408A (en) | 1989-12-18 | 1991-01-01 | Varian Associates, Inc. | Dual track handling and processing system |
US5311028A (en) | 1990-08-29 | 1994-05-10 | Nissin Electric Co., Ltd. | System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions |
US5132544A (en) | 1990-08-29 | 1992-07-21 | Nissin Electric Company Ltd. | System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning |
FR2681472B1 (fr) * | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | Procede de fabrication de films minces de materiau semiconducteur. |
JP3360919B2 (ja) * | 1993-06-11 | 2003-01-07 | 三菱電機株式会社 | 薄膜太陽電池の製造方法,及び薄膜太陽電池 |
US5481116A (en) | 1994-06-10 | 1996-01-02 | Ibis Technology Corporation | Magnetic system and method for uniformly scanning heavy ion beams |
US5438203A (en) | 1994-06-10 | 1995-08-01 | Nissin Electric Company | System and method for unipolar magnetic scanning of heavy ion beams |
US5483203A (en) * | 1994-11-01 | 1996-01-09 | Motorola, Inc. | Frequency synthesizer having modulation deviation correction via presteering stimulus |
JP3381443B2 (ja) * | 1995-02-02 | 2003-02-24 | ソニー株式会社 | 基体から半導体層を分離する方法、半導体素子の製造方法およびsoi基板の製造方法 |
US5672879A (en) | 1995-06-12 | 1997-09-30 | Glavish; Hilton F. | System and method for producing superimposed static and time-varying magnetic fields |
FR2744285B1 (fr) * | 1996-01-25 | 1998-03-06 | Commissariat Energie Atomique | Procede de transfert d'une couche mince d'un substrat initial sur un substrat final |
US5789030A (en) | 1996-03-18 | 1998-08-04 | Micron Technology, Inc. | Method for depositing doped amorphous or polycrystalline silicon on a substrate |
SG65697A1 (en) * | 1996-11-15 | 1999-06-22 | Canon Kk | Process for producing semiconductor article |
JP3257624B2 (ja) * | 1996-11-15 | 2002-02-18 | キヤノン株式会社 | 半導体部材の製造方法 |
KR100304161B1 (ko) * | 1996-12-18 | 2001-11-30 | 미다라이 후지오 | 반도체부재의제조방법 |
SG68035A1 (en) | 1997-03-27 | 1999-10-19 | Canon Kk | Method and apparatus for separating composite member using fluid |
US5985742A (en) | 1997-05-12 | 1999-11-16 | Silicon Genesis Corporation | Controlled cleavage process and device for patterned films |
US6033974A (en) | 1997-05-12 | 2000-03-07 | Silicon Genesis Corporation | Method for controlled cleaving process |
US5877070A (en) | 1997-05-31 | 1999-03-02 | Max-Planck Society | Method for the transfer of thin layers of monocrystalline material to a desirable substrate |
JPH114008A (ja) * | 1997-06-11 | 1999-01-06 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜太陽電池の製造方法 |
DE19730975A1 (de) * | 1997-06-30 | 1999-01-07 | Max Planck Gesellschaft | Verfahren zur Herstellung von schichtartigen Gebilden auf einem Substrat, Substrat sowie mittels des Verfahrens hergestellte Halbleiterbauelemente |
US6103599A (en) | 1997-07-25 | 2000-08-15 | Silicon Genesis Corporation | Planarizing technique for multilayered substrates |
US6180496B1 (en) | 1997-08-29 | 2001-01-30 | Silicon Genesis Corporation | In situ plasma wafer bonding method |
JP3469761B2 (ja) | 1997-10-30 | 2003-11-25 | 東京エレクトロン株式会社 | 半導体デバイスの製造方法 |
US6130436A (en) | 1998-06-02 | 2000-10-10 | Varian Semiconductor Equipment Associates, Inc. | Acceleration and analysis architecture for ion implanter |
US6368930B1 (en) | 1998-10-02 | 2002-04-09 | Ziptronix | Self aligned symmetric process and device |
US6534381B2 (en) | 1999-01-08 | 2003-03-18 | Silicon Genesis Corporation | Method for fabricating multi-layered substrates |
US6207964B1 (en) | 1999-02-19 | 2001-03-27 | Axcelis Technologies, Inc. | Continuously variable aperture for high-energy ion implanter |
WO2000063956A1 (fr) | 1999-04-20 | 2000-10-26 | Sony Corporation | Procede et dispositif pour realiser un depot de couches minces, et procede pour la production d'un dispositif a semiconducteur a couches minces |
US6287941B1 (en) | 1999-04-21 | 2001-09-11 | Silicon Genesis Corporation | Surface finishing of SOI substrates using an EPI process |
US6171965B1 (en) | 1999-04-21 | 2001-01-09 | Silicon Genesis Corporation | Treatment method of cleaved film for the manufacture of substrates |
US6204151B1 (en) | 1999-04-21 | 2001-03-20 | Silicon Genesis Corporation | Smoothing method for cleaved films made using thermal treatment |
JP3542521B2 (ja) * | 1999-06-08 | 2004-07-14 | キヤノン株式会社 | 半導体基体及び太陽電池の製造方法と陽極化成装置 |
US6323108B1 (en) * | 1999-07-27 | 2001-11-27 | The United States Of America As Represented By The Secretary Of The Navy | Fabrication ultra-thin bonded semiconductor layers |
US6984571B1 (en) | 1999-10-01 | 2006-01-10 | Ziptronix, Inc. | Three dimensional device integration method and integrated device |
US6500694B1 (en) | 2000-03-22 | 2002-12-31 | Ziptronix, Inc. | Three dimensional device integration method and integrated device |
US6646287B1 (en) * | 1999-11-19 | 2003-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with tapered gate and insulating film |
JP2002237607A (ja) * | 2000-01-27 | 2002-08-23 | Canon Inc | 多孔質層の転写方法、半導体素子の製造方法及び太陽電池の製造方法 |
US6902987B1 (en) | 2000-02-16 | 2005-06-07 | Ziptronix, Inc. | Method for low temperature bonding and bonded structure |
DE10008583A1 (de) * | 2000-02-24 | 2001-09-13 | Osram Opto Semiconductors Gmbh | Verfahren zum Herstellen eines optisch transparenten Substrates und Verfahren zum Herstellen eines lichtemittierenden Halbleiterchips |
US6689519B2 (en) | 2000-05-04 | 2004-02-10 | Kla-Tencor Technologies Corp. | Methods and systems for lithography process control |
WO2002003472A2 (en) | 2000-06-29 | 2002-01-10 | California Institute Of Technology | Aerosol silicon nanoparticles for use in semiconductor device fabrication |
US6563133B1 (en) | 2000-08-09 | 2003-05-13 | Ziptronix, Inc. | Method of epitaxial-like wafer bonding at low temperature and bonded structure |
US6696688B2 (en) | 2000-09-07 | 2004-02-24 | Diamond Semiconductor Group, Llc | Apparatus for magnetically scanning and/or switching a charged-particle beam |
JP4252237B2 (ja) | 2000-12-06 | 2009-04-08 | 株式会社アルバック | イオン注入装置およびイオン注入方法 |
WO2002080244A2 (en) | 2001-02-12 | 2002-10-10 | Asm America, Inc. | Improved process for deposition of semiconductor films |
US20050026432A1 (en) | 2001-04-17 | 2005-02-03 | Atwater Harry A. | Wafer bonded epitaxial templates for silicon heterostructures |
US7238622B2 (en) | 2001-04-17 | 2007-07-03 | California Institute Of Technology | Wafer bonded virtual substrate and method for forming the same |
US7019339B2 (en) | 2001-04-17 | 2006-03-28 | California Institute Of Technology | Method of using a germanium layer transfer to Si for photovoltaic applications and heterostructure made thereby |
WO2003001869A2 (en) | 2001-06-29 | 2003-01-09 | California Institute Of Technology | Method and apparatus for use of plasmon printing in near-field lithography |
FR2827078B1 (fr) | 2001-07-04 | 2005-02-04 | Soitec Silicon On Insulator | Procede de diminution de rugosite de surface |
EP1408551B1 (en) | 2001-07-17 | 2014-07-02 | Shin-Etsu Handotai Co., Ltd. | Method for producing bonding wafer |
US20030045098A1 (en) | 2001-08-31 | 2003-03-06 | Applied Materials, Inc. | Method and apparatus for processing a wafer |
US6875671B2 (en) | 2001-09-12 | 2005-04-05 | Reveo, Inc. | Method of fabricating vertical integrated circuits |
US6804062B2 (en) | 2001-10-09 | 2004-10-12 | California Institute Of Technology | Nonimaging concentrator lens arrays and microfabrication of the same |
US6814833B2 (en) * | 2001-10-26 | 2004-11-09 | Corning Incorporated | Direct bonding of articles containing silicon |
US20030111013A1 (en) | 2001-12-19 | 2003-06-19 | Oosterlaken Theodorus Gerardus Maria | Method for the deposition of silicon germanium layers |
US20030230778A1 (en) | 2002-01-30 | 2003-12-18 | Sumitomo Mitsubishi Silicon Corporation | SOI structure having a SiGe Layer interposed between the silicon and the insulator |
FR2839385B1 (fr) | 2002-05-02 | 2004-07-23 | Soitec Silicon On Insulator | Procede de decollement de couches de materiau |
US7121474B2 (en) | 2002-06-18 | 2006-10-17 | Intel Corporation | Electro-optical nanocrystal memory device |
AU2003258960A1 (en) | 2002-06-26 | 2004-01-19 | Semequip Inc. | Ion implantation device and method |
FR2842650B1 (fr) | 2002-07-17 | 2005-09-02 | Soitec Silicon On Insulator | Procede de fabrication de substrats notamment pour l'optique, l'electronique ou l'opto-electronique |
US7294582B2 (en) | 2002-07-19 | 2007-11-13 | Asm International, N.V. | Low temperature silicon compound deposition |
US6979630B2 (en) | 2002-08-08 | 2005-12-27 | Isonics Corporation | Method and apparatus for transferring a thin layer of semiconductor material |
US6818529B2 (en) | 2002-09-12 | 2004-11-16 | Applied Materials, Inc. | Apparatus and method for forming a silicon film across the surface of a glass substrate |
US6822326B2 (en) | 2002-09-25 | 2004-11-23 | Ziptronix | Wafer bonding hermetic encapsulation |
GB2395354B (en) | 2002-11-11 | 2005-09-28 | Applied Materials Inc | Ion implanter and a method of implanting ions |
US6800518B2 (en) | 2002-12-30 | 2004-10-05 | International Business Machines Corporation | Formation of patterned silicon-on-insulator (SOI)/silicon-on-nothing (SON) composite structure by porous Si engineering |
US7176528B2 (en) | 2003-02-18 | 2007-02-13 | Corning Incorporated | Glass-based SOI structures |
SG115630A1 (en) | 2003-03-11 | 2005-10-28 | Asml Netherlands Bv | Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock |
US7238595B2 (en) | 2003-03-13 | 2007-07-03 | Asm America, Inc. | Epitaxial semiconductor deposition methods and structures |
US6881966B2 (en) | 2003-05-15 | 2005-04-19 | Axcelis Technologies, Inc. | Hybrid magnetic/electrostatic deflector for ion implantation systems |
AU2004249124A1 (en) * | 2003-05-20 | 2004-12-29 | Erimos Pharmaceuticals Llc | Methods and compositions for delivery of catecholic butanes for treatment of diseases |
FR2856192B1 (fr) | 2003-06-11 | 2005-07-29 | Soitec Silicon On Insulator | Procede de realisation de structure heterogene et structure obtenue par un tel procede |
US7029995B2 (en) | 2003-06-13 | 2006-04-18 | Asm America, Inc. | Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy |
US6771410B1 (en) | 2003-06-18 | 2004-08-03 | Intel Corporation | Nanocrystal based high-speed electro-optic modulator |
US7126139B2 (en) | 2003-10-09 | 2006-10-24 | The Regents Of The University Of California | Device and method of positionally accurate implantation of individual particles in a substrate surface |
US20060024435A1 (en) | 2003-10-20 | 2006-02-02 | Dean Holunga | Turbulent mixing aerosol nanoparticle reactor and method of operating the same |
US6867073B1 (en) | 2003-10-21 | 2005-03-15 | Ziptronix, Inc. | Single mask via method and device |
JP2005150686A (ja) | 2003-10-22 | 2005-06-09 | Sharp Corp | 半導体装置およびその製造方法 |
US7019315B2 (en) | 2003-12-08 | 2006-03-28 | Varian Semiconductor Equipment Associates, Inc. | System and method for serial ion implanting productivity enhancements |
US6992025B2 (en) | 2004-01-12 | 2006-01-31 | Sharp Laboratories Of America, Inc. | Strained silicon on insulator from film transfer and relaxation by hydrogen implantation |
US6987272B2 (en) | 2004-03-05 | 2006-01-17 | Axcelis Technologies, Inc. | Work piece transfer system for an ion beam implanter |
US6956225B1 (en) | 2004-04-01 | 2005-10-18 | Axcelis Technologies, Inc. | Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systems |
US7301172B2 (en) | 2004-04-07 | 2007-11-27 | California Institute Of Technology | Sequentially charged nanocrystal light emitting device |
US20080211061A1 (en) * | 2004-04-21 | 2008-09-04 | California Institute Of Technology | Method For the Fabrication of GaAs/Si and Related Wafer Bonded Virtual Substrates |
EP1605502A1 (en) | 2004-06-08 | 2005-12-14 | Interuniversitair Microelektronica Centrum Vzw | Transfer method for the manufacturing of electronic devices |
US7265030B2 (en) | 2004-07-20 | 2007-09-04 | Sharp Laboratories Of America, Inc. | Method of fabricating silicon on glass via layer transfer |
WO2006015185A2 (en) | 2004-07-30 | 2006-02-09 | Aonex Technologies, Inc. | GaInP/GaAs/Si TRIPLE JUNCTION SOLAR CELL ENABLED BY WAFER BONDING AND LAYER TRANSFER |
US7279400B2 (en) | 2004-08-05 | 2007-10-09 | Sharp Laboratories Of America, Inc. | Method of fabricating single-layer and multi-layer single crystalline silicon and silicon devices on plastic using sacrificial glass |
CN101019214A (zh) * | 2004-08-05 | 2007-08-15 | 加州理工大学 | 制造结晶硅的方法 |
EP1792338A1 (en) | 2004-09-21 | 2007-06-06 | S.O.I.TEC. Silicon on Insulator Technologies S.A. | Thin layer transfer method wherein a co-implantation step is performed according to conditions avoiding blisters formation and limiting roughness |
US20060071213A1 (en) | 2004-10-04 | 2006-04-06 | Ce Ma | Low temperature selective epitaxial growth of silicon germanium layers |
US7846759B2 (en) | 2004-10-21 | 2010-12-07 | Aonex Technologies, Inc. | Multi-junction solar cells and methods of making same using layer transfer and bonding techniques |
US20060108688A1 (en) | 2004-11-19 | 2006-05-25 | California Institute Of Technology | Large grained polycrystalline silicon and method of making same |
FR2880988B1 (fr) * | 2005-01-19 | 2007-03-30 | Soitec Silicon On Insulator | TRAITEMENT D'UNE COUCHE EN SI1-yGEy PRELEVEE |
US10374120B2 (en) * | 2005-02-18 | 2019-08-06 | Koninklijke Philips N.V. | High efficiency solar cells utilizing wafer bonding and layer transfer to integrate non-lattice matched materials |
US7525103B2 (en) | 2006-01-20 | 2009-04-28 | Varian Semiconductor Equipment Associates, Inc. | Technique for improving uniformity of a ribbon beam |
JP2009530818A (ja) * | 2006-03-13 | 2009-08-27 | ナノグラム・コーポレイション | 薄シリコンまたはゲルマニウムシートおよび薄型シート製太陽電池 |
US7863157B2 (en) * | 2006-03-17 | 2011-01-04 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a layer transfer process |
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US8012851B2 (en) | 2011-09-06 |
JP2009530833A (ja) | 2009-08-27 |
WO2007109568A2 (en) | 2007-09-27 |
US20070235074A1 (en) | 2007-10-11 |
WO2007109568A3 (en) | 2008-09-04 |
EP1997124A2 (en) | 2008-12-03 |
US20100180945A1 (en) | 2010-07-22 |
US7863157B2 (en) | 2011-01-04 |
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